CN216035850U

CN216035850U - Storage equipment for material bottles

Info

Publication number: CN216035850U
Application number: CN202121930713.XU
Authority: CN
Inventors: 邢程; 程亮
Original assignee: ICLeague Technology Co Ltd
Current assignee: ICLeague Technology Co Ltd
Priority date: 2021-08-17
Filing date: 2021-08-17
Publication date: 2022-03-15
Anticipated expiration: 2031-08-17

Abstract

The embodiment of the application discloses storage facilities of material bottle. The storage apparatus includes: a storage compartment for storing bottles of material; an opening is arranged above the storage grid; the material bottle is a chemical preparation bottle with an identification code on the bottle body; the identification component is positioned at a position corresponding to the identification codes of the material bottles in the storage grid and is used for scanning the identification codes of the material bottles in the storage grid; the telescopic assembly is positioned at the opening of the storage grid; the telescopic assembly is used for blocking the material bottles from entering and exiting the storage grid when in an extended state; and the identification component scans code scanning information obtained by the identification code and is used for determining the telescopic state of the telescopic component.

Description

Storage equipment for material bottles

Technical Field

The embodiment of the application relates to the field of semiconductor manufacturing, and relates to but is not limited to storage equipment of material bottles.

Background

Various liquid materials may be required in a semiconductor manufacturing process, such as: photoresist, cleaning agents, and the like. The existing material bottles are placed in a spare cabinet of a spare room or a chemical cabinet at the machine table end, and the material bottles of various models are placed in one cabinet body. Various types of material bottles are mixed together, and the storage grid in the cabinet is open, so that people can take the material bottles at will, which can cause the risk of taking the material bottles by mistake, and even can cause serious MO (Missing Operation) events by using wrong materials.

Disclosure of Invention

In view of this, the present application provides a storage apparatus for material bottles, the storage apparatus including:

a storage compartment for storing bottles of material; an opening is arranged above the storage grid; the material bottle is a chemical preparation bottle with an identification code on the bottle body;

the identification component is positioned at a position corresponding to the identification codes of the material bottles in the storage grid and is used for scanning the identification codes of the material bottles in the storage grid;

the telescopic assembly is positioned at the opening of the storage grid; the telescopic assembly is used for blocking the material bottles from entering and exiting the storage grid when in an extended state;

and the identification component scans code scanning information obtained by the identification code and is used for determining the telescopic state of the telescopic component.

In some embodiments, the vial of material is capable of moving into or out of the storage compartment when the retraction assembly is in the retracted state.

In some embodiments, the retraction assembly comprises: a cylinder; the cylinder comprises a telescopic part; wherein the extended state and the shortened state of the expansion and contraction portion correspond to an amount of gas in the cylinder.

In some embodiments, the cylinder further comprises:

a first gas bin and a second gas bin; the gas quantity of the first gas bin is larger than a first threshold value, and the gas quantity of the second gas bin is smaller than a second threshold value, and the telescopic part of the cylinder is in an extension state; and under the condition that the gas quantity of the first gas bin is smaller than the first threshold value and the gas quantity of the second gas bin is larger than the second threshold value, the telescopic part of the cylinder is in a shortened state.

In some embodiments, the retraction assembly further comprises:

the first control valve is respectively connected with the air source and the air cylinder through vent pipes; the first control valve is used for controlling the gas communication direction between the gas source and the cylinder; wherein the gas flow direction corresponds to the movement direction of the telescopic part of the cylinder; the air source is used for providing compressed air.

In some embodiments, the first control valve is connected to the first gas cartridge via a first vent line; the first control valve is connected with the second gas bin through a second vent pipe;

when the first control valve is in a first state, the gas in the first gas bin flows to the first control valve through the first vent pipe, and the compressed air provided by the gas source flows to the second gas bin through the second vent pipe;

when the first control valve is in the second state, the gas in the second gas bin flows to the first control valve through the second vent pipe, and the compressed air provided by the gas source flows to the first gas bin through the first vent pipe.

In some embodiments, the retraction assembly further comprises:

the second control valve is connected to a vent pipe between the first control valve and the cylinder; the second control valve is used for controlling the movement speed of the telescopic part of the cylinder by adjusting the flow speed or the flow of the gas on the vent pipe.

In some embodiments, the retraction assembly comprises:

and the position detection unit is positioned adjacent to the telescopic assembly and used for detecting the telescopic state of the telescopic assembly.

In some embodiments, the storage device further comprises:

the control unit is respectively connected with the identification assembly and the telescopic assembly; and the controller is used for controlling the telescopic state of the telescopic assembly according to the code scanning information.

In some embodiments, the storage device further comprises:

and the carrying device is positioned outside the storage grid and used for moving the material bottles into the storage grid or moving the material bottles in the storage grid out of the storage grid when the telescopic assembly is in a shortened state.

