CN216104649U

CN216104649U - Lifting mechanism and bearing device

Info

Publication number: CN216104649U
Application number: CN202122405887.0U
Authority: CN
Inventors: 温任华
Original assignee: Meijie Photoelectric Technology Shanghai Co ltd
Current assignee: Meijie Photoelectric Technology Shanghai Co ltd
Priority date: 2021-09-30
Filing date: 2021-09-30
Publication date: 2022-03-22
Anticipated expiration: 2031-09-30

Abstract

A lifting mechanism and a receiving device, wherein the lifting mechanism comprises: the top surfaces of the at least two supporting plates are positioned in the same plane; the supporting plate comprises a first part which is contacted with the mounting plate and a second part which is opposite to the first part along the extending direction of the supporting plate, and the width of the second part is smaller than that of the first part along the direction vertical to the surface of the part to be received; the supporting rods are separated from the supporting plates, and when the movable end moves along the direction perpendicular to the part to be received and towards the direction far away from the fixed end, the supporting rods can penetrate through the clamping holes, protrude out of the chuck and are used for receiving the part to be received; the top surfaces of the plurality of support rods can be lower than the top surface of the chuck when the movable end moves in a direction perpendicular to the member to be received and toward a direction close to the fixed end. The embodiment of the utility model is beneficial to improving the stability of the support of the part to be supported.

Description

Lifting mechanism and bearing device

Technical Field

The embodiment of the utility model relates to the field of semiconductor equipment, in particular to a lifting mechanism and a bearing device.

Background

In semiconductor manufacturing, various process steps are involved, including: the method comprises the following steps of photoetching process, dry etching process, physical vapor deposition process and chemical vapor deposition process, wherein different process technologies run on different operation tables.

Accordingly, the movement of the component to be received (e.g. a wafer) between the various stations is usually effected by means of a transport device, and the fixing of the component to be received is effected by means of a chuck.

However, at present, the stability of the chuck to support the member to be received is to be improved.

SUMMERY OF THE UTILITY MODEL

The embodiment of the utility model provides a lifting mechanism and a bearing device, which are beneficial to improving the stability of supporting a part to be borne.

In order to solve the above problems, an embodiment of the present invention provides a lifting mechanism, configured to receive a component to be received, and further configured to place the component to be received on a chuck, where the chuck is provided with a clamping hole; the lifting mechanism comprises: the driver comprises a fixed end and a movable end, and the movable end can move relative to the fixed end along the direction vertical to the surface of the part to be received; the mounting plate is positioned on the movable end and connected with the movable end; the supporting plates are connected with the mounting plate, and the top surfaces of the supporting plates are positioned in the same plane; the support plate comprises a first part which is in contact with the mounting plate and a second part which is opposite to the first part along the extension direction of the support plate, and the width of the second part is smaller than that of the first part along the direction vertical to the surface of the part to be received; the supporting rods are separated from the supporting plates, and when the movable end moves in a direction perpendicular to the part to be received and in a direction away from the fixed end, the supporting rods can penetrate through the clamping holes, protrude out of the chuck and are used for receiving the part to be received; when the movable end moves in a direction perpendicular to the member to be received and toward a direction close to the fixed end, the top surfaces of the plurality of support rods can be lower than the top surface of the chuck.

Optionally, the fixed end is a cylinder; the movable end is a piston rod, the piston rod is sleeved in the cylinder, and the piston rod can move in the cylinder along a direction perpendicular to the surface of the part to be received.

Optionally, the support plate is vertically connected to the mounting plate.

Optionally, the lifting mechanism further comprises: the fixed plate is fixedly connected with the fixed end; the fixed plate is provided with a guide rail which extends along the direction vertical to the part to be received; the mounting plate is provided with a sliding block along the direction vertical to the part to be received; the slider is slidable within the guide rail.

Optionally, the number of the sliding blocks is one or more, and one or more of the sliding blocks are symmetrically arranged along the center of the mounting plate.

Optionally, the support rods are arranged on the support plate in an array manner.

Optionally, the support rods have a diameter of 8mm to 16 mm.

Optionally, the number of the supporting rods is 3 or 4.

Optionally, the support rod includes a support portion and a support pin located on the top of the support portion, and the support pin is used for receiving the component to be received.

Optionally, the material of the support pin includes: polyetheretherketone or rubber.

