CN215964966U

CN215964966U - Brush head subassembly and polishing pad brushing device

Info

Publication number: CN215964966U
Application number: CN202121666256.8U
Authority: CN
Inventors: 朱亮; 沈文杰; 黄金涛; 谢龙辉; 郑猛; 潘兴兴
Original assignee: Zhejiang Jingsheng Mechanical and Electrical Co Ltd
Current assignee: Zhejiang Jingsheng Mechanical and Electrical Co Ltd
Priority date: 2021-07-21
Filing date: 2021-07-21
Publication date: 2022-03-08
Anticipated expiration: 2031-07-21

Abstract

The utility model relates to the field of brushing mechanisms, in particular to a brush head assembly and a polishing pad brushing device, which comprise: a fixed seat; the brush head body is movably connected with the fixed seat and can move in a first direction; and an adjustment assembly, the adjustment assembly comprising: the first elastic piece can deform and is arranged on the fixed seat, and one end of the first elastic piece is abutted against the brush head body so as to weaken the movement of the brush head body in the first direction; the limiting part is connected to the fixing seat in an adjustable mode and is abutted to the other end of the first elastic part. The application has the following effects: the first elastic piece is arranged between the brush head body and the fixed seat, and weakens the movement of the brush head body, so that the technical problem of poor cleaning effect of the brush head on the polishing pad in the prior art is solved; the technical effect of improving the cleaning effect of the brush head on the polishing pad is achieved.

Description

Brush head subassembly and polishing pad brushing device

Technical Field

The application relates to the field of brushing mechanisms, in particular to a brush head assembly.

Background

Grinding and polishing the silicon wafer, wherein the purpose of removing materials on the surface of the silicon wafer is realized by mainly utilizing the friction between the silicon wafer below the polishing head and a polishing pad on the polishing disk; during silicon wafer grinding and polishing, a polishing pad on a polishing disc is in long-term contact with polishing liquid, the polishing liquid is easy to crystallize and stays on the polishing pad, meanwhile, after the silicon wafer is processed, the polishing pad on the polishing disc is slightly worn, the polishing pad on the disc surface is uneven, and therefore the polishing pad needs to be brushed and cleaned.

Among the prior art, the utilization is scrubbed the polishing pad through brush head, and the brush head generally carries out control direction and dynamics through digit control mechanism such as arm, nevertheless because the vibrations of twining the body in the process of scrubbing cause the effort of brush head to the polishing pad unstable, or because arm control accuracy is not high, has the deviation also to cause the unstable problem of brush head to the polishing pad effort at control brush head removal in-process to lead to the polishing pad to scrub the effect not good.

Therefore, the technical problems of the prior art are as follows: the cleaning effect of the brush head on the polishing pad is not good.

SUMMERY OF THE UTILITY MODEL

The application provides a brush head component, which solves the technical problem that the cleaning effect of a brush head on a polishing pad in the prior art is poor; the technical effect of improving the cleaning effect of the brush head on the polishing pad is achieved.

The application provides a brush head subassembly adopts following technical scheme:

a brushhead assembly, comprising: a fixed seat; the toothbrush head body is movably connected to the fixed seat and can move in a first direction; and an adjustment assembly, the adjustment assembly comprising: the first elastic piece is deformable and arranged on the fixed seat, and one end of the first elastic piece is abutted against the brush head body so as to weaken the movement of the brush head body in a first direction; the limiting part is connected to the fixing seat in an adjustable mode, and the limiting part is abutted to the other end of the first elastic part.

Preferably, be provided with spacing subassembly between fixing base and the brush head body, spacing subassembly includes: the first limiting plate is fixed on the fixed seat; the second limiting plate is fixed on the brush head body and can be abutted against the first limiting plate, so that the moving range of the fixing seat is limited.

Preferably, the fixed seat is provided with a first channel, the first channel penetrates through to one end, close to the brush head body, of the fixed seat, and the first elastic piece is arranged in the first channel.

Preferably, a push plate is slidably connected in the first channel, and two end surfaces of the push plate respectively abut against the limiting member and the first elastic member.

Preferably, a supporting plate is arranged between the fixed seat and the brush head body, and two end faces of the supporting plate are respectively abutted against the fixed seat and the brush head body.

Preferably, the fixing base includes: the first seat is movably connected with the brush head body, and a first channel is arranged in the first seat; the second seat is rotatably connected to one end, far away from the brush head body, of the first seat, so that the second seat can rotate around a shaft, and the second seat is connected with the limiting part in an adjustable mode.

Preferably, the second seat is connected with a synchronizing wheel, and the synchronizing wheel is fixedly connected with the first seat in a positioning manner.