In this application embodiment, the storage lattice correspondence of material bottle installs flexible subassembly and discernment subassembly, can scan the sign indicating code on the material bottle through the discernment subassembly, and flexible subassembly then can scan the sign indicating code information of sweeping that the sign indicating code obtained according to the scanning subassembly, confirms whether need the extension to block the business turn over of material bottle, so, can reduce the condition that the wrong material bottle was traded in the maloperation.

Drawings

Fig. 1 is a schematic structural diagram of a material bottle storage apparatus according to an embodiment of the present disclosure;

fig. 2 is a schematic structural diagram of a telescopic assembly according to an embodiment of the present disclosure;

FIG. 3 is a schematic structural diagram of another telescoping assembly provided in an embodiment of the present application;

FIG. 4 is a schematic structural diagram of another telescopic assembly provided in the embodiments of the present application;

FIG. 5 is a schematic structural diagram of another telescopic assembly provided in the embodiments of the present application;

FIG. 6 is a schematic structural diagram of another material bottle storage apparatus according to an embodiment of the present disclosure;

FIG. 7 is a schematic structural diagram of a storage apparatus for material bottles according to an embodiment of the present disclosure;

FIG. 8 is a schematic diagram of a prior art material bottle storage device;

FIG. 9 is a diagram of a package for a material bottle according to an embodiment of the present disclosure;

fig. 10 is a schematic structural view of a material bottle storage apparatus provided in an embodiment;

FIG. 11 is a flowchart illustrating an exemplary process for changing a material bottle at the end of a tool in a semiconductor manufacturing process;

FIG. 12 is a schematic view of a person opening a material bottle storage compartment at the machine end;

FIG. 13 is a schematic view of a material bottle cap being unscrewed in a counter-clockwise direction;

FIG. 14 is a schematic view of a replacement stock vial;

FIG. 15 is a schematic illustration of clockwise tightening of a material bottle cap;

FIG. 16 is a schematic view of a mischanged stock vial;

FIG. 17 is a schematic view of a material bottle that may be removed;

FIG. 18 is a schematic illustration of the material bottle being non-removable;

fig. 19 is a schematic structural diagram of a storage apparatus for material bottles according to an embodiment of the present disclosure.

Detailed Description

As shown in fig. 1, the present embodiment provides a storage apparatus 100 for material bottles, including: a storage compartment 110 for storing a material bottle 200; an opening 111 is arranged above the storage grid 110; the material bottle 200 is a chemical preparation bottle with an identification code 210 on the bottle body; an identification component 120 located at a position corresponding to the identification code 210 of the material bottle 200 in the storage cell 110, for scanning the identification code 210 of the material bottle 200 in the storage cell 110; a telescopic assembly 130 located at the opening 111 of the storage compartment 110; the retractable assembly 130 is used for blocking the material bottle 200 from entering or exiting the storage grid 110 when in an extended state; wherein, the identification component 120 scans code scanning information obtained by the identification code 210 to determine the telescopic status of the telescopic component 130.

In the embodiment of the present invention, the storage device of the material bottle may be an accessory device of a semiconductor processing apparatus for storing materials required to be used in a semiconductor process, and the storage space in the storage device may be one or more. When the material bottle is located in the storage grid, the material in the material bottle can be used by semiconductor processing equipment, and when the material is exhausted, the material bottle in the storage grid needs to be replaced. Alternatively, the storage device may be a separate storage device for storing the stock, and when some processing devices need to replace the material, the material bottle needs to be taken out of the storage grid; when the stock needs to be stored, a new bottle of material needs to be moved into the storage compartment.

In the embodiment of the application, the storage grid is provided with an opening at the upper part, and the size of the opening is not limited but at least the material bottle can be conveniently taken from the upper part of the storage grid. The material bottle is a chemical preparation bottle with an identification code on the bottle body. The chemical reagent can be corrosive chemical reagent or photoresist for semiconductors, and is a reagent which needs to be controlled to prevent being taken by mistake.

When the material bottle is taken and placed in the storage grid, the telescopic assembly is in a shortened state and is used for allowing the material bottle to move into the storage grid. The telescopic assembly may be a telescopic cylinder controlled by air pressure, a telescopic member controlled by an electromechanical motor, a telescopic structure composed of a spring and the like, or the like. For example, the telescopic cylinder may comprise a telescopic rod, a gas bin, a gas pressure regulating device and the like.

The identification component may be located at an opening on the storage compartment or outside the storage compartment for scanning an identification code on a material bottle located within the storage compartment. For example, the height of the storage grid is smaller than that of the material bottle, and when part of the bottle body of the material bottle is positioned in the storage grid, the bottle neck and the bottle mouth part can be exposed out of the opening of the storage grid, as shown in the figure. The identification component obtains code scanning information by scanning an identification code on the bottleneck of the material bottle in addition to the storage. The identification code on the material bottle can be a bar code, a two-dimensional code or other ID identification marks, and the identification component can identify the identification code in an image acquisition or infrared scanning mode and the like to obtain the code scanning information.

