CN215981279U - Pipeline connector - Google Patents

Abstract

The utility model provides a pipeline connector for sealing connection between pipelines, which comprises: the sealing device comprises a first connecting pipe, a second connecting pipe, a third connecting pipe and a sealing assembly; the first end of the second connecting pipe is sleeved with one end of the first connecting pipe, and the second end of the second connecting pipe is sleeved with one end of the third connecting pipe; at least one of the first connecting pipe and the third connecting pipe is axially telescopically movable relative to the second connecting pipe; the sealing component is sleeved at the sleeving joint of the second connecting pipe, the first connecting pipe and the third connecting pipe. According to the utility model, the whole length of the pipeline connector is adjusted by moving the first connecting pipe and/or the third connecting pipe relative to the second connecting pipe, so that the length adjusting range is more flexible, the structure is stable and not easy to deform, the maintenance and the cleaning are convenient, and the sealing property and the corrosion resistance of the pipeline connector are further improved by the sealing assembly.

Description

Pipeline connector

Technical Field

The utility model relates to the field of gas conveying pipelines, in particular to a pipeline connector.

Background

There is a large amount of pipelines among the semiconductor processing equipment and carries out the demand of sealing connection between the pipeline, and prior art adopts the mode of hard coupling (like welding) or uses stainless steel bellows as the connected mode between the pipeline usually, but the mode of hard coupling is not convenient for pipeline maintenance and clearance, and stainless steel bellows easily warp, easily stains, especially when high temperature corrosivity tail gas conveying pipeline uses, stainless steel bellows have following shortcoming: (1) the pipe wall is thin and can be corroded and perforated in only one week, (2) the adjustable length range is limited, the use is single, and (3) a plurality of folds exist, and dirt is inconvenient to clean.

Therefore, a pipeline connector is needed to solve the above problems.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a pipeline connector which can facilitate the installation of pipelines of semiconductor equipment such as CVD, PVD and the like, reduce the processing error in the pipelines of the equipment, resist high temperature and corrosion and have long service life.

The utility model provides a pipeline connector, which comprises a first connecting pipe, a second connecting pipe, a third connecting pipe and a sealing assembly, wherein the first connecting pipe is connected with the second connecting pipe; one end parts of the first connecting pipe and the third connecting pipe are provided with flange plates, and the diameters of the first connecting pipe and the third connecting pipe are the same; the first end of the second connecting pipe is sleeved with one end of the first connecting pipe, which is far away from the flange plate, and the second end of the second connecting pipe is sleeved with one end of the third connecting pipe, which is far away from the flange plate; at least one of the first connecting pipe and the third connecting pipe is axially telescopically movable relative to the second connecting pipe; the sealing assembly is sleeved at the sleeving positions of the second connecting pipe, the first connecting pipe and the third connecting pipe.

The beneficial effects are that: according to the utility model, the first end of the second connecting pipe is mutually sleeved with the end of the first connecting pipe, which is far away from the flange plate, and the second end of the second connecting pipe is mutually sleeved with the end of the third connecting pipe, which is far away from the flange plate; at least one of the first connecting pipe and the third connecting pipe can axially and telescopically move relative to the second connecting pipe, and the pipeline connector is made into a telescopic structure, so that the pipeline connector can adjust the required length according to actual requirements, compared with the existing stainless steel corrugated pipe connecting piece, the length adjusting range of the pipeline connector provided by the utility model is more flexible and more convenient to install, the wall of the pipeline is not required to be bent and deformed like a corrugated pipe, the wall thickness of the pipeline can be higher than that of the corrugated pipe, the corrosion resistance of the pipeline connector is improved, the service life is prolonged, the structure of the pipeline connector is not easy to deform, and the corrugated pipe is easier to clean; the sealing assembly is sleeved at the sleeving positions of the second connecting pipe, the first connecting pipe and the third connecting pipe, so that the sealing performance and the corrosion resistance of the pipeline connector are improved.

