CN215976016U - Magnetron sputtering device for film coating machine - Google Patents

Abstract

The utility model discloses a magnetron sputtering device for a film plating machine, wherein the film plating machine comprises a film plating chamber and a rotating cage, and the rotating cage is rotatably arranged in the film plating chamber. The magnetron sputtering device comprises a controller and at least one magnetron sputtering component. The magnetron sputtering component comprises a target material in a circular tube shape, a magnetic yoke in a strip shape and a driving piece. The target material is arranged in the coating chamber and is positioned at the periphery of the rotating cage. The magnet yoke is arranged in the target and is deviated to one side of the target. The driving piece is used for driving the magnet yoke to rotate around the axis of the target material. The controller is connected with the driving piece in a signal mode and/or electrically connected with the driving piece. Under the control of the controller, the driving piece is used for driving the magnetic yoke to rotate and positioning the magnetic yoke at a first position facing the rotating cage and a second position far away from the rotating cage. The magnetic yoke is rotatable, so that sputtering atoms escaping from the target material can be effectively prevented from sputtering onto a product to be coated during the initial operation stage of the coating machine, and the yield of the product to be coated can be ensured.

Description

Magnetron sputtering device for film coating machine

Technical Field

The utility model relates to the technical field of film plating machines, in particular to a magnetron sputtering device for a film plating machine.

Background

The film coating machine is a full-automatic heating wire evaporation coating device. The method is used for plating a metal film on the surface of an injection molding object, such as PC, PBT, ABS, BMC and the like, in a vacuum state, and plating an oxidation protection film, such as a silica gel film, on the surface of the metal film. The film plating machine can automatically and continuously carry out the working procedures of low vacuum exhaust, electric arc ion bombardment pretreatment, high vacuum exhaust, aluminum evaporation, anti-oxidation film plating and the like in vacuum. The product hanging tool to be coated is fixed on a tooling plate of the rotating cage, can rotate and rotate together, and can adjust the rotating speed.

As shown in fig. 1, a yoke 112 ' of a conventional film plating machine is directly fixed inside a target 111 ', and faces one side of a rotating cage, and at an initial stage of plating a film on a product to be plated, the target 111 ' is largely cleaned insufficiently in an earlier stage to cause dirt to be attached to a surface layer, so that if the product to be plated is directly plated, a film plating effect of the product is deteriorated to a great extent, and even the product is directly scrapped. Therefore, in the prior art, a rotatable baffle 5 is usually disposed on a side of the target 111' facing the rotating cage, and the baffle 5 is driven by a rotating mechanism to rotate back and forth along a predetermined track, so as to shield the sputtered atoms. Specifically, in the initial stage of the machine operation, sputtering atoms escaping from the target 111 'are directly sputtered onto the shutter 5 by rotating the shutter 5 between the target 111' and the rotating cage, thereby preventing them from being directly sputtered onto the product. And after the machine runs stably, the baffle 5 is rotated to one side, so that sputtering atoms can be directly sputtered onto the product to be coated on the surface layer of the rotating cage, and a film can be deposited on the surface layer of the product. However, since the temperature of the sputtered atoms is high, when the sputtered atoms are sputtered onto the baffle 5 in a large amount and at a high frequency, the baffle is damaged and deformed due to heating, so that the baffle 5 is unsmooth or even cannot rotate in the rotating process, and the coating process is finally affected.

Therefore, based on the defects in the prior art, it is always a problem to be solved by those skilled in the art that the sputtering atoms escaping from the target and the product to be coated can be isolated during the initial operation of the coating machine.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a magnetron sputtering device for a film plating machine, which can effectively prevent sputtering atoms escaping from a target material from sputtering a product to be plated in the initial running stage of the film plating machine by setting a magnetic yoke to be rotatable, thereby ensuring the yield of the product to be plated.

The technical scheme provided by the utility model is as follows:

a magnetron sputtering device for a film plating machine comprises a film plating chamber and a rotating cage, wherein the rotating cage is rotatably arranged in the film plating chamber;

the magnetron sputtering device comprises a controller and at least one magnetron sputtering component;

the magnetron sputtering component comprises a target material in a circular tube shape, a strip-shaped magnetic yoke and a driving piece;

the target is arranged in the coating chamber and is positioned at the periphery of the rotating cage;

the magnetic yoke is arranged in the target and is deviated to one side of the target;

the driving piece is used for driving the magnet yoke to rotate around the axis of the target material; and

the controller is in signal connection and/or electric connection with the driving piece;

under the control of the controller, the driving piece is used for driving the magnetic yoke to rotate and positioning the magnetic yoke at a first position facing the rotating cage and a second position far away from the rotating cage.

