CN215881196U - Double-sided polishing pad replacing device - Google Patents

Abstract

The present disclosure provides a double-sided polishing pad changing device, which includes a bottom frame, a lifting rod, a bracket, at least four cantilevers and a plurality of discs; the lifting rod penetrates into the underframe; the bracket comprises a bottom plate and at least four shafts, the bottom plate is fixed on the lifting rod, and the shafts surround the center of the bottom plate; each cantilever is pivotally sleeved on the shaft and provided with a groove; each tray body is arranged on the upper surface of the cantilever and is used for supporting the double-sided polishing pad, and the thickness of each tray body allows a hand to extend between the double-sided polishing pad and the cantilever; each groove is internally provided with an elastic piece, each elastic piece comprises a cap body and a spring, the cap body is provided with a concave part, the upper end of each spring abuts against the concave part, the lower end of each spring abuts against the groove, and each spring can translate and rotate in the groove; when the double-sided polishing pad is not placed, the cap body exceeds the upper surface of the tray body; when the double-sided polishing pad is placed, the spring is compressed; the elastic elongation of the spring is set such that: when the double-sided polishing pad is pasted, the cap body can extend into the open hole of the double-sided polishing pad, the through hole of the back adhesive protection paper and the medicine supply hole of the upper positioning plate.

Description

Double-sided polishing pad replacing device

Technical Field

The present disclosure relates to the field of semiconductors, and more particularly to a double-sided polishing pad changing apparatus.

Background

Gallium arsenide, indium phosphide and the like, which are second-generation semiconductor materials, have shown increasingly broad application prospects in the fields of mobile phones, infrared optics, satellite communications and the like by virtue of their excellent electronic properties. However, in the production process from the growth of the gallium arsenide crystal to the introduction of the finished gallium arsenide wafer, a series of complicated processes are performed, in which a polishing PAD (PAD) mainly made of polyurethane or non-woven fabric is used in the process of the double-side polishing process having a large size (more than 6 inches) and a high flatness. In the double-sided polishing process, a polishing pad attached to an upper fixed disc of a double-sided polishing machine needs to be replaced periodically, three persons are required to operate at the same time each time when the polishing pad is replaced, two persons stand on two sides of the double-sided polishing machine, two hands respectively hold a pen holder with the same aperture as a medicine supply hole of the upper fixed disc, the position of a hole formed by propping against the polishing pad is consistent with that of the medicine supply hole of the upper fixed disc, namely the hole is aligned (the operation requires that a head part extends into the upper fixed disc to be matched with the upper fixed disc to check whether other holes are aligned, and an arm bends to the upper fixed disc to exert force, so that the operation is particularly strenuous), before the polishing pad is attached, another person needs to repeatedly check whether the hole formed by the polishing pad and the medicine supply holes of the double-sided polishing machine are all aligned, after the operation is confirmed, a piece of gum protective gum paper on the edge of the polishing pad is torn, the polishing pad is evenly and flatly attached to the upper fixed disc of the double-sided polishing machine by using a pressing pad hammer, and the person responsible for tearing the gum protective gum paper of the polishing pad in front hole, until the pasting is completed.

At present, in the double-side polishing process, the pad changing of the upper fixed plate is realized by using the method, the pad pasting method is low in labor efficiency, the pad is easy to deviate when holes are aligned, sometimes, a part of the polishing pad is pasted but the holes are not aligned, the pad needs to be torn again and pasted again, if the pad is folded, the pad can only be scrapped, and a new polishing pad needs to be taken again to be punched and pasted again. Not only wasting material cost, but also wasting labor efficiency.

SUMMERY OF THE UTILITY MODEL

In view of the problems in the background art, it is an object of the present disclosure to provide a double-sided polishing pad exchanging apparatus that can improve double-sided polishing pad attaching efficiency and save labor.