In another embodiment, the identification component can also be used to identify an identification code on the body of an extra-stored material bottle. For example, when a new material bottle needs to be stored in the storage grid, the material bottle is first moved to a designated location outside the storage grid. The identification component identifies the identification code on the new material bottle and determines whether the material bottle is allowed to be moved into the storage compartment. Illustratively, when the retraction assembly is controlled to shorten, a new bottle of material may be moved into the storage compartment; if the telescoping assembly is extended, the new bottle of material is blocked from the storage compartment and is not permitted to move into the storage compartment.

And the identification component scans code scanning information obtained by the identification code and is used for determining the telescopic state of the telescopic component. The code scanning information obtains the content of the identification code. The code scanning information may include the type, lot, category, and manufacturer information of the material bottles. Whether the material bottle is the required material bottle is judged according to the code scanning information, and whether the telescopic assembly is in an extension state or a shortening state is determined according to a judgment result. For example, the identification component compares the identification code of the material bottle identified for the first time with the identification code of the material bottle identified for the second time (third time, and so on) to judge whether the material bottles belong to the same specification material, if so, the telescopic component changes from the extension state to the shortening state, and if not, the telescopic component keeps the extension state and prohibits the material bottle from being taken out.

It should be noted that the "first identified material bottle" mentioned herein may be a material bottle for inputting standard information meeting the requirement, for example, a material bottle is placed in a storage compartment corresponding to an identification component which has not input the standard information, and information of an identification code on the material bottle is identified by the identification component as the standard information. The subsequent identification component takes the standard information as a standard, and if the identified identification code is matched with the standard information, the telescopic component is shortened, and the material bottle can be taken and placed; if the identified identification code is not matched with the standard information, the telescopic assembly is extended to block the material bottle from entering and exiting the storage grid.

For another example, the identification component scans the identification code on the material bottle, and the identification component determines whether the currently identified identification code belongs to a desired identification code (e.g., with a mark of a designated product lot) according to information in the identification code, thereby determining whether the material bottle needs to be blocked from entering or exiting the storage cell.

Illustratively, when storing the material bottle for the first time, when not having the material bottle in the storage check, the flexible subassembly is in and shortens the state, puts into the material bottle after the identification code of the material bottle of putting into the storage check for the first time of the discernment subassembly discernment of being convenient for. And taking out the material bottle again or when the material bottle in the storage grid is exhausted and a new material bottle needs to be replaced into the storage grid, identifying the bar code or the two-dimensional code or the ID of the new material bottle by using the identification component on the storage grid, and comparing the identified information with the recorded information when the material bottle is stored in the storage grid for the first time. If the information is consistent, the retraction assembly changes from the extended state to the shortened state for allowing the spent vial to be removed from the storage compartment. If the two messages are inconsistent, the telescoping assembly continues to maintain the extended state, blocking the depleted material bottle from being removed from the storage compartment.

So, when moving into or shifting out the material bottle in following the storage check, can use recognition device to discern the sign code of material bottle, utilize the information of discerning, judge whether the material bottle is required material bottle, whether the state of the flexible subassembly that corresponds according to the judged result is extension or shortens, decides whether the material bottle can put into the storage check or decides whether the material bottle can take out from the storage check. The condition that production is wrong because of personnel's mistake is taken the material bottle of drawing materials has been reduced from the system level.

In an embodiment of the present application, the vial can be moved into and out of the storage compartment when the telescoping assembly is in the shortened state.

When the telescopic assembly is in a shortened state, the telescopic assembly at the moment does not limit the movement of the material bottle any more, a moving space is provided for the material bottle, and the material bottle cannot be blocked from moving into and out of the storage grid.

Illustratively, when storing the material bottle for the first time, when not having the material bottle in the storage check, the flexible subassembly is in and shortens the state, moves into the material bottle after the identification code of the material bottle of putting into the storage check for the first time of the discernment subassembly discernment.

Illustratively, the identification component is used for judging whether the material bottles belong to the same specification material or not by comparing the identification code of the material bottle identified for the first time with the identification code of the material bottle identified for the second time (third time, and so on), and if so, the telescopic component is changed from the extension state to the shortening state, so that the material bottle can be conveniently moved into the storage grid.

For another example, when the material bottle needs to be moved out of the storage grid, the identification component judges whether the material bottle meets the moving-out condition, and if so, the telescopic component is changed from the extension state to the shortening state, so that the material bottle is conveniently moved out of the storage grid.