In the patent, sputtering atoms escaping from the target can be directly sputtered onto a product to be coated on the surface layer of the rotating cage, so that the film can be deposited on the surface layer of the product. At the initial stage of treating the coating film product and carrying out the coating film, because of the target can be because of wasing inadequately in earlier stage and lead to the surperficial dirt that adheres to, consequently, the steerable driving piece of controller drive yoke rotates to the second position, is that the yoke rotates to the one side of keeping away from the rotating cage promptly. Therefore, sputtering atoms can escape from one side of the target material far away from the rotating cage, and the sputtering atoms can be prevented from sputtering on a product to be coated attached to the outer wall surface of the rotating cage. After the target material can stably escape from the sputtering atoms, the controller can control the driving piece to drive the magnetic yoke to rotate to the first position again, namely the magnetic yoke rotates to one side facing the rotating cage. Therefore, the sputtering atoms can escape from the target towards one side of the rotating cage, so that the sputtering atoms can be ensured to be directly sputtered on the product to be coated attached to the outer wall surface of the rotating cage.

Further preferably, the driving member comprises a driving body and a rotating shaft;

the driving body is arranged above the coating chamber;

the rotating shaft is connected with the driving body in a driving mode, extends into the target and is coaxial with the target;

the magnetic yoke is mounted on the outer wall surface of the rotating shaft and has the same extending direction with the rotating shaft.

Further preferably, the transverse section of the magnetic yoke is arc-shaped and is coaxial with the target and the rotating shaft.

Further preferably, a first flange and a second flange for sealing the inside of the target are respectively mounted at two ends of the target; and the first flange plate and the second flange plate are respectively arranged at the top and the bottom of the coating chamber.

Further preferably, a through hole for the rotating shaft to penetrate is formed in the center of the first flange plate, and

one end of the rotating shaft, which is far away from the driving body, is rotatably arranged on the second flange plate.

Further preferably, the rotating shaft is sleeved with a first bearing seat and a second bearing seat which are used for abutting against the inner wall surface of the target material; the first bearing seat is arranged adjacent to the first flange plate, and the second bearing seat is arranged adjacent to the second flange plate.

Further preferably, the yoke is located between the first bearing housing and the second bearing housing.

Further preferably, a gap is reserved between the magnet yoke and the inner wall surface of the target material.

Further preferably, a base is arranged above the coating chamber, and the interior of the base is hollow;

the driving body is mounted on the upper end face of the base, and the rotating shaft extends into the target through the inside of the base; and a bearing assembly used for abutting against the inner wall surface of the base is sleeved on the part of the rotating shaft corresponding to the inside of the base.

Further preferably, the base is provided with a connecting piece for butting the target material;

the connecting piece is of a hollow tubular structure and is sleeved on the rotating shaft.

The utility model has the technical effects that:

in the method, sputtering atoms escaping from the target can be directly sputtered onto a product to be coated on the surface layer of the rotating cage, so that a film can be deposited on the surface layer of the product to complete the coating process of the product to be coated. Wherein, at the initial stage of treating the coating film product and carrying out the coating film, because target can lead to the top layer to adhere to there is the dirt because of wasing inadequately in earlier stage, consequently, in order to ensure the quality of coating film, the steerable driving piece of controller drive yoke rotates to the second position, is that the yoke rotates to the one side of keeping away from the rotating cage promptly. Therefore, sputtering atoms can escape from one side of the target material far away from the rotating cage, and the sputtering atoms can be prevented from sputtering on a product to be coated attached to the outer wall surface of the rotating cage. After the target material can stably escape from the sputtering atoms, the controller can control the driving piece to drive the magnetic yoke to rotate to the first position again, namely the magnetic yoke rotates to one side facing the rotating cage. Therefore, the sputtering atoms can escape from the target towards one side of the rotating cage, so that the sputtering atoms can be ensured to be directly sputtered on the product to be coated attached to the outer wall surface of the rotating cage.

Drawings

The utility model is described in further detail below with reference to the following figures and detailed description:

FIG. 1 is a schematic diagram of a baffle, a target and a yoke in the prior art;

FIG. 2 is a schematic structural diagram of a coating machine provided by the product of the present invention;

FIG. 3 is a schematic structural view of the magnetron sputtering apparatus and the rotating cage of FIG. 2 installed in a coating chamber;

FIG. 4 is a schematic structural view of the magnetron sputtering assembly shown in FIG. 3;

FIG. 5 is a cross-sectional view taken along line A-A of FIG. 4;

fig. 6 is a transverse cross-sectional view of the target shown in fig. 4 in one state;

fig. 7 is a transverse cross-sectional view of the target shown in fig. 4 in another state.