Thus, in some embodiments, a double-sided polishing pad changer includes a base frame, a lift bar, a support, at least four cantilevers, and a plurality of disks; the lifting rod penetrates through the underframe and can lift in the vertical direction; the bracket comprises a bottom plate and at least four shafts, the bottom plate is fixed at the top end of the lifting rod, and the at least four shafts are arranged around the center of the bottom plate at intervals along the circumferential direction; each cantilever is pivotally sleeved on the corresponding shaft so as to be capable of pivoting around the corresponding shaft, and each cantilever is provided with a groove extending linearly; each tray body is arranged on the upper surface corresponding to the tail end of one cantilever and is used for supporting one part of the double-sided polishing pad in the process that the double-sided polishing pad is stuck on the upper positioning disc of the double-sided polishing machine, and the thickness of each tray body is set to allow a hand to extend between the supported double-sided polishing pad and the upper surface corresponding to one cantilever; a plurality of elastic pieces are arranged in each groove, the number of the elastic pieces is equal to the maximum number of the openings of the double-sided polishing pad and the medicine supply holes of the upper positioning plate in the same radial direction, each elastic piece comprises a cap body and a spring, the cap body is provided with a concave part with only an opening at the lower end, the upper end of the spring abuts against the bottom wall of the concave part, the lower end of the spring abuts against the bottom surface of the groove, and the spring of each elastic piece can translate and rotate along the groove in the groove; when the double-sided polishing pad is not placed, the top surface of the cap body of each elastic piece exceeds the upper surfaces of the plurality of disc bodies; when the upper double-sided polishing pad is placed, the spring of each elastic member is compressed, and the cap body of each elastic member is spaced apart from the upper surface of the cantilever or enters the groove; the elastic elongation of the spring of each elastic member is set such that: when the double-sided polishing pad is attached, the cap body can extend into the opening of the double-sided polishing pad, the through hole of the back adhesive protection paper and the medicine supply hole of the upper positioning plate so as to position the double-sided polishing pad and the upper positioning plate relative to each other.

In some embodiments, the base frame includes a base and a support column extending upward from the base, the lift rod penetrates the support column, and the double-sided polishing pad changing apparatus further includes a motor disposed at the support column and connected to the lift rod.

In some embodiments, the lifter is a lead screw.

In some embodiments, the support further comprises a top plate opposite to the bottom plate, two ends of each shaft are respectively fixed to the top plate and the bottom plate, and the upper surface of the top plate is flush with the upper surfaces of the plurality of discs.

In some embodiments, the number of cantilevers is four.

In some embodiments, the circumferential spacing of two adjacent cantilevers when abutted together is less than the circumferential spacing of adjacent openings of a double-sided polishing pad and the circumferential spacing of adjacent dispensing holes of an upper puck.

In some embodiments, each cantilever arm is directly sleeved on a corresponding shaft at the end.

In some embodiments, each cantilever is journaled at an end on a corresponding one of the shafts by a bearing.

In some embodiments, each cantilever is sleeved at an end on a corresponding one of the shafts by a circular ring.

In some embodiments, each of the elastic members further comprises a base plate fixedly connected to a lower end of the spring;

each cantilever is also provided with a channel, the bottom surface of the adjacent groove of the channel is positioned at the two transverse sides of the groove and extends along the groove, and the channel and the groove accommodate the chassis of the corresponding elastic part together, so that the chassis of the corresponding elastic part is limited in the vertical direction and the chassis of the corresponding elastic part is allowed to rotate and translate in the channel and the groove.

The beneficial effects of this disclosure are as follows: in the application, the lifting rod capable of lifting in the up-down direction, the support, the at least four cantilevers capable of pivoting around respective shafts, the plurality of disc bodies and the elastic part capable of stretching in the up-down direction and translating and rotating along the grooves in the cantilevers can be used for completing the pasting of the double-sided polishing pad by only one operator; through the elastic piece, the alignment of the corresponding trompil of two-sided polishing pad and the corresponding confession medicine hole of last positioning disk is easy, convenient, need not to do over again, has improved the quality of pasting of two-sided polishing pad.

Drawings

FIG. 1 is a schematic perspective view of one embodiment of a double-sided polishing pad changing apparatus according to the present disclosure.

FIG. 2 is a top view of a double-sided polishing pad illustrating the distribution of openings in the double-sided polishing pad;

FIG. 3 is a bottom perspective view of the cap of the spring;

FIG. 4 is a schematic view of the positioning of the double-sided polishing pad with the upper puck, wherein the cap of one resilient member is inserted into the opening of the double-sided polishing pad and the drug delivery aperture of the upper puck, and the other resilient member is in a state of being compressed by the double-sided polishing pad;

fig. 5 shows another embodiment of the spring and cantilever.

