KR101915472B1 - Tube for preventing by-product from trap - Google Patents

Abstract

Various embodiments of the present invention are directed to a pipeline for preventing by-product trapping, and a technical problem to be solved is to provide a pipeline for preventing by-product trapping that prevents vortex flow of the process gas flowing in the inside and extends the service life.
To this end, the present invention relates to a flexible inner pipe; A flange coupled to the flexible inner tubing; And a bellows type outer pipe formed on the outer side of the flexible inner pipe and coupled to the flange.

Description

[0001] The present invention relates to piping for preventing by-

Various embodiments of the present invention relate to piping for preventing by-product traps used in a semiconductor manufacturing process line or a flat panel display manufacturing process line.

The bellows is generally formed as a corrugated tube by a thin metal plate and has a stretchability in a direction inclined to the central axis or the central axis. The bellows is used to solve problems such as gap inconsistency between pipelines or deviation of center axis which may occur when connecting general metal pipelines. The bellows facilitates assembly of the general metal pipe, and mitigates the vibration introduced from the outside into the metal pipe.

However, since the bellows is made of a thin metal plate, when the bellows is contacted with a corrosive substance such as a corrosive gas or a corrosive liquid, corrosion occurs and a through hole is formed. Particularly, when the bellows is used for piping of a line in which a corrosive substance is frequently used, such as a semiconductor manufacturing process line or a flat panel display manufacturing process line, the bellows may cause a process accident such as leakage of a corrosive substance due to a leak have. In addition, since the bellows has a groove formed by a corrugated tube therein, it can induce vortex of the reaction gas flowing in the bellows, thereby preventing smooth flow. In addition, the reaction of the reaction gases flowing in the bellows causes various reaction by-products to accumulate inside the bellows, resulting in clogging.

The above-described information disclosed in the background of the present invention is only for improving the understanding of the background of the present invention, and thus may include information not constituting the prior art.

Various embodiments of the present invention provide a by-product trap prevention piping that prevents vortexing of the process gas flowing therethrough and extends its service life.

[[This section is a summary of claims, please review the claims]]

The by-product trap prevention piping according to various embodiments of the present invention includes a flexible internal piping; A flange coupled to the flexible inner tubing; And a bellows type outer pipe formed on the outer side of the flexible inner pipe and coupled to the flange.

The flexible inner pipe may include an inner peripheral surface, and the inner peripheral surface may be formed flat in the direction of the central axis.

The flexible inner pipe may be formed of a corrosion resistant resin, and the bellows type outer pipe may be formed of metal.

The flexible inner pipe may be formed of a resin material which can be deformed in an inclined direction with respect to a central axis or a central axis, and a plurality of multi-joint rings may be connected to each other.

The flexible inner pipe may be formed of Teflon.

The flexible inner pipe further includes a locking protrusion formed on an outer diameter surface of the end portion, and the flange further includes a locking groove formed on an inner surface of the flexible pipe, and the locking protrusion and the locking groove can be coupled with each other.

Wherein the plurality of articulated rings include a first articulated ring and a second articulated ring, each of the first and second articulated rings having a flat inner circumferential surface; A flat outer circumferential surface opposite to the inner circumferential surface; An inner engaging groove formed on one side between the inner circumferential surface and the outer circumferential surface; An inner engaging jaw formed at an end of the inner engaging groove; An outer engaging groove formed on the other side between the inner circumferential surface and the outer circumferential surface; And an outer engaging jaw formed at an end of the outer engaging groove, wherein an inner engaging jaw of the first engaging ring is engaged with an outer engaging groove of the second engaging ring, The engaging jaws can be engaged with the internal engaging grooves of the adjacent first multi-joint ring.

Each of the first and second multi-joint rings may further include an inner inclined surface formed between the inner circumferential surface and the inner engaging groove, and may include an outer inclined surface formed between the outer circumferential surface and the outer engaging groove.

Wherein each of the first and second articulated rings further includes an end inclined surface formed between the inner circumferential surface and the outer engaging jaw, and the inclined inner surface of the first articulated ring and the inclined end surface of the second articulated ring Can be combined.

