CN215902335U - Ultrasonic cleaning device for silicon component - Google Patents
Ultrasonic cleaning device for silicon component Download PDFInfo
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- CN215902335U CN215902335U CN202122068501.1U CN202122068501U CN215902335U CN 215902335 U CN215902335 U CN 215902335U CN 202122068501 U CN202122068501 U CN 202122068501U CN 215902335 U CN215902335 U CN 215902335U
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- silicon
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- silicon part
- frame
- ultrasonic cleaning
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Abstract
The utility model discloses an ultrasonic cleaning device for a silicon part, which comprises a cleaning machine body, a cleaning tank arranged on the cleaning machine body and used for containing cleaning liquid, and ultrasonic generators arranged on two sides of the cleaning tank and used for sending ultrasonic waves to clean the silicon part, wherein an accommodating frame used for accommodating the silicon part is detachably arranged on the cleaning tank, and a silicon part rotating device used for driving the silicon part on the accommodating frame to rotate and clean is arranged at the bottom end in the cleaning tank; according to the utility model, the silicon part rotating device is arranged to drive the silicon part on the containing frame to rotate, so that all positions of the silicon part can be cleaned in the cleaning process, the problem that the contact position of the silicon part and the containing frame cannot be effectively cleaned is prevented, the cleaning efficiency is improved, and the cleaning effect is better.
Description
Technical Field
The utility model relates to the technical field of semiconductors, in particular to an ultrasonic cleaning device for a silicon component.
Background
The silicon part used for chip etching has residues or dirt on the processing surface of the processes such as grinding, polishing, etching and the like, if the silicon part is not cleaned in time, the residues can be remained on the surface to finally prevent the silicon part from being removed, so that the cleanliness of the product is poor, and the etching effect of a chip etching machine for bombarding the chip is influenced. Therefore, the silicon parts need to be cleaned to remove the unwanted substances adhered to the surfaces of the silicon parts, thereby ensuring the cleanness and purity of the silicon parts. Generally, silicon parts are cleaned by an ultrasonic cleaning machine, but the traditional ultrasonic cleaning machine is fixed when the silicon parts are placed, and the contact positions of the silicon parts and the ultrasonic cleaning machine cannot be effectively cleaned, so that an ultrasonic cleaning device capable of effectively cleaning the silicon parts is needed.
SUMMERY OF THE UTILITY MODEL
Therefore, in order to solve the above problems, the present invention provides an ultrasonic cleaning apparatus for a silicon member.
In order to achieve the purpose, the technical scheme of the utility model is to provide an ultrasonic cleaning device for a silicon part, which comprises a cleaning machine body, a cleaning tank arranged on the cleaning machine body and used for containing cleaning liquid, and ultrasonic generators arranged on two sides of the cleaning tank and used for sending out ultrasonic waves to clean the silicon part, wherein an accommodating frame used for accommodating the silicon part is detachably arranged on the cleaning tank, and a silicon part rotating device used for driving the silicon part on the accommodating frame to rotate for cleaning is arranged at the bottom end in the cleaning tank.
The further improvement is that: silicon part rotating device is including locating rotating seat, rotatable locating on the bottom in the washing tank be used for driving on the rotating seat hold the frame on the silicon part rotate carry out abluent live-rollers, locate be used for the drive on the cleaning machine body live-roller pivoted rotation drive subassembly, locate be located the rotating seat both ends on the washing tank bottom end and be used for placing hold the frame and drive hold the frame and be close to the live-rollers or keep away from the lift rack of live-rollers.
The further improvement is that: the rotation driving assembly comprises a rotation motor and a bevel gear transmission set, wherein the rotation motor is used for driving the rotation roller to rotate, and the bevel gear transmission set is arranged between the rotation roller and the rotation motor and is used for changing the rotation direction of the rotation motor.
The further improvement is that: the lifting rack comprises at least two waterproof electric telescopic rods arranged at the inner bottom end of the cleaning tank and a cleaning placing rod arranged at the output end of each waterproof electric telescopic rod and used for supporting the containing rack.
The further improvement is that: the accommodating frame is provided with at least two supporting rods for supporting the silicon parts, and the supporting rods can be movably arranged on the accommodating frame to adapt to the silicon parts with different specifications.