Preferably, the sealing assembly comprises at least one outer sleeve, the outer sleeve being of a corrosion resistant material. The beneficial effects are that: the outer sleeve plays a sealing role in the sleeving positions of the first connecting pipe, the second connecting pipe and the third connecting pipe, the vacuum requirement of the reaction chamber in the pipe cavity of the connecting pipes can be met, once the connecting pipes are corroded and leaked, the corrosion-resistant outer sleeve can play a double-insurance role, and the service life of the pipeline connector is prolonged.

Preferably, the length of the second connection pipe coincides with the sum of the lengths of the first connection pipe and the third connection pipe. The beneficial effects are that: the telescopic amount of the pipeline connector can reach twice of the length of the original pipeline, and the application range of the pipeline connector is expanded.

Preferably, the second connection pipe is hard-wired to the first connection pipe, and the second connection pipe is detachably connected to the third connection pipe. The beneficial effects are that: by the second connection pipe being hard-wired to the first connection pipe, the overall stability of the pipe connector structure is enhanced.

Preferably, the second connection pipe is detachably connected to the first connection pipe and the third connection pipe. The beneficial effects are that: the second connecting pipe is detachably connected with the first connecting pipe and the third connecting pipe, so that the first connecting pipe and the third connecting pipe can move relative to the second connecting pipe, the adjusting length range of the pipeline connector is expanded, and subsequent maintenance and cleaning can be facilitated.

Further preferably, a clamp is sleeved outside the outer sleeve for fixing and sealing.

Preferably, the contact parts between the outer sleeve and the first connecting pipe, the second connecting pipe and the third connecting pipe are fixedly sealed by adopting a sealant. The beneficial effects are that: the sealing glue can deform along with the shape of the sealing surface, is not easy to flow, is a sealing material with certain cohesiveness, and can achieve the effects of leakage prevention and vibration prevention by filling the contact parts between the outer sleeve of the pipeline connector and the first connecting pipe, the second connecting pipe and the third connecting pipe with the sealing glue for sealing.

Preferably, the second connecting pipe has an outer diameter smaller than the inner diameters of the first connecting pipe and the third connecting pipe and is adapted to the inner diameters of the first connecting pipe and the third connecting pipe. Preferably, the second connecting pipe has an inner diameter larger than outer diameters of the first connecting pipe and the third connecting pipe and is adapted to the outer diameters of the first connecting pipe and the third connecting pipe. The beneficial effects are that: the connecting pipes are connected in a sleeved mode with the inner diameter and the outer diameter matched with each other, so that the connecting pipes are not prone to shaking when moving relatively when the length of the pipeline connector is adjusted, and the stability of the pipeline connector is improved.

Drawings

Fig. 1A is a perspective view of a pipeline connector provided by the present invention;

FIG. 1B is a cross-sectional view of a pipeline connector according to the present invention;

fig. 2A is a perspective view of a pipeline connector provided in an embodiment of the present application;

fig. 2B is a cross-sectional view of a pipeline connector according to an embodiment of the present application;

fig. 2C is a perspective view of another pipeline connector provided by an embodiment of the present application;

FIG. 2D is a cross-sectional view of another pipeline connector provided by an embodiment of the present application;

FIG. 3 is a cross-sectional view of a pipeline connector according to the present invention;

FIG. 4 is a cross-sectional view of yet another pipeline connector provided by the present invention;

fig. 5 is a cross-sectional view of another pipeline connector provided by the present invention.

Reference numbers in the figures:

1-a first connection pipe;

2-a second connecting tube;

3-a third connecting pipe;

4-sealing assembly/outer sleeve;

5-a first clamp;

6-second clip.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings of the present invention, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention. Unless defined otherwise, technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this invention belongs. As used herein, the word "comprising" and similar words are intended to mean that the element or item preceding the word comprises the element or item listed after the word and its equivalent, but does not exclude other elements or items.

