CN216411861U

CN216411861U - Photoetching plate clamp for microscope examination

Info

Publication number: CN216411861U
Application number: CN202123020451.6U
Authority: CN
Inventors: 陆峰
Original assignee: Changsha Shaopu Photoelectric Technology Co ltd
Current assignee: Changsha Shaopu Photoelectric Technology Co ltd
Priority date: 2021-12-03
Filing date: 2021-12-03
Publication date: 2022-04-29
Anticipated expiration: 2031-12-03

Abstract

The utility model provides a photolithography jig for microscopic examination. The lithography clamp for microscopic examination comprises: the conveying box is provided with a fixing mechanism and two adjusting mechanisms; the utility model provides a lithography clamp for microscopic examination, which solves the technical problem of avoiding collision with a cutting blade by a mode of adsorbing and fixing the bottom of a code disc and can ensure that lithography equipment and cutting equipment can be adjusted in position so as to ensure that the precision of the code disc meets the standard.

Description

Photoetching plate clamp for microscope examination

Technical Field

The utility model belongs to the technical field of coded disc processing, and particularly relates to a lithographic plate clamp for microscopic examination.

Background

When a microscope is used for inspection and measurement, a coded disc is needed, the coded disc is a measuring element which has strong resolution capability, high measurement precision and reliable working performance and is used for measuring the rotating angle position of a shaft, the coded disc needs to be subjected to line carving by using a photoetching process in the production process to ensure that the coded disc has a high-precision measurement effect, meanwhile, the shape of the coded disc needs to be sheared and polished by using precision carving equipment after the carving is finished, and the precision of the shape dimension of the coded disc is required to meet the requirement. The blade is located above the base, the adjusting mechanism is arranged inside the base, the blanking auxiliary mechanism is installed in the middle of the top of the base, the connecting ring can move upwards or downwards along the stud by controlling the rotating direction of the rotating ring, three limiting blocks can move towards the center or the edge of the base in a synchronous mode under the action of the connecting rod, the coded disc can be accurately positioned at the center of the top of the base, the accuracy of coded disc machining is improved, and meanwhile the device can fix the coded discs with different diameters.

However, the above structure has a disadvantage that when the stacking tray is fixed, the cutting blade may collide with the clamp during the process of cutting the overall dimension of the stacking tray, so that the cutting blade and the clamp are damaged, and the operation personnel is required to maintain and process, which is time-consuming and labor-consuming.

Therefore, there is a need to provide a new lithographic plate holder for microscopic examination to solve the above technical problems.

SUMMERY OF THE UTILITY MODEL

The utility model solves the technical problem of providing a lithography clamp for microscopic examination, which avoids collision with a cutting blade by adsorbing and fixing the bottom of a code disc, and can ensure that lithography equipment and cutting equipment can adjust the positions so as to ensure that the precision of the code disc meets the standard.

In order to solve the technical problem, the photolithography jig for microscopic examination provided by the utility model comprises a conveying box, wherein a fixing mechanism and two adjusting mechanisms are arranged on the conveying box; the fixing mechanism comprises a first motor, a threaded long rod, a moving block, a first cylindrical block, a fixing cavity, a mounting groove, a second motor, a rotating rod, a first conical gear, a first four threaded short rods, a second four conical gear, four clamping plates, two supporting plates and a long plate, wherein the first motor is fixedly mounted on the outer wall of one side of the conveying box, the threaded long rod is fixedly mounted on an output shaft of the first motor, one end of the threaded long rod extends into the conveying box and is rotatably connected with the conveying box, the moving block is in threaded mounting on the threaded long rod, the top of the moving block extends out of the conveying box, the first cylindrical block is fixedly mounted at the top of the moving block, the fixing cavity is formed in the first cylindrical block, the mounting groove is formed in the inner wall of the bottom of the fixing cavity, the second motor is fixedly mounted on the inner wall of the bottom of the mounting groove, and the rotating rod is fixedly mounted on the output shaft of the second motor, the top end of the rotating rod extends into the fixed cavity, the first conical gear is fixedly arranged at the top end of the rotating rod, the four first threaded short rods are rotatably arranged in the fixed cavity, the four second conical gears are fixedly arranged at one ends of the corresponding first threaded short rods respectively, the second conical gear is meshed with the first conical gear, the four clamping plates are respectively and threadedly arranged on the corresponding first threaded short rods, the tops of the clamping plates extend out of the first cylindrical block, the two supporting plates are fixedly arranged at the tops of the conveying boxes, and the long plate is fixedly arranged at the tops of the two supporting plates;

