KR20210066047A - System for automatic opening and closing chemical drum and transferring chemical - Google Patents

Abstract

The present invention provides a system for automatic opening and closing a chemical container and transporting chemicals which can remove harmful elements such as fume and mist created from chemicals when opening a container. The system for automatic opening and closing a chemical container and transporting chemicals comprises: a frame having an internal space in which a chemical container can be positioned; a container support positioned on a lower portion in the frame, and positioning and fixing the chemical container; an image processing module capable of sensing the position, size, and type of a cap of the chemical container; a cap opening/closing unit positioned above the container support, and moving to be positioned above the position of the cap of the chemical container sensed by the image processing module to open and close the cap regardless of the size and type of the cap of the chemical container; and a chemical transport unit positioned above the container support, and moving to be positioned above the position of the cap of the chemical container sensed by the image processing module to transport chemicals in the chemical container of which the cap is opened by the cap opening/closing unit out of the chemical container.

Description

SYSTEM FOR AUTOMATIC OPENING AND CLOSING CHEMICAL DRUM AND TRANSFERRING CHEMICAL

The present invention relates to an automatic chemical container opening and closing and chemical liquid transfer system that automatically opens and closes a stopper of a chemical container containing a chemical liquid for display and semiconductor manufacturing, and transfers the chemical liquid.

Chemicals used in display and semiconductor manufacturing processes are stored in containers of various shapes and sizes for efficiency of transportation and convenience of operation. When using the chemical solution in the storage container, it is necessary to open and close the stopper and connect the connector. However, there is a risk that workers are exposed to chemical vapors, chemical mists, etc. that are harmful to the human body during this process.

Currently, the operator is doing the work such as transporting the storage container and transferring the fluid manually, and is working after wearing a chemical-resistant protective clothing, a gas mask, etc. to protect the worker from the above-mentioned risk factors, and accordingly, the accuracy There is a problem with this falling, time and cost increase.

The present invention is intended to solve this problem, and it automatically recognizes the position and shape of the storage container stopper of various sizes and shapes for storing chemical liquids that are essential for display and semiconductor manufacturing processes, but which pose a fatal risk to the human body when leaked. An object of the present invention is to provide an automatic chemical container opening and closing and chemical liquid transfer system that opens and closes and transfers the chemical liquid by fastening the transfer unit.

However, the technical problems to be achieved by the present embodiment are not limited to the technical problems described above, and other technical problems may exist.

One embodiment of the chemical chemical container automatic opening and closing and chemical liquid transport system according to the present invention for solving the above technical problem is a frame having an internal space in which the chemical container can be located, located below the inside of the frame, the A container support for positioning and fixing a chemical container, an image processing module capable of sensing the position, size and type of the stopper of the chemical container, located above the container support, and sensed by the image processing module, chemical A stopper opening/closing unit capable of opening and closing the stopper regardless of the size and type of the stopper of the chemical container by moving to be positioned above the location of the stopper of the container, and located above the container support, in the image processing module The sensed, moving to be positioned above the position of the stopper of the chemical container, comprising a chemical transfer unit for transferring the chemical liquid inside the chemical container with the stopper opened in the stopper opening and closing unit to the outside of the chemical container, It may be an automatic chemical container opening and closing and chemical liquid transfer system.

The container support is controlled to tilt the chemical container when a weight sensor measuring the weight of the chemical container, and a ratio of the weight measured by the weight sensor to the initial weight before delivery of the chemical is less than or equal to a predetermined value , may include a tilting device.

The stopper opening/closing unit is movable up and down, has an inner accommodation space, and is located in the inner accommodation space of the stopper opening/closing duct, the stopper opening/closing duct having one end in close contact with the chemical container when descending, and chemical by moving down A plurality of stopper opening/closing jigs attached to apply a torque to the stopper of the chemical container and rotating the stopper of the chemical container, installed on the upper surface of the stopper opening/closing duct, so that the stopper opening/closing jig does not move more than a predetermined length When the stopper of the chemical container is opened by the stopper opening/closing stopper, and the stopper opening/closing jig, the chemical vapor (Fume) and chemical mist (Mist) from the chemical container are exhausted. may include

When the plurality of stopper opening and closing jigs are attached to apply a torque to the stopper of the chemical container by a descending movement, when the stopper of the chemical container is of a protruding type protruding out of the chemical container, the chemical container Attached to the stopper of the chemical container in the form of gripping the outside of the stopper, when the stopper of the chemical container is a recessed type in which the stopper is depressed into the chemical container, the plurality of stopper opening and closing jigs are all the chemicals After being positioned at the center of the inside of the stopper of the container, the plurality of stopper opening/closing jigs may be radially spread to be attached to the inner wall of the stopper of the chemical container.