Wherein the reference numerals are as follows:

100 double-sided polishing pad changing device 6 elastic member

D1 Cap 61 in vertical direction

1 Chassis 611 recess

11 base 611a bottom wall

12 top surface of the supporting column 612

2 lifting rod 62 spring

3 support 63 chassis

31 baseboard 7 motor

32-shaft 8 ring

33 Top plate 200 double-sided polishing pad

331 upper surface 200a opening

4 lower surface of cantilever 200b

41 groove 300 upper positioning disc

411 bottom 300a medicine supply hole

42 upper surface 300b lower surface

43 channel 400 back adhesive protection paper

5 disc 400a perforations

51 upper surface 400b upper surface

Detailed Description

The accompanying drawings illustrate embodiments of the present disclosure and it is to be understood that the disclosed embodiments are merely examples of the disclosure, which can be embodied in various forms, and therefore, specific details disclosed herein are not to be interpreted as limiting, but merely as a basis for the claims and as a representative basis for teaching one skilled in the art to variously employ the present disclosure.

Further, expressions indicating directions (for example, up and down, etc.) used for explaining operations and configurations of respective members in the embodiments are not absolute but relative, and although these indications are appropriate when the respective members are in the positions shown in the drawings, when the positions are changed, the directions should be interpreted differently to correspond to the changes.

Moreover, the use of the terms first, second, etc. are used merely to name components and are not intended to imply that there are interdependencies between these components and the relative importance of these components.

As used herein, a double-sided polishing pad refers to a polishing pad used in a double-sided polishing process.

Referring to fig. 1 to 4, in some embodiments, a double-sided polishing pad exchange apparatus 100 includes a base frame 1, a lift lever 2, a support 3, at least four cantilevers 4, and a plurality of disks 5.

The lift lever 2 is inserted into the chassis 1 and can be raised and lowered in the vertical direction D1.

The bracket 3 includes a base plate 31 fixed to the top end of the lifting rod 2, and at least four shafts 32, the at least four shafts 32 being circumferentially spaced around the center of the base plate 31.

Each of the suspension arms 4 is pivotally fitted to a corresponding one of the shafts 32 to be pivotable about the corresponding one of the shafts 32, and each of the suspension arms 4 is provided with a linearly extending groove 41.

Each of the tray bodies 5 is provided on the upper surface 42 corresponding to the tip of one of the arms 4, and each of the tray bodies 5 serves to support a portion of the double-sided polishing pad 200 during the process of adhering the double-sided polishing pad 200 to the upper positioning plate 300 of the double-sided polishing machine. The thickness of each of the disks 5 (i.e., the interval between the upper surface of the disk 5 and the upper surface 42 of the cantilever 4) is set to allow a hand to be inserted between the supported double-sided polishing pad 200 and the upper surface 42 of a corresponding one of the cantilevers 4.

A plurality of elastic members 6 are provided in each groove 41. The number of the elastic members 6 is equal to the maximum number of the opening holes 200a of the double-sided polishing pad 200 and the supply holes 300a of the upper positioning plate 300 in the same radial direction. Each elastic member 6 includes a cap 61 and a spring 62. The cap body 61 has a recess 611 (refer to fig. 3) whose only lower end is open, the upper end of the spring 62 abuts against the bottom wall 611a of the recess 611 and the lower end of the spring 62 abuts against the bottom surface 411 of the groove 41, and the spring 62 of each elastic member 6 can translate and rotate along the groove 41 within the groove 41.

When the double-sided polishing pad 200 is not placed, the top surface 612 of the cap body 61 of each elastic member 6 exceeds the upper surfaces 51 of the plurality of disks 5; upon placement of the upper double-sided polishing pad 200, the spring 62 of each resilient member 6 is compressed, and the cap body 61 of each resilient member 6 is spaced from the upper surface 42 of the cantilever arm 4 or into the groove 41.

The elastic extension of the spring 62 of each elastic member 6 is set such that: when the double-sided polishing pad 200 is attached, the cap body 61 can be made to protrude into the open hole 200a of the double-sided polishing pad 200, the through hole 400a of the adhesive-backed protective paper 400, and the medicine supply hole 300a of the upper puck 300, so that the double-sided polishing pad 200 and the upper puck 300 are positioned with respect to each other. In other words, the dimension of the cap body 61 in the up-down direction D1 is configured to: the cap body 61 can protrude into the opening hole 200a of the double-side polishing pad 200, pass through the space between the double-side polishing pad 200 and the upper puck 300 of the double-side polisher, and protrude into the supply hole 300a of the upper puck 300.