Optionally, the part to be received includes: wafer, liquid crystal panel or mask.

In order to solve the above problem, an embodiment of the present invention further provides a receiving device, including: the chuck is used for supporting and fixing the part to be received; a plurality of clamping holes are formed in the chuck; the lifting mechanism provided by the embodiment of the utility model is arranged below the chuck; the support rod is arranged corresponding to the clamping hole, and when the movable end moves along a direction which is perpendicular to the part to be received and faces to a direction close to the chuck, the support rod can penetrate through the clamping hole to receive the part to be received; when the movable end moves in a direction perpendicular to the member to be received and toward a direction close to the fixed end, the top surfaces of the plurality of support rods can be lower than the top surface of the chuck.

Optionally, the chuck includes: comprises a chassis and a bulge part which is bulged below; the supporting plate avoids the arrangement of the convex part.

Optionally, the receiving device further includes: the motion platform is positioned below the convex part and fixedly connected with the convex part, and is used for moving the chuck and the part to be received.

Optionally, a groove is formed in the bottom surface of the chuck and corresponds to the support rod; the clamping hole is positioned in the groove.

Compared with the prior art, the technical scheme of the embodiment of the utility model has the following advantages:

in the lifting mechanism provided by the embodiment of the utility model, a plurality of supporting rods are arranged and are separated from the supporting plate, and when the movable end moves along the direction perpendicular to the part to be received and towards the direction far away from the fixed end, the plurality of supporting rods can pass through the clamping holes, protrude out of the chuck and are used for supporting the part to be received; when the movable end moves along a direction perpendicular to the component to be received and towards a direction close to the fixed end, the top surfaces of the plurality of support rods can be lower than the top surface of the chuck, so that the component to be received is placed on the chuck; through elevating system, thereby only need set up on the chuck with the card hole that the bracing piece corresponds is favorable to guaranteeing the effective area of chuck, and corresponding be favorable to the guarantee chuck and treat the area of accepting the adsorption zone between the part, and then the improvement is right treat the steadiness that the part supported.

Furthermore, in the lifting mechanism, the support plate comprises the first part and the second part, and the width of the second part is smaller than that of the first part along the direction perpendicular to the surface of the component to be received, so that on one hand, the wider first part is beneficial to improving the connection stability between the support plate and the mounting plate, and on the other hand, the narrower second part is beneficial to reducing the space occupied by the lifting mechanism.

In the bearing device provided by the embodiment of the utility model, the bearing device comprises the lifting mechanism provided by the embodiment of the utility model; the lifting mechanism is provided with a plurality of supporting rods which are separated from the supporting plate, and when the movable end moves along the direction perpendicular to the part to be received and towards the direction far away from the fixed end, the plurality of supporting rods can penetrate through the clamping holes, protrude out of the chuck and are used for supporting the part to be received; when the movable end moves along a direction perpendicular to the component to be received and towards a direction close to the fixed end, the top surfaces of the plurality of support rods can be lower than the top surface of the chuck, so that the component to be received is placed on the chuck; through elevating system, thereby only need set up on the chuck with the card hole that the bracing piece corresponds is favorable to guaranteeing the effective area of chuck, and corresponding be favorable to increasing the chuck and treat the area of accepting the adsorption zone between the part, and then the improvement is right treat the steadiness that the part supported.

In addition, in the lifting mechanism provided by the embodiment of the present invention, the supporting plate includes the first portion and the second portion, and the width of the second portion is smaller than the width of the first portion along a direction perpendicular to the surface of the component to be received, so that on one hand, the wider first portion is beneficial to improving the connection stability between the supporting plate and the mounting plate, and on the other hand, the narrower second portion is beneficial to reducing the space occupied by the lifting mechanism.

In an alternative scheme, the chuck comprises a bottom plate and a convex part protruding below the bottom plate; the supporting plate avoids the arrangement of the convex part. The bulge part is used for raising the height of the chassis, and an accommodating space is reserved between the motion platform and the chuck so as to place the second part; the width of the second part is smaller than that of the first part, so that a reserved space between the motion table and the chuck is reduced, and the size of the bearing device is reduced.