The reference numbers illustrate:

a film coating machine 100; a magnetron sputtering apparatus 1; a magnetron sputtering assembly 11; a target 111; a target 111'; a first flange 1111; a second flange 1112; a first bearing housing 1113; a second bearing housing 1114; a yoke 112; a yoke 112'; a set screw 1121; a driver 113; a drive body 1131; a rotating shaft 1132; a base 114; a bearing assembly 1141; a connector 1142; a film coating chamber 2; a bin gate 21; a rotating cage 3; a gap 4; a baffle 5.

Detailed Description

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

For the sake of simplicity, the drawings only schematically show the parts relevant to the present invention, and they do not represent the actual structure as a product. In addition, in order to make the drawings concise and understandable, components having the same structure or function in some of the drawings are only schematically illustrated or only labeled. In this document, "one" means not only "only one" but also a case of "more than one".

It should be further understood that the term "and/or" as used in this specification and the appended claims refers to and includes any and all possible combinations of one or more of the associated listed items.

In this context, it is to be understood that, unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

In addition, in the description of the present application, the terms "first", "second", and the like are used only for distinguishing the description, and are not intended to indicate or imply relative importance.

According to an embodiment of the present invention, as shown in fig. 2 to 7, a magnetron sputtering apparatus 1 for a coater 100, the coater 100 includes a coating chamber 2 and a rotating cage 3, and the rotating cage 3 is rotatably installed in the coating chamber 2. The magnetron sputtering device 1 comprises a controller and at least one magnetron sputtering component 11. The magnetron sputtering assembly 11 includes a target 111 having a circular tube shape, a yoke 112 having a strip shape, and a driving member 113. The target 111 is arranged in the coating chamber 2 and is positioned at the periphery of the rotating cage 3. The yoke 112 is mounted inside the target 111 and is biased toward one side of the target 111. The driving member 113 is used for driving the yoke 112 to rotate around the axis of the target 111. And a controller in signal and/or electrical communication with the driving member 113. Wherein, under the control of the controller, the driving member 113 is used for driving the magnetic yoke 112 to rotate and positioning the magnetic yoke 112 at a first position facing the rotating cage 3 and a second position far away from the rotating cage 3.

In this embodiment, the sputtering atoms escaping from the target 111 can be directly sputtered onto the product to be coated on the surface layer of the rotating cage 3, so as to deposit a film on the surface layer of the product, thereby completing the coating process of the product to be coated. In the initial stage of coating the product to be coated, the target 111 may be insufficiently cleaned in the early stage to cause dirt to adhere to the surface layer, so that the controller may control the driving member 113 to drive the magnetic yoke 112 to rotate to the second position, that is, the magnetic yoke 112 rotates to the side away from the rotating cage 3, in order to ensure the coating quality. Thus, the sputtering atoms can escape from the side of the target 111 far away from the rotating cage 3, so that the sputtering atoms can be prevented from sputtering on the product to be coated attached to the outer wall surface of the rotating cage 3. After the target 111 can stably escape the sputtered atoms, the controller can control the driving member 113 to drive the yoke 112 to rotate to the first position, that is, the yoke 112 rotates to the side facing the rotating cage 3. Thus, the sputtering atoms can escape from the target 111 toward the side of the rotating cage 3, so that the sputtering atoms can be ensured to be directly sputtered onto the product to be coated attached to the outer wall surface of the rotating cage 3.

It should be noted that, in this embodiment, referring to fig. 2 and fig. 3, the coating chamber 2 may be in a sealed state, so as to facilitate the vacuum pumping process of the coating chamber 2, thereby greatly improving the coating quality of the product to be coated. It is worth mentioning that the coating chamber 2 may be provided with a door 21, and the opening and closing of the door 21 may facilitate the workers to access the product to be coated and perform other work processes, such as cleaning, maintaining and replacing the inside of the coating chamber 2.

Further, in this embodiment, with continued reference to fig. 2 and 3, the rotating cage 3 is rotatably mounted within the coating chamber 2. The rotating cage 3 is preferably vertically disposed, and can be driven to rotate by a motor or a rotary cylinder. It is worth mentioning that the rotating cage 3 is internally hollow, a plurality of arc-shaped sheet-shaped plate bodies which are sequentially spliced are arranged on the side wall of the rotating cage 3, and the outer wall surface of each plate body is used for fixing a product to be coated.

