CN115294856A - Photoresist mark and photoresist replacing method - Google Patents
Photoresist mark and photoresist replacing method Download PDFInfo
- Publication number
- CN115294856A CN115294856A CN202210889814.XA CN202210889814A CN115294856A CN 115294856 A CN115294856 A CN 115294856A CN 202210889814 A CN202210889814 A CN 202210889814A CN 115294856 A CN115294856 A CN 115294856A
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- China
- Prior art keywords
- photoresist
- container
- mark
- bar code
- information
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Links
- 229920002120 photoresistant polymer Polymers 0.000 title claims abstract description 150
- 238000000034 method Methods 0.000 title claims abstract description 14
- 239000003550 marker Substances 0.000 claims description 9
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000001680 brushing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F3/00—Labels, tag tickets, or similar identification or indication means; Seals; Postage or like stamps
- G09F3/02—Forms or constructions
- G09F3/0297—Forms or constructions including a machine-readable marking, e.g. a bar code
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
- B65D25/20—External fittings
- B65D25/205—Means for the attachment of labels, cards, coupons or the like
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F3/00—Labels, tag tickets, or similar identification or indication means; Seals; Postage or like stamps
- G09F3/02—Forms or constructions
- G09F2003/0272—Labels for containers
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Mechanical Engineering (AREA)
- Details Of Rigid Or Semi-Rigid Containers (AREA)
Abstract
The invention provides a photoresist mark and a photoresist replacing method, which are used for a first container and a second container for filling photoresist; the outer surface of the first container is provided with a first mark; the outer surface of the second container is provided with a second mark; the first mark and the second mark are combined together to form a third mark; the third mark is used for simultaneously collecting the information of the photoresist contained in the first container and the second container after the third mark is scanned by the information collecting equipment so as to replace the photoresist. When two bottles of photoresist are arranged in parallel, the scanning gun is used for scanning to read the photoresist, at the moment, the bar code information can provide the name and batch number information of the new photoresist and the old photoresist at the same time, and can be compared with the information of the new photoresist, and the photoresist is replaced after the comparison is correct, so that the correct photoresist bottle can be replaced.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to a photoresist mark and a photoresist replacing method.
Background
In the existing photoresist replacing process, system management is utilized, firstly, a scanning gun scans bar codes of old photoresist bottles (empty bottles or nearly empty bottles) to be replaced, then, new photoresist bottles (full bottles) to be replaced are scanned, and after the system compares the bar code information to confirm that the name of the photoresist and the batch number are correct, manual photoresist replacing operation is carried out.
At this time, there may be other abnormally prepared photoresist beside the bar code, and the photoresist replacing person may still replace the wrong photoresist after the bar code is brushed.
Disclosure of Invention
In view of the above disadvantages of the prior art, an object of the present invention is to provide a photoresist identifier and a photoresist replacing method, which are used to solve the problem that a photoresist replacing worker still replaces a wrong photoresist after brushing a barcode.
To achieve the above and other related objects, the present invention provides a photoresist marking and a photoresist replacing method, at least comprising:
a first and a second container for holding photoresist; the outer surface of the first container is provided with a first mark; the outer surface of the second container is provided with a second mark; the first identification and the second identification are combined together to form a third identification; the third mark is used for simultaneously collecting the information of the photoresist contained in the first container and the second container after the third mark is scanned by the information collecting equipment so as to replace the photoresist.
Preferably, the first container and the second container for holding the photoresist are bottles with the same shape and capacity.
Preferably, the first, second and third identifiers are bar codes; the first identification is a first bar code; the second identification is a second bar code; the third identifier is a third barcode.
Preferably, the first bar code is horizontally arranged on the side wall of the first container, and one end of the first bar code is positioned at the edge of the side wall of the first container; the second bar code is horizontally arranged on the side wall of the second container, and one end of the second bar code is positioned at the edge of the side wall of the second container; when the first container and the second container are closely arranged, the first bar code and the second bar code are seamlessly spliced together to form the third bar code.