Drawings

FIG. 1 is a schematic view of a receiving device;

FIG. 2 is a schematic perspective view of an embodiment of a lifting mechanism of the present invention;

FIG. 3 is a view from the direction A of FIG. 2;

FIG. 4 is a view from the direction B of FIG. 2;

FIG. 5 is a top view of FIG. 2;

fig. 6 is a schematic perspective view of a receiving device according to an embodiment of the utility model.

Detailed Description

As can be seen from the background art, the support stability of the chuck to the receiving member needs to be improved at present.

Taking a to-be-received component as an example, a receiving device is combined with an analysis chuck to analyze the reason why the stability of the support of the to-be-received component needs to be improved. Fig. 1 is a schematic structural view of a receiving device.

Referring to fig. 1, the receiving device includes: a chuck 30, wherein the chuck 30 is used for supporting and fixing a part to be received, a groove 31 is arranged on the chuck 30, the shape of the groove 31 is matched with the finger end 33 of a manipulator, the manipulator is used for transferring the part to be received, and when the finger end 33 places the part to be received (not shown) on the chuck 30, the finger end 33 can be accommodated in the groove 31 and can be moved and extracted along the direction parallel to the surface of the part to be received; the chuck 30 is further provided with an adsorption area 34, and the component to be received is fixed by the adsorption area 34 in a vacuum adsorption mode. A moving table 31 is arranged below the chuck 30, and the moving table 31 is fixedly connected with the chuck 30; the motion stage 31 is used to move the chuck 30 and the member to be received.

In order to ensure that the fingers 33 can stably support and convey the component to be received, the area of the fingers 33 is usually large, which results in an excessively large area of the grooves 31 on the chuck 30 matching with the shape of the fingers 33, and further results in an excessively small area of the suction area 34 on the chuck 30, which results in poor stability of the chuck 30 in supporting the component to be received.

In order to solve the above problem, an embodiment of the present invention provides a lifting mechanism, in which a plurality of support rods are disposed, and are separated from the support plate, and when the movable end moves along a direction perpendicular to the component to be received and in a direction away from the fixed end, the plurality of support rods can pass through the clamping holes, protrude from the chuck, and are used for supporting the component to be received; when the movable end moves along a direction perpendicular to the component to be received and towards a direction close to the fixed end, the top surfaces of the plurality of support rods can be lower than the top surface of the chuck, so that the component to be received is placed on the chuck; through elevating system, thereby only need set up on the chuck with the card hole that the bracing piece corresponds is favorable to increasing the effective area of chuck, and corresponding be favorable to increasing the chuck and treat the area of accepting the adsorption zone between the part, and then the improvement is right treat the steadiness that the part supported.

In order to make the aforementioned objects, features and advantages of the embodiments of the present invention comprehensible, specific embodiments accompanied with figures are described in detail below. FIG. 3 is a view from the direction A of FIG. 2;

FIG. 4 is a view from the direction B of FIG. 2; fig. 5 is a top view of fig. 2.

In this embodiment, the lifting mechanism is configured to receive a component to be received (not shown), and further configured to place the component to be received on a chuck (not shown), where the chuck is provided with a clamping hole (not shown).

As an embodiment, the part to be received includes: wafer, liquid crystal panel or mask. In the present embodiment, a to-be-received component is taken as an example of a wafer for explanation.

The lifting mechanism is used for receiving the part to be received and also used for placing the part to be received on the chuck, so that the part to be received can run between different devices.

The chuck is used for placing the part to be received, which is received by the lifting mechanism, and providing supporting and fixing functions for the part to be received.

Be provided with the card hole in the chuck for realize elevating system's bracing piece is along the perpendicular to treat that the part is accepted and the orientation is close to the direction of chuck passes the chuck headspace.

It should be noted that the chuck and the component to be received are only used for convenience of description of the lifting mechanism, and in a specific implementation, the chuck and the component to be received may not be part of the lifting mechanism. Referring to fig. 2 to 4, in the present embodiment, the lifting mechanism includes: the driver 1 comprises a fixed end and a movable end, wherein the movable end can move relative to the fixed end along a direction vertical to the surface of the part to be received; the mounting plate 4 is positioned on the movable end and connected with the movable end; the supporting plates 5 are connected with the mounting plate 4, and the top surfaces of the supporting plates 5 are positioned in the same plane; the support plate 5 comprises a first part 6 which is in contact with the mounting plate 4 and a second part 7 which is opposite to the first part 6 along the extension direction of the support plate 5, and the width of the second part 7 is smaller than that of the first part 6 along the direction vertical to the surface of the part to be received; the supporting rods 8 are separated from the supporting plate 5, and when the movable end moves in a direction perpendicular to the part to be received and in a direction away from the fixed end, the supporting rods 8 can penetrate through the clamping holes, protrude out of the clamping chuck and are used for receiving the part to be received; when the movable end moves in a direction perpendicular to the member to be received and toward a direction close to the fixed end, the top surfaces of the plurality of support rods 8 can be lower than the top surface of the chuck.