Preferably, the first seat is provided with: the second channel penetrates to one end close to the brush head body; and the second elastic piece is arranged in the second channel and is abutted against the supporting plate.

Preferably, the first elastic member and the second elastic member are springs; the limiting part is specifically a screw, and the screw is connected to the second seat through threads.

A polishing pad scrubbing apparatus includes the brush head assembly.

In summary, the present application includes at least one of the following beneficial technical effects:

1. in the application, the brush head body can move in the first direction of the fixed seat, the first elastic part is arranged between the brush head body and the fixed seat and is limited by the limiting part, after the brush head body is contacted with the polishing pad, the brush head body is subjected to the acting force in the reverse direction of the first direction, and the elastic part weakens the motion of the brush head body, so that the acting force of the brush head body on the polishing pad is kept stable, and the technical problem that the cleaning effect of the brush head on the polishing pad in the prior art is poor is solved; the technical effect of improving the cleaning effect of the brush head on the polishing pad is achieved.

2. The adjustable connection of locating part is on the fixing base, through adjusting the locating part in order to change the deformation degree of first elastic component for the first body of brush receives the effort of elastic component adjustable, is adapted to different operational environment, improves the stability of the first body of brush to the effort of polishing pad.

3. The synchronizing wheel is fixed on the first seat, and the fixed seat is driven to rotate by the brush head body through the driving synchronizing wheel, so that the cleaning effect of the brush head body on the polishing pad is further improved.

Drawings

FIG. 1 is a perspective view of a brush head assembly according to the present disclosure.

FIG. 2 is an exploded view of a brush head assembly according to the present application.

FIG. 3 is a front cross-sectional view of a brushhead assembly of the present application.

Fig. 4 is a partially enlarged view of a in fig. 3.

Reference numerals: 100. a fixed seat; 101. a first seat; 102. a second seat; 103. a first channel; 104. a second channel; 105. a third channel; 106. a first hole; 107. a second hole; 108. a synchronizing wheel; 109. a bearing; 200. a brush head body; 201. a brush head seat; 202. brushing; 300. an adjustment assembly; 301. pushing the plate; 302. a limiting member; 303. a first elastic member; 304. a support plate; 305. a second elastic member; 400. a limiting component; 401. a first limit plate; 402. and a second limiting plate.

Detailed Description

The numbering of the components as such, e.g., "first", "second", etc., is used herein only to distinguish the objects as described, and does not have any sequential or technical meaning. The term "connected" and "coupled" when used in this application, unless otherwise indicated, includes both direct and indirect connections (couplings). In the description of the present application, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present application and for simplicity in description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, are not to be considered as limiting the present application.

In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through intervening media. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

The embodiment of the application provides a brush head component, and the first elastic part 303 is arranged between the brush head body 200 and the fixed seat 100 and weakens the motion of the brush head body 200, so that the technical problem that the cleaning effect of the brush head on a polishing pad is poor in the prior art is solved; the technical effect of improving the cleaning effect of the brush head on the polishing pad is achieved.

In order to better understand the technical solution, the technical solution will be described in detail with reference to the drawings and the specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.

A brush head assembly, as shown in fig. 1 and 2, comprises a fixed base 100, a brush head body 200 and an adjusting assembly 300, wherein the brush head body 200 is movably connected to the fixed base 100 and can slide and move in a first direction, specifically, the brush head body 200 is located below the fixed base 100, so that the brush head body 200 can move for a certain distance in a vertical direction.

As shown in fig. 1 and 2, the brush head body 200 includes a brush head seat 201 and bristles 202, the brush head seat 201 is a circular plate, the bristles 202 are fixed on a surface of the brush head seat 201 away from the fixed seat 100, the bristles 202 are used for contacting and scrubbing the polishing pad, a circular step is provided on the brush head seat 201, the brush head body 200 is connected with the fixed seat 100 through the step, as shown in fig. 3 and 4, a position limiting assembly 400 is provided between the brush head seat 201 and the fixed seat 100, the position limiting assembly 400 includes a first position limiting plate 401 and a second position limiting plate 402, the first position limiting plate 401 and the second position limiting plate 402 are both circular ring-shaped, the first position limiting plate 401 is fixed at the bottom of the side edge of the fixed seat 100, the first position limiting plate 401 is located in the inner space of the step, the second position limiting plate 402 is fixed on the step, the first position limiting plate 401 can abut against or separate from the second position limiting plate 402, so that the brush head body 200 can move in the vertical direction relative to the fixed seat 100, the moving distance is the height of the step; when the brush head body 200 moves upward, the second limiting plate 402 moves upward and is separated from the first limiting plate 401, and when the brush head body 200 moves downward, the second limiting plate 402 moves downward and is abutted against the first limiting plate 401.