When the material bottle needs to be moved out of the storage grid after use, the telescopic assembly is changed from the extension state to the shortening state, so that the material bottle is conveniently moved out of the storage grid.

As shown in fig. 2, in the embodiment of the present application, the telescopic assembly 130 includes: a cylinder; the cylinder includes a telescopic portion 131; wherein the extended state and the shortened state of the expansion part 131 correspond to an amount of gas in the cylinder.

The telescopic assembly 130 in the embodiment of the present application includes at least one cylinder, and a plurality of cylinders may be used, which is not limited herein. The cylinder has at least one telescopic part, and a plurality of telescopic parts can be used, which is not limited herein.

The expansion/contraction state of the expansion/contraction portion 131 is divided into an expanded state and a contracted state. The expansion and contraction state of the expansion and contraction part 131 is related to the gas amount in the corresponding cylinder. For example, the larger the gas amount in the cylinder is, the more the expansion/contraction portion of the cylinder can be pushed out to be in an expanded state. The smaller the gas amount in the cylinder is, the more the expansion part of the cylinder can be pulled back, and the expansion part can be in a shortened state.

When the gas amount in the cylinder makes the telescopic part in the extension state (for example, the gas amount in the cylinder is larger than a first threshold), namely the telescopic assembly is in the extension state, the telescopic assembly limits the movement of the material bottle. The material vial is not capable of moving into or out of the storage compartment.

For example, a vial of material has been placed in the storage compartment and the vial of material is caught by the telescoping assembly, blocking the vial of material from moving out of the storage compartment.

The material bottle is to be put into the storage grid, and the flexible subassembly stretches out, and the material bottle does not have other spaces to get into the storage grid, blocks that the material bottle shifts into in the storage grid.

When the gas amount in the cylinder makes the telescopic part in the shortened state (for example, the gas amount in the cylinder is smaller than a second threshold value), namely the telescopic assembly is in the shortened state, the telescopic assembly does not limit the activity of the material bottle. The material bottles are capable of moving into or out of the storage compartments.

If the material bottle is stored for the first time, the telescopic assembly is in a shortened state when the material bottle is not arranged in the storage grid, and the identification assembly is convenient to identify the material bottle which is placed in the storage grid for the first time and then move into the material bottle.

The identification assembly is used for judging whether the material bottles belong to the same specification material or not by comparing the identification code of the material bottle identified for the first time with the identification code of the material bottle identified for the second time (third time, and so on), if so, the telescopic assembly is changed from the extension state to the shortening state, and the material bottle is conveniently moved into the storage grid.

When the material bottle needs to be moved out of the storage grid, the identification assembly judges whether the material bottle meets the moving-out condition, and if the telescopic assembly is changed from the extension state to the shortening state, the material bottle is convenient to move out of the storage grid.

In the embodiment of the present application, as shown in fig. 2, the cylinder further includes: a first gas bin 132 and a second gas bin 133; wherein, the telescopic part 131 of the cylinder is in an extended state when the gas quantity of the first gas bin 132 is greater than a first threshold value and the gas quantity of the second gas bin 133 is less than a second threshold value; in a state where the gas amount of the first gas bin 132 is smaller than the first threshold value and the gas amount of the second gas bin 133 is larger than the second threshold value, the telescopic part 131 of the cylinder is in a shortened state.

The cylinder in the embodiments of the present application includes a first gas chamber and a second gas chamber, for example, the first gas chamber and the second gas chamber are separated by a piston, the first gas chamber does not include a piston rod, and the second gas chamber includes a piston rod.

For example, when the piston rod needs to be pushed to enable the cylinder to be in an extension state, the gas quantity of the first gas chamber is larger than the first threshold value, and the gas quantity of the second gas chamber is smaller than the second threshold value.

When the piston rod needs to be pulled back, and the air cylinder is in a telescopic state, the gas quantity of the first gas chamber is smaller than the first threshold value, and the gas quantity of the second gas chamber is larger than the second threshold value.

The first threshold value may be a thrust force value for pushing the piston rod and the second threshold value may be a pull force value for pulling back the piston rod.

As shown in fig. 3, in the embodiment of the present application, the telescopic assembly 130 further includes:

the first control valve 140 is respectively connected with the air source and the air cylinder through vent pipes; the first control valve 140 is used for controlling the gas communication direction between the gas source and the cylinder; wherein the gas flow direction corresponds to the movement direction of the telescopic part 131 of the cylinder; the air source is used for providing compressed air.

The first control valve may be a pneumatic control valve, a mechanical valve, and a solenoid valve. The embodiment of the application selects the electromagnetic valve. The solenoid valve is provided with a first port 141, a second port 142, and a gas source port 143. The first port 141 of the solenoid valve is connected with the first gas bin 132, and the second port 142 is connected with the second gas bin 133. The gas source port 143 is connected to a gas source. The flow direction of the gas between the gas source and the cylinder is controlled by the power-on and power-off states of the solenoid valve, and the flow direction of the gas corresponds to the movement direction of the telescopic part 131 of the cylinder.