Referring to fig. 1, 2 and 4, in the operation process, when the operation of attaching the double-sided polishing pad 200 is started, the angle between every two adjacent disks 5 is not greater than 180 degrees (the situation that the unsupported portion of the double-sided polishing pad 200 between the two adjacent disks 5 is too large and the gravity of the unsupported portion generates a pull-down force on the attachment, so that the attachment is not easy to be performed) is avoided, the double-sided polishing pad 200 is placed on the disks 5, the spring 62 of each elastic member 6 is compressed by the double-sided polishing pad 200, and the lifting rod 2 drives the support 3, the at least four cantilevers 4, the disks 5 and all the elastic members 6 to move upwards to approach the upper positioning disk 300; when the lift lever 2 reaches a position where the distance between the lower surface 200b of the double-sided polishing pad 200 and the lower surface 300b of the upper puck 300 is less than the distance between the top surface 612 of the cap body 61 of each elastic member 6 beyond the upper surfaces 51 of the plurality of disks 5 when the double-sided polishing pad 200 is not placed and a prescribed position where the space between the upper surface 400b of the adhesive-backed protective paper 400 on the double-sided polishing pad 200 and the lower surface 300b of the upper puck 300 allows fingers to be inserted to tear the adhesive-backed protective paper 400 on the double-sided polishing pad 200, the operator selects one cantilever arm 4 as the first cantilever arm 4, selects the corresponding one elastic member 6 on the first cantilever arm 4 and holds the cap body 61 of the elastic member 6 with one hand and compresses the spring 62 and lifts and rotates the double-sided polishing pad 200 with the other hand to align the elastic member 6 with one opening 200a of the adjacent double-sided polishing pad 200 and one supply opening 300a of the upper puck 300, thereafter, the elastic member 6 is moved along the groove 41 to align the elastic member 6 with the aligned opening hole 200a of the double-sided polishing pad 200 and the dispensing hole 300a of the upper puck 300; after the three alignment is completed, the held cap body 61 is released, the spring 62 of the elastic member 6 elastically extends, and the spring 62 drives the cap body 61 to extend into the opening 200a of the double-sided polishing pad 200 and the dispensing hole 300a of the upper positioning plate 300 so as to position the double-sided polishing pad 200 and the upper positioning plate 300 relative to each other at the elastic member 6; then, repeating the operation for the next elastic member 6 on the cantilever 4 until the opening hole 200a of the double-sided polishing pad 200 and the dispensing hole 300a of the upper puck 300 on the same radial line are inserted into the cap body 61 of the corresponding elastic member 6 on the first cantilever 4; then pivoting the adjacent second cantilever 4 so that the included angle between the first cantilever 4 and the second cantilever 4 is larger than 90 degrees and the elastic member 6 on the second cantilever 4 has the corresponding opening 200a of the double-sided polishing pad 200 and the corresponding dispensing hole 300a of the upper positioning plate 300, and performing the same operation as the first cantilever 4; thereafter, the adhesive-backed protective paper 400 on the double-sided polishing pad 200 in the corresponding region between the first and second cantilevers 4 and 4 is torn to adhere the double-sided polishing pad 200 in the region to the upper puck 300; then, the adjacent third cantilever arms 4 are pivoted, so that the included angle between the third cantilever arms 4 and the second cantilever arms 4 is larger than 90 degrees, the elastic parts 6 on the third cantilever arms 4 are provided with the corresponding opening holes 200a of the double-sided polishing pads 200 and the corresponding medicine supply holes 300a of the upper positioning plate 300, the same operation as that of the first cantilever arms 4 is carried out, and after all the elastic parts 6 on the third cantilever arms 4 are subjected to the same operation, the back adhesive protection paper 400 on the double-sided polishing pads 200 in the corresponding areas between the third cantilever arms 4 and the second cantilever arms 4 is torn off, so that the double-sided polishing pads 200 in the areas are adhered to the upper positioning plate 300; then, the start lift lever 2 is lowered, and the adhesive-backed protective paper 400 on the double-sided polishing pad 200 in the remaining region is manually torn off, thereby completing the attachment of the double-sided polishing pad 200 in the remaining region.

In the present disclosure, by the lifting lever 2 which can be lifted in the up-down direction D1, the bracket 3, the at least four cantilevers 4 which can be pivoted around the respective shafts 32, the plurality of disk bodies 5, and the elastic member 6 which can be extended and retracted in the up-down direction D1 and can be translated and rotated along the groove 41 in the cantilever 4, the double-sided polishing pad 200 can be attached by only one operator, which improves the attaching efficiency of the double-sided polishing pad 200 and saves labor compared to the background art; through the elastic member 6, the alignment of the corresponding opening hole 200a of the double-sided polishing pad 200 and the corresponding medicine supply hole 300a of the upper puck 300 is easy and convenient, and rework is not required, improving the quality of the attachment of the double-sided polishing pad 200.