The driver 1 provides power for the mounting plate 4, the supporting plate 5 and the supporting rod 8 to move along the direction vertical to the surface of the part to be received.

As an example, the fixed end is a cylinder 2; the movable end is a piston rod 3, the piston rod 3 is sleeved in the cylinder 2, and the piston rod 3 can move in the cylinder 2 along a direction perpendicular to the surface of the part to be received.

In other embodiments, the driver 1 may also be a high pressure gas line or other type of driver.

In this embodiment, the member to be received is a wafer, and the piston rod 3 can move in a direction perpendicular to the surface of the wafer.

The mounting panel 4 is used for connecting the backup pad 5 with the movable end, the mounting panel 4 is still used for right the backup pad 5 plays fixed and supported effect.

In this embodiment, the mounting plate 4 is located on the piston rod 3 and is fixedly connected to the piston rod 3, so that when the piston rod 3 moves in a direction perpendicular to the surface of the wafer, the piston rod 3 can drive the mounting plate 4 to move in the direction perpendicular to the wafer.

The supporting plate 5 is used for providing a supporting function for the supporting rod 8.

The top surfaces of the at least two supporting plates 5 are located in the same plane, so that the supporting rods 8 located on the supporting plates 5 are located in the same plane, the supporting rods 8 located on the supporting plates 5 are enabled to be evenly distributed below the part to be received, and accordingly the supporting uniformity and the stability of the part to be received are improved.

In this embodiment, the supporting plate 5 includes the first portion 6 and the second portion 7, and the width of the second portion 7 is smaller than that of the first portion 6 along a direction perpendicular to the surface of the component to be received, so that on one hand, the wider first portion 6 is beneficial to improving the connection stability between the supporting plate 5 and the mounting plate 4, and on the other hand, the narrower second portion 7 is beneficial to reducing the space occupied by the lifting mechanism.

In this embodiment, the supporting plate 5 is vertically connected to the mounting plate 4, so that the connection stability between the supporting plate 5 and the mounting plate 4 is relatively easy to realize in the process manufacturing, and the process cost is favorably saved.

Moreover, in this embodiment, the supporting plate 5 is arranged along the central symmetry of the mounting plate 4, which is beneficial to the implementation of the symmetrical device of the lifting mechanism 26, and further beneficial to the guarantee of the balance and stability of the lifting mechanism 26, and is also beneficial to the guarantee of the supporting rod 8 on the supporting plate 5, which is about to the central symmetrical distribution of the mounting plate 4, and further the guarantee of the uniform distribution of the parts to be received on the supporting rod 8, and the uniformity of the supporting function of the parts to be received is improved.

The supporting rod 8 is used for bearing the part to be received.

The number of the supporting rods 8 is multiple, and the top surfaces of the supporting rods 8 are located in the same plane, so that stable and balanced support is provided for the part to be received.

When the movable end moves in a direction perpendicular to the component to be received and away from the fixed end, the support rods 8 can penetrate through the clamping holes and protrude out of the chuck and are used for receiving the component to be received, so that the component to be received is placed on the support rods 8; when the movable end moves in a direction perpendicular to the member to be received and toward a direction close to the fixed end, the top surface of the support rod 8 can be lower than the top surface of the chuck, so that the member to be received is placed on the chuck, and the chuck supports and fixes the member to be received.

Specifically, in the field of semiconductor devices, a manipulator (please refer to fig. 1) is usually used to convey the component to be received, when a plurality of the support rods 8 pass through the card holes and protrude from the chuck, and the support rods 8 protrude from the chuck, so that a gap is formed between the top surface of the support rod and the chuck, accordingly, when the component to be received is placed on the support rods 8 by the finger ends of the manipulator, the gap between the support rods 8 and the chuck can be used to accommodate the manipulator, so that a groove for accommodating the manipulator is not required to be formed on the chuck, which is beneficial to increasing the area of an adsorption region on the chuck for adsorbing the component to be received, and improving the support stability of the chuck for the component to be received.