The chemical liquid transfer unit is movable up and down, and includes a chemical liquid transfer duct having one end in close contact with the chemical product container when descending, and a sealing member at one end to seal the stopper portion of the opened chemical container. A pipe, an external pipe positioned to surround the outside of the internal pipe, a transport pipe that is inserted into the internal pipe to transport the chemical to the outside, is installed on the upper surface of the chemical transport duct, and the sealing member moves by a predetermined length or more It includes a chemical liquid transfer stopper to prevent it, and a chemical liquid transfer exhaust port including a space between the outer pipe and the inner pipe, and the inside of the inner pipe, N ₂ gas may be supplied.

The sealing member may be in the form of an inverted trapezoidal column whose circumference becomes narrower toward the lower side.

The image processing module may further include a barcode reader, and sense the model number of the chemical container by reading the barcode attached to the chemical container.

According to the present invention, it is possible to obtain the effect of automatically opening and closing by recognizing the position and shape of the storage container stopper of various sizes and shapes. In addition, since the chemical liquid is transferred by fastening the transfer unit, it is possible to obtain the effect of removing harmful factors such as fume and mist generated from the chemical liquid when the container is opened.

In addition, since a weight sensor is provided at the bottom of the frame unit to detect the remaining amount of the chemical and tilt the chemical container, it is possible to obtain the effect of minimizing the remaining amount of the chemical than when taking out the chemical in a horizontal state.

1 is a schematic diagram of an automatic chemical container opening and closing and chemical liquid transfer system according to the present invention.
2 is a view for explaining the form of the stopper of the chemical container.
3 is a schematic view of a closure opening/closing unit according to the present invention.
Figure 4 schematically shows that a plurality of stopper opening and closing jigs open and close the stopper of the chemical container.
5 is a schematic view of a chemical liquid transfer unit according to the present invention.

Examples of the present invention are provided to more completely explain the present invention to those of ordinary skill in the art, and the following examples may be modified in various other forms, and the scope of the present invention is as follows It is not limited to an Example. Rather, these examples are provided so that this disclosure will be more thorough and complete, and will fully convey the spirit of the invention to those skilled in the art.

In the drawings, variations of the illustrated shapes can be expected, for example depending on manufacturing technology and/or tolerances. Accordingly, embodiments of the present invention should not be construed as limited to the specific shape of the regions shown herein, but should include, for example, manufacturing-induced shape changes. The same reference numerals refer to the same elements throughout. Furthermore, various elements and regions in the drawings are schematically drawn. Accordingly, the present invention is not limited by the relative size or spacing drawn in the accompanying drawings.

Throughout the specification, when a part is "connected" with another part, it is not only "directly connected" but also "electrically connected" with another element or member interposed therebetween. include In addition, when a part "includes" a certain component, it means that other components may be further included, rather than excluding other components, unless specifically stated to the contrary. It should be understood that the existence or addition of features or numbers, steps, operations, components, parts or combinations thereof is not precluded in advance.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a schematic diagram of an automatic chemical container opening and closing and chemical liquid transfer system 1000 according to the present invention.

Referring to FIG. 1 , the automatic chemical container opening and closing and chemical liquid transfer system 1000 according to the present invention includes a frame 100 , a container support 200 , an image processing module 300 , a stopper opening/closing unit 400 , and a chemical liquid A transfer unit 500 may be included.

The frame 100 may have an internal space in which the chemical container 600 may be located. The frame 100 may have a rectangular parallelepiped shape, and may include one or more openable and openable doors. The chemical container 600 accommodates the chemical therein, and may be transferred into the frame 100 by a transfer line (not shown). The chemical container 600 that has been transported is, as will be described later in detail, in the frame 100, the stopper 700 of the chemical container is opened, and the chemical liquid inside the chemical container 600 is transferred to the chemical container ( 600) may be transferred to the outside, and after closing the stopper 700 of the chemical container again, it may be transferred out of the frame 100 .

The container support 200 may be positioned below the frame 100 inside, and fixed by positioning the chemical container 600 that has been transported. The container support 200 is a chemical container 600 when the ratio of the weight sensor (not shown) for measuring the weight of the chemical container 600 and the weight measured by the weight sensor to the initial weight before chemical liquid transfer is less than or equal to a predetermined value ) may include a tilting device (not shown) controlled to tilt.