For example, when the gas flow direction enters from the first gas cabin and exits from the second gas cabin, the cylinder expansion part is pushed, so that the cylinder is changed from a shortened state to an extended state. The gas flow direction enters from the second gas bin, and when the gas flows out from the first gas bin, the telescopic part of the cylinder is pulled reversely, so that the cylinder is changed from an extension state to a shortening state. The gas source is compressed gas, and can be compressed air.

Illustratively, when the first control valve is a passage, the gas in the gas source enters the first gas bin through the gas pipe, and pushes the telescopic part, so that the cylinder is changed from the shortening state to the lengthening state. And the gas in the second gas bin is discharged through the vent pipe.

When the first control valve is opened, gas in the gas source enters the second gas bin through the gas pipe, and the telescopic part is pulled reversely, so that the cylinder is changed from the extension state to the shortening state. The gas in the first gas bin is discharged through the vent pipe.

In the embodiment of the present application, as shown in fig. 3, the first control valve 140 is connected to the first gas bin 132 through a first vent pipe 151; the first control valve 140 is connected with the second gas bin 133 through a second vent pipe 152;

when the first control valve 140 is in the first state, the gas in the first gas bin 132 flows to the first control valve 140 through the first vent line 151, and the compressed air provided by the gas source flows to the second gas bin 133 through the second vent line 152;

when the first control valve 140 is in the second state, the gas in the second gas chamber 133 flows to the first control valve 140 through the second vent pipe 152, and the compressed air provided by the gas source flows to the first gas chamber 132 through the first vent pipe 151.

The first control valve 140 may be a pneumatic control valve, a mechanical valve, and a solenoid valve. The number of the first vent pipes may be one or more, and is not limited herein. The number of the second vent pipes may be one or more, and is not limited herein.

For example, the first control valve may be a solenoid valve. The first state of the solenoid valve is a de-energized state and the second state of the solenoid valve is an energized state.

The first control valve is connected with the first gas bin through a first vent pipe, the first control valve is connected with the second gas bin through a second vent pipe, and the directions of gas flows in the first vent pipe and the second vent pipe are opposite. When the first breather pipe is used for air intake, the second breather pipe is used for air exhaust; when the second breather pipe is charged, the first breather pipe is discharged.

When the electromagnetic valve is electrified, the air source enters the first air pipe through the first interface of the electromagnetic valve and is conveyed to the first air bin, and when the air quantity of the first air bin is larger than the first threshold value and the air quantity of the second air bin is smaller than the second threshold value, the telescopic part is pushed, so that the air cylinder is changed from a shortening state to an extension state. Meanwhile, the gas in the second gas bin is output to a second gas pipe through a second interface to be discharged.

When the electromagnetic valve is powered off, the air source enters the second air pipe through the second interface of the electromagnetic valve and is conveyed to the second air chamber, and when the air quantity of the first air chamber is smaller than the first threshold value and the air quantity of the second air chamber is larger than the second threshold value, the telescopic part of the air cylinder is pulled reversely, so that the air cylinder is changed from the extension state to the shortening state. Meanwhile, the gas in the first gas bin is output to the first gas pipe through the first interface to be discharged.

The first threshold value may be a thrust value for pushing the piston rod, and the second threshold value may be a tension value for pushing the piston rod backward.

In the embodiment of the present application, as shown in fig. 4, the telescopic assembly 130 further includes:

a second control valve connected to a vent pipe between the first control valve 140 and the cylinder; the second control valve is used for controlling the movement speed of the telescopic part 131 of the cylinder by adjusting the flow speed or flow of the gas on the vent pipe.

The second control valve is a valve for adjusting flow rate or flow, and may be a regulating valve, a V-shaped valve, an angle valve, a needle valve, a butterfly valve, a diaphragm valve, or the like.

The embodiment of the application selects two needle valves, namely a first needle valve 160 and a second needle valve 161. The first needle valve 160 is installed on the first breather pipe 151 between the first control valve 140 and the cylinder for controlling the moving speed of the telescopic part 131 of the cylinder by adjusting the flow rate of the gas on the first breather pipe 151, and the second needle valve 161 is installed on the second breather pipe 152 between the first control valve 140 and the cylinder for controlling the moving speed of the telescopic part 131 of the cylinder by adjusting the flow rate of the gas on the second breather pipe 152. The gas flow pipe of the needle valve is provided with a small orifice, and the conduction rate of the flow path can be continuously changed by adjusting the distance between the needle-shaped sealing shaft and the orifice, so as to achieve the purpose of controlling the flow rate of the compressed gas and further control the movement speed of the telescopic part 131 of the cylinder.