The further improvement is that: the accommodating frame is provided with a pair of supporting moving grooves for the supporting rods to move, and the two ends of the supporting rods are in threaded connection with supporting fixing caps for fixing the supporting rods on the supporting moving grooves.
The further improvement is that: and a support graduated scale for determining the moving distance of the support rod on the support moving groove is arranged on one side of the support moving groove on the containing frame.
The further improvement is that: the supporting rod is provided with a plurality of supporting and separating plates which are used for simultaneously placing a plurality of silicon components on the supporting rod and separating the silicon components.
The further improvement is that: and positioning devices for respectively positioning the side edges of the silicon parts are arranged at the two ends of the accommodating frame.
The further improvement is that: the positioning device comprises at least one pair of positioning moving grooves arranged on the containing frame and positioning rods movably arranged on any pair of positioning moving grooves, the positioning moving grooves incline upwards from inside to outside, and the specifications of the positioning moving grooves on the inner side and the outer side of the positioning moving grooves are gradually increased.
The further improvement is that: and the two ends of the positioning rod are in threaded connection with positioning fixing caps used for fixing the positioning rod on the positioning moving groove.
The further improvement is that: and a positioning graduated scale for determining the moving distance of the positioning rod on the positioning moving groove is arranged on one side of the positioning moving groove on the containing frame.
The further improvement is that: the positioning rod is provided with a plurality of positioning separation plates for simultaneously arranging a plurality of silicon components on the positioning rod to separate the silicon components.
The further improvement is that: the accommodating frame is provided with a handle for conveniently lifting the accommodating frame, and the accommodating frame comprises an accommodating base and an accommodating groove which vertically penetrates through the accommodating base and is used for accommodating the silicon part.
The ultrasonic cleaning device for the silicon part has the following beneficial effects:
1. according to the utility model, the silicon part rotating device is arranged, and the silicon part rotating device drives the silicon part on the containing frame to rotate, so that all positions of the silicon part can be cleaned in the cleaning process, the problem that the contact position of the silicon part and the containing frame cannot be effectively cleaned is prevented, the cleaning efficiency is improved, and the cleaning effect is better.
2. According to the utility model, the containing frame arranged on the cleaning and placing rod is driven to lift through the waterproof electric telescopic rod, so that the silicon part arranged in the containing frame can just abut against the rotating roller, the rotating roller can better drive the silicon part to rotate on the containing frame, and the situation that the silicon part is ejected out of the containing frame by the rotating roller is prevented.
3. According to the utility model, by arranging the supporting rods and the supporting moving grooves and moving and adjusting the positions of the supporting rods on the supporting moving grooves to support silicon parts with different specifications, the silicon parts are prevented from being unstably placed due to the small distance between the supporting rods when a larger silicon part is placed, and the silicon parts are prevented from being damaged due to the collision between the lower ends of the supporting rods and external articles when the silicon parts are placed due to the larger distance between the supporting rods when a smaller silicon part is placed, or the silicon parts cannot be completely supported and fall off due to shaking in the process of carrying the silicon parts, so that the cleaning device can be suitable for the silicon parts with various specifications, and the best cleaning effect can be achieved for cleaning various silicon parts.
4. According to the utility model, the supporting and separating plate is arranged on the supporting rod, so that the silicon parts can be well separated when a plurality of silicon parts are simultaneously arranged on the supporting rod, and the risk of collision and scratch between adjacent silicon parts is prevented.
5. The positioning rod and the positioning moving groove are arranged, and the positioning rod is moved and adjusted on the positioning moving groove to position the side edges of the silicon parts with different specifications, so that the silicon parts are prevented from being unstable in placement and damaged due to shaking collision caused by the fact that the positioning function cannot be achieved when the silicon parts are placed, and the silicon parts can be rotated more stably in the rotating process.
6. According to the utility model, the positioning separation plate is arranged on the positioning rod, so that the silicon parts can be well separated when the silicon parts are simultaneously arranged on the positioning rod, and the risk of collision and scratch between the adjacent silicon parts is prevented.
7. According to the utility model, by arranging the supporting graduated scale and the positioning graduated scale, the positions of the supporting rod and the positioning rod on the supporting moving groove and the positioning moving groove respectively can be better determined, so that the safety of placing the silicon part is ensured.