Preferably, the first container is an empty bottle, and the photoresist in the first container is used up; the second container is filled with photoresist.
Preferably, the information acquisition device is a scanning gun.
Preferably, the third barcode is used for reading information of the photoresist contained in the first container and the second container after the third barcode is scanned by the scanning gun, and the first container filled with the used photoresist is replaced with the second container filled with the photoresist.
Preferably, the information of the photoresist includes a name and a lot number of the photoresist.
The invention also provides a photoresist replacing method of the photoresist mark, which at least comprises the following steps:
step one, providing a first container and a second container; the first container and the second container are used for containing photoresist, the photoresist in the first container is used up or nearly used up, and the second container is filled with the photoresist; splicing the first identifier on the first container and the second identifier on the second container to form a third identifier;
scanning the third mark by using a scanning gun, and simultaneously acquiring photoresist information in the first container and the second container;
and step three, comparing the photoresist information of the first container with the photoresist information of the second container, and replacing the first container with the used photoresist with the second container filled with the photoresist.
As described above, the photoresist mark and the photoresist replacing method of the present invention have the following advantages: when two bottles of photoresist are arranged in parallel, the scanning gun is used for scanning to read the photoresist, at the moment, the bar code information can provide the name and batch number information of the new photoresist and the old photoresist at the same time, and can be compared with the information of the new photoresist, and the photoresist is replaced after the comparison is correct, so that the correct photoresist bottle can be replaced.
Drawings
FIG. 1 is a schematic view of a photoresist mark of the present invention;
FIG. 2 is a flow chart of a method of replacing a photoresist according to a photoresist mark of the present invention.
Detailed Description
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention.
Please refer to fig. 1-2. It should be noted that the drawings provided in the present embodiment are only for illustrating the basic idea of the present invention, and the components related to the present invention are only shown in the drawings rather than drawn according to the number, shape and size of the components in actual implementation, and the type, quantity and proportion of the components in actual implementation may be changed freely, and the layout of the components may be more complicated.
The invention provides a photoresist mark, at least comprising:
a first and a second container for holding photoresist; the outer surface of the first container is provided with a first mark; the outer surface of the second container is provided with a second mark; the first mark and the second mark are combined together to form a third mark; and the third identifier is used for simultaneously acquiring the information of the photoresist arranged in the first container and the second container after scanning the third identifier by the information acquisition equipment so as to replace the photoresist.
Further, the first container and the second container for holding the photoresist of the embodiment are bottles with the same shape and capacity size.
Further, the first, second, and third identifiers of this embodiment are all bar codes; the first identification is a first bar code; the second identification is a second bar code; the third identifier is a third barcode.
Further, the first bar code of the present embodiment is horizontally disposed on the sidewall of the first container, and one end of the first bar code is located at the edge of the sidewall of the first container; the second bar code is horizontally arranged on the side wall of the second container, and one end of the second bar code is positioned at the edge of the side wall of the second container; when the first container and the second container are closely arranged, the first bar code and the second bar code are seamlessly spliced together to form the third bar code.
Further, the first container of this embodiment is an empty bottle, and the photoresist in the first container is used up; the second container is filled with photoresist.
Further, the information collecting device of the embodiment is a scanning gun.
Further, the third barcode of the present embodiment is used for reading information of the photoresist contained in the first container and the second container after the third barcode is scanned by the scanning gun, and replacing the first container with the used photoresist with the second container filled with the photoresist.
Further, the information of the photoresist of this embodiment includes a name and a lot number of the photoresist.
FIG. 1 is a schematic view of a photoresist mark of the present invention, as shown in FIG. 1. The embodiment provides a photoresist marker, comprising: a first container (old) and a second container (new) for holding photoresist; the first container is in this embodiment an empty or nearly empty bottle of used up photoresist and the second container is in this embodiment a new bottle filled with photoresist.
The outer surface of the first container 01 is provided with a first mark 01; the first identification is a bar code; the outer surface of the second container is provided with a second mark; the second mark is also a bar code, and the first mark and the second mark are combined together to form a third mark; the bar code of the first mark and the bar code of the second mark are spliced with each other to form the third mark, and the third mark is also a bar code.