As shown in fig. 5, in the embodiment of the present application, the telescopic assembly 130 includes:

and a position detection unit located adjacent to the telescopic assembly 130 and used for detecting the telescopic state of the telescopic assembly 130.

The position detection unit may be a position sensor, and is located adjacent to the telescopic assembly 130, and the number of the position sensors is at least two, and in the embodiment of the present application, two position sensors are selected and used, which are the first position sensor 170 and the second position sensor 171 respectively.

Illustratively, the first position sensor is mounted at a first extreme position of the piston corresponding to a position of the piston when the retraction assembly is in the fully retracted position. The second position sensor is arranged at a second extreme position of the piston, and the second extreme position corresponds to the position of the piston when the telescopic assembly is fully extended.

When first position sensor and second position sensor all do not detect the signal, the piston was neither in first extreme position nor when the second extreme position this moment, if take out the material bottle this moment, the material bottle has the damage risk, and the flexible subassembly need reset to the complete extension state, avoids the material bottle to be taken out illegally.

In the embodiment of the present application, as shown in fig. 6, the storage apparatus 100 further includes:

a control unit 300 connected to the recognition component 120 and the expansion component 130, respectively; for controlling the telescopic state of the telescopic assembly 130 according to the code scanning information.

The embodiment of the present application further includes a control unit 300, and the control unit 300 includes a memory 310 and a comparator 320. The recognition component 120 is electrically connected to the control unit 300, and the control unit 300 is electrically connected to the telescopic component 130.

Illustratively, the memory in the control unit is configured to store bottle information identified by the identification component when a bottle of material is first stored in the storage compartment.

The memory in the control unit may be pre-stored with identification information to be compared. A comparator in the control unit compares the material vial information identified by the identification component when the material vial is first stored in the storage compartment with the information of a new material vial. And outputs the comparison result.

A comparator in the control unit compares the information identified by the identifying component with information previously stored in the memory. And outputs the comparison result.

When the information comparison result is the same or the required information is identified, the control unit outputs a signal to the electromagnetic valve,

When the position sensor detects that the piston is at the first extreme position, the telescopic assembly is in a fully shortened state. The vial of material in the storage compartment can now be removed.

Illustratively, when the information comparison results are different, the control unit outputs a signal to the solenoid valve, when the solenoid valve is energized, the gas source enters the first gas pipe through the first interface of the solenoid valve and is conveyed to the first gas bin, and when the gas quantity of the first gas bin is greater than the first threshold value and the gas quantity of the second gas bin is less than the second threshold value, the telescopic part is pushed, so that the cylinder is changed from the shortened state to the extended state. Meanwhile, the gas in the second gas bin is output to a second gas pipe through a second interface to be discharged. When the position sensor detects that the piston is at the second limit position, the telescopic assembly is in a fully extended state at the moment. The material bottle in the storage compartment may not be removed at this point.

As shown in fig. 7, in the embodiment of the present application, the storage apparatus 100 further includes:

a carrying device 400 located outside the storage compartment 110, for moving the material bottle 200 into the storage compartment 110 or moving the material bottle 200 in the storage compartment 110 out of the storage compartment 110 when the retractable assembly 130 is in the shortened state.

The handling device 400 may include a robot arm, a vacuum chuck.

For example, when the transport is not necessary, the transport device is located outside the storage cell, and when the transport is necessary, the transport device approaches the neck of the material bottle and holds the material bottle to move upward. The conveying device is used for moving the material bottles into the storage grid or moving the material bottles in the storage grid out of the storage grid when the telescopic assembly is in a shortened state.

The embodiments of the present application also provide the following examples:

various liquid materials may be required in a semiconductor manufacturing process, such as: photoresist, cleaning agents, and the like. Photoresist is a liquid chemical with photosensitivity used in semiconductor photolithography process as a medium for transferring circuit patterns from a photomask to a silicon wafer. In the prior art, whether the material bottles are placed in a stock room or a chemical cabinet at a machine end, as shown in fig. 8, various types of material bottles 200 are placed in one storage cell 110. Taking photoresist as an example, at most 10 tubes of photoresist can be configured in one coater at present for various processes. As shown in fig. 9, different photoresists all use the same specification such as: 4L glass bottle packing to the same producer different model photoresist label outward appearance is similar, has the risk of trading the mistake. As shown in fig. 10, the storage compartment 110 in the cabinet is open, and the person can take the material bottle 200 at will, which may cause the risk of taking the material bottle by mistake, and even cause serious MO events due to wrong material.

