CN216237368U - Heater for czochralski silicon - Google Patents
Heater for czochralski silicon Download PDFInfo
- Publication number
- CN216237368U CN216237368U CN202122712469.6U CN202122712469U CN216237368U CN 216237368 U CN216237368 U CN 216237368U CN 202122712469 U CN202122712469 U CN 202122712469U CN 216237368 U CN216237368 U CN 216237368U
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- Prior art keywords
- outer shell
- quartz crucible
- groove
- clamping groove
- heater
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- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 14
- 239000010703 silicon Substances 0.000 title claims abstract description 14
- 239000010453 quartz Substances 0.000 claims abstract description 42
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 42
- 238000005485 electric heating Methods 0.000 claims abstract description 29
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 12
- 239000013078 crystal Substances 0.000 claims description 6
- 238000009826 distribution Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 abstract description 20
- 230000000694 effects Effects 0.000 abstract description 2
- 230000006872 improvement Effects 0.000 abstract description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 13
- 238000005457 optimization Methods 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007770 graphite material Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000004857 zone melting Methods 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model provides a heater for pulling czochralski silicon, which comprises: the electric heating device comprises an outer shell, an electric heating rod and a limiting groove; the lower part in the outer shell is provided with an electric heating rod, and the outer shell is connected with the electric heating rod in an embedding way; the limiting groove is positioned on the inner wall of the outer shell, and the limiting groove and the outer shell are of an integrated structure; the first clamping groove is positioned on the inner wall of the outer shell, and the first clamping groove and the outer shell are of an integrated structure; the quartz crucible is arranged inside the outer shell, and the quartz crucible is sleeved with the outer shell in a clearance fit manner; the limiting block is located on the outer wall of the quartz crucible, and the limiting block and the quartz crucible are of an integrated structure. Through the improvement structurally, it is high to have heating work efficiency to it is good and the stability in use is strong to be heated the effect, improves its practical performance and practical value advantage greatly, thereby the effectual problem and the not enough that appear in having solved current device.
Description
Technical Field
The utility model relates to the technical field of monocrystalline silicon, in particular to a heater for pulling monocrystalline silicon.
Background
The current preparation methods of monocrystalline silicon are divided into zone-melting monocrystalline silicon and czochralski monocrystalline silicon. The Czochralski method utilizes the principle of driving the condensation and crystallization of a melt, and produces a phase change from a liquid to a solid at the interface of the solid and the liquid by virtue of the temperature drop of the melt.
However, the heater for pulling the monocrystalline silicon at present has certain defects, for example, most heaters only rely on graphite materials for heating, the graphite heating is slow, the work efficiency is seriously influenced, the clearance between the crucible and the heater is large, the heating is slow, and meanwhile, the crucible is easy to rotate randomly in the heater, so that the use is inconvenient, and the practical value of the heater is greatly reduced.
In view of the above, the present invention provides a heater for pulling a silicon single crystal, which is improved in view of the conventional problems, and aims to solve the problems and to improve the practical value by the above technique.
SUMMERY OF THE UTILITY MODEL
The present invention is directed to a heater for pulling silicon single crystal to solve the problems and disadvantages of the related art.
In order to achieve the aim, the utility model provides a heater for pulling czochralski silicon, which is achieved by the following specific technical means:
a heater for pulling a silicon single crystal, comprising: the device comprises an outer shell, an electric heating rod, a limiting groove, a first clamping groove, a quartz crucible, a limiting block, a second clamping groove, a skirt edge and a hanging ring; the lower part in the outer shell is provided with an electric heating rod, and the outer shell is connected with the electric heating rod in an embedding way; the limiting groove is positioned on the inner wall of the outer shell, and the limiting groove and the outer shell are of an integrated structure; the first clamping groove is positioned on the inner wall of the outer shell, and the first clamping groove and the outer shell are of an integrated structure; the quartz crucible is arranged inside the outer shell, and the quartz crucible is sleeved with the outer shell in a clearance fit manner; the limiting block is positioned on the outer wall of the quartz crucible, and the limiting block and the quartz crucible are of an integrated structure; the second clamping groove is positioned on the outer wall of the quartz crucible, and the second clamping groove and the quartz crucible are of an integrated structure; the skirt edge is positioned at the upper part of the quartz crucible, and the skirt edge and the quartz crucible are of an integrated structure; the hanging ring is arranged on the upper portion of the skirt edge, and the hanging ring is screwed with the skirt edge through threads.
As a further optimization of the technical scheme, the outer shell of the heater for pulling the czochralski silicon is in a cylindrical shape, and eight electric heating rods are arranged at the lower part in the outer shell in an annular distribution mode.
As a further optimization of the technical scheme, the limiting groove of the heater for pulling the monocrystalline silicon is a U-shaped groove, and the limiting grooves are distributed on the inner wall of the outer shell in a cross manner and are arranged at four positions.
According to the further optimization of the technical scheme, the first clamping groove and the second clamping groove of the heater for pulling the czochralski silicon are both arc-shaped grooves, and the first clamping groove and the second clamping groove are sleeved with the outer shell through the quartz crucible to form a circular hole.