Further, in the present embodiment, referring to fig. 3, the number of the magnetron sputtering assemblies 11 may preferably be multiple, and the plurality of magnetron sputtering assemblies 11 are controlled by the same controller, are located at the periphery of the rotating cage 3, and are located on the same circumference. Therefore, under the control action of the controller, the magnetron sputtering components 11 can be synchronously opened, operated and closed, and the coating consistency and uniformity of a plurality of products to be coated can be greatly ensured.

Further, the target 111 has a hollow circular tube-like configuration, and the central axis of the target 111 and the central axis of the rotating cage 3 are arranged in parallel. The yoke 112 may be in an elongated shape, and is located inside the target 111 and extends along the length direction of the target 111. As a further optimization, the yoke 112 may be biased to one side inside the target 111, and the driving member 113 is drivingly connected to the yoke 112 for driving the yoke 112 to rotate around the central axis of the target 111 to adjust the position of the yoke 112 relative to the target 111, thereby changing the sputtering direction of the sputtering atoms escaping from the target 111.

As a further optimization of this embodiment, referring to fig. 4 and 5, the driving member 113 may include a driving body 1131 and a rotating shaft 1132. Specifically, the driving body 1131 may be preferably installed above the coating chamber 2, but is not limited thereto. The shaft 1132 is drivingly connected to the driving body 1131, and the shaft 1132 extends into the target 111 and is disposed coaxially with the target 111. The yoke 112 is mounted on an outer wall surface of the rotation shaft 1132, and has the same extending direction as the rotation shaft 1132. That is, as long as it can be ensured that the driving body 1131 can drive the rotating shaft 1132 to rotate, so as to drive the magnetic yoke 112 to rotate around the central axis of the target 111, so as to change the sputtering direction, any structural change is within the protection scope of this patent, and will not be described herein in too much detail.

It should be noted that, in this embodiment, referring to fig. 6 and 7, the transverse section of the magnetic yoke 112 may be arc-shaped and disposed coaxially with the target 111 and the rotating shaft 1132, so that the magnetic yoke can be adapted to the outer wall structure of the rotating shaft 1132, so that the two are more tightly butted, and the structural stability of the magnetic yoke 112 during the rotation process is improved. The yoke 112 may be fixedly coupled to the rotating shaft 1132 by, for example, a fixing screw 1121, but is not limited thereto, and it may also be fixedly coupled to the rotating shaft 1132 by, for example, a latch, an adhesive, a lock, and the like, and all of them are within the protection scope of this patent.

Further, in the present embodiment, referring to fig. 4 and 5, a first flange 1111 and a second flange 1112 for sealing the inside of the target 111 are respectively installed at both ends of the target 111. The first flange 1111 and the second flange 1112 are respectively and fixedly installed at the top and the bottom of the film coating chamber 2, so that the target 111 can be fixed. That is to say, the first flange 1111 and the second flange 1112 play a role of sealing the inside of the target 111 on the one hand and a role of fixing the target 111 on the other hand, so that the target 111 has strong stability in the use process, thereby improving the coating quality of the product.

It should be mentioned that, in the present embodiment, a through hole for the rotation shaft 1132 to penetrate is formed at the center of the first flange 1111, and one end of the rotation shaft 1132, which is far away from the driving body 1131, is rotatably installed on the second flange 1112. That is, the first flange 1111 and the second flange 1112 also serve to stabilize the shaft 1132, so that the shaft 1132 is more stable during rotation.

Further, in the present embodiment, referring to fig. 5, in order to effectively improve the rotation effect of the rotating shaft 1132, a first bearing seat 1113 and a second bearing seat 1114 for abutting against the inner wall surface of the target 111 may be sleeved on the rotating shaft 1132. The first bearing housing 1113 is disposed adjacent to the first flange 1111, and the second bearing housing 1114 is disposed adjacent to the second flange 1112. Thus, under the combined action of the first bearing seat 1113 and the second bearing seat 1114, the rotation shaft 1132 can rotate more stably, and the rotation shaft 1132 can be effectively prevented from moving along the radial direction. Wherein, in order to facilitate the smooth and easy and quick installation that can of yoke 112 on pivot 1132, can set up yoke 112 to be located between first bearing frame 1113 and the second bearing frame 1114, so the rational overall arrangement of structure of can being convenient for prevents that yoke 112 from receiving blockking of first bearing frame 1113 and second bearing frame 1114.

It should be noted that, referring to fig. 6 and 7, a gap 4 is reserved between the yoke 112 and the inner wall surface of the target 111, so that friction between the yoke 112 and the inner wall surface of the target 111 can be prevented, thereby causing abrasion of the yoke 112 and/or the target 111.