Fig. 11 is a flow chart of a prior art station end material bottle exchange process in a semiconductor manufacturing process, including,

s1101, giving an alarm by a machine liquid level sensor to remind a user of replacing a material bottle;

s1102, preparing a spare material bottle by personnel;

s1103, opening the material bottle storage grid at the machine station end, and unscrewing the bottle cap of the material bottle to be replaced;

s1104, confirming that the name and the model of the spare material bottle are consistent with those of the material bottle to be replaced, replacing the spare material bottle, and screwing the bottle cap;

s1105, eliminating the liquid level alarm information of the machine station.

When the machine liquid level sensor gives an alarm, the staff is reminded that the material bottles in the storage grids in the machine need to be replaced. As shown in fig. 9, the person is ready for a stock vial. As shown in fig. 12, the person opens the machine end material bottle storage cell 110, and as shown in fig. 13, the person unscrews the cap of the material bottle 200 to be replaced in the storage cell in a counterclockwise direction. As shown in fig. 14, the operator confirms whether the brand name and model number of the stock bottle 200 and the stock bottle 200 to be replaced match, replaces the stock bottle 200, and as shown in fig. 15, tightens the cap of the stock bottle 200 clockwise. After the stock material bottle is placed into the storage grid, the personnel manually eliminate the machine station end liquid level alarm information.

Through the above steps, it can be found that the problems of the existing replacing steps include: all the steps of replacing the material bottles are manually operated by personnel. The external packing of the material bottles of the same specification and different models produced by the same manufacturer is similar, the external packing needs to be detected actively by personnel, the models need to be distinguished carefully, and the correct replacement every time is difficult to ensure. The material bottles with the same specification and different models are also universal with the bottle caps, and the fool-proof effect cannot be realized from the bottle caps. As shown in fig. 16, when the material bottle a needs to be replaced, the material bottle B is easily replaced into the storage compartment 100 because the material bottle a and the material bottle B have the same specification and are packaged similarly. A swap event may occur. When the material bottle 200 is replaced by mistake, the material liquid in the material bottle 200 to be replaced and the material liquid in the spare material bottle 200 are mixed in the machine table pipeline, the yield of the product is influenced, the influence cannot be found at the first time of the mistake replacement, and the longer the time for the mistake replacement is, the larger the loss of a semiconductor manufacturer is. This is a serious MO event.

The embodiment of the application provides storage facilities of material bottle for prevent staying when changing the material bottle, avoid the condition that the people for the maloperation leads to changing mistakes.

When the material bottle is stored in the storage cell 110, the material bottle may contain photoresist, cleaning solution, liquid crystal, or the like. Retraction assembly 130 is in a shortened state for allowing the vial of material to move into storage compartment 110. The telescoping assembly 130 includes a telescoping portion 131. The expansion part 131 may be a cylinder. As shown in fig. 17, when the extendable portion 131 is in the shortened state, the material bottle 200 can be taken out. As shown in fig. 18, when the extensible part 131 is extended, the material bottle 200 cannot be taken out.

As shown in fig. 19, the recognition device 120 may be a bar-type scanner using the recognition device 120 mounted on the corresponding cell. The identification device 120 identifies an identification code on the vial, which may be a bar code. The recognition device 120 is connected to the control unit 300, and the control unit 300 is connected to the telescopic assembly 130. The memory 310 of the control unit 300 is used to store the material bottle information recognized by the recognition device 120 when the material bottle is stored in the storage cell for the first time. The expansion/contraction portion 131 is in a contracted state at this time. The material bottle is placed in the storage grid with an opening above by utilizing a conveying device or personnel, and after the material bottle is placed, a sensor in the storage grid detects that the material bottle is arranged in the storage grid. The control unit 300 outputs a signal to the first control valve 151, the first control valve 151 may be a solenoid valve, when the first control valve 151 is powered on, the gas source flows into the first port 141 of the first control valve 151 through the gas source port 143 of the first control valve 151, enters the first gas pipe 151, and is delivered to the first gas chamber 132, and the first gas pipe 151 is provided with a first control valve 160, and the first control valve 160 may be a needle valve, and is configured to adjust a flow rate of the gas source, so as to control a movement speed of the telescopic portion 131. Meanwhile, the gas in the second gas bin 133 is output to the second gas pipe 152 through the second interface 142 and exhausted. And a second control valve 161 is installed on the second air pipe 152, and the second control valve 161 may be a needle valve for adjusting the flow rate of the air source, thereby controlling the movement speed of the telescopic part 131. When the gas amount of the first gas bin 132 is greater than the first threshold value and the gas amount of the second gas bin 133 is less than the second threshold value, the telescopic part 131 is pushed, so that the cylinder changes from the shortened state to the lengthened state. When the second position sensor 171 detects a signal, the telescopic assembly 130 is in a fully extended state. The position of retraction assembly 130 reaches a predetermined position.