As shown in fig. 2 and 3, the fixing base 100 includes a first base 101 and a second base 102, the first base 101 and the second base 102 are disposed up and down, the first base 101 is located below the second base 102, the first base 101 is connected to the brush head body 200 through the above-mentioned limiting component 400, a first channel 103 is disposed in the first base 101, specifically, an opening direction of the first channel 103 is the same as a moving direction of the brush head body 200, the first channel 103 is located on a central axis of the first base 101, the first channel 103 penetrates through an end of the first base 101 close to the brush head body 200, in an embodiment, the first channel 103 further penetrates through an end of the first base 101 far away from the brush head body 200, and certainly, the first channel 103 may not penetrate through an end of the first base 101 far away from the brush head body 200.

As shown in fig. 2 and 3, the adjusting assembly 300 includes a first elastic member 303 and a limiting member 302, the first elastic member 303 is disposed in the first channel 103, the first elastic member 303 is deformable under a force, the larger the deformation is, the larger the reaction force is, for example, a spring may be used, and the first elastic member 303 maintains a compressed state; the limiting part 302 is adjustably fixed on the fixed seat 100, the top of the first elastic part 303 abuts against the limiting part 302, the bottom of the first elastic part 303 abuts against the brush head body 200, specifically, the limiting part 302 adopts a screw, the direction of the screw is the same as the direction of the first channel 103, the screw is connected to the second seat 102 through a screw thread, a push plate 301 is arranged on the top of the first channel 103 in a sliding manner, the push plate 301 is a circular plate, and the push plate 301 can move up and down in the first channel 103; the push plate 301 is located between the limiting member 302 and the first elastic member 303, and the compression degree of the first elastic member 303 is adjusted by adjusting the up-down position of the limiting member 302; a supporting plate 304 is arranged between the bottom of the first elastic element 303 and the brush head seat 201, one surface of the supporting plate 304 is abutted against the bottom of the first elastic element 303, and the other surface is abutted against the upper end surface of the brush head seat 201.

As shown in fig. 2 and 3, a synchronizing wheel 108 is disposed on the fixing base 100, specifically, the synchronizing wheel 108 is sleeved on the second base 102, the synchronizing wheel 108 is connected with the second base 102 through two bearings 109, and the bottom edge of the synchronizing wheel 108 is fixedly connected with the top of the first base 101 through a screw or a flange, so that the synchronizing wheel 108 drives the first base 101 and the brush head body 200 to rotate, while the second base 102 is not driven to rotate. A transmission rod is fixed on the first seat 101, a longitudinal groove body is formed in the brush head seat 201, and the transmission rod is in inserted fit with the groove body, so that the first seat 101 can drive the brush head body 200 to rotate when rotating, and the up-and-down motion of the brush head body 200 is not influenced; of course, the friction force between the first limiting plate and the second limiting plate can be used for driving the brush head body to rotate.

As shown in fig. 3, a second channel 104 and a second elastic member 305 are further disposed in the first seat 101, the second channel 104 is disposed inside the first seat 101, the second channel 104 and the first channel 103 are parallel to each other, in one embodiment, the number of the second channels 104 is 3, the second channels are uniformly distributed in the circumferential direction of the first channel 103, and are the same as the first channel 103, and the second channel 104 penetrates through one end of the first seat 101 close to the brush head seat 201 and does not penetrate through the other end of the first seat 101; the second elastic element 305 is disposed inside the second channel 104 and the second elastic element 305 is in a compressed state, such that the top of the second elastic element 305 abuts against the top surface of the second channel 104, the bottom of the second elastic element 305 abuts against the brush head base 201 through the supporting plate 304, and the second elastic element 305 may specifically adopt a spring.

As shown in FIG. 3, the brush head assembly of the present embodiment further comprises a water passage assembly comprising a third channel 105, a first hole 106 and a second hole 107; the third channel 105 is arranged on the first seat 101, and the third channel 105 longitudinally penetrates through the first seat 101; the first hole 106 is arranged on the support plate 304, and the position of the first hole 106 is positioned right below the third channel 105; the second hole 107 is formed in the brush head seat 201, and the second hole 107 is located right below the first hole 106, so that water can reach the polishing pad through the third channel 105, the first hole 106 and the second hole 107 respectively; of course, the positions of the first hole 106, the second hole 107 and the third channel 105 may be staggered.

