CN216450468U - Magnetic control single crystal pulling superconducting magnet coil and superconducting magnet device - Google Patents
Magnetic control single crystal pulling superconducting magnet coil and superconducting magnet device Download PDFInfo
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- CN216450468U CN216450468U CN202122700081.4U CN202122700081U CN216450468U CN 216450468 U CN216450468 U CN 216450468U CN 202122700081 U CN202122700081 U CN 202122700081U CN 216450468 U CN216450468 U CN 216450468U
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Abstract
The utility model discloses a magnetic control single crystal pulling superconducting magnet coil and a superconducting magnet device. On the basis of keeping the advantages of high utilization rate of the saddle-shaped coil magnetic field, small coil usage amount and the like under the condition of the same magnetic field intensity requirement, the embodiment of the utility model adopts the circular coil to reduce the winding difficulty of the spatial circular arc structure of the saddle-shaped coil, and is beneficial to improving the production efficiency. Meanwhile, the stress of the circular coil is more reasonable under the action of strong electromagnetic force, and the risk of quench of the coil in the operation process is relieved. More importantly, the circular coils can obtain higher magnetic field uniformity in a space region under the condition of the same size, so that the efficiency of the production and preparation of the magnetic control pulling single crystal is improved.
Description
Technical Field
The utility model relates to the technical field of semiconductor production equipment, in particular to a magnetic control single crystal pulling superconducting magnet coil and a superconducting magnet device.
Background
The high-purity monocrystalline silicon is widely applied to industries such as solar cells, integrated circuits, semiconductors and the like, is one of key materials of high and new technology industries such as photovoltaic power generation, electronic information and the like, and has an important strategic position in terms of energy, information and national safety.
According to the research and study of the existing documents, the regional and monopolized property of the processing and preparation of the single crystal silicon in the field of the superconducting magnet for magnetically controlled pulling of the single crystal leads to that the prior foreign development units are mainly enterprises such as Sumitomo, Toshiba and Japan superconducting technology company (Jastec), and the magnet preparation technology in the field is almost completely in a confidential and blocked state. Although the related research of domestic monocrystalline silicon starts with japan, the production technology level is still relatively low in the present general, and most of the domestic integrated circuits and silicon wafers thereof still depend on importation. However, the accumulation and development of the technology are coming to the fore over the years, and related patents such as CN103106994A, CN110136915A and the like have been applied for protection in recent years. However, most of the prior magnets have the following problems, such as the magnet coil has 4 more circular coil structures or even more, the structure is complicated, and the utilization rate of the magnetic field is not high. Especially, in the 4-coil structure and the structures above, because the magnetic fields between the coils are mutually offset, the utilization rate of the magnetic field is low, and the cost is high due to the fact that the using amount of the superconducting wire is large under the same magnetic field requirement. Meanwhile, CN210535437U and CN210429450U both adopt saddle coil structures as shown in fig. 1 and fig. 2, and the structures include a first saddle coil 1 and a second saddle coil 2, which can well avoid the above problems, and the utilization rate of the magnet is significantly improved, and under the condition of generating the same central magnetic field B, the amount of superconducting wire is less than 1/2 of the traditional 4 coils, so that the production cost of the single crystal pulling superconducting magnet is greatly reduced compared with the traditional magnetic control superconducting magnet.
However, there is a certain disadvantage in the saddle-shaped coil, because the magnet diameter of the magnetic control single crystal pulling magnet is about 2m, and the coil is a saddle-shaped space curved coil, the winding of the saddle-shaped coil is difficult and time-consuming, which results in that the production period and cost of the saddle-shaped magnetic control single crystal pulling magnet produced on a large scale are limited by the influence of the winding of the coil. Meanwhile, the magnetic field of the three spatial axes of the saddle-shaped coil shows a larger attenuation trend from the center to the outside, and a more uniform magnetic field area needs to be selected for pulling the single crystal, so that the usable uniform magnetic field area of the saddle-shaped coil is not very large, and in sum, on the basis of keeping the high utilization rate of the magnetic field of the saddle-shaped coil, the difficulty of coil winding is further simplified, the uniform magnetic field area is improved, and the key problem of reducing cost and improving efficiency is solved.
SUMMERY OF THE UTILITY MODEL
The embodiment of the utility model provides a magnetic control single crystal pulling superconducting magnet coil and a superconducting magnet device, which are used for solving the problems of high winding difficulty and poor magnetic field uniformity of a saddle-shaped coil in the prior art.
In one aspect, an embodiment of the present invention provides a magnetic control single crystal pulling superconducting magnet coil, including:
two circular coils, two circular coils are the loop configuration and all incline to set up, and the cross arrangement between two circular coils.