The flexible inner pipe may further include a locking protrusion formed on an outer diameter surface of the end portion, and the locking protrusion may be in close contact with the front end of the flange.

Some of the plurality of articulated rings further include an engagement protrusion formed on an outer diameter surface, and the engagement protrusion may be coupled to the bellows type outer pipe.

The inner pipe may further include a plurality of latching protrusions formed on an outer surface thereof, and the plurality of latching protrusions may be coupled to a relatively large inner surface of the bellows type outer pipe.

The plurality of latching protrusions are equal to the bellows pitch of the bellows type outer pipe, and the plurality of latching protrusions can be coupled to a relatively large inner diameter surface of the bellows type outer pipe.

The piping for preventing by-product trap according to various embodiments of the present invention includes a flexible inner pipe of Teflon, a flange coupled to the flexible inner pipe, and a flange formed outside the flexible inner pipe, Including piping,

A stopper having a latching protrusion is located at an end of the flexible internal pipe, a latching groove is formed in an inner surface of the flange, and a latching protrusion of the stopper can be coupled to the latching groove.

Various embodiments of the present invention provide a by-product trap prevention piping that prevents vortexing of the process gas flowing therethrough and extends its service life.

In other words, the piping for preventing by-product trap according to various embodiments of the present invention has an inner pipe in which an inner circumferential surface is flatly formed in the direction of the central axis so that the process gas flows smoothly, vortex is not generated, .

In addition, the pipeline for preventing by-product trap according to various embodiments of the present invention is formed of a corrosion-resistant resin material so that the inner pipe is not corroded by the corrosive material, and the external piping formed of a metal material is less exposed to the corrosive substance Increase the life span.

Since the piping for preventing by-product trap according to various embodiments of the present invention is formed by connecting a plurality of multi-joint rings in which internal piping is made of a resin material, it is easy to deform in a direction oblique to the central axis or the central axis, .

According to various embodiments of the present invention, since the multi-joint ring is formed of a flexible resin material, the pipe for preventing the by-product trap can be easily joined to form an internal pipe.

According to various embodiments of the present invention, when the inner pipe is made of Teflon, the pipe for preventing the by-product trap prevents the adhesion of the reaction by-products due to hydrophobicity, lubricity and non-stickiness of the Teflon material, .

1A and 1B to 1D are enlarged cross-sectional views showing a piping for preventing by-product trap according to various embodiments of the present invention and a structure of an internal piping, respectively.
2 is a cross-sectional view of a by-product trap prevention piping according to various embodiments of the present invention.
3 is a cross-sectional view illustrating a by-product trap prevention pipe according to various embodiments of the present invention.
4 is a cross-sectional view of a by-product trap prevention piping according to various embodiments of the present invention.
5 is a cross-sectional view of a by-product trap prevention piping according to various embodiments of the present invention.
6 is a cross-sectional view of a by-product trap prevention piping according to various embodiments of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The embodiments of the present invention are described in order to more fully explain the present invention to those skilled in the art, and the following embodiments may be modified into various other forms, It is not limited to the embodiment. Rather, these embodiments are provided so that this disclosure will be more faithful and complete, and will fully convey the scope of the invention to those skilled in the art.

In the following drawings, thickness and size of each layer are exaggerated for convenience and clarity of description, and the same reference numerals denote the same elements in the drawings. As used herein, the term "and / or" includes any and all combinations of one or more of the listed items. In the present specification, the term " connected "means not only the case where the A member and the B member are directly connected but also the case where the C member is interposed between the A member and the B member and the A member and the B member are indirectly connected do.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms "a," "an," and "the" include singular forms unless the context clearly dictates otherwise. Also, " comprise, " and / or "comprising, " when used in this specification, are intended to be interchangeable with the said forms, numbers, steps, operations, elements, elements and / And does not preclude the presence or addition of one or more other features, integers, operations, elements, elements, and / or groups.

Although the terms first, second, etc. are used herein to describe various elements, components, regions, layers and / or portions, these members, components, regions, layers and / It is obvious that no. These terms are only used to distinguish one member, component, region, layer or section from another region, layer or section. Thus, a first member, component, region, layer or section described below may refer to a second member, component, region, layer or section without departing from the teachings of the present invention.