Drawings
FIG. 1 is a schematic view of the structure of the cleaning tank of the present invention;
FIG. 2 is a schematic view of the receiving rack of the present invention;
FIG. 3 is a schematic cross-sectional view taken along line A-A of FIG. 1;
FIG. 4 is a schematic view of the present invention with a handle;
FIG. 5 is a schematic view of the structure of the receiving rack of the present invention;
fig. 6 is a plan view of the receiving rack of the present invention.
Detailed Description
The following description of the embodiments of the present invention will be made with reference to the accompanying drawings. The following examples are only for illustrating the technical solutions of the present invention more clearly, and the protection scope of the present invention is not limited thereby.
Referring to fig. 1 to 6, an ultrasonic cleaning apparatus for silicon parts includes a cleaning machine body 3, a cleaning tank 31 disposed on the cleaning machine body 3 for containing a cleaning solution, and an ultrasonic generator 32 disposed on two sides of the cleaning tank 31 for emitting ultrasonic waves to clean silicon parts, wherein an accommodating frame 1 for accommodating silicon parts is detachably disposed on the cleaning tank 31, and a silicon part rotating device for driving the silicon parts on the accommodating frame 1 to rotate for cleaning is disposed at an inner bottom end of the cleaning tank 31;
the silicon part rotating device comprises a rotating seat 33 arranged at the inner bottom end of the cleaning tank 31, a rotating roller 34 which is rotatably arranged on the rotating seat 33 and used for driving the silicon part on the containing frame 1 to rotate for cleaning, a rotating driving assembly arranged on the cleaning machine body 3 and used for driving the rotating roller 34 to rotate, and a lifting placing frame which is arranged at the inner bottom end of the cleaning tank 31, is positioned at the two ends of the rotating seat and used for placing the containing frame 1 and driving the containing frame to be close to the rotating roller or be far away from the rotating roller;
the rotation driving assembly comprises a rotation motor 37 for driving the rotation roller 34 to rotate, and a bevel gear transmission set arranged between the rotation roller 34 and the rotation motor 37 and used for changing the rotation direction of the rotation motor 37, wherein the bevel gear transmission set comprises a plurality of bevel gears 35 and a plurality of transmission rods 36, the rotation direction of the rotation motor 37 is changed through the matching transmission between a plurality of groups of transmission rods 36 and the bevel gears 35, and the transmission relationship between the bevel gear set 35 and the transmission rods 36 is not described again for the prior art;
the lifting rack comprises at least two waterproof electric telescopic rods 38 arranged at the inner bottom end of the cleaning tank and a cleaning placing rod 39 arranged at the output end of the waterproof electric telescopic rods 38 and used for supporting the containing frame 1, the containing frame 1 arranged on the cleaning placing rod 39 is driven to lift through the waterproof electric telescopic rods 38, so that a silicon part placed in the containing frame 1 can be just abutted against the rotating roller 34, the rotating roller 34 can better drive the silicon part to rotate on the containing frame, and the silicon part is prevented from being ejected out of the containing frame by the rotating roller 34;
the accommodating frame 1 is provided with a handle 2 for conveniently lifting the accommodating frame, the accommodating frame 1 comprises an accommodating base 11 and an accommodating groove 12 which vertically penetrates through the accommodating base 11 and is used for accommodating a silicon part, and the rotating roller extends into the accommodating groove 12 to rotate the silicon part in the accommodating frame 1;
the accommodating frame 1 is provided with at least two supporting rods 131 for supporting silicon components, the supporting rods 131 are movably arranged on the accommodating frame 1 to be suitable for silicon components with different specifications, the accommodating frame 1 is provided with a pair of supporting moving grooves 132 for the supporting rods 131 to move, and two ends of the supporting rods 131 are in threaded connection with supporting fixing caps 133 for fixing the supporting rods 131 on the supporting moving grooves 132; a support scale 134 for determining the moving distance of the support rod 131 on the support moving groove 132 is arranged on one side of the support moving groove 132 on the accommodating frame 1; a plurality of supporting and separating plates 135 for separating silicon parts from each other when the plurality of silicon parts are simultaneously placed on the supporting rod 131 are disposed on the supporting rod 131;