In view of the problems in the prior art, an embodiment of the present invention provides a pipeline connector for installing pipelines of semiconductor equipment such as CVD, PVD, etc., and particularly for connecting two high-temperature corrosive tail gas (e.g., gases with strong oxidizing property or strong corrosive property such as chlorine, hydrogen chloride, oxygen, sulfur trioxide, sulfur dioxide, hydrogen fluoride, nitrogen dioxide, hydrogen sulfide, ammonia, ozone, etc.) conveying pipelines into a pipeline in a fluid communication state, as shown in fig. 1A and 1B, where fig. 1B is a cross-sectional view of a three-dimensional structure shown in fig. 1A, including a first connecting pipe 1, a second connecting pipe 2, a third connecting pipe 3 and a sealing assembly 4. Referring to fig. 1B, a flange is disposed at one end of each of the first connecting pipe 1 and the third connecting pipe 3, and the first connecting pipe 1 and the third connecting pipe 3 have the same diameter; the first end of the second connecting pipe 2 is sleeved with the end of the first connecting pipe 1 far away from the flange plate, and the second end of the second connecting pipe 2 is sleeved with the end of the third connecting pipe 3 far away from the flange plate; at least one of the first connecting pipe 1 and the third connecting pipe 3 is axially telescopically movable relative to the second connecting pipe 2; the sealing component 4 is sleeved at the sleeving joint of the second connecting pipe 2, the first connecting pipe 1 and the third connecting pipe 3.

The length of the pipeline connector is adjusted through the relative movement between the connecting pipes, compared with the existing stainless steel corrugated pipe connecting piece, the length adjusting range is more flexible and the installation is more convenient, the pipe wall does not need to be bent and deformed like a corrugated pipe, so that the thickness of the pipe wall can be higher than that of the corrugated pipe, the pipe wall is more corrosion-resistant, and compared with the corrugated pipe, the corrugated pipe connector is more convenient to clean, the corrosion resistance is improved, the service life is prolonged, the structure of the pipeline connector is not easy to deform, and compared with the corrugated pipe, the corrugated pipe connector is easier to clean; through establish at above-mentioned connecting pipe cup joints the outside cover of department seal assembly 4 has improved pipeline connector's stability and leakproofness, has further prolonged life.

In a possible embodiment, the first connecting pipe 1 and the third connecting pipe 3 are flange pipes with T-shaped structures, one end of each flange pipe is a flange plate for being connected with a pipeline to be communicated in a sealing manner, the other end of each flange pipe is a straight pipe, the flange plate can be made of metal, polytetrafluoroethylene or the like, the material of the flange plate can be selected according to different equipment pipeline requirements, and the material of the straight pipe is metal, such as stainless steel; in some possible embodiments, the first connecting pipe 1 and the third connecting pipe 3 are identical in structure and size. The first connecting pipe 1 and the third connecting pipe 3 are set to have the same diameter and are sleeved in the sealing component 4, so that the sealing effect is better.

In some possible embodiments, the second connection pipe 2 is a straight pipe, the outer diameter of the second connection pipe 2 is smaller than the inner diameters of the first connection pipe 1 and the third connection pipe 3 and matches with the inner diameters of the first connection pipe 1 and the third connection pipe 3, the second connection pipe 2 is sleeved inside the first connection pipe 1 and the third connection pipe 3, as shown in fig. 2A and 2B, where fig. 2B is a cross-sectional view of the three-dimensional structure shown in fig. 2A. In another possible embodiment, the inner diameter of the second connection pipe 2 is larger than the outer diameters of the first connection pipe 1 and the third connection pipe 3 and is matched with the outer diameters of the first connection pipe 1 and the third connection pipe 3, and the second connection pipe 2 is sleeved outside the first connection pipe 1 and the third connection pipe 3, as shown in fig. 2C and 2D, where fig. 2D is a cross-sectional view of the three-dimensional structure shown in fig. 2C.

The connection mode of the second connection pipe 2 sleeved inside the first connection pipe 1 and the third connection pipe 3 is exemplarily shown below, and the connection mode of the second connection pipe 2 sleeved outside the first connection pipe 1 and the third connection pipe 3 is similar thereto, and is not described herein again. In addition, the specific connection mode among the first connection pipe 1, the second connection pipe 2, and the third connection pipe 3 is not limited in the present invention.