Working principle/steps:

the brush head body 200 is movably connected with the first seat 101, and the brush head body 200 can move for a certain distance in the vertical direction; the limiting member 302 is adjustably connected to the second seat 102, the limiting member 302 abuts against the first elastic member 303, the first elastic member 303 is compressed to generate deformation, a downward acting force is formed on the brush head body 200, and when the brush head body 200 moves upwards or has an upward movement trend due to external control or vibration, the first elastic body resists the movement of the brush head body 200 to weaken the upward movement of the brush head body 200, so that the pressure output by the brush head body 200 to the polishing pad is kept stable; the weakening effect of the first elastic body on the upward movement of the brush head body 200 is adjusted by adjusting the position of the limiting piece 302 to change the deformation degree of the first elastic piece 303.

The technical effects are as follows:

1. in the application, the brush head body 200 can move in the first direction of the fixed seat 100, the first elastic part 303 is arranged between the brush head body 200 and the fixed seat 100, the first elastic part 303 is limited by the limiting part 302, after the brush head body 200 is contacted with a polishing pad, the brush head body 200 is subjected to an acting force in the reverse direction of the first direction, and the movement of the brush head body 200 is weakened by the elastic part, so that the acting force of the brush head body 200 on the polishing pad is kept stable, and the technical problem of poor cleaning effect of the brush head on the polishing pad in the prior art is solved; the technical effect of improving the cleaning effect of the brush head on the polishing pad is achieved.

2. The limiting member 302 is adjustably connected to the fixing base 100, and the deformation degree of the first elastic member 303 is changed by adjusting the limiting member 302, so that the brush head body 200 can be adjusted by the acting force of the elastic member, and is suitable for different working environments, and the stability of the acting force of the brush head body 200 on the polishing pad is improved.

3. The synchronous wheel 108 is fixed on the first seat 101, and the fixed seat 100 is driven by driving the synchronous wheel 108 to rotate by the brush head body 200, so that the cleaning effect of the brush head body 200 on the polishing pad is further improved.

The embodiment also discloses a polishing pad brushing device, which comprises a brush head assembly and a driving assembly; the structure of the brush head component is the same as that of the brush head component; the driving assembly is connected with the first seat 101 and acts on the first seat 101 for driving the brush head assembly to move in the space. The driving assembly is a power mechanism, and the driving brush head assembly can be driven to move without making specific requirements on the structure of the driving assembly, for example, the driving assembly can be driven by a screw rod or a cylinder or driven by the combination of the screw rod and the cylinder, so that the driving brush head assembly can move in space.

While preferred embodiments of the present invention have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. Therefore, it is intended that the appended claims be interpreted as including preferred embodiments and all such alterations and modifications as fall within the scope of the utility model.

It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the utility model. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.

Claims

1. A brushhead assembly, comprising:

a fixed seat;

the toothbrush head body is movably connected to the fixed seat and can move in a first direction; and

an adjustment assembly, the adjustment assembly comprising:

the first elastic piece is deformable and arranged on the fixed seat, and one end of the first elastic piece is abutted against the brush head body so as to weaken the movement of the brush head body in a first direction;

the limiting part is connected to the fixing seat in an adjustable mode, and the limiting part is abutted to the other end of the first elastic part.

2. The brush head assembly of claim 1, wherein a limiting assembly is disposed between the holder and the brush head body, the limiting assembly comprising:

the first limiting plate is fixed on the fixed seat;

the second limiting plate is fixed on the brush head body and can be abutted against the first limiting plate, so that the moving range of the fixing seat is limited.

3. The brush head assembly of claim 1, wherein the holder defines a first channel extending through an end of the holder adjacent to the brush head body, and the first resilient member is disposed in the first channel.

4. The brush head assembly of claim 3, wherein a push plate is slidably connected in the first channel, and two end surfaces of the push plate respectively abut against the limiting member and the first elastic member.

5. The brush head assembly of claim 2, wherein a support plate is disposed between the fixed base and the brush head body, and two end surfaces of the support plate respectively abut against the fixed base and the brush head body.

6. The brush head assembly of claim 4, wherein the holder comprises:

the first seat is movably connected with the brush head body, and a first channel is arranged in the first seat;

the second seat is rotatably connected to one end, far away from the brush head body, of the first seat, so that the second seat can rotate around a shaft, and the second seat is connected with the limiting part in an adjustable mode.

7. The brush head assembly of claim 6, wherein a synchronizing wheel is coupled to the second frame and is fixedly coupled to the first frame.

8. A brush head assembly according to claim 6, characterised in that said first seat is provided with:

the second channel penetrates to one end close to the brush head body;

and the second elastic piece is arranged in the second channel and is abutted against the supporting plate.

9. A brush head assembly according to claim 8, characterized in that said first and second elastic members are embodied as springs; the limiting part is specifically a screw, and the screw is connected to the second seat through threads.

10. A polishing pad scrubbing apparatus, comprising:

a brushhead assembly, which is the brushhead assembly of any one of claims 1 to 9.