In this embodiment, the support rods 8 are arranged in an array manner on the support plate 5, and the arrangement manner is favorable for uniformly distributing the parts to be received, so as to improve the support stability of the parts to be received. In other embodiments, the support rods 8 may not be arranged in an array on the support plate 5, for example: staggered arrangement, etc.

It should be noted that the number of the support rods 8 is not too small, nor too large. If the number of the support bars 8 is too small, for example: if the number of the supporting rods is less than 3, the top of the supporting rod 8 cannot determine a plane, which is not beneficial to providing a stable supporting function for the part to be received; if the quantity of bracing piece 8 is too much, causes the waste of material easily, just the card hole quantity that needs to set up on the chuck is corresponding also too much, is unfavorable for the position in card hole is arranged on the chuck, still leads to the shared area in card hole too big easily, and then is unfavorable for the chuck is right treat the steadiness that the receiving component supported. For this reason, in the present embodiment, the number of the support rods 8 is 3 or 4.

It should be noted that the diameter of the support rod 8 should not be too small, nor too large. If the diameter of the supporting rod 8 is too small, the area of the top of the supporting rod 8 is small, and the supporting area of the supporting rod 8 for the part to be received is also too small; if the diameter of the supporting rod 8 is too large, the diameter of the clamping hole is correspondingly too large, so that the adsorption area on the chuck is correspondingly reduced, and the stability of the chuck for supporting the part to be received is not high. For this reason, in the present embodiment, the support rod 8 has a diameter of 8mm to 16 mm.

As an example, the diameter of the support rod 8 is 10mm or 12 mm.

As an example, the support bar 8 includes a support portion 12 and a support pin 13 positioned on top of the support portion 12.

Wherein the supporting portion 12 is used for supporting the supporting pin 13, and the supporting pin 13 is used for receiving the component to be received.

By making the support rod 8 include the support portion 12 and the support pin 13, the support pin 13 can be made of a material with a smooth surface, so that the support pin 13 is not easy to scratch the component to be received, and the support rod can be made of a material with low cost and easy availability, thereby being beneficial to reducing the cost.

In the present embodiment, the support lever 8 including the support portion 12 and the support pin 13 will be described as an example. In other embodiments, the supporting rod 8 may also be an integrated structure.

In this embodiment, the material of the support portion 12 is aluminum alloy or stainless steel. The aluminum alloy and the stainless steel are light in weight and easy to obtain, so that the weight of the lifting mechanism is reduced, and the cost is saved.

In this embodiment, the material of the support pin 13 includes: polyetheretherketone (PEEK) or rubber. The polyetheretherketone has the characteristics of self-lubrication, easy processing and high mechanical strength, so that the supporting pin 13 is not easy to scratch the part to be received; the rubber is a high-elasticity polymer material with reversible deformation, is rich in elasticity at room temperature, is beneficial to enabling the supporting pin 13 to have a smooth surface, and reduces the probability of causing damage to the part to be received.

In this embodiment, the support pin 13 and the support portion 12 can be fixed by threads, which is easy to implement in terms of manufacturing process. In other embodiments, the support pin 13 and the support portion 12 may be fixed by other fixing methods, such as welding.

In this embodiment, the support rod 8 is a cylindrical structure. In other embodiments, the support bars 8 may also be of a prismatic structure.

In this embodiment, when the support bar 8 is a cylindrical structure, the side wall of the support portion 12 needs to be flush with the side wall of the support pin 13.

In other embodiments, the side wall of the support pin 13 may protrude from the side wall of the support portion 12 or be retracted relative to the side wall of the support portion 12, provided that the support pin 13 can be accommodated in the locking hole.

In this embodiment, the lifting mechanism further includes: a fixing plate 9, wherein the fixing plate 9 is connected with the fixed end of the driver 1; the fixed plate 9 is provided with a guide rail 10 extending along the direction vertical to the part to be received; the mounting plate 4 is provided with a slide block 11 along the direction vertical to the part to be received; the slide 11 is able to slide inside the guide 10.