In one possible implementation, the current in the two circular coils is in opposite directions.
In one possible implementation, the two circular coils include a first circular coil and a second circular coil, the first circular coil having a diameter larger than a diameter of the second circular coil, the second circular coil being located inside the first circular coil.
In a possible implementation manner, the two circular coils include a first circular coil and a second circular coil, the diameters of the first circular coil and the second circular coil are the same, and the first circular coil and the second circular coil are connected together in a manner of a ring buckle.
On the other hand, the embodiment of the utility model provides a superconducting magnet device, which comprises the magnetic control single crystal pulling superconducting magnet coil.
The magnetic control single crystal pulling superconducting magnet coil and the superconducting magnet device have the following advantages:
on the basis of retaining advantages such as coil use amount is few under the condition that saddle shape coil magnetic field high-usage, the same magnetic field intensity demand, adopt circular coil structure to reduce saddle shape coil space circular arc structure's the wire winding degree of difficulty, do benefit to and improve production efficiency. Meanwhile, the stress of the circular coil structure is more reasonable under the action of strong electromagnetic force, the risk of quenching of the coil in the operation process is relieved, more importantly, the circular coil structure can obtain higher magnetic field uniformity in a space region under the condition of the same size, and the efficiency of magnetic control pulling single crystal production and preparation is improved conveniently. In conclusion, the utility model improves the batch production efficiency of the magnetic control pulling single crystal magnet, reduces the production cost, and obtains a more uniform space magnetic field, thereby being beneficial to obtaining the single crystal silicon with higher quality.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic diagram of a saddle coil of the prior art;
FIG. 2 is a schematic view of the magnetic field of a saddle coil of the prior art;
FIG. 3 is a schematic diagram showing a comparison of the three-dimensional structures of a circular coil provided by an embodiment of the present invention and a saddle coil of the prior art;
FIG. 4 is a side view of a circular coil provided in accordance with an embodiment of the present invention and a saddle coil of the prior art;
FIG. 5 is a schematic cross-sectional view of the circular coil and saddle coil of FIG. 4 taken along the direction A-A;
fig. 6 is a graph showing a comparison of normalized magnetic field strength of a circular coil provided by an embodiment of the present invention and a saddle coil of the prior art.
Description of reference numerals: 1-a first saddle coil, 2-a second saddle coil, 3-a first circular coil, 4-a second circular coil.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Fig. 3-5 are schematic structural diagrams of a magnetron-pulled single crystal superconducting magnet coil according to an embodiment of the present invention. The embodiment of the utility model provides a magnetic control single crystal pulling superconducting magnet coil, which comprises:
two circular coils, two circular coils are the loop configuration and all incline to set up, and the cross arrangement between two circular coils.
Illustratively, the two circular coils are approximately equivalent at the upper and lower arc ends, so that the advantages of high magnetic field utilization rate, less lines with the same magnetic field intensity B, low leakage magnetic field and the like of the conventional saddle-shaped coil compared with a magnetic control single crystal pulling magnet manufactured by the traditional solenoid coil are retained. Moreover, the whole circular coil adopted by the utility model has the same size of occupied space with the existing saddle-shaped coil, and the occupied space size is smaller than that of the traditional solenoid coil. However, the circular coils adopted in the present invention and the existing saddle-shaped coils have certain differences in the distribution uniformity of the spatial magnetic field, as shown in fig. 4, the circular coils with the same size can obtain better magnetic field uniformity in the direction of the X, Y, Z axes, thereby improving the utilization rate of the magnetic field of the magnetic control single crystal pulling.
Furthermore, the circular coil adopted by the embodiment of the utility model is more reasonable in stress, so that the problem of coil quench caused by large coil stress and strain due to strong electromagnetic force when the coil is electrified and excited is solved, and the magnetic control pulling single crystal magnet manufactured by the circular coil is more stable and reliable in operation. In addition, the round coil adopted by the embodiment of the utility model is convenient to mount and fix, the related supporting structural member is more convenient to process and produce, and the final cost is lower.
In addition, the embodiment of the utility model adopts a spatial crossing form of the circular coils, and can obtain higher magnetic field uniformity in a larger spatial region compared with a saddle-shaped coil with the same size, as shown in fig. 4, thereby improving the utilization rate of the magnetic control single crystal pulling magnetic field. Since the growth of high purity single crystals has high requirements for the uniformity of the magnetic field, only uniform magnetic field regions can be selected for utilization in the prior art when the single crystal is pulled, and it can be seen from fig. 4 that the magnetic field generated by the circular coil is more uniform, so that the range of available space is larger, and the production efficiency is inevitably higher when the single crystal is prepared. Further, since the circular coil adopted by the embodiment of the utility model can obtain better magnetic field uniformity in a larger area, the circular coil can be made smaller under the condition that the single crystal production requires a certain magnetic field area, so that the usage amount of superconducting wires, support structures and the like can be reduced, and the production cost can be further reduced.