referring to fig. 5, each pair of the supporting moving grooves 132 is formed by symmetrically arranging two supporting moving grooves 132 at both sides of the accommodating frame 1, when silicon parts are placed, the two supporting rods 131 are spaced on the respective supporting moving grooves 132 by a supporting scale 134, the spacing between the two supporting rods 131 is adjusted, and then the supporting fixing caps 133 at both ends of the supporting rods 131 are locked, so as to support the silicon parts of different specifications, prevent the silicon parts from being unstably placed due to the small spacing between the two supporting rods 131 when a large silicon part is placed, prevent the lower end of the small silicon part from being damaged due to collision between the silicon part and an external object when the small silicon part is placed due to the large spacing between the two supporting rods 131, or prevent the small silicon part from falling due to shaking during the transportation of the silicon part, so that the cleaning device can adapt to the silicon parts of various specifications, the best cleaning effect can be achieved for cleaning various silicon parts;
the two ends of the accommodating frame 1 are provided with positioning devices for respectively positioning the side edges of the silicon parts, each positioning device comprises at least one pair of positioning moving grooves 141 arranged on the accommodating frame 1 and a positioning rod 142 movably arranged on any pair of positioning moving grooves 141, the positioning moving grooves 141 are inclined upwards from inside to outside, and the specification of the positioning moving grooves 141 on the inner side and the positioning moving grooves 141 on the outer side is gradually increased; two ends of the positioning rod 142 are in threaded connection with positioning fixing caps 143 for fixing the positioning rod 142 on the positioning moving grooves 141; a positioning scale 144 for determining the moving distance of the positioning rod 142 on the positioning moving groove 141 is arranged on one side of the accommodating frame 1 on the positioning moving groove 141; a plurality of positioning separation plates 145 for separating a plurality of silicon members from each other by simultaneously placing the silicon members on the positioning rod 142 are provided on the positioning rod 142;
referring to fig. 5, in the embodiment of the present invention, there are two pairs of positioning moving grooves 141, each pair of positioning moving grooves 141 includes two positioning moving grooves 141 symmetrically disposed on two sides of the accommodating frame 1, different positioning moving grooves 141 are selected according to silicon components of different specifications, when a silicon component is placed, a distance between two positioning rods 142 on the respective selected positioning moving groove 141 is determined by a positioning scale 144, then the distance between the two positioning rods 142 is adjusted, and then positioning fixing caps 143 at two ends of the positioning rods 142 are locked to position the sides of the silicon component of different specifications, so as to prevent the silicon component from being placed unstably due to mismatch between the two positioning rods 142 and the silicon component, which may cause shaking collision and damage of the silicon component, and ensure that the silicon component may rotate more stably during a rotation cleaning process.
The working principle is as follows: the support rod 131 and the positioning rod 142 on the containing frame 1 are adjusted to adapt to the position of a silicon part to be contained, then the silicon part is placed in the containing frame 1, cleaning liquid is injected into the cleaning tank 3, the lifting containing frame in the cleaning tank 3 is lifted, the containing frame 1 containing the silicon part is placed on the lifting containing frame, the lifting containing frame is controlled to descend until the silicon part in the containing frame is just abutted to the rotating roller 34, the rotating motor 37 is started to drive the rotating roller 34 to rotate, the ultrasonic generator 32 is started to start to rotate and clean the silicon part, when the cleaning is completed, the rotating motor 37 and the ultrasonic generator 32 are stopped to operate, the lifting containing frame 1 is driven to lift, the containing frame 1 is taken down, and finally the cleaned silicon part is taken out from the containing frame 1.
While there have been shown and described what are at present considered to be the fundamental principles of the utility model and its essential features and advantages, it will be understood by those skilled in the art that the utility model is not limited by the embodiments described above, which are included to illustrate the principles of the utility model, but that various changes and modifications may be made therein without departing from the spirit and scope of the utility model as defined by the appended claims and their equivalents.
Claims (14)
1. The utility model provides an ultrasonic cleaning device of silicon part, includes the cleaning machine body, locates be used for holding the washing tank of washing liquid on the cleaning machine body, locate be used for sending the supersonic generator of ultrasonic cleaning silicon part on the washing tank both sides, its characterized in that: the cleaning tank is detachably provided with a containing frame used for containing a silicon part, and the bottom end in the cleaning tank is provided with a silicon part rotating device used for driving the silicon part on the containing frame to rotate for cleaning.