the adjusting mechanism comprises a hydraulic cylinder, a second cylindrical block, a first circular groove, a rotating block, an adjusting box, a third motor, a second threaded short rod and a connecting block, the hydraulic cylinder is fixedly mounted at the bottom of the long plate, the second cylindrical block is fixedly mounted on an output shaft of the hydraulic cylinder, the first circular groove is formed in the bottom of the second cylindrical block, the rotating block is rotatably mounted in the first circular groove, the bottom of the rotating block extends out of the first circular groove, the adjusting box is fixedly mounted at the bottom of the rotating block, the third motor is fixedly mounted on the outer wall of one side of the adjusting box, the second threaded short rod is fixedly mounted on the output shaft of the third motor, one end of the second threaded short rod extends into the adjusting box and is rotatably connected with the adjusting box, the connecting block is threadedly mounted on the second threaded short rod, and the bottom of the connecting block extends out of the adjusting box.

As a further scheme of the present invention, the bottom of the corresponding connecting block is fixedly provided with a lithography device, and the bottom of the corresponding connecting block is fixedly provided with a cutting device.

As a further scheme of the utility model, a circular groove II is formed in the top of the rotating block, a gear ring is fixedly mounted on the inner wall of the bottom of the circular groove II, a motor IV is fixedly mounted on the inner wall of the top of the circular groove I, a circular rod is fixedly mounted on an output shaft of the motor IV, the bottom end of the circular rod extends into the circular groove II, a rotating gear is fixedly mounted at the bottom end of the circular rod, and the rotating gear is meshed with the gear ring.

As a further scheme of the utility model, a rubber block is fixedly mounted at the top of the clamping plate, an air suction cavity is formed in the rubber block, a plurality of air holes are fixedly mounted on the inner wall of the top of the air suction cavity, an air suction pump is fixedly mounted on one side of the clamping plate, a connecting pipe is fixedly mounted on an air inlet of the air suction pump, and the top end of the connecting pipe extends into the air suction cavity.

As a further scheme of the utility model, four T-shaped sliding rods are fixedly arranged in the fixing cavity and are in sliding connection with corresponding clamping plates.

As a further scheme of the utility model, a first sliding rod is fixedly installed in the conveying box, the first sliding rod is connected with a moving block in a sliding manner, a second sliding rod is fixedly installed in the adjusting box, and the second sliding rod is connected with a connecting block in a sliding manner.

Compared with the related art, the lithography clamp for microscopic examination provided by the utility model has the following beneficial effects:

1. according to the utility model, the fixing mechanism is arranged, so that the coded disc can be fixed in a mode of adsorption and fixation at the bottom of the coded disc, and the coded disc can be firmly fixed, and the effect of preventing the clamp from being damaged after the clamp is contacted with the cutting blade is achieved;

2. according to the utility model, the adjusting mechanism is arranged, so that the position of the processing angle of the processing equipment can be adjusted, and the effect of ensuring the accuracy of the coded disc after processing by adjusting the position of the processing equipment is achieved.

Drawings

In order to facilitate understanding for those skilled in the art, the present invention will be further described with reference to the accompanying drawings.

FIG. 1 is a schematic cross-sectional front view of a lithographic plate holder for microscopic examination according to the present invention;

FIG. 2 is an enlarged schematic view of portion A of FIG. 1;

FIG. 3 is an enlarged schematic view of portion B of FIG. 1;

FIG. 4 is an assembly view of a first cylindrical block, a fixing cavity, a first conical gear, a first threaded short rod, a second conical gear and a clamping plate in the utility model;

FIG. 5 is an assembly view of the clamp plate, rubber block, suction chamber, air holes and air pump of the present invention.

In the figure: 1. a delivery box; 2. a first motor; 3. a threaded long rod; 4. a moving block; 5. a first cylindrical block; 6. a fixed cavity; 7. mounting grooves; 8. a second motor; 9. rotating the rod; 10. a first conical gear; 11. a first threaded short rod; 12. a second bevel gear; 13. a splint; 14. a support plate; 15. a long plate; 16. a hydraulic cylinder; 17. a second cylindrical block; 18. a first circular groove; 19. rotating the block; 20. an adjustment box; 21. a third motor; 22. a second threaded short rod; 23. connecting blocks; 24. a lithographic apparatus; 25. cutting equipment; 26. a second circular groove; 27. a toothed ring; 28. a fourth motor; 29. a rubber block; 30. an air pump.