And the third identifier is used for simultaneously acquiring the information of the photoresist arranged in the first container and the second container after scanning the third identifier by the information acquisition equipment so as to replace the photoresist. The first container and the second container for holding the photoresist of the embodiment are bottles with the same shape and capacity. The first identifier 01, the second identifier 02 and the third identifier of the embodiment are all bar codes; . As shown in fig. 1, the first barcode of this embodiment is horizontally disposed on the sidewall of the first container, and one end of the first barcode is located at the edge of the sidewall of the first container; the second bar code is horizontally arranged on the side wall of the second container, and one end of the second bar code is positioned at the edge of the side wall of the second container; the arrangement is such that when the first and second containers are placed in close proximity, the first and second bar codes seamlessly splice together to form the third bar code (as shown in figure 1). The first container of this embodiment is an empty bottle, and the photoresist therein is used up; the second container is filled with photoresist.
The information acquisition device of the embodiment is a scanning gun. The third barcode of this embodiment is used for reading the information of the photoresist contained in the first container and the second container after scanning by the scanning gun, and replacing the first container with the used or nearly used photoresist with a second container filled with photoresist. The information of the photoresist of this embodiment includes a name and a lot number of the photoresist. In this embodiment, the bottle (first container) filled with the photoresist can be inserted into the bottle (second container) filled with the photoresist to replace the photoresist.
The present invention further provides a method for replacing a photoresist according to a photoresist identifier, as shown in fig. 2, where fig. 2 is a flowchart of the method for replacing a photoresist according to a photoresist identifier according to the present invention, the method at least includes:
step one, providing a first container and a second container; the first container (old) and the second container (new) are used for containing photoresist, the photoresist in the first container is used up or nearly used up, and the second container is filled with photoresist; splicing the first mark 01 on the first container and the second mark 02 on the second container to form a third mark;
scanning the third mark by using a scanning gun, and simultaneously acquiring the photoresist information in the first container and the second container; as shown in fig. 1, in this step two, the third identifier (i.e., two bar codes spliced with each other) is scanned by using the scanning gun, and the photoresist information (i.e., the name and the batch number of the used-up photoresist) in the first container and the photoresist information (i.e., the name and the batch number of the photoresist filled in the new bottle) in the second container are simultaneously collected (read).
And step three, comparing the photoresist information of the first container with the photoresist information of the second container, and replacing the first container with the used or nearly used photoresist with the second container filled with the photoresist. In this embodiment, the bottle head of the unscrewed first container is inserted into the second container to achieve correct photoresist replacement, thereby avoiding the photoresist replacement error caused by still using the original old photoresist bottle.
In summary, when two bottles of photoresist are used in the barcode of the photoresist of the present invention, the scanning gun is used to scan and read the photoresist, and at this time, the barcode information can provide the name and lot number information of the new and old photoresist at the same time, and can be compared with the information of the new photoresist, and after the comparison is correct, the photoresist is replaced to achieve the correct replacement of the photoresist bottle. Therefore, the invention effectively overcomes various defects in the prior art and has high industrial utilization value.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (9)
1. A photoresist marker, comprising at least:
a first and a second container for holding photoresist; the outer surface of the first container is provided with a first mark; the outer surface of the second container is provided with a second mark; the first mark and the second mark are combined together to form a third mark; and the third identifier is used for simultaneously acquiring the information of the photoresist arranged in the first container and the second container after scanning the third identifier by the information acquisition equipment so as to replace the photoresist.
2. The photoresist marker of claim 1, wherein: the first container and the second container for containing the photoresist are bottles with the same shape, capacity and size.
3. The photoresist marker of claim 2, wherein: the first, second and third identifiers are bar codes; the first identification is a first bar code; the second identification is a second bar code; the third identifier is a third barcode.