The fixing plate 9 is used for fixing the fixing end and providing a mounting position for the guide rail 10.

In specific implementation, the fixing plate 9 is fixedly arranged below the chuck, the fixed end is connected with the fixing plate 9, so that the movable end can drive the mounting plate 4, the supporting plate 5 and the supporting rod 8 to move along the direction perpendicular to the component to be received relative to the chuck.

As an example, the fixed end is a cylinder 2, and the cylinder 2 is connected to the fixed plate 9, so as to determine the position of the piston rod 3 (i.e., the movable end).

The guide rail 10 is used for limiting the sliding range and the sliding direction of the sliding block 11, and further limiting the lifting range and the lifting direction of the support rod 8 by sliding the sliding block 11.

The extension direction of the guide rail 10 is perpendicular to the surface direction of the part to be received, thereby ensuring that the running direction of the slide block 11 is in the direction perpendicular to the part to be received.

The slider 11 is disposed on the mounting plate 4 and is capable of sliding in the guide rail 10, thereby defining the moving range and moving direction of the movable end and improving the stability of the movement of the movable end.

The number of the sliders 11 may be one or more.

In this embodiment, the number of the sliding blocks 11 is plural, and correspondingly, the number of the guide rails 10 matching with the sliding blocks 11 is plural, and the directions of the plural guide rails 10 are parallel. By making the number of the sliding blocks 11 plural, when the sliding blocks 11 slide in the guide rails 10, the mounting plate 4 is not prone to skew, and the mounting plate 4, the support plate 5 connected to the mounting plate 4, and the support rod 8 separated from the support plate 5 can move along the direction of the guide rails in a balanced and stable manner. As an example, the number of the sliding blocks 11 is 2, which is beneficial to saving materials and space while ensuring that the supporting rod 8 can move along the direction of the guide rail 10 in a balanced and stable manner.

In this embodiment, one or more of the sliding blocks 11 are symmetrically arranged along the center of the mounting plate 4, which is beneficial to keep the balance of the lifting mechanism.

In order to solve the problems, the utility model also provides a bearing device. Fig. 6 is a schematic perspective view of a receiving device according to an embodiment of the utility model.

Referring to fig. 6, in the present embodiment, the receiving device includes: a chuck 21, wherein the chuck 21 is used for supporting and fixing the part to be received 24; a plurality of chucking holes (not shown) are provided in the chuck 21; the lifting mechanism provided by the embodiment of the utility model is arranged below the chuck 21; wherein, the fixing plate 9 is fixedly arranged below the chuck; the support rod 8 is arranged corresponding to the clamping hole, and when the movable end moves in a direction perpendicular to the part to be received 24 and toward the chuck 21, the support rod 8 can pass through the clamping hole to receive the part to be received 24; when the movable end moves in a direction perpendicular to the member to be received 24 and toward a direction close to the fixed end, the top surfaces of the plurality of support rods 8 can be lower than the top surface of the chuck 21.

The lifting mechanism is provided with a plurality of support rods 8 which are separated from the support plate 5, and when the movable end (not shown) moves along the direction perpendicular to the part to be received 24 and towards the direction far away from the fixed end, the plurality of support rods 8 can pass through the clamping holes and protrude out of the chuck 21 and are used for supporting the part to be received 24; when the movable end moves in a direction perpendicular to the member to be received 24 and toward a direction close to the fixed end, the top surfaces of the plurality of support rods 8 can be lower than the top surface of the chuck 21, so that the member to be received 24 is placed on the chuck; through elevating system 26 to only need set up on chuck 21 with the card hole that bracing piece 8 corresponds is favorable to guaranteeing chuck 21's effective area, correspondingly is favorable to the increase chuck 21 with treat the area of accepting the absorption area (not shown) between the part 24, and then improve right treat the steadiness that the part 24 supported.

Furthermore, in the lifting mechanism, the supporting plate 5 comprises the first portion and the second portion, and the width of the second portion is smaller than that of the first portion along the direction perpendicular to the surface of the component to be received, so that on one hand, the wider first portion is beneficial to improving the connection stability between the supporting plate 5 and the mounting plate 4, and on the other hand, the narrower second portion is beneficial to reducing the space occupied by the lifting mechanism 26.

The chuck 21 is used for placing the part to be received by the lifting mechanism 26 and providing support for the part to be received 24.

