CN215816819U - Pulse width adjustable laser components - Google Patents