As a further optimization of the technical scheme, the limiting block of the heater for pulling the monocrystalline silicon is of a rectangular block structure, and the limiting block is clamped with the limiting groove in a clearance fit mode.
As a further optimization of the technical scheme, eight first clamping grooves of the heater for pulling the monocrystalline silicon are distributed on the inner wall of the outer shell in an annular array mode, and the first clamping grooves and the electric heating rod are clamped in a clearance fit mode.
Due to the application of the technical scheme, compared with the prior art, the utility model has the following advantages:
1. according to the heater for czochralski silicon, the electric heating rod is arranged, so that the electric heating rod can be used for heating on the basis of the original graphite heating, the heating speed is greatly increased, the working efficiency is improved, and the practical value of the device is greatly improved.
2. According to the heater for pulling the monocrystalline silicon, the electric heating rod is clamped in the hole formed by the first clamping groove and the second clamping groove, so that the electric heating rod and the quartz crucible can be tightly attached, the heating efficiency is improved, and the practical performance is greatly improved.
3. According to the heater for pulling the monocrystalline silicon, the limit block is clamped with the limit groove, so that the problem of inconvenient operation caused by random rotation of the quartz crucible in the outer shell can be solved, and the practical value of the heater is greatly improved.
4. The device has the advantages of high heating efficiency, good heating effect, strong use stability, great improvement of practical performance and practical value and the like by improving the structure of the device, thereby effectively solving the problems and the defects in the existing device.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate embodiments of the utility model and, together with the description, serve to explain the utility model and not to limit the utility model. In the drawings:
FIG. 1 is a schematic front view of the present invention;
FIG. 2 is a schematic structural diagram of the outer casing of the present invention;
FIG. 3 is a schematic diagram of the position of the electric heating rod of the present invention;
FIG. 4 is a schematic view showing the structure of a quartz crucible of the present invention.
In the figure: the device comprises an outer shell 1, an electric heating rod 2, a limiting groove 3, a first clamping groove 4, a quartz crucible 5, a limiting block 6, a second clamping groove 7, a skirt edge 8 and a hanging ring 9.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
It is to be noted that, in the description of the present invention, "a plurality" means two or more unless otherwise specified; the terms "upper", "lower", "left", "right", "inner", "outer", "front", "rear", "head", "tail", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are only for convenience in describing and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, should not be construed as limiting the utility model.
Furthermore, the terms "first," "second," "third," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
Meanwhile, in the description of the present invention, unless otherwise explicitly specified or limited, the terms "connected" and "connected" should be interpreted broadly, for example, as being fixedly connected, detachably connected, or integrally connected; the connection can be mechanical connection or electrical connection; may be directly connected or indirectly connected through an intermediate. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Referring to fig. 1 to 4, the present invention provides a specific technical embodiment of a heater for pulling single crystal silicon:
a heater for pulling a silicon single crystal, comprising: the device comprises an outer shell 1, an electric heating rod 2, a limiting groove 3, a first clamping groove 4, a quartz crucible 5, a limiting block 6, a second clamping groove 7, a skirt edge 8 and a hanging ring 9; the lower part in the outer shell 1 is provided with an electric heating rod 2, and the outer shell 1 is connected with the electric heating rod 2 in an embedding way; the limiting groove 3 is positioned on the inner wall of the outer shell 1, and the limiting groove 3 and the outer shell 1 are of an integrated structure; the first clamping groove 4 is positioned on the inner wall of the outer shell 1, and the first clamping groove 4 and the outer shell 1 are of an integrated structure; the quartz crucible 5 is arranged inside the outer shell 1, and the quartz crucible 5 is sleeved with the outer shell 1 in a clearance fit manner; the limiting block 6 is positioned on the outer wall of the quartz crucible 6, and the limiting block 6 and the quartz crucible 5 are of an integrated structure; the second clamping groove 7 is positioned on the outer wall of the quartz crucible 5, and the second clamping groove 7 and the quartz crucible 5 are of an integrated structure; the skirt edge 8 is positioned at the upper part of the quartz crucible 5, and the skirt edge 8 and the quartz crucible 5 are of an integrated structure; the hanging ring 9 is arranged at the upper part of the skirt edge 8, and the hanging ring 9 is screwed with the skirt edge 8 through threads.
Specifically, the outer shell 1 is cylindrical, eight electric heating rods 2 are arranged at the lower part of the outer shell 1 in an annular distribution mode, and the outer shell 1 is made of graphite materials and is provided with a heating electrode in the prior art.
Specifically, the limiting groove 3 is a U-shaped groove, and the limiting groove 3 is disposed at four positions on the inner wall of the outer housing 1 in a cross distribution manner, and as shown in fig. 2, the limiting groove 3 and the first engaging groove 4 are distributed on the inner wall of the outer housing 1 in a staggered manner.