2. An ultrasonic cleaning apparatus for a silicon part according to claim 1, characterized in that: silicon part rotating device is including locating rotating seat, rotatable locating on the bottom in the washing tank be used for driving on the rotating seat hold the frame on the silicon part rotate carry out abluent live-rollers, locate be used for the drive on the cleaning machine body live-roller pivoted rotation drive subassembly, locate be located the rotating seat both ends on the washing tank bottom end and be used for placing hold the frame and drive hold the frame and be close to the live-rollers or keep away from the lift rack of live-rollers.
3. An ultrasonic cleaning apparatus for a silicon part according to claim 2, characterized in that: the rotation driving assembly comprises a rotation motor and a bevel gear transmission set, wherein the rotation motor is used for driving the rotation roller to rotate, and the bevel gear transmission set is arranged between the rotation roller and the rotation motor and is used for changing the rotation direction of the rotation motor.
4. An ultrasonic cleaning apparatus for a silicon part according to claim 2, characterized in that: the lifting rack comprises at least two waterproof electric telescopic rods arranged at the inner bottom end of the cleaning tank and a cleaning placing rod arranged at the output end of each waterproof electric telescopic rod and used for supporting the containing rack.
5. An ultrasonic cleaning apparatus for a silicon part according to claim 1, characterized in that: the accommodating frame is provided with at least two supporting rods for supporting the silicon parts, and the supporting rods can be movably arranged on the accommodating frame to adapt to the silicon parts with different specifications.
6. An ultrasonic cleaning apparatus for a silicon part according to claim 5: the accommodating frame is provided with a pair of supporting moving grooves for the supporting rods to move, and the two ends of the supporting rods are in threaded connection with supporting fixing caps for fixing the supporting rods on the supporting moving grooves.
7. An ultrasonic cleaning apparatus for a silicon part according to claim 6, wherein: and a support graduated scale for determining the moving distance of the support rod on the support moving groove is arranged on one side of the support moving groove on the containing frame.
8. An ultrasonic cleaning apparatus for a silicon part according to claim 5, wherein: the supporting rod is provided with a plurality of supporting and separating plates which are used for simultaneously placing a plurality of silicon components on the supporting rod and separating the silicon components.
9. An ultrasonic cleaning apparatus for a silicon part according to claim 5, wherein: and positioning devices for respectively positioning the side edges of the silicon parts are arranged at the two ends of the accommodating frame.
10. An ultrasonic cleaning apparatus for a silicon part according to claim 9, wherein: the positioning device comprises at least one pair of positioning moving grooves arranged on the containing frame and positioning rods movably arranged on any pair of positioning moving grooves, the positioning moving grooves incline upwards from inside to outside, and the specifications of the positioning moving grooves on the inner side and the outer side of the positioning moving grooves are gradually increased.
11. An ultrasonic cleaning apparatus for a silicon part according to claim 10, wherein: and the two ends of the positioning rod are in threaded connection with positioning fixing caps used for fixing the positioning rod on the positioning moving groove.
12. An ultrasonic cleaning apparatus for a silicon part according to claim 10, wherein: and a positioning graduated scale for determining the moving distance of the positioning rod on the positioning moving groove is arranged on one side of the positioning moving groove on the containing frame.
13. An ultrasonic cleaning apparatus for a silicon part according to claim 10, wherein: the positioning rod is provided with a plurality of positioning separation plates for simultaneously arranging a plurality of silicon components on the positioning rod to separate the silicon components.
14. An ultrasonic cleaning apparatus for a silicon part according to claim 5, wherein: the accommodating frame is provided with a handle for conveniently lifting the accommodating frame, and the accommodating frame comprises an accommodating base and an accommodating groove which vertically penetrates through the accommodating base and is used for accommodating the silicon part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122068501.1U CN215902335U (en) | 2021-08-30 | 2021-08-30 | Ultrasonic cleaning device for silicon component |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122068501.1U CN215902335U (en) | 2021-08-30 | 2021-08-30 | Ultrasonic cleaning device for silicon component |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215902335U true CN215902335U (en) | 2022-02-25 |
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ID=80293061
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122068501.1U Active CN215902335U (en) | 2021-08-30 | 2021-08-30 | Ultrasonic cleaning device for silicon component |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215902335U (en) |
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2021
- 2021-08-30 CN CN202122068501.1U patent/CN215902335U/en active Active
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