In some embodiments, referring to fig. 1, the base frame 1 includes a base 11 and a support post 12, the support post 12 extending upward from the base 11, and the lift pins 2 penetrating the support post 12. The double-sided polishing pad exchanging apparatus 100 further includes a motor 7, and the motor 7 is disposed on the support column 12 and connected to the lifting rod 2. Thereby realizing automation of the lifting rod 2.

In some embodiments, the lifting rod 2 is a lead screw. The lead screw is adopted, so that the lifting position of the lifting rod 2 can be accurately positioned.

In some embodiments, referring to fig. 1, the stand 3 further comprises a top plate 33. The top plate 33 faces the bottom plate 31, both ends of each shaft 32 are fixed to the top plate 33 and the bottom plate 31, respectively, and the upper surface 331 of the top plate 33 is flush with the upper surfaces 51 of the plurality of tray bodies 5. The top plate 33 and the bottom plate 31 are centrally located with respect to the plurality of trays 5, and the top plate 33 and the plurality of trays 5 together serve as a support. Even if the angle between two adjacent disks 5 is larger than 180 degrees, the influence of the aforementioned gravity pair of the double-sided polishing pad 200 on the adhesion due to the large unsupported portion between two adjacent disks 5, which causes a pull-down force, is reduced by the central support of the top plate 33, so that the adhesion is not easily performed.

In some embodiments, referring to fig. 1, there are four cantilevers 4. Two of the four cantilevers 4 are used for the currently attached region of the double-sided polishing pad 200, and the other two partition the non-attached region of the double-sided polishing pad 200 so that the included angle of the non-attached region of the double-sided polishing pad 200 is not more than 180 degrees.

In some embodiments, the circumferential spacing of two adjacent cantilevers 4 when brought together is smaller than the circumferential spacing of adjacent openings 200a of the double-sided polishing pad 200 and the circumferential spacing of adjacent supply holes 300a of the upper puck 300. Thus, the high-precision bonding requirement for positioning one by one in the circumferential direction of the double-sided polishing pad 200 is satisfied.

There are various ways in which each cantilever arm 4 is pivotally mounted to a corresponding axle 32. For example, each cantilever 4 is directly fitted at the end on a corresponding one of the shafts 32. Each cantilever arm 4 is fitted at its end on a corresponding one of the shafts 32, for example, by means of a bearing (not shown). For example, as shown in fig. 1, each cantilever 4 is fitted at its end to a corresponding one of the shafts 32 via a ring 8.

In some embodiments, referring to fig. 5, each elastic member 6 further includes a bottom plate 63, and the bottom plate 63 is fixedly coupled to a lower end of the spring 62. Each arm 4 is further provided with a channel 43, the channel 43 being adjacent to the bottom surface 411 of the groove 41, located on both lateral sides of the groove 41 and extending along the groove 41, the channel 43 receiving the chassis 63 of the corresponding elastic element 6 together with the groove 41, so that the chassis 63 of the corresponding elastic element 6 is restrained in the up-down direction D1 and allows the chassis 63 of the corresponding elastic element 6 to rotate and translate in the channel 43 and the groove 41. Thereby preventing the elastic member 6 from tipping when the double-sided polishing pad 200 is moved in the sticking operation after the double-sided polishing pad 200 is placed thereon.

The above detailed description is used to describe a number of exemplary embodiments, but is not intended to limit the combinations explicitly disclosed herein. Thus, unless otherwise specified, various features disclosed herein can be combined together to form a number of additional combinations that are not shown for the sake of brevity.

Claims (10)

1. A double-sided polishing pad changing apparatus (100) characterized in that,

comprises an underframe (1), a lifting rod (2), a bracket (3), at least four cantilevers (4) and a plurality of disc bodies (5);

the lifting rod (2) penetrates into the chassis (1) and can be lifted in the vertical direction (D1);

the support (3) comprises a bottom plate (31) and at least four shafts (32), the bottom plate (31) is fixed at the top end of the lifting rod (2), and the at least four shafts (32) are arranged around the center of the bottom plate (31) at intervals along the circumferential direction;

each cantilever (4) is pivotally sleeved on the corresponding shaft (32) so as to be capable of pivoting around the corresponding shaft (32), and each cantilever (4) is provided with a groove (41) extending linearly;