Exemplarily, one end of the second connection pipe 2 is fixedly sleeved in the first connection pipe 1 by a welded hard connection manner, and the other end of the second connection pipe 2 is adaptively inserted into the third connection pipe 3 or the other end of the second connection pipe 2 is detachably connected to the third connection pipe 3 by a threaded connection manner, so that the second connection pipe 2 is fixed to the first connection pipe 1, and the purpose of adjusting the length of the pipe connector is achieved by the telescopic movement of the third connection pipe 3 relative to the second connection pipe 2. The pipeline connector reduces the activity variable when the pipeline connector is installed by adopting a mode that one end is fixed and the other end is movably connected, enhances the stability of the structure of the pipeline connector and has low processing cost.

Illustratively, one end of the second connection pipe 2 is detachably connected to the first connection pipe 1 by a threaded connection, and the other end of the second connection pipe 2 is adaptively inserted into the third connection pipe 3 or detachably connected to the third connection pipe 3 by a threaded connection, so that the first connection pipe 1 and the third connection pipe 3 can move telescopically relative to the second connection pipe 2, which not only increases the length adjustment range of the pipeline connector, but also facilitates the disassembly, maintenance and cleaning of the pipeline connector.

As an example, fig. 2A and 2B show a case where both ends of the second connection pipe 2 are detachably connected to the inside of the first connection pipe 1 and the third connection pipe 3 by means of a threaded connection. As shown in fig. 2A and 2B, an inner thread is disposed on an inner wall of the first connection pipe 1, an inner thread is disposed on an inner wall of the third connection pipe 3, an outer thread is disposed on the entire outer wall of the second connection pipe 2 or only the outer walls at both ends, fig. 2A and 2B illustrate that an outer thread is disposed on the entire outer wall of the second connection pipe 2, the first connection pipe 1 and the second connection pipe 2 are detachably connected by the inner thread disposed on the inner wall of the first connection pipe 1 and the outer thread disposed on the outer wall of the second connection pipe 2, and the third connection pipe 3 and the second connection pipe 2 are detachably connected by the inner thread disposed on the inner wall of the third connection pipe 3 and the outer thread disposed on the outer wall of the second connection pipe 2. Fig. 2C and 2D show the case that both ends of the second connection pipe 2 are detachably connected to the outside of the first connection pipe 1 and the third connection pipe 3 by means of threaded connection.

In a possible embodiment, the sealing assembly 4 may be one or more outer sleeves. The figures in this specification all illustrate the sealing assembly as an outer sleeve. The sealing assembly 4 mentioned herein is equivalent to the outer sleeve 4, but the number of outer sleeves is not limited thereby. The outer sleeve 4 is sleeved at the sleeved position of the second connecting pipe 2 and the first connecting pipe 1 and the sleeved position of the second connecting pipe 2 and the third connecting pipe 3, so that the sealing performance and the corrosion resistance of the pipeline connector are improved. When the outer diameter of the second connecting pipe 2 is smaller than the inner diameters of the first connecting pipe 1 and the third connecting pipe 3, the inner diameter of the outer sleeve 4 is matched with the outer diameters of the first connecting pipe 1 and the third connecting pipe 3; when the inner diameter of the second connecting pipe 2 is larger than the outer diameters of the first connecting pipe 1 and the third connecting pipe 3, the inner diameter of the outer sleeve 4 is matched with the outer diameter of the second connecting pipe 2.

In some possible embodiments, the outer sleeve 4 is a corrosion resistant material, such as polytetrafluoroethylene. Thus, once the connecting pipe is corroded, the outer sleeve 4 can play a double safety role in preventing gas leakage, and the service life of the pipeline connector is prolonged.

In some possible embodiments, a clamp is provided on the outside of the outer sleeve 4 for a fixed seal, as shown in fig. 3. In fig. 3, the pipe connector further includes: a first clip 5 and a second clip 6. After the relative positions of the third connecting pipe 3, the second connecting pipe 2 and the first connecting pipe 1 are determined, the first clamping hoop 5 and the second clamping hoop 6 are sleeved on the outer sleeve 4 for fixed sealing, and the leakage is avoided when the pipeline connector is used for conveying corrosive gas. And, the quantity of clamp can be set for according to actual conditions to improve overall structure's stability.