The part to be received 24 includes: wafer, liquid crystal panel or mask. In the present embodiment, the component to be received 24 is taken as a wafer for illustration.

In this embodiment, the chuck is further provided with an adsorption area, and the component to be received 24 is fixed in the adsorption area in a vacuum adsorption mode. The clamping hole is used for enabling the supporting rod to penetrate through the chuck 21 in a direction perpendicular to the part to be received 24 and towards the direction close to the chuck 21. Correspondingly, the card hole only need with the size and the position of bracing piece are corresponding, are favorable to increasing the regional area of absorption on the chuck, and then improve the support stability that the part was treated to the chuck.

In the field of semiconductor devices, in particular, it is common to employ robots (see also fig. 1) for effecting the transfer of the parts to be received, when the plurality of support rods 8 pass through the clamping holes and protrude from the clamping chuck, and the support rods 8 protrude from the clamping chuck such that a gap is formed between the top surface of the support rod 8 and the clamping chuck 21, accordingly, when the finger end 41 of the robot arm places the part to be received 24 on the support bar 8, the space between the support bar 8 and the chuck 21 can be used to accommodate the robot, therefore, a groove (not shown) for accommodating the manipulator does not need to be formed in the chuck 21, which is correspondingly beneficial to increase the area of the suction area for sucking the component to be received 24 on the chuck 21, and improves the support stability of the chuck 21 on the component to be received 24.

It should be noted that the member to be received 24 is only used for convenience of description of the receiving device, and the member to be received 24 is not a part of the receiving device.

In this embodiment, the chuck 21 includes: comprises a chassis 22 and a convex part 23 protruding downwards; the support plate 5 is disposed avoiding the boss 23.

Wherein the bottom plate 22 is used for supporting and fixing the part to be received 24.

The protrusion 23 is used to raise the height of the chassis 22, thereby providing a space for the lifting mechanism.

By making the chuck 21 include the bottom plate 22 and the protruding portion 23 protruding downward; the supporting plate 5 can be arranged to avoid the protruding part 23, and the protruding part 23 is used for raising the height of the chassis 22, so as to reserve an accommodating space between the motion platform 20 and the chuck 21 for placing the second part; and because the width of the second part is smaller than that of the first part, the reserved space between the motion table 20 and the chuck 21 is reduced, and the occupied space of the bearing device is reduced.

In a specific implementation, the bottom surface of the chuck 21 is provided with a groove 50 corresponding to the position of the support rod 8; the card hole is located in the groove 50. Through setting up slot 50, can increase the backup pad 5 with the spacing distance of chuck 21 bottom avoids backup pad 5 with chuck 21 contacts, is favorable to protecting backup pad 5 with the integrality of chuck 21.

The lifting mechanism 26 is used for receiving the part to be received 24 and also used for placing the part to be received 24 on the chuck 21.

The support rod 8 is arranged corresponding to the clamping hole, and when the movable end moves in a direction perpendicular to the part to be received 24 and toward the chuck 21, the support rod 8 can pass through the clamping hole to receive the part to be received 24; when the movable end moves in a direction perpendicular to the member to be received 24 and toward a direction close to the fixed end, the top surfaces of the plurality of support rods 8 can be lower than the top surface of the chuck 21. So that the receiving device receives the part to be received 24 and fixes the part to be received 24 on the chuck 21.

In this embodiment, the supporting plate 5 is disposed to avoid the protruding portion 22, so as to prevent the supporting plate 5 from colliding with the protruding portion 23, which is beneficial to protecting the structures of the supporting plate 5 and the protruding portion 23, and thus the supporting plate 5 can be lifted normally.

For a detailed description of the lifting mechanism 26, please refer to the corresponding description of the previous embodiment, which is not repeated herein.

In this embodiment, the receiving device further includes: and the moving table 20 is positioned below the protruding part 23 and is fixedly connected with the protruding part 23, so that the bearing device is integrated to realize integration.

The motion stage 20 is used to move the chuck 21 and the part to be received 24.

In a specific implementation, a base (not shown) is disposed below the moving table 20, one or more sliding rails 40 are disposed on the base, and the moving table 24 is located on the sliding rails to move the chuck 21 and the component to be received 24 along the direction of the sliding rails 40.