As a further optimization of the present embodiment, referring to fig. 4 and 5, a base 114 is installed above the coating chamber 2, the base 114 is preferably located right above the target 111, and the interior of the base 114 can be hollow. The driving body 1131 is mounted on the upper end surface of the pedestal 114, and the shaft 1132 extends to the inside of the target 111 through the inside of the pedestal 114. And a portion of the rotating shaft 1132 corresponding to the inside of the susceptor 114 is sleeved with a bearing assembly 1141 for abutting against the inner wall surface of the susceptor 114. In this embodiment, based on the practical application scenario, the length of the rotating shaft 1132 is long, and therefore, the base 114 is disposed at a position where the rotating shaft 1132 is adjacent to the driving body 1131, and the stability of the rotating shaft 1132 is further improved by disposing the bearing assembly 1141 inside the base 114, so that the rotating effect of the magnetic yoke 112 is better, and the rotating shaft 1132 is prevented from causing the magnetic yoke 112 to rotate unstably due to the occurrence of shaking, thereby affecting the coating quality.

Further, referring to fig. 5, the base 114 is provided with a connector 1142 for abutting against the target 111. The connecting member 1142 is a hollow tubular structure and is disposed on the shaft 1132 in a sleeving manner. The connecting member 1142 is used to connect the base 114 and the first flange 1111 of the target 111, so as to further improve the stability of the target 111 and the base 114 during the use process, and the connecting member 1142 also serves to stabilize the rotating shaft 1132.

The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.

Claims (10)

1. A magnetron sputtering device for a film plating machine, the film plating machine comprises a film plating chamber and a rotating cage, the rotating cage is rotatably arranged in the film plating chamber, the magnetron sputtering device is characterized in that,

the magnetron sputtering device comprises a controller and at least one magnetron sputtering component;

the magnetron sputtering component comprises a target material in a circular tube shape, a strip-shaped magnetic yoke and a driving piece;

the target is arranged in the coating chamber and is positioned at the periphery of the rotating cage;

the magnetic yoke is arranged in the target and is deviated to one side of the target;

the driving piece is used for driving the magnet yoke to rotate around the axis of the target material; and

the controller is in signal connection and/or electric connection with the driving piece;

under the control of the controller, the driving piece is used for driving the magnetic yoke to rotate and positioning the magnetic yoke at a first position facing the rotating cage and a second position far away from the rotating cage.

2. The magnetron sputtering apparatus for coating machine as claimed in claim 1,

the driving piece comprises a driving body and a rotating shaft;

the driving body is arranged above the coating chamber;

the rotating shaft is connected with the driving body in a driving mode, extends into the target and is coaxial with the target;

the magnetic yoke is mounted on the outer wall surface of the rotating shaft and has the same extending direction with the rotating shaft.

3. The magnetron sputtering apparatus for coating machine as claimed in claim 2,

the transverse section of the magnet yoke is arc-shaped and is coaxial with the target and the rotating shaft.

4. The magnetron sputtering apparatus for coating machine as claimed in claim 2,

a first flange and a second flange which are used for sealing the interior of the target material are respectively arranged at two ends of the target material; and the first flange plate and the second flange plate are respectively arranged at the top and the bottom of the coating chamber.

5. The magnetron sputtering apparatus for coating machine as claimed in claim 4,

a through hole for the rotating shaft to penetrate is formed in the center of the first flange plate, and

one end of the rotating shaft, which is far away from the driving body, is rotatably arranged on the second flange plate.

6. The magnetron sputtering apparatus for coating machine as claimed in claim 4,

the rotating shaft is sleeved with a first bearing seat and a second bearing seat which are used for abutting against the inner wall surface of the target material; the first bearing seat is arranged adjacent to the first flange plate, and the second bearing seat is arranged adjacent to the second flange plate.

7. The magnetron sputtering apparatus for coating machine as claimed in claim 6,

the yoke is located between the first bearing seat and the second bearing seat.

8. The magnetron sputtering apparatus for coating machine as claimed in any one of claims 1 to 7,

a gap is reserved between the magnet yoke and the inner wall surface of the target material.

9. The magnetron sputtering apparatus for coating machine as claimed in any one of claims 2 to 7,

a base is arranged above the coating chamber, and the interior of the base is hollow;

the driving body is mounted on the upper end face of the base, and the rotating shaft extends into the target through the inside of the base; and a bearing assembly used for abutting against the inner wall surface of the base is sleeved on the part of the rotating shaft corresponding to the inside of the base.

10. The magnetron sputtering apparatus for coating machine as claimed in claim 9,

the base is provided with a connecting piece for butting the target material;

the connecting piece is of a hollow tubular structure and is sleeved on the rotating shaft.

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