In detail, as will be described later, in the automatic chemical container opening and closing and chemical liquid transfer system 1000 according to the present invention, when transferring the chemical liquid inside the chemical container 600 to the outside of the chemical container 600, the transfer pipe (540, Fig. 5) can be used. When almost all of the chemical liquid inside the chemical container 600 is transferred, only the chemical liquid remains at the bottom of the chemical container 600 , and there may be a limit in transferring the remaining chemical to the transfer pipe 540 . At this time, as the above-described tilting device is controlled to be tilted, the chemical container 600 is tilted, and it becomes much easier to transfer the remaining chemical to the transfer pipe 540 .

The above-described weight sensor, when the chemical container 600 is transported and the position is fixed to the container support 200, it is possible to measure the initial weight (A) before the chemical transfer of the chemical container 600. And, preferably, it is possible to measure the weight (B) of the chemical container 600 in real time. The tilting device is, when the ratio of the weight (B) of the chemical container 600 to the initial weight (A) of the chemical container 600 before chemical liquid transfer, that is, (B / A) is less than or equal to a predetermined value, the chemical container ( 600) can be controlled to tilt.

Preferably, when more than 90% of the chemical is transferred, that is, when (B/A) is 0.1 or less, the tilting device may be controlled to tilt the chemical container 600 . More preferably, when 80% or more of the chemical is transferred, that is, when (B/A) is 0.2 or less, the tilting device may be controlled to tilt the chemical container 600 .

The image processing module 300 may sense the position, size and type of the stopper 700 of the chemical container, and the model number of the chemical container 600 . In addition, the image processing module 300 may preferably be a module including a camera lens and a barcode reader, but is not limited thereto.

The closure 700 of the chemical container will be described in detail with reference to FIG. 2 . 2 is a view for explaining the form of the stopper 700 of the chemical container.

Referring to Figure 2, the stopper 700 of the chemical container, the case of the protruding type protruding out of the chemical container 600 (Fig. 2 (a)), and the case of the retracted type that is depressed into the chemical container 600 (Fig. 2 (b)). As will be described later in detail, in the case of the protruding type, it is opened and closed by holding and rotating the outside of the stopper 700 of the chemical container, and in the case of the recessed type, by applying a force to face the outside from the inside of the stopper 700 of the chemical container It can be opened and closed by rotating the stopper 700 of the chemical container.

3 is a schematic diagram of a stopper opening/closing unit 400 according to the present invention.

3, the stopper opening/closing unit 400 is located above the container support 200, sensed by the image processing module 300, and moved to be positioned above the location of the stopper 700 of the chemical container. , it is possible to open and close the stopper regardless of the size and type of the stopper 700 of the chemical container.

The stopper opening/closing unit 400 is movable up and down by a driving means (not shown). The plug opening/closing unit 400 may include a plug opening/closing duct 410 , a plurality of plug opening/closing jigs 420 , a plug opening/closing stopper 430 , and a plug opening/closing exhaust port 440 .

The plug opening/closing duct 410 may have an internal accommodation space. In addition, when descending, one end is in close contact with the chemical container 600 , and one end may have elasticity so that there is no problem even when descending further after being in close contact with the chemical container 600 .

A plurality of stopper opening/closing jig 420 is located in the inner accommodation space of the stopper opening/closing duct 410, and is attached to apply a torque to the stopper 700 of the chemical container by descending movement, the stopper of the chemical container can be rotated.

A plurality of stopper opening and closing jigs 420 will be described with reference to FIG. 4 . Figure 4 schematically shows that a plurality of stopper opening and closing jig 420 opens and closes the stopper 700 of the chemical container.

Referring to Figure 4, the plurality of stopper opening and closing jigs 420, when the stopper 700 of the chemical container is a protruding type protruding out of the chemical container 600 (in the case of (a) of FIG. 2), descending When attached to apply a torque to the stopper 700 of the chemical container by movement, it may be attached to the stopper 700 of the chemical container in the form of gripping the outside of the stopper 700 of the chemical container. A plurality of stopper opening and closing jig 420 is a case in which the stopper 700 of the chemical container is depressed into the chemical container 600 (in the case of (b) of FIG. 2), a plurality of stopper opening and closing jigs ( After all 420) is located in the center of the inside of the stopper 700 of the chemical container, a plurality of stopper opening and closing jigs 420 are radially spread so that it can be attached to the inner wall of the stopper 700 of the chemical container. have.

