CN216117737U

CN216117737U - Pressure-adjustable chip power-on probe mechanism with trigger function

Info

Publication number: CN216117737U
Application number: CN202122053738.2U
Authority: CN
Inventors: 梁维勇; 李伟
Original assignee: Leishen Technology Shenzhen Co ltd
Current assignee: Leishen Technology Shenzhen Co ltd
Priority date: 2021-08-27
Filing date: 2021-08-27
Publication date: 2022-03-22
Anticipated expiration: 2031-08-27

Abstract

The utility model relates to the technical field of probes, in particular to a pressure-adjustable chip power-on probe mechanism with a trigger function. Compared with the prior art, the pressure-adjustable chip power-on probe mechanism with the trigger function can make up for measurement errors caused by different product thicknesses, effectively ensure the measurement precision, improve the use safety and effectively prevent the products or the probes from being damaged due to manual misoperation.

Description

Pressure-adjustable chip power-on probe mechanism with trigger function

[ technical field ] A method for producing a semiconductor device

The utility model relates to the technical field of probes, in particular to a pressure-adjustable chip power-on probe mechanism with a trigger function.

[ background of the utility model ]

The probe mechanism that adds of prior art all adopts fixed push down the height, relies on probe elastic deformation's mode to guarantee the contact of probe and chip, and this type of design is difficult to guarantee the equilibrium of crimping force, probably causes to add the electric instability, and can cause the damage to the chip when the product difference in height that awaits measuring.

[ Utility model ] content

In order to overcome the problems, the utility model provides a pressure-adjustable chip power-on probe mechanism with a trigger function, which can effectively solve the problems.

The utility model provides a technical scheme for solving the technical problems, which comprises the following steps: the pressure-adjustable chip power-on probe mechanism with the trigger function comprises a three-position adjusting seat, wherein an insulating seat is fixed at one end of the three-position adjusting seat, a probe cantilever is fixed at one end of the insulating seat, a probe clamp is connected below the probe cantilever through a compression spring, and a spring piece is connected between the probe clamp and the insulating seat; a small shaft shoulder rod is clamped and fixed on the probe cantilever, the upper end of the small shaft shoulder rod is clamped and fixed in the probe cantilever, the lower end of the small shaft shoulder rod penetrates through the probe clamp and is fixedly connected with a contact block, a contact is arranged on the upper surface of the contact block, and the contact is contacted with the lower surface of the probe clamp; two ends of the contact are connected to the equipment workbench through leads to provide a normally closed signal; and the probe clip is fixedly clamped with a probe.

Preferably, the probe is connected to the equipment power supply meter at the tail part through a lead wire.

Preferably, the probe is mounted at an inclination.

Preferably, the end part of the probe clamp is provided with a circular arc notch in a machining mode.

Preferably, the end part of the probe clamp is provided with a clamping screw.

Preferably, a jacking screw is arranged above the compression spring.

Preferably, the contact block uses an insulating material.

Preferably, three adjusting knobs are arranged on the three-position adjusting seat.

Preferably, a locking plate is arranged below the spring piece and used for locking and fixing the spring piece on the insulating seat and the probe clamp.

Compared with the prior art, the pressure-adjustable chip power-on probe mechanism with the trigger function can make up for measurement errors caused by different product thicknesses, and ensures consistent pressure and contact resistance during power supply each time by changing the pressing height of the probe in real time, thereby effectively ensuring the measurement precision; the flexible connection power-on mode of the spring piece and the compression spring can improve the use safety and effectively prevent products or probes from being damaged due to manual misoperation.

[ description of the drawings ]

FIG. 1 is a diagram of a pressure tunable chip power-on probe mechanism with trigger functionality according to the present invention.

[ detailed description ] embodiments

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the utility model and are not intended to limit the utility model.

It should be noted that all directional indications (such as up, down, left, right, front, and back … …) in the embodiments of the present invention are limited to relative positions on a given view, not absolute positions.

In addition, the descriptions related to "first", "second", etc. in the present invention are only for descriptive purposes and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

Referring to fig. 1, the pressure-adjustable chip power-on probe mechanism with a trigger function of the present invention is suitable for testing and aging equipment of a high-power laser chip, and other equipment which needs to power on the high-power laser chip and perform precise temperature control to test aging, and includes a three-position adjusting seat 1 for mounting the probe mechanism on a working table of the equipment, an insulating seat 2 is fixed at one end of the three-position adjusting seat 1, a probe cantilever 3 is fixed at one end of the insulating seat 2, a probe clamp 8 is connected below the probe cantilever 3 through a compression spring 9, and a spring piece 6 is connected between the probe clamp 8 and the insulating seat 2. The joint is fixed with little shaft shoulder pole 4 on the probe cantilever 3, in little shaft shoulder pole 4's upper end joint was fixed in probe cantilever 3, the lower extreme of little shaft shoulder pole 4 passed probe clamp 8 and fixedly connected with contact piece 5, contact piece 5 upper surface is provided with contact 11, and contact 11 contacts in the lower surface of probe clamp 8. Two ends of the contact 11 are connected to the equipment workbench through leads, which is equivalent to providing a normally closed signal. The probe clip 8 is fixedly clamped with a probe 12.