4. The photoresist marker of claim 3, wherein: the first bar code is horizontally arranged on the side wall of the first container, and one end of the first bar code is positioned at the edge of the side wall of the first container; the second bar code is horizontally arranged on the side wall of the second container, and one end of the second bar code is positioned at the edge of the side wall of the second container; when the first container and the second container are closely arranged, the first bar code and the second bar code are seamlessly spliced together to form the third bar code.
5. The photoresist marker of claim 4, wherein: the first container is an empty bottle or an approximately empty bottle, and the photoresist in the first container is used up or approximately used up; the second container is filled with photoresist.
6. The photoresist marker of claim 5, wherein: the information acquisition equipment is a scanning gun.
7. The photoresist marker of claim 6, wherein: and the third bar code is used for reading the information of the photoresist contained in the first container and the second container after the third bar code is scanned by a scanning gun, and replacing the first container filled with the used photoresist with a second container filled with the photoresist.
8. The photoresist marker of claim 1, wherein: the information of the photoresist includes a name and a lot number of the photoresist.
9. A method for replacing a photoresist of a photoresist mark according to any one of claims 1 to 8, comprising at least:
step one, providing a first container and a second container; the first container and the second container are used for containing photoresist, the photoresist in the first container is used up, and the second container is filled with the photoresist; splicing the first identifier on the first container and the second identifier on the second container to form a third identifier;
scanning the third mark by using a scanning gun, and simultaneously acquiring the photoresist information in the first container and the second container;
and step three, comparing the photoresist information of the first container with the photoresist information of the second container, and replacing the first container with the used or nearly used photoresist with the second container filled with photoresist.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210889814.XA CN115294856A (en) | 2022-07-27 | 2022-07-27 | Photoresist mark and photoresist replacing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210889814.XA CN115294856A (en) | 2022-07-27 | 2022-07-27 | Photoresist mark and photoresist replacing method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115294856A true CN115294856A (en) | 2022-11-04 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210889814.XA Pending CN115294856A (en) | 2022-07-27 | 2022-07-27 | Photoresist mark and photoresist replacing method |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6758400B1 (en) * | 2000-11-20 | 2004-07-06 | Hewlett-Packard Development Company, L.P. | Dual bar code reading system for a data storage system |
| CN101529448A (en) * | 2006-08-30 | 2009-09-09 | 贝克顿·迪金森公司 | Multiple barcode format labelling system and method |
| CN110712582A (en) * | 2018-07-13 | 2020-01-21 | 台湾积体电路制造股份有限公司 | Vehicle for replacing photoresist bottle, computer system and replacing method |
| CN211495176U (en) * | 2019-12-13 | 2020-09-15 | 苏州同冠微电子有限公司 | Glue bottle mistake proofing device that trades |
| CN113240137A (en) * | 2021-05-27 | 2021-08-10 | 上海积塔半导体有限公司 | Photoresist replacing method and system and photoresist managing method and system |
| CN216035850U (en) * | 2021-08-17 | 2022-03-15 | 芯盟科技有限公司 | Storage equipment for material bottles |
-
2022
- 2022-07-27 CN CN202210889814.XA patent/CN115294856A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6758400B1 (en) * | 2000-11-20 | 2004-07-06 | Hewlett-Packard Development Company, L.P. | Dual bar code reading system for a data storage system |
| CN101529448A (en) * | 2006-08-30 | 2009-09-09 | 贝克顿·迪金森公司 | Multiple barcode format labelling system and method |
| CN110712582A (en) * | 2018-07-13 | 2020-01-21 | 台湾积体电路制造股份有限公司 | Vehicle for replacing photoresist bottle, computer system and replacing method |
| CN211495176U (en) * | 2019-12-13 | 2020-09-15 | 苏州同冠微电子有限公司 | Glue bottle mistake proofing device that trades |
| CN113240137A (en) * | 2021-05-27 | 2021-08-10 | 上海积塔半导体有限公司 | Photoresist replacing method and system and photoresist managing method and system |
| CN216035850U (en) * | 2021-08-17 | 2022-03-15 | 芯盟科技有限公司 | Storage equipment for material bottles |
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Application publication date: 20221104 |