It is to be understood that the terms related to space such as "beneath," "below," "lower," "above, But may be utilized for an easy understanding of other elements or features. Terms related to such a space are for easy understanding of the present invention depending on various process states or use conditions of the present invention, and are not intended to limit the present invention. For example, if an element or feature of the drawing is inverted, the element or feature described as "lower" or "below" will be "upper" or "above." Thus, "below" is a concept covering "upper" or "lower ".

1A and 1B to 1D are enlarged cross-sectional views showing a piping 100 for preventing by-product trap according to various embodiments of the present invention and a structure of the internal piping 110, respectively.

As shown in FIG. 1A, a by-product trap prevention pipe 100 according to an embodiment of the present invention may include a flexible inner pipe 110, a flange 130, and a bellows type outer pipe 150.

The flexible inner pipe 110 can be easily bent at an angle, and can include a substantially flat inner peripheral surface. That is, the flexible inner pipe 110 can be easily bent in the central axial direction (or the longitudinal direction) or in an inclined direction to the central axis, and the inner peripheral surface can be formed to be substantially flat.

In particular, the flexible inner pipe 110 may be formed of a resin having high corrosion resistance. By way of example, and not by way of limitation, the flexible inner pipe 110 may be formed of polytetrafluoroethylene (PTFE), that is, Teflon (trade name: TEFLON). Such Teflon forms a very stable compound due to the strong chemical bonding between fluorine and carbon, and has nearly complete chemical inertness and heat resistance, non-tackiness, excellent insulation stability, and low coefficient of friction.

Of course, in the embodiment of the present invention, the material of the flexible inner pipe 110 is not limited to Teflon, and may be formed of a fluororesin such as FEP, PFA, PVDF, PCTFE, ECTFE, ETFE etc. excellent in corrosion resistance . In addition to the fluororesin, the flexible inner pipe 110 may be formed of a polyolefin resin such as HDPE, LDPE, UHMW, PP or the like, or a polyvinyl chloride resin such as PVC, CPVC or the like.

Furthermore, the flexible inner pipe 110 may be formed of a resin such as Urethane or silicone to reinforce elasticity instead of Teflon. However, Teflon or an anti-chemical material may be coated on the inner peripheral surface 113 of the elastic resin so that the chemical resistance is enhanced.

Here, the material of the flexible inner pipe 110 may be shared in all the embodiments described below.

On the other hand, on the outer surface of the end portion of the flexible inner pipe 110, a locking protrusion 111 protruding in a direction substantially perpendicular to the axial direction or the longitudinal direction may further be formed, .

The flange 130 may be coupled to both ends of the flexible inner pipe 110, respectively. The flange 130 may be formed of, for example, but not limited to, a metal such as aluminum, copper, or SUS. Here, the flange 130 may have an engagement groove 131 formed on the inner surface thereof.

 The flexible inner pipe 110 can be firmly engaged with and fixed to the flange 130 by engaging the engagement protrusion 111 of the flexible inner pipe 110 with the engagement groove 131 of the flange 130. [ have. This flange 130 may be coupled to the main equipment of, for example, but not limited to, a semiconductor manufacturing process line or a flat panel display manufacturing process line.

Here, the mutual coupling and fixing structure of the flexible internal pipe 110 and the flange 130 can be shared in all the embodiments described below.

The bellows type external piping 150 is coupled to the outside of the flexible internal piping 110, and both ends can be coupled to the flange 130. The bellows type external piping 150 may be formed of, for example, but not limited to, metal such as aluminum, copper, and SUS.

The bellows type external pipe 150 may have a relatively narrow diameter and a relatively large diameter in a continuous shape repeatedly. The bellows type external pipe 150 is the same as the conventional bellows pipe, Will not be described further.

Thus, due to the characteristics of the flexible inner pipe 110, the pipe 100 for preventing by-product trap according to the embodiment of the present invention does not cause corrosion even when it comes into contact with a corrosive gas such as a corrosive gas or a corrosive liquid No through hole is formed.