The plurality of stopper opening and closing jigs 420 may have their entire surfaces made of a material such as silicon. Therefore, a plurality of stopper opening and closing jig 420, even if the stopper 700 of the chemical container is a protruding type protruding out of the chemical container 600, the stopper 700 of the chemical container is the chemical container 600 ), even in the case of a recessed type, it can be attached to apply a torque to the stopper 700 of the chemical container regardless of its size.

The stopper opening/closing stopper 430 is installed on the upper surface of the stopper opening/closing duct 410, and may prevent the stopper opening/closing jig 420 from moving more than a predetermined length. Specifically, when the stopper opening/closing stopper 430 touches the upper surface of the chemical container 600, the stopper opening/closing duct 410 may be controlled not to descend any more.

The stopper opening and closing exhaust port 440 is, when the stopper 700 of the chemical container is opened by the stopper opening and closing jig 410, the chemical vapor (Fume) and the chemical mist (Mist) from the chemical container 600 are It may be configured to be exhausted. When the stopper 700 of the chemical container is opened by the stopper opening/closing jig 410, the stopper opening/closing exhaust port 440 automatically fume, mist through the upper surface of the stopper opening/closing duct 410 by the pressure difference. can be exhausted.

5 is a schematic diagram of a chemical liquid transfer unit 500 according to the present invention. Referring to FIG. 5 , the chemical transfer unit 500 is positioned above the container support 200 , sensed by the image processing module 300 , and moves to be positioned above the position of the stopper 700 of the chemical container. Thus, the chemical liquid inside the chemical container 600 with the stopper opened in the stopper opening/closing unit 400 may be transferred to the outside of the chemical container 600 .

The chemical liquid transfer unit 500 is movable up and down by a driving means (not shown). The chemical liquid transfer unit 500 may include a chemical liquid transfer duct 510 , an internal pipe 520 , an external pipe 530 , a transfer pipe 540 , a chemical liquid transfer stopper 550 , and a chemical liquid transfer exhaust port 560 . can

The chemical delivery duct 510 may have elasticity such that one end is in close contact with the chemical container when descending, and there is no problem even when descending further after one end is in close contact with the chemical container 600 .

The inner pipe 520 may include a sealing member 525 for sealing the stopper 700 portion of the opened chemical container at one end thereof. The sealing member 525 may be made of a material such as silicone, and it is possible to seal the chemical container 600 with an open stopper by descending. The perimeter may be in the form of an inverted trapezoidal column narrowing.

The external pipe 530 may be positioned to surround the outside of the internal pipe 520 . By performing the double pipe in this way, exhaust can be made between the external pipe and the internal pipe as will be described later. That is, the chemical solution transfer module may be exhausted through the chemical liquid transfer exhaust port 560 including the space between the external pipe 530 and the internal pipe 520 .

The transfer pipe 540 may be inserted into the inner pipe 520 to transport the chemical to the outside. When the sealing member 525 descends to seal the stopper 700 of the opened chemical container, the transfer pipe 540 may be inserted into the inner pipe 520 . After being inserted, the chemical may be transferred from the inside to the outside of the chemical container 600 by a pump (not shown). After the transfer is made to some extent, the chemical liquid can be transferred from the inside of the chemical container 600 to the outside while tilting the chemical container 600 using the weight sensor and the tilting device as described above. By doing in this way, the little remaining chemical can be easily transferred.

The chemical liquid transfer stopper 550 may be installed on the upper surface of the chemical liquid transfer duct 510 and prevent the sealing member 525 from moving more than a predetermined length. Specifically, when the stopper opening/closing stopper 550 touches the upper surface of the chemical container 600, the stopper opening/closing duct 510 may be controlled not to descend any more.

Inside the inner pipe 520 , N ₂ gas may be supplied. By doing so, it is possible to keep the inside of the inner pipe clean and dry.

In addition, as described above, the image processing module 300 may sense the model number of the chemical container 600 by reading the barcode of the chemical container 600 with a barcode reader (not shown). By doing so, when the chemical container 600 containing the required chemical and other types of chemicals enters the automatic chemical container opening and closing and chemical liquid transfer system according to the present invention, a warning sound is generated or the operation is stopped. , it can prevent accidents caused by the misuse of chemicals.