In a specific implementation, the shape and size of the motion stage 20 match the shape and size of the protrusions 23.

In a specific implementation, the motion stage 20 and the boss 23 may be fixed by screws (not shown). A plurality of threaded holes (not shown) are distributed on the motion table 20, a plurality of counter bores are correspondingly distributed on the protruding portion 23, and the threaded holes and the counter bores are fixedly connected through screws.

Although the present invention is disclosed above, the present invention is not limited thereto. Various changes and modifications may be effected therein by one skilled in the art without departing from the spirit and scope of the utility model as defined in the appended claims.

Claims

1. The utility model provides a lifting mechanism for accept and treat the part of accepting, and still be used for with treat that the part of accepting is placed on the chuck, be provided with the card hole on the chuck, its characterized in that, lifting mechanism includes:

the driver comprises a fixed end and a movable end, and the movable end can move relative to the fixed end along the direction vertical to the surface of the part to be received;

the mounting plate is positioned on the movable end and connected with the movable end;

the supporting plates are connected with the mounting plate, and the top surfaces of the supporting plates are positioned in the same plane; the support plate comprises a first part which is in contact with the mounting plate and a second part which is opposite to the first part along the extension direction of the support plate, and the width of the second part is smaller than that of the first part along the direction vertical to the surface of the part to be received;

the supporting rods are separated from the supporting plates, and when the movable end moves in a direction perpendicular to the part to be received and in a direction away from the fixed end, the supporting rods can penetrate through the clamping holes, protrude out of the chuck and are used for receiving the part to be received; when the movable end moves in a direction perpendicular to the member to be received and toward a direction close to the fixed end, the top surfaces of the plurality of support rods can be lower than the top surface of the chuck.

2. The lift mechanism of claim 1, wherein the fixed end is a cylinder; the movable end is a piston rod, the piston rod is sleeved in the cylinder, and the piston rod can move in the cylinder along a direction perpendicular to the surface of the part to be received.

3. The lift mechanism of claim 1, wherein the support plate is vertically attached to the mounting plate.

4. The lift mechanism of claim 1, further comprising:

the fixed plate is fixedly connected with the fixed end; the fixed plate is provided with a guide rail which extends along the direction vertical to the part to be received; the mounting plate is provided with a sliding block along the direction vertical to the part to be received; the slider is slidable within the guide rail.

5. The lift mechanism of claim 4, wherein the number of said blocks is one or more, and one or more of said blocks are symmetrically disposed along the center of said mounting plate.

6. The lift mechanism of claim 1, wherein the support rods are arranged in an array on the support plate.

7. The lift mechanism of claim 1, wherein the support rod has a diameter of 8mm to 16 mm.

8. The lift mechanism of claim 1, wherein the number of support bars is 3 or 4.

9. The lift mechanism of claim 1, wherein the support bar includes a support portion and a support pin at a top of the support portion for receiving the part to be received.

10. The lift mechanism of claim 9, wherein the material of the support pins comprises: polyetheretherketone or rubber.

11. The lift mechanism of claim 1, wherein the component to be received comprises: wafer, liquid crystal panel or mask.

12. A receiving device, comprising:

the chuck is used for supporting and fixing the part to be received; a plurality of clamping holes are formed in the chuck;

the elevating mechanism according to any one of claims 1 to 11, disposed below the chuck; the fixing plate is fixedly arranged below the chuck, the supporting rod is arranged corresponding to the clamping hole, and when the movable end moves along a direction which is perpendicular to the part to be received and faces to the chuck, the supporting rod can penetrate through the clamping hole to receive the part to be received; when the movable end moves in a direction perpendicular to the member to be received and toward a direction close to the fixed end, the top surfaces of the plurality of support rods can be lower than the top surface of the chuck.

13. The mount of claim 12, wherein the chuck comprises: comprises a chassis and a bulge part which is bulged below; the supporting plate avoids the arrangement of the convex part.

14. The adapter of claim 13, wherein the adapter further comprises: the motion platform is positioned below the convex part and fixedly connected with the convex part, and is used for moving the chuck and the part to be received.

15. The mount of claim 12, wherein the bottom surface of the chuck is provided with grooves corresponding to the positions of the support rods; the clamping hole is positioned in the groove.

16. The adapter of claim 12, wherein the component to be received comprises: wafer, liquid crystal panel or mask.