Particularly, when the bellows type external piping 150 is used for piping of a line in which a corrosive substance is frequently used, such as a semiconductor manufacturing process line or a flat panel display manufacturing line, it causes a process accident such as leakage of corrosive substances due to leakage However, as described above, in the embodiment of the present invention, the flexible inner pipe 110 having the substantially flat inner circumferential surface 113 is additionally formed on the inner side of the bellows-type outer pipe 150, It can be prevented in advance.

Further, since the inner circumferential surface 113 of the flexible inner pipe 110 is formed to be substantially flat, a vortex phenomenon does not occur in the reaction gas flowing therein, and smooth gas flow can be performed. As a result, The reaction byproducts are not trapped or accumulated inside, and the reaction byproducts do not block the inside of the pipe.

Meanwhile, the flexible inner pipe 110 may be formed by connecting a plurality of articulated rings made of resin to each other, which will be described with reference to FIGS. 1B to 1D. Here, the structure of the articulated ring and the mutual coupling structure thereof can be variously changed, and it should be understood that the following description is only an example of the articulated ring.

As shown in Figs. 1B to 1D, a plurality of articulated rings can be formed by, for example, connecting the first articulated ring 112A and the second articulated ring 112B to each other so that the center axis (or longitudinal direction) And can be easily bent along the oblique direction on the central axis.

The first and second articulated rings 112A and 112B have inner circumferential surfaces 113 and 114, an inner engaging groove 115, an inner engaging jaw 116, an outer engaging groove 118, an outer engaging jaw 119 ). Further, the first and second articulated rings 112A and 112B may further include an inner inclined surface 121, an outer inclined surface 122, and an end inclined surface 123, respectively.

The inner circumferential surface 113 may have a substantially flat cross-sectional shape, and the inner circumferential surface 113 forms a circular inner circumferential surface. The outer circumferential surface 114 can be formed in a substantially flat shape in the shape of a section opposite to the inner circumferential surface 113, and this outer circumferential surface 114 forms a circular outer surface. Here, the inner peripheral surface 113 and the outer peripheral surface 114 may be formed substantially parallel to each other.

The inner engaging groove 115 may be formed in one side between the inner circumferential surface 113 and the outer circumferential surface 114 so as to be substantially recessed toward the outer circumferential surface 114. The inner engaging jaw 116 may be formed in the inner engaging groove 115 And may be formed so as to protrude substantially toward the inside at an end thereof. Here, an end vertical surface 117 may be formed between the inner engaging jaw 116 and the outer peripheral surface 114.

The outer engaging groove 118 may be formed on the other side between the inner peripheral surface 113 and the outer peripheral surface 114 so as to be substantially recessed toward the inner peripheral surface 113. The outer engaging jaw 119 may protrude substantially outward As shown in FIG.

In this manner, the inner engaging jaw 116 of the first articulated ring 112A can basically be engaged with the outer engaging recess 118 of the second articulated ring 112B adjacent to the second articulated ring 112B, The outer engaging jaw 119 of the first polygonal ring 112B can be engaged with the inner engaging groove 115 of the adjacent first polygonal ring 112A.

Here, the outer engaging groove 118 of the second articulated ring 112B adjacent to the inner engaging jaw 116 of the first articulated ring 112A, and the outer engaging groove 118 of the second articulated ring 112B And the internal engaging grooves 115 of the first polygonal ring 112A adjacent to the first engaging grooves 115 can relatively move with respect to each other in the central axial direction (or longitudinal direction), so that the length of the flexible internal pipe 110 is increased or decreased It can be stretched.

For example, in the case of the diagram shown in Fig. 1C, the length of the flexible inner pipe 110 is maximally extended. That is, when the inner stopping jaw 116 of the first multi-joint ring 112A contacts the outer stopping jaw 119 of the second multi-joint ring 112B, the length of the flexible inner pipe 110 is maximized . In other words, when the inner inclined surface 121 of the first articulated ring 112A is farthest from the end inclined surface 123 of the second articulated ring 112B, the length of the flexible inner tube 110 becomes maximum . ≪ / RTI >

Conversely, when the inner stopping jaw 116 of the first articulated ring 112A contacts the outer inclined surface 122 of the second articulated ring 112B, the length of the flexible inner tube 110 is minimized State. In other words, when the inner inclined surface 121 of the first articulated ring 112A comes into contact with the end inclined surface 123 of the second articulated ring 112B, the length of the flexible inner tube 110 is minimized .