Specifically, first draw-in groove 4 and second draw-in groove 7 are the arc wall, and cup joint through quartz crucible 5 and shell body 1 between first draw-in groove 4 and the second draw-in groove 7 and constitute the circular port to the circular port of constitution is the mounting hole of electrical heating rod 2.
Specifically, stopper 6 is rectangle block structure, and stopper 6 passes through the joint between clearance fit mode and the spacing groove 3 to it is shown in combination figure 4, stopper 6 and second draw-in groove 7 are the formula of staggering and distribute on quartz crucible 5's outer wall.
Specifically, first draw-in groove 4 is that annular array distribution mode is provided with eight on the inner wall of shell 1 altogether, and through clearance fit mode joint between first draw-in groove 4 and the electrical heating stick 2, first draw-in groove 4 is the groove of dodging of electrical heating stick 2.
The method comprises the following specific implementation steps:
when the device is used, firstly, the outer shell 1 is placed into a monocrystalline silicon furnace, the heating electrode and the electric heating rod 2 are connected with a control power supply, then the quartz crucible 5 is hoisted by the hoisting ring 9, aligned with the limiting block 6 and sleeved in the limiting groove 3 in a sliding manner, and the subsequent heating straight pulling operation and other work can be carried out.
In summary, the following steps: according to the heater for czochralski silicon, the electric heating rod is arranged, so that the electric heating rod can be used for heating on the basis of the original graphite heating, the heating speed is greatly increased, the working efficiency is improved, and the practical value of the device is greatly improved; the electric heating rod is clamped in the hole formed by the first clamping groove and the second clamping groove, so that the electric heating rod and the quartz crucible can be tightly attached, the heating efficiency is improved, and the practical performance is greatly improved; through making the joint between stopper and the spacing groove to can prevent that quartz crucible from rotating the inconvenient problem of operation that arouses at will in the shell, improve the device's practical value then greatly, thereby the effectual problem and the not enough that appear in the current device of having solved.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. A heater for pulling a silicon single crystal, comprising: the device comprises an outer shell (1), an electric heating rod (2), a limiting groove (3), a first clamping groove (4), a quartz crucible (5), a limiting block (6), a second clamping groove (7), a skirt edge (8) and a hanging ring (9); the method is characterized in that: an electric heating rod (2) is arranged at the lower part in the outer shell (1), and the outer shell (1) is connected with the electric heating rod (2) in an embedding mode; the limiting groove (3) is positioned on the inner wall of the outer shell (1), and the limiting groove (3) and the outer shell (1) are of an integrated structure; the first clamping groove (4) is positioned on the inner wall of the outer shell (1), and the first clamping groove (4) and the outer shell (1) are of an integrated structure; the quartz crucible (5) is arranged inside the outer shell (1), and the quartz crucible (5) is sleeved with the outer shell (1) in a clearance fit manner; the limiting block (6) is positioned on the outer wall of the quartz crucible (6), and the limiting block (6) and the quartz crucible (5) are of an integrated structure; the second clamping groove (7) is positioned on the outer wall of the quartz crucible (5), and the second clamping groove (7) and the quartz crucible (5) are of an integrated structure; the skirt edge (8) is positioned at the upper part of the quartz crucible (5), and the skirt edge (8) and the quartz crucible (5) are of an integrated structure; the hanging ring (9) is arranged on the upper portion of the skirt edge (8), and the hanging ring (9) is screwed with the skirt edge (8) through threads.
2. The heater of claim 1, wherein: the outer shell (1) is barrel-shaped, and the lower part position in the outer shell (1) is provided with eight electric heating rods (2) in an annular distribution mode.
3. The heater of claim 1, wherein: the limiting groove (3) is a U-shaped groove, and the limiting groove (3) is distributed on the inner wall of the outer shell (1) in a cross shape and is provided with four positions.
4. The heater of claim 1, wherein: the first clamping groove (4) and the second clamping groove (7) are arc-shaped grooves, and a circular hole is formed between the first clamping groove (4) and the second clamping groove (7) in a sleeved mode through the quartz crucible (5) and the outer shell (1).
5. The heater of claim 1, wherein: the limiting block (6) is of a rectangular block structure, and the limiting block (6) is connected with the limiting groove (3) in a clamping mode in a clearance fit mode.
6. The heater for pulling the silicon single crystal according to claim 1 or 4, wherein: first draw-in groove (4) are that annular array distribution mode is provided with eight on the inner wall of shell (1) altogether, and pass through clearance fit mode joint between first draw-in groove (4) and electric heating rod (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122712469.6U CN216237368U (en) | 2021-11-08 | 2021-11-08 | Heater for czochralski silicon |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122712469.6U CN216237368U (en) | 2021-11-08 | 2021-11-08 | Heater for czochralski silicon |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216237368U true CN216237368U (en) | 2022-04-08 |
Family
ID=80993798
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122712469.6U Expired - Fee Related CN216237368U (en) | 2021-11-08 | 2021-11-08 | Heater for czochralski silicon |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216237368U (en) |
-
2021
- 2021-11-08 CN CN202122712469.6U patent/CN216237368U/en not_active Expired - Fee Related
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20220408 |