Detailed Description

Referring to fig. 1, fig. 2, fig. 3, fig. 4 and fig. 5, wherein fig. 1 is a front cross-sectional structural view of a lithographic plate holder for microscopic examination according to the present invention; FIG. 2 is an enlarged schematic view of portion A of FIG. 1; FIG. 3 is an enlarged schematic view of portion B of FIG. 1; FIG. 4 is an assembly view of a first cylindrical block, a fixing cavity, a first conical gear, a first threaded short rod, a second conical gear and a clamping plate in the utility model; FIG. 5 is an assembly view of the clamp plate, rubber block, suction chamber, air holes and air pump of the present invention. The lithography clamp for microscopic examination comprises a conveying box 1, wherein a fixing mechanism and two adjusting mechanisms are arranged on the conveying box 1; the fixing mechanism comprises a motor I2, a threaded long rod 3, a moving block 4, a cylindrical block I5, a fixing cavity 6, a mounting groove 7, a motor II 8, a rotating rod 9, a conical gear I10, four threaded short rods I11, four conical gear II 12, four clamping plates 13, two supporting plates 14 and a long plate 15, wherein the motor I2 is fixedly installed on the outer wall of one side of the conveying box 1, the threaded long rod 3 is fixedly installed on an output shaft of the motor I2, one end of the threaded long rod 3 extends into the conveying box 1 and is rotatably connected with the conveying box 1, the moving block 4 is in threaded installation on the threaded long rod 3, the top of the moving block 4 extends out of the conveying box 1, the cylindrical block I5 is fixedly installed on the top of the moving block 4, the fixing cavity 6 is arranged on the cylindrical block I5, the mounting groove 7 is arranged on the inner wall of the bottom of the fixing cavity 6, the second motor 8 is fixedly installed on the inner wall of the bottom of the installation groove 7, the rotating rod 9 is fixedly installed on an output shaft of the second motor 8, the top end of the rotating rod 9 extends into the fixed cavity 6, the first bevel gear 10 is fixedly installed at the top end of the rotating rod 9, the four first threaded short rods 11 are all rotatably installed in the fixed cavity 6, the four second bevel gears 12 are respectively and fixedly installed at one ends of the corresponding first threaded short rods 11, the two bevel gears 12 are meshed with the first bevel gears 10, the four clamping plates 13 are respectively and threadedly installed on the corresponding first threaded short rods 11, the top of each clamping plate 13 extends out of the corresponding first cylindrical block 5, the two supporting plates 14 are respectively and fixedly installed at the top of the conveying box 1, and the long plate 15 is fixedly installed at the tops of the two supporting plates 14;

the adjusting mechanism comprises a hydraulic cylinder 16, a second cylindrical block 17, a first circular groove 18, a second rotating block 19, an adjusting box 20, a third motor 21, a second threaded short rod 22 and a connecting block 23, the hydraulic cylinder 16 is fixedly arranged at the bottom of the long plate 15, the second cylindrical block 17 is fixedly arranged on an output shaft of the hydraulic cylinder 16, the first circular groove 18 is formed in the bottom of the second cylindrical block 17, the rotating block 19 is rotatably arranged in the first circular groove 18, the bottom of the rotating block 19 extends out of the first circular groove 18, the adjusting box 20 is fixedly arranged at the bottom of the rotating block 19, the third motor 21 is fixedly arranged on the outer wall of one side of the adjusting box 20, the second threaded short rod 22 is fixedly arranged on the output shaft of the third motor 21, one end of the second threaded short rod 22 extends into the adjusting box 20 and is rotatably connected with the adjusting box 20, and the connecting block 23 is threadedly arranged on the second threaded short rod 22, the bottom of the connecting block 23 extends out of the adjusting tank 20.

As shown in fig. 1, a lithographic apparatus 24 is fixedly mounted at the bottom of the corresponding connecting block 23, and a cutting apparatus 25 is fixedly mounted at the bottom of the corresponding connecting block 23;

through mutually supporting of lithography apparatus 24 and cutting equipment 25, form and can process the code wheel through lithography apparatus 24 and cutting equipment 25, avoided the code wheel to carry out high accuracy processing and lead to the size not conform to the requirements.

As shown in fig. 3, a second circular groove 26 is formed in the top of the rotating block 19, a toothed ring 27 is fixedly mounted on the inner wall of the bottom of the second circular groove 26, a fourth motor 28 is fixedly mounted on the inner wall of the top of the first circular groove 18, a round bar is fixedly mounted on an output shaft of the fourth motor 28, the bottom end of the round bar extends into the second circular groove 26, a rotating gear is fixedly mounted at the bottom end of the round bar, and the rotating gear is meshed with the toothed ring 27;

through the mutual cooperation of the circular groove II 26, the gear ring 27, the motor IV 28, the round rod and the rotating gear, the rotating block 19 can be indirectly controlled to rotate through the motor IV 28, and the situation that the machining angles of the photoetching equipment 24 and the cutting equipment 25 cannot be adjusted in a rotating mode due to the fact that the rotating block 19 cannot rotate is avoided.