On the other hand, in the first and second articulated rings 112A and 112B, the inner inclined surface 121 can be formed between the inner circumferential surface 113 and the inner engaging groove 115, and the outer inclined surface 122 can be formed on the outer circumferential surface 114, And the outer engaging groove 118. Here, the inner inclined surface 121 and the outer inclined surface 122 may be formed substantially parallel. The end inclined surface 123 may be formed between the inner circumferential surface 113 and the outer engaging jaw 119. The end inclined surface 123 may be formed to be substantially parallel to the outer inclined surface 122 and the inner inclined surface 121 .

In particular, a sharp apex 124 may be provided between the end slope 123 and the inner circumferential surface 113. Here, the inner inclined surface 121 of the first articulated ring 112A and the inclined surface 123 of the second articulated ring 112B may be coupled to each other.

In this manner, the flexible inner pipe (or the outer pipe) can be bent in accordance with the mutual engagement angle or mutual opposing angle between the inclined end surface 123 of the second polygonal ring 112B and the inner inclined surface 121 of the first polygonal ring 112A 110 are determined.

For example, as shown in FIG. 1C, when the angle between the end inclined surface 123 of the second articulated ring 112B and the inner inclined surface 121 of the first articulated ring 112A is approximately 0 degrees ( The flexible inner pipe 110 has a substantially straight shape.

However, when the angle between the end inclined surface 123 of the second articulated ring 112B and the inner inclined surface 121 of the first articulated ring 112A is not approximately 0 degrees (that is, , The flexible inner pipe 110 is bent at a substantially constant angle along the central axis or the longitudinal direction.

2 is a cross-sectional view illustrating a by-product trap prevention pipe 200 according to various embodiments of the present invention. The by-product trap prevention piping 200 shown in Fig. 2 is substantially similar to the piping 100 shown in Fig. 1A, and therefore only the difference will be described.

As shown in FIG. 2, the flexible inner pipe 110 may include a locking protrusion 211 formed on an outer diameter surface of an end portion thereof. Here, the latching protrusion 211 protrudes toward a relatively large inner diameter surface of the bellows type outer pipe 150. Particularly, the locking protrusion 211 is in close contact with the front end of the flange 130, and the extended region 212 of the flexible inner pipe 110 extending from the locking protrusion 211 contacts the inner peripheral surface of the flange 130 As shown in FIG.

In this way, the flexible inner pipe 110 can be stably coupled to the flange 130 without providing additional engagement grooves on the inner diameter surface of the flange 130, thereby ensuring the hermeticity / hermeticity. That is, the locking protrusion 211 of the flexible inner pipe 110 and the extended area 212 extending from the locking protrusion 211 are in close contact with the front end and the inner diameter face of the flange 130, respectively, 110) and the flange (130) can be ensured.

3 is a cross-sectional view illustrating a by-product trap prevention pipe 300 according to various embodiments of the present invention. The by-product trap prevention piping 300 shown in Fig. 3 is substantially similar to the piping 200 shown in Fig. 2, and therefore only the difference will be described.

As shown in FIG. 3, some of the plurality of articulated rings constituting the flexible internal pipe 310 may further include a latching protrusion 311 formed on an outer diameter surface. Furthermore, the latching protrusion 311 can be coupled to the bellows type external piping 150. That is, the latching protrusion 311 can be coupled to the relatively largest inner diameter surface of the bellows type outer pipe 150.

In this way, the flexible inner pipe 310 includes not only the end but also the engagement protrusion 311 formed in a substantially central area. By joining the engagement protrusion 311 to the bellows-type outer pipe 150, The joining property between the cast inner pipe 3110 and the flange 130 and between the flexible inner pipe 110 and the bellows type outer pipe 150 can be improved.