The probe 12 is connected to the power supply meter of the equipment through a lead at the tail part, and the probe 12 is obliquely installed at a certain angle because the electrode of the product is very small and the position of the puncture needle needs to be observed through a high-magnification camera, so that the position can be avoided for convenient observation. The end part of the probe clamp 8 is provided with an arc-shaped notch in a processing mode, so that the probe 12 can be conveniently matched and clamped. The end part of the probe clamp 8 is provided with a clamping screw 13, the clamping screw 13 of the probe clamp 8 can be loosened for products with larger height difference, the overhanging length of the probe 12 is properly adjusted, and finally the probe 12 is accurately pricked on the electrode of the product by utilizing a three-dimensional adjusting frame under the assistance of camera vision.

The spring plate 6 of the connection between the probe clamp 8 and the insulating base 2 enables the probe clamp 8 to be in a floating state, and can also effectively protect the laser chip from being pricked by the probe 12 even under an overvoltage state. Because the technological requirements are different, the required force for fastening the product by the probe 12 is different, a compression spring 9 is designed above the probe clamp 8, a jacking screw 10 is arranged above the compression spring 9, and the tightness of the compression spring 9 is adjusted by the jacking screw 10. Because the contact resistance changes due to different needle insertion forces, the pressure needs to be consistent every time the probe 12 is pressed down.

The contact 11 is arranged between the probe clamp 8 and the contact block 5, the contact 11 is composed of a contact group with a circular arc surface and a plane, the mode belongs to point contact, and the contact 11 is disconnected after slight displacement change occurs, so that high-precision position control is realized. The contact block 5 needs to be made of an insulating material in order to prevent the lead from being turned into a conducting state by conduction of the mechanism after the contact 11 is broken. When the probe 12 is pressed down towards the product all the time, the contact 11 is disconnected after reaching the preset pressure, the leads at the two ends of the contact 11 are used as feedback signals, the equipment workbench stops pressing down in time after receiving the signals, and power-on measurement is started. Because the height of the chip to be measured may have errors, the height of the pressing down can be adjusted in real time by using the feedback signal provided by the contact 11, so as to ensure that the pressure of the probe 12 on the product can be consistent each time.

Three adjusting knobs 13 are arranged on the three-position adjusting seat 1, and the position of the probe 12 relative to a product can be finely adjusted. Adopt the joint mode between little shaft shoulder pole 4 and the probe cantilever 3, conveniently height-adjusting. And a locking plate 7 is arranged below the spring piece 6 and used for locking and fixing the spring piece 6 on the insulating base 2 and the probe clamp 8.

Compared with the prior art, the pressure-adjustable chip power-on probe mechanism with the trigger function can make up for measurement errors caused by different product thicknesses, and ensures consistent pressure and contact resistance during power supply each time by changing the pressing height of the probe 12 in real time, thereby effectively ensuring the measurement accuracy; the flexible connection power-on mode of the spring piece 6 and the compression spring 9 can improve the use safety and effectively prevent the product or the probe 12 from being damaged due to misoperation.

The above description is only a preferred embodiment of the present invention, and not intended to limit the scope of the present invention, and any modifications, equivalents, improvements, etc. made within the spirit of the present invention should be included in the scope of the present invention.

Claims

1. The pressure-adjustable chip power-on probe mechanism with the trigger function is characterized by comprising a three-position adjusting seat, wherein one end of the three-position adjusting seat is fixedly provided with an insulating seat, one end of the insulating seat is fixedly provided with a probe cantilever, a probe clamp is connected below the probe cantilever through a compression spring, and a spring piece is connected between the probe clamp and the insulating seat;

a small shaft shoulder rod is clamped and fixed on the probe cantilever, the upper end of the small shaft shoulder rod is clamped and fixed in the probe cantilever, the lower end of the small shaft shoulder rod penetrates through the probe clamp and is fixedly connected with a contact block, a contact is arranged on the upper surface of the contact block, and the contact is contacted with the lower surface of the probe clamp;

two ends of the contact are connected to the equipment workbench through leads to provide a normally closed signal;

and the probe clip is fixedly clamped with a probe.

2. The pressure tunable chip power-on probe mechanism with trigger function of claim 1, wherein said probe is connected at the tail to the device power meter by wire.

3. The pressure tunable chip power-on probe mechanism with trigger function according to claim 1, wherein said probe is installed in an inclined manner.

4. The pressure tunable chip power-on probe mechanism with trigger function according to claim 1, wherein said probe clip end portion is machined with a circular arc notch.

5. The pressure tunable chip power-on probe mechanism with trigger function according to claim 1, wherein a clamping screw is disposed at the end of the probe clamp.

6. The pressure tunable chip power-on probe mechanism with trigger function according to claim 1, wherein a jacking screw is disposed above the compression spring.

7. The pressure tunable chip power-on probe mechanism with trigger function of claim 1, wherein the contact block uses an insulating material.

8. The pressure tunable chip power-on probe mechanism with trigger function according to claim 1, wherein three adjusting knobs are disposed on the three-position adjusting seat.

9. The pressure tunable chip power-on probe mechanism with trigger function according to claim 1, wherein a locking plate is disposed under the spring plate for locking and fixing the spring plate to the insulating base and the probe clip.