As shown in fig. 5, a rubber block 29 is fixedly mounted at the top of the clamping plate 13, an air suction cavity is formed in the rubber block 29, a plurality of air holes are fixedly mounted on the inner wall of the top of the air suction cavity, an air suction pump 30 is fixedly mounted at one side of the clamping plate 13, a connecting pipe is fixedly mounted at an air inlet of the air suction pump 30, and the top end of the connecting pipe extends into the air suction cavity;

through the mutual cooperation of rubber piece 29, suction chamber, gas pocket, aspiration pump 30 and connecting pipe, form and to fix the code wheel through vacuum adsorption's mode through aspiration pump 30, avoided the unable fixed firm unable normal processing that leads to of code wheel.

As shown in fig. 2, four T-shaped sliding rods are fixedly installed in the fixing cavity 6, and the T-shaped sliding rods are slidably connected with corresponding clamping plates 13;

through the mutual cooperation of T shape slide bar and splint 13, the formation can carry on spacingly through T shape slide bar to splint 13, has avoided splint 13 can take place to rotate and lead to unable normal removal.

As shown in fig. 1 and 3, a first sliding rod is fixedly installed in the conveying box 1, the first sliding rod is connected with the moving block 4 in a sliding manner, a second sliding rod is fixedly installed in the adjusting box 20, and the second sliding rod is connected with the connecting block 23 in a sliding manner;

through the mutual cooperation of the first sliding rod and the second sliding rod, the movable block 4 and the connecting block 23 can be limited through the first sliding rod and the second sliding rod, and the phenomenon that the movable block 4 and the connecting block 23 cannot move due to the fact that the movable block 4 and the connecting block 23 can rotate is avoided.

The working principle of the photolithography clamp for microscopic examination provided by the utility model is as follows:

the first step is as follows: when the code wheel needs to be fixed, the position of a clamping plate 13 is adjusted according to the size of the code wheel to be processed, a second motor 8 is started at first, the second motor 8 drives a rotating rod 9 to rotate, the rotating rod 9 drives a first bevel gear 10 to rotate, the first bevel gear 10 drives four second bevel gears 12 to rotate, the second bevel gears 12 drive a first threaded short rod 11 to rotate, the first threaded short rod 11 drives the clamping plate 13 in threaded connection with the first threaded short rod to move, the clamping plate 13 moves until the space between the clamping plate and the clamping plate is matched with the size of the code wheel, the code wheel is placed at the tops of the four clamping plates 13 at the moment, the central position of the code wheel and the central position of a first cylindrical block 5 are on the same vertical plane, the air suction pump 30 is started at the moment, air suction is performed by the air suction pump 30 through a connecting pipe, the connecting pipe performs vacuum adsorption on the code wheel through an air suction cavity and an air hole, and the code wheel is fixed firmly;

the second step is as follows: when the code disc is processed, firstly, a semiconductor photoetching process is applied, a master plate is manufactured through laser direct writing equipment, then, batch production of the code disc is performed through a pattern transfer mode, a first motor 2 is started, the first motor 2 drives a long threaded rod 3 to rotate, the long threaded rod 3 drives a moving block 4 connected with a thread of the long threaded rod to move until the moving block 4 moves to the position right below a photoetching device 24, then, a hydraulic cylinder 16 is started, the height of the photoetching device 24 is adjusted through the hydraulic cylinder 16, then, a fourth motor 28 is started, the fourth motor 28 drives a round rod to rotate, the round rod drives a rotating gear to rotate, the rotating gear drives a toothed ring 27 to rotate, the toothed ring 27 drives a rotating block 19 to rotate, the rotating block 19 drives an adjusting box 20 to rotate until the photoetching device 24 rotates to a proper processing angle, then, a third motor 21 is started, and the third motor 21 drives a second threaded short rod 22 to rotate, two 22 drive connecting blocks of screw thread quarter butt 23 remove, move to suitable machined position until lithography apparatus 24, start lithography apparatus 24 and process the code disc this moment, 2um can be accomplished to the minimum lines of semiconductor technology lines of accomplishing processing, the precision can reach 0.25um, accomplish the lines sculpture back, repetitive operation removes the code disc to cutting equipment 25's below, restart cutting equipment 25 cuts the overall dimension of code disc, the code disc overall dimension precision of accomplishing the cutting is in 10um, the line uniformity through the code disc of same master processing has obtained the assurance simultaneously.