Here, though not limiting, each of the articulated rings 310A constituting the flexible internal pipe 310 may be formed in a substantially diamond-shaped cross-section. That is, the articulated ring 310A includes an inner circumferential surface 310a and an outer circumferential surface 310b parallel to each other, and left and right sloped surfaces 310c and 310d parallel to each other at the ends of the inner circumferential surface 310a and the outer circumferential surface 310b .

The length of the flexible inner pipe 310 is varied according to the distance between the multi-joint rings 310A, and the length of the flexible internal pipe 310 is varied along the central axis or longitudinal direction according to the angle of break between the adjacent multi- And can be bent at a predetermined angle.

4 is a cross-sectional view illustrating a by-product trap prevention pipe 400 according to various embodiments of the present invention.

As shown in FIG. 4, the flexible inner pipe 410 may be in the form of a single pipe rather than a multi-joint ring. That is, the flexible inner pipe 410 may have a single pipe shape having a flat inner circumferential surface 410a and a flat outer circumferential surface 410b as an opposite surface thereof, and a plurality of fastening protrusions 413 may be formed on the outer circumferential surface 410a . The plurality of latching projections 413 can be coupled to a relatively large inner surface of the bellows type outer pipe 150. In addition, the latching protrusions 411 formed on both sides of the flexible inner pipe 410 are in close contact with the front end of the flange 230 and the extended region 412 is coupled to the inner surface of the flange 230.

As described above, the flexible inner pipe 410 includes a plurality of locking protrusions 413 formed at predetermined pitches, and the plurality of locking protrusions 413 are coupled to the bellows type outer pipe 150, The coupling between the inner pipe 410 and the bellows type outer pipe 150 can be further improved.

5 is a cross-sectional view illustrating a by-product trap prevention pipe 500 according to various embodiments of the present invention.

As shown in FIG. 5, the flexible inner pipe 510 may be in the form of a single pipe rather than a multi-joint ring. That is, the flexible inner pipe 510 may include a flat inner circumferential surface 510a and a wave-like outer circumferential surface 510b. In particular, a plurality of latching protrusions 513 may be formed on the outer circumferential surface 510a in the same shape as the bellows pitch of the bellows type outer pipe 150. Furthermore, all of the plurality of latching projections 513 can be coupled to a relatively large inner-diameter surface of the bellows-type outer pipe 150.

As described above, the flexible internal pipe 510 includes a plurality of latching projections 513 formed at the same pitch as the bellows pitch, and the plurality of latching projections 513 are coupled to the bellows type external pipe 150 , The coupling between the flexible inner pipe 510 and the bellows-type outer pipe 150 can be further improved.

6 is a cross-sectional view illustrating a by-product trap prevention pipe 600 according to various embodiments of the present invention.

6, the pipe 600 according to the embodiment of the present invention includes a flexible inner pipe 610, a flange 630 coupled to the flexible inner pipe 610, a flexible inner pipe 610, A stopper 670 coupled between the flange 630 and the flange 630 and an outer pipe 750 positioned outside the flexible inner pipe 610 and coupled to the flange 630. [

The flexible inner pipe 610 may be formed of Teflon with excellent corrosion resistance, and flanges 630 may be respectively coupled to both ends of the pipe. The stopper 670 is coupled to the inside of the flange 630 and is in close contact with the flexible inner pipe 610. The stopper 670 is formed with a latching protrusion 671 in the outer direction and the latching protrusion 671 is engaged with the latching groove 631 formed on the inner surface of the flange 630. Thus, the flexible inner pipe 610 is stably coupled to the flange 630 by the stopper 670.

On the other hand, the outer pipe 650 has a flat inner circumferential surface and an outer circumferential surface rather than a bellows shape. Moreover, the inner circumferential surface of the outer pipe 650 can be brought into close contact with the outer circumferential surface of the flexible inner pipe 610. Further, the flange 630 can be coupled to the end of the outer pipe 650 through the adhesive 690. [

In this way, even if the pipe 600 according to the embodiment of the present invention is flexible, a flexible inner pipe 610 made of Teflon is inserted into the pipe 600, and a flexible inner pipe 610 made of Teflon At least one latching groove 631 and a stopper 670 to which the latching protrusion 671 is coupled in the latching groove 631 are formed in the flanges 630 of both sides .