each of the tray bodies (5) is provided on the upper surface (42) corresponding to the tip of one of the cantilevers (4), each of the tray bodies (5) is used to support a part of the double-sided polishing pad (200) in the process of adhering the double-sided polishing pad (200) to the upper positioning plate (300) of the double-sided polishing machine, and the thickness of each of the tray bodies (5) is set to allow a hand to be inserted between the supported double-sided polishing pad (200) and the upper surface (42) corresponding to one of the cantilevers (4);

a plurality of elastic members (6) are arranged in each groove (41), the number of the elastic members (6) is equal to the maximum number of the opening holes (200a) of the double-sided polishing pad (200) and the medicine supply holes (300a) of the upper positioning plate (300) in the same radial direction, each elastic member (6) comprises a cap body (61) and a spring (62), the cap body (61) is provided with a concave part (611) only with an opening at the lower end, the upper end of the spring (62) abuts against the bottom wall (611a) of the concave part (611) while the lower end of the spring (62) abuts against the bottom surface (411) of the groove (41), and the spring (62) of each elastic member (6) can translate and rotate along the groove (41) in the groove (41);

when the double-sided polishing pad (200) is not placed, the top surface (612) of the cap body (61) of each elastic member (6) exceeds the upper surfaces (51) of the plurality of disc bodies (5); when the double-sided polishing pad (200) is placed, the spring (62) of each elastic member (6) is compressed, and the cap body (61) of each elastic member (6) is spaced apart from the upper surface (42) of the cantilever (4) or enters the groove (41);

the elastic extension of the spring (62) of each elastic member (6) is set such that: when the double-sided polishing pad (200) is attached, the cap body (61) can be made to extend into the open hole (200a) of the double-sided polishing pad (200), the through hole (400a) of the adhesive-backed protective paper (400), and the medicine supply hole (300a) of the upper positioning plate (300) to position the double-sided polishing pad (200) and the upper positioning plate (300) relative to each other.

2. The double-sided polishing pad changing apparatus (100) according to claim 1,

the chassis (1) comprises a base (11) and a supporting column (12), the supporting column (12) extends upwards from the base (11), the lifting rod (2) penetrates through the supporting column (12),

the double-sided polishing pad replacing device (100) further comprises a motor (7), and the motor (7) is arranged on the supporting column (12) and connected to the lifting rod (2).

3. The double-sided polishing pad changing apparatus (100) according to claim 2, wherein the lifting rod (2) is a lead screw.

4. The double-sided polishing pad changing apparatus (100) according to claim 1,

the bracket (3) also comprises a top plate (33),

the top plate (33) is opposite to the bottom plate (31), two ends of each shaft (32) are respectively fixed on the top plate (33) and the bottom plate (31), and the upper surface (331) of the top plate (33) is flush with the upper surfaces (51) of the plurality of disc bodies (5).

5. The double-sided polishing pad changing apparatus (100) according to claim 1, wherein the number of cantilevers (4) is four.

6. The double-sided polishing pad changing apparatus (100) according to claim 1,

the interval in the circumferential direction when two adjacent cantilevers (4) are abutted together is smaller than the interval in the circumferential direction of adjacent openings (200a) of the double-sided polishing pad (200) and the interval in the circumferential direction of adjacent medicine supply holes (300a) of the upper puck (300).

7. A double-sided polishing pad changing apparatus (100) according to claim 1, wherein each cantilever arm (4) is directly fitted at an end portion on a corresponding one of the shafts (32).

8. A double-sided polishing pad changing apparatus (100) according to claim 1, wherein each cantilever arm (4) is fitted at an end portion thereof to a corresponding one of the shafts (32) through a bearing.

9. The double-sided polishing pad changing apparatus (100) according to claim 1,

the end part of each cantilever (4) is sleeved on a corresponding shaft (32) through a circular ring (8).

10. The double-sided polishing pad changing apparatus (100) according to claim 1,

each elastic part (6) also comprises a chassis (63), and the chassis (63) is fixedly connected with the lower end of the spring (62);

each cantilever (4) is also provided with a channel (43), the channel (43) is adjacent to the bottom surface (411) of the groove (41), is positioned at two transverse sides of the groove (41) and extends along the groove (41), and the channel (43) and the groove (41) are used for accommodating the chassis (63) of the corresponding elastic piece (6) together, so that the chassis (63) of the corresponding elastic piece (6) is limited in the up-down direction (D1) and the chassis (63) of the corresponding elastic piece (6) is allowed to rotate and translate in the channel (43) and the groove (41).

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