Although the embodiments of the present invention have been illustrated and described above, the present invention is not limited to the specific embodiments described above, and it is common in the technical field to which the present invention pertains without departing from the gist of the present invention as claimed in the claims. Anyone with knowledge can implement various modifications, of course, and such modifications are within the scope of the claims.

In addition, the scope of the present invention is indicated by the following claims rather than the description of the invention, and all changes or modifications derived from the meaning and scope of the claims and their equivalent concepts are interpreted as being included in the scope of the present invention. should be

100 frames
200 container base
300 image processing modules
400 bung opening unit
410 stopper duct
420 Multiple stopper opening and closing jig
430 plug open/close stopper
440 plug open vent
500 chemical liquid transfer unit
510 chemical liquid transfer duct
520 internal piping
525 sealing member
530 external piping
540 transfer piping
550 chemical liquid transfer stopper
560 Chemical transfer exhaust port
600 chemical containers
700 chemical container closures

Claims (7)

a frame having an interior space in which a chemical container may be located;
A container support that is located below the inside of the frame and fixed by positioning the chemical container,
an image processing module capable of sensing the position, size, and type of the stopper of the chemical container;
It is located above the container support and moved to be positioned above the location of the stopper of the chemical container, sensed by the image processing module, so that the stopper can be opened and closed regardless of the size and type of the stopper of the chemical container. a closure opening unit, and
It is located above the container support and moved to be positioned above the position of the stopper of the chemical container, sensed by the image processing module, and the chemical liquid inside the chemical container with the stopper opened in the stopper opening and closing unit is transferred to the chemical. Chemical liquid transfer unit that transfers to the outside of the chemical container
Including, automatic chemical container opening and closing and chemical liquid transfer system. According to claim 1,
The container support is
a weight sensor for measuring the weight of the chemical container; and
A tilting device that is controlled to tilt the chemical container when the ratio of the weight measured by the weight sensor to the initial weight before delivery of the chemical is less than or equal to a predetermined value
Including, automatic chemical container opening and closing and chemical liquid transfer system. According to claim 1,
The cap opening/closing unit is movable up and down,
A stopper opening/closing duct having an internal accommodating space and having one end in close contact with the chemical container when descending;
A plurality of stopper opening/closing jigs located in the inner accommodation space of the stopper opening/closing duct and attached to apply a torque to the stopper of the chemical container by descending movement to rotate the stopper of the chemical container;
A stopper opening/closing stopper installed on the upper surface of the stopper opening/closing duct and preventing the stopper opening/closing jig from moving more than a predetermined length, and
When the stopper of the chemical container is opened by the stopper opening and closing jig, the stopper opening/closing exhaust port configured to exhaust the chemical vapor (Fume) and the chemical mist (Mist) from the chemical container
Including, automatic chemical container opening and closing and chemical liquid transfer system. 4. The method of claim 3,
The plurality of stopper opening and closing jigs,
When attached to torque the closure of a chemical container by a downward movement,
When the stopper of the chemical container is protruding out of the chemical container, it is attached to the stopper of the chemical container in the form of gripping the outside of the stopper of the chemical container,
When the stopper of the chemical container is of a recessed type recessed into the chemical container, all of the plurality of stopper opening and closing jigs are located in the center of the inside of the stopper of the chemical container, and then the plurality of stopper opening and closing jigs is attached to the inner wall of the stopper of the chemical container to spread radially,
Automatic chemical container opening and closing and chemical liquid transfer system. According to claim 1,
The chemical liquid transfer unit is movable up and down,
When descending, one end of the chemical delivery duct is in close contact with the chemical container,
At one end, an inner pipe including a sealing member for sealing the closure portion of the opened chemical container,
an external pipe positioned to surround the outside of the internal pipe;
A transfer pipe inserted into the inner pipe to transport the chemical to the outside;
a chemical liquid transfer stopper installed on the upper surface of the chemical liquid transfer duct and prevent the sealing member from moving more than a predetermined length; and
Chemical transfer exhaust port comprising a space between the external pipe and the internal pipe
including,
Inside the inner pipe, N ₂ gas is supplied, chemical automatic container opening and closing and chemical liquid transfer system. 6. The method of claim 5,
The sealing member is in the form of an inverted trapezoidal column whose circumference becomes narrower as it goes down, automatic chemical container opening and closing and chemical liquid delivery system. According to claim 1,
The image processing module further comprises a barcode reader,
By reading a barcode attached to the chemical container, it is possible to sense the model number of the chemical container, an automatic chemical container opening and closing and chemical delivery system.

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