The pipe 600 according to the embodiment of the present invention can prevent the corrosion of the pipe as in the case of the bellows type pipe and prevent the deposition of reaction by-products in the pipe by using the non-adhesive property of Teflon.

As described above, the present invention is not limited to the above-described embodiment, but can be applied to a pipeline for preventing by-product traps according to the present invention. It will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention.

100 to 600; Byproduct trap prevention piping
110; Flexible inner tubing 111; Latching projection
112A and 112B; First and second articulated rings 113; Inner circumferential surface
114; An outer circumferential surface 115; Internal jam groove
116; Inner jaws 117; End vertical plane
118; External engaging groove 119; Outside jaw
121; Inner inclined surface 122; External slope
123; End slope 124; vertex
130; Flange 131; Latching groove
150; Bellows type external piping

Claims (14)

Flexible internal piping;
A flange coupled to the flexible inner tubing; And
And a bellows type outer pipe formed on the outer side of the flexible inner pipe and coupled to the flange,
The flexible inner pipe is formed of Teflon,
The bellows type external piping is formed of a metal material,
Wherein the flexible inner pipe includes an engagement protrusion formed on an outer diameter surface of an end,
Wherein the flange includes an engagement groove formed on an inner surface of the flange, the engagement protrusion and the engagement groove are coupled to each other,
Wherein the flexible internal pipe is formed by connecting a plurality of multi-joint rings capable of being deformed in an inclined direction to a central axis or a central axis,
Wherein the plurality of articulated rings include a first articulated ring and a second articulated ring,
A flat inner circumferential surface;
A flat outer circumferential surface opposite to the inner circumferential surface;
An inner engaging protrusion protruding in the direction of the inner circumferential surface at a portion where the first side of the inner circumferential surface meets the first side of the outer circumferential surface;
An inner engaging groove formed in a recessed shape toward the outer circumferential surface at a portion adjacent to the inner engaging jaw;
An outer engaging jaw protruding in the direction of the outer peripheral surface at a portion where the second side of the inner peripheral surface and the second side of the outer peripheral surface meet; And
And an outer engaging groove formed in a recessed shape toward the inner peripheral surface at a portion adjacent to the outer engaging jaw,
The second side of the inner peripheral surface is disposed on the opposite side of the first side of the inner peripheral surface, the second side of the outer peripheral surface is disposed on the opposite side of the first side of the outer peripheral surface,
Wherein an inner engaging jaw of the first articulated ring is engaged with an outer engaging groove of the second articulated ring, and an inner engaging groove of the first articulated ring and an outer engaging jaw of the second articulated ring are engaged, Wherein the length of the flexible inner pipe is elongated or contracted. The method according to claim 1,
Wherein the flexible inner pipe includes an inner peripheral surface,
Wherein the inner circumferential surface is flattened in the direction of the central axis. delete delete delete delete delete The method according to claim 1,
Each of the first and second articulated rings
Further comprising an inner inclined surface formed between the inner peripheral surface and the inner engaging groove,
Further comprising an outer inclined surface formed between the outer circumferential surface and the outer engaging groove. 9. The method of claim 8,
Each of the first and second articulated rings
Further comprising an end inclined surface formed between the inner circumferential surface and the outer engaging jaw,
Wherein an inner inclined surface of the first multi-joint ring and an inclined end surface of the second multi-joint ring are coupled to each other so as to be viewed from each other. The method according to claim 1,
Wherein the flexible inner pipe further comprises a latching protrusion formed on an outer diameter surface of an end,
And the latching projection is in close contact with the tip end of the flange. The method according to claim 1,
Wherein some of the plurality of articulated rings further include engagement protrusions formed on an outer surface,
And the latching protrusion is coupled to the bellows type external piping. The method according to claim 1,
Wherein the inner pipe further comprises a plurality of latching protrusions formed on an outer surface,
Wherein the plurality of latching projections are coupled to a relatively large inner surface of the bellows type outer pipe. 13. The method of claim 12,
The plurality of latching projections are equal to the bellows pitch of the bellows type external piping,
Wherein the plurality of latching projections are coupled to a relatively large inner surface of the bellows type outer pipe. delete

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