Fig. 6 is a comparison of the normalized magnetic field strength of a circular coil used in an embodiment of the present invention and a conventional saddle coil, and it can also be seen from fig. 6 that the magnetic field strength of the circular coil used in an embodiment of the present invention is higher in the Y direction, i.e., the horizontal direction, than that of the saddle coil.
In a possible embodiment, the current in the two circular coils is in opposite directions.
Illustratively, two cross points exist after two circular coils are arranged in a cross mode, and the current directions of the two circular coils near the cross points are opposite. Just because the current directions are opposite, the magnetic field of the two circular coils at the intersection point is subjected to magnetic field cancellation, so that the saddle-shaped coil does not have the equivalent coil structure in the area, and the circular coil adopting the embodiment of the utility model obtains the magnetic field in the horizontal direction similar to that of the saddle-shaped coil.
In a possible embodiment, the two circular coils comprise a first circular coil 3 and a second circular coil 4, the diameter of the first circular coil 3 being greater than the diameter of the second circular coil 4, the second circular coil 4 being located inside the first circular coil 3.
Illustratively, the inner diameter of the first circular coil 3 may be equal to the outer diameter of the second circular coil 4, while the outer portions of the first circular coil 3 and the second circular coil 4 need to be provided with an insulating layer to ensure the insulating effect inside and outside the coils. By adopting the first circular coil 3 and the second circular coil 4 with different diameters, the inner side surface of the first circular coil 3 can be contacted with the outer side surface of the second circular coil 4, and the contact position is the intersection point. The line connecting the two intersections may pass through the centers of the first and second circular coils 3 and 4.
In a possible embodiment, the two circular coils include a first circular coil 3 and a second circular coil 4, the first circular coil 3 and the second circular coil 4 have the same diameter, and the first circular coil 3 and the second circular coil 4 are connected together by means of a ring buckle.
Illustratively, with the first circular coil 3 and the second circular coil 4 having the same diameter, the inner side surface of one side of the first circular coil 3 and the outer side surface of one side of the second circular coil 4 may be in contact, and the outer side surface of the other side of the first circular coil 3 and the inner side surface of the other side of the second circular coil 4 may be in contact, and the contact position is the intersection. The line connecting the two intersections may pass through the centers of the first and second circular coils 3 and 4.
The embodiment of the utility model also provides a superconducting magnet device which comprises the magnetic control single crystal pulling superconducting magnet coil.
In addition to the above-mentioned magnetic control single crystal pulling superconducting magnet coil, the superconducting magnet device further includes components such as a dewar and a cold shield, and the connection mode of the magnetic control single crystal pulling superconducting magnet coil and other components and the structures of other components are the prior art, and detailed description is not given in the embodiments of the present invention.
While preferred embodiments of the present invention have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. Therefore, it is intended that the appended claims be interpreted as including preferred embodiments and all such alterations and modifications as fall within the scope of the utility model.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the utility model. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (5)
1. A magnetic control single crystal pulling superconducting magnet coil is characterized by comprising:
the two circular coils are of circular ring structures and are arranged obliquely, and the two circular coils are arranged in a crossed mode.
2. A magnetron pulled single crystal superconducting magnet coil as claimed in claim 1 wherein the direction of current flow in the two circular coils is opposite.
3. A magnetron pulled single crystal superconducting magnet coil according to claim 1 wherein the two circular coils comprise a first circular coil (3) and a second circular coil (4), the diameter of the first circular coil (3) being greater than the diameter of the second circular coil (4), the second circular coil (4) being located inside the first circular coil (3).
4. A magnetron pulled single crystal superconducting magnet coil according to claim 1, wherein the two circular coils comprise a first circular coil (3) and a second circular coil (4), the first circular coil (3) and the second circular coil (4) have the same diameter, and the first circular coil (3) and the second circular coil (4) are connected together by means of a ring buckle.
5. A superconducting magnet apparatus comprising the magnetron-pulled single crystal superconducting magnet coil according to any one of claims 1 to 4.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113871133A (en) * | 2021-11-05 | 2021-12-31 | 西安聚能超导磁体科技有限公司 | Magnetic control single crystal pulling superconducting magnet coil and superconducting magnet device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113871133A (en) * | 2021-11-05 | 2021-12-31 | 西安聚能超导磁体科技有限公司 | Magnetic control single crystal pulling superconducting magnet coil and superconducting magnet device |
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