It should be noted that the device structure and the accompanying drawings of the present invention mainly describe the principle of the present invention, and in the technology of the design principle, the settings of the power mechanism, the power supply system, the control system, and the like of the device are not completely described and clear, and on the premise that the skilled person understands the principle of the utility model, the details of the power mechanism, the power supply system, and the control system can be clearly known, the control mode of the application document is automatically controlled by the controller, and the control circuit of the controller can be realized by simple programming of the skilled person in the art;

the standard parts used in the method can be purchased from the market, and can be customized according to the description of the specification and the accompanying drawings, the specific connection mode of each part adopts conventional means such as mature bolts, rivets, welding and the like in the prior art, the machines, parts and equipment adopt conventional models in the prior art, and the structure and the principle of the parts known by the skilled person can be known by technical manuals or conventional experimental methods.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments, or a direct or indirect use of these embodiments, without departing from the principles and spirit of the utility model, the scope of which is defined in the claims and their equivalents, as used in the related art, and all of which are intended to be encompassed by the present invention.

Claims

1. A lithographic plate holder for microscopic examination, comprising:

the conveying box is provided with a fixing mechanism and two adjusting mechanisms;

the fixing mechanism comprises a first motor, a threaded long rod, a moving block, a first cylindrical block, a fixing cavity, a mounting groove, a second motor, a rotating rod, a first conical gear, a first four threaded short rods, a second four conical gear, four clamping plates, two supporting plates and a long plate, wherein the first motor is fixedly mounted on the outer wall of one side of the conveying box, the threaded long rod is fixedly mounted on an output shaft of the first motor, one end of the threaded long rod extends into the conveying box and is rotatably connected with the conveying box, the moving block is in threaded mounting on the threaded long rod, the top of the moving block extends out of the conveying box, the first cylindrical block is fixedly mounted at the top of the moving block, the fixing cavity is formed in the first cylindrical block, the mounting groove is formed in the inner wall of the bottom of the fixing cavity, the second motor is fixedly mounted on the inner wall of the bottom of the mounting groove, and the rotating rod is fixedly mounted on the output shaft of the second motor, the top end of the rotating rod extends into the fixed cavity, the first conical gear is fixedly arranged at the top end of the rotating rod, the four first threaded short rods are rotatably arranged in the fixed cavity, the four second conical gears are fixedly arranged at one ends of the corresponding first threaded short rods respectively, the second conical gear is meshed with the first conical gear, the four clamping plates are respectively and threadedly arranged on the corresponding first threaded short rods, the tops of the clamping plates extend out of the first cylindrical block, the two supporting plates are fixedly arranged at the tops of the conveying boxes, and the long plate is fixedly arranged at the tops of the two supporting plates;

2. The lithographic plate holder for microscopic examination of claim 1, wherein: correspondingly, the bottom of the connecting block is fixedly provided with photoetching equipment, and correspondingly, the bottom of the connecting block is fixedly provided with cutting equipment.

3. The lithographic plate holder for microscopic examination of claim 1, wherein: a second circular groove is formed in the top of the rotating block, a toothed ring is fixedly mounted on the inner wall of the bottom of the second circular groove, a fourth motor is fixedly mounted on the inner wall of the top of the first circular groove, a round rod is fixedly mounted on an output shaft of the fourth motor, the bottom end of the round rod extends into the second circular groove, a rotating gear is fixedly mounted at the bottom end of the round rod, and the rotating gear is meshed with the toothed ring.

4. The lithographic plate holder for microscopic examination of claim 1, wherein: the utility model discloses a pneumatic suction device, including splint, fixed mounting has the rubber piece at the top of splint, the chamber of breathing in has been seted up on the rubber piece, fixed mounting has a plurality of gas pockets on the top inner wall in chamber of breathing in, one side fixed mounting of splint has the aspiration pump, fixed mounting has the connecting pipe on the air inlet of aspiration pump, the top of connecting pipe extends to the intracavity of breathing in.

5. The lithographic plate holder for microscopic examination of claim 1, wherein: four T-shaped sliding rods are fixedly installed in the fixing cavity and are in sliding connection with corresponding clamping plates.

6. The lithographic plate holder for microscopic examination of claim 1, wherein: the conveying box is internally and fixedly provided with a first sliding rod, the first sliding rod is connected with a moving block in a sliding mode, the adjusting box is internally and fixedly provided with a second sliding rod, and the second sliding rod is connected with a connecting block in a sliding mode.