In other possible embodiments, the contact portions between the outer sleeve 4 and the first connecting pipe 1, the second connecting pipe 2 and the third connecting pipe 3 are fixedly sealed by using a sealant, so as to improve the stability of the whole structure.

The following will exemplify the use of the pipe connector shown in fig. 1A and 1B to connect a first pipe to be connected and a second pipe to be connected (not shown in the drawings).

Referring to fig. 1B, one end of the second connection pipe 2 is first fixedly connected to the first connection pipe 1.

Referring to fig. 1A, the sealing assembly 4 (outer sleeve) is sleeved on the fixed connector formed by the first connecting pipe 1 and the second connecting pipe 2, then the third connecting pipe 3 is sleeved on the other end of the second connecting pipe 2, the length of the third connecting pipe 3 sleeved on the second connecting pipe 2 is adjusted according to the distance between the first pipe to be connected and the second pipe to be connected, and the length of the sealing assembly 4 (outer sleeve) can reach the distance between the sleeved part covering the first connecting pipe 1 and the second connecting pipe 2 and the sleeved part covering the third connecting pipe 3 and the second connecting pipe 2.

And then, the flange plate of the first connecting pipe 1 is hermetically connected with the flange plate of the first pipeline to be connected.

And then finely adjusting the length of the third connecting pipe 3 sleeved on the second connecting pipe 2, and connecting the flange plate of the third connecting pipe 3 with the flange plate of the second pipeline to be connected in a sealing manner.

Finally, a clamp is sleeved outside the sealing assembly 4 (outer sleeve) for fixing and sealing, and the fixing position of the clamp can refer to the pipe connector shown in (b) of fig. 4.

In some possible embodiments, the length of the second connection tube 2 coincides with the sum of the lengths of the first connection tube 1 and the third connection tube 3. The telescopic capacity of the pipeline connector can reach twice of the length of the original pipeline, and the application range of the pipeline connector is expanded. Such as the line connector shown in fig. 5.

Although the embodiments of the present invention have been described in detail hereinabove, it is apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it is to be understood that such modifications and variations are within the scope and spirit of the present invention as set forth in the following claims. Moreover, the utility model as described herein is capable of other embodiments and of being practiced or of being carried out in various ways.

Claims (9)

1. A pipeline connector, comprising: the sealing device comprises a first connecting pipe, a second connecting pipe, a third connecting pipe and a sealing assembly;

one end parts of the first connecting pipe and the third connecting pipe are provided with flange plates, and the diameters of the first connecting pipe and the third connecting pipe are the same;

the first end of the second connecting pipe is sleeved with one end of the first connecting pipe, which is far away from the flange plate, and the second end of the second connecting pipe is sleeved with one end of the third connecting pipe, which is far away from the flange plate;

at least one of the first connecting pipe and the third connecting pipe is axially telescopically movable relative to the second connecting pipe;

the sealing assembly is sleeved at the sleeving positions of the second connecting pipe, the first connecting pipe and the third connecting pipe.

2. The tube connector of claim 1, wherein the sealing assembly comprises at least one outer sleeve, the outer sleeve being a corrosion resistant material.

3. The line connector of claim 1, wherein the length of the second connecting tube coincides with the sum of the lengths of the first connecting tube and the third connecting tube.

4. The line connector of claim 1, wherein the second connecting tube is hard-wired to the first connecting tube, and the second connecting tube is detachably connected to the third connecting tube.

5. The line connector of claim 1, wherein the second connecting tube is detachably connected to the first connecting tube and the third connecting tube.

6. The line connector of claim 2, wherein a clamp is disposed around the outer sleeve for a secure seal.

7. The tube connector of claim 2, wherein the contact portions between the outer sleeve and the first, second and third connecting tubes are fixedly sealed by a sealant.

8. The line connector of claim 1, wherein the second connecting tube has an outer diameter smaller than and matching the inner diameters of the first and third connecting tubes.

9. The line connector of claim 1, wherein the second connecting tube has an inner diameter larger than and adapted to the outer diameters of the first and third connecting tubes.

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