After the material bottle of the machine station end storage grid is exhausted, the liquid level sensor of the machine station detects a signal, and the machine station end sends out alarm information that the material bottle is exhausted. When the material bottle needs to be replaced into the storage grid, the identification device 120 on the storage grid is used to identify the identification code of the material bottle, and the comparator 320 of the control unit 300 compares the information identified this time with the information recorded when the material bottle is stored in the storage grid for the first time. If the comparator 320 determines that the contents of the two messages are consistent, the comparator 320 outputs a signal to the first control valve, the first control valve 151 is powered off, the gas source flows into the second port 142 of the first control valve 151 through the gas source port 143 of the first control valve 151, enters the second gas pipe 152, and is conveyed to the second gas chamber 133, and when the gas amount of the first gas chamber 132 is smaller than the first threshold value and the gas amount of the second gas chamber 133 is larger than the second threshold value, the cylinder expansion part 131 is pulled back, so that the cylinder is changed from the extension state to the shortening state. When the first position sensor 170 detects a signal, the retraction assembly 130 is in a fully retracted state. The position of retraction assembly 130 reaches a predetermined position. At this point the spent material bottle is allowed to be removed from the storage compartment.

The control unit 300 further includes a timer 330, and when the timer 330 times out, the telescopic assembly 130 does not change from the fully extended state to the fully shortened state or from the fully shortened state to the fully extended state, and the telescopic assembly 130 needs to be reset.

The timer 330 sets a predetermined time from the second position sensor 171 to the first position sensor 170 in the piston 136 of the expansion/contraction portion 131. When the predetermined time is reached, if the first position sensor 170 does not detect a signal, the expansion part 131 is not in a fully shortened state, and the material bottle cannot be taken out of the storage compartment. The first position sensor 170 will send a signal to the control unit 300 and the control unit 300 will output a signal to the first control valve to reset the piston 136 of the telescopic part 131 to the position of the second sensor 171.

After the material bottle in the machine storage grid is moved out by the carrying device or personnel, the material bottle is placed in the storage grid, and the alarm information of 'the material bottle is exhausted' at the machine end is cleared. When receiving the clear signal, the control unit 300 sends a signal to the first control valve 140, and the first control valve 140 sends a signal to control the expansion/contraction part 131 to change from the contracted state to the expanded state.

When the second position sensor 171 detects a signal, the telescopic assembly 130 is in a fully extended state. The bellows 131 within the cell will continue to remain fully extended until it is desired to remove the vial from the cell.

The data stored in the storage 310 of the control unit 300 can be cleared and can be rewritten. For example, when there are no bottles of material in the cell, the data in storage 310 may be cleared. New data is written into the storage 310 before the cell is placed in the vial of material.

The control unit storage 310 has a higher authority for the erase and write functions of the stored data than is allowed for the removal and removal of the vials of material in the cells.

It should be appreciated that reference throughout this specification to "one embodiment" or "an embodiment" means that a particular feature, structure or characteristic described in connection with the embodiment is included in at least one embodiment of the present application. Thus, the appearances of the phrases "in one embodiment" or "in an embodiment" in various places throughout this specification are not necessarily all referring to the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. It should be understood that, in the various embodiments of the present application, the sequence numbers of the above-mentioned processes do not mean the execution sequence, and the execution sequence of each process should be determined by its function and inherent logic, and should not constitute any limitation to the implementation process of the embodiments of the present application. The above-mentioned serial numbers of the embodiments of the present application are merely for description and do not represent the merits of the embodiments.

It should be noted that, in this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.

The above description is only for the embodiments of the present application, but the scope of the present application is not limited thereto, and any person skilled in the art can easily conceive of changes or substitutions within the technical scope of the present application, and shall be covered by the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims

1. A storage device for bottles of material, characterized in that it comprises:

2. The storage device of claim 1, wherein the vial of material is movable into and out of the storage compartment when the retraction assembly is in the shortened state.

3. The storage device of claim 2, wherein the telescoping assembly comprises: a cylinder; the cylinder comprises a telescopic part; wherein the extended state and the shortened state of the expansion and contraction portion correspond to an amount of gas in the cylinder.

4. The storage apparatus of claim 3, wherein the cylinder further comprises:

5. The storage device of claim 4, wherein the telescoping assembly further comprises:

6. The storage apparatus of claim 5, wherein the first control valve is connected to the first gas silo through a first vent line; the first control valve is connected with the second gas bin through a second vent pipe;

7. The storage device of claim 5, wherein the telescoping assembly further comprises:

the second control valve is connected to a vent pipe between the first control valve and the cylinder; the second control valve is used for controlling the movement speed of the telescopic part of the cylinder by adjusting the flow rate of gas on the vent pipe.

8. The storage device of claim 1, wherein the telescoping assembly comprises:

9. The storage device of any one of claims 1 to 8, further comprising:

10. The storage device of any one of claims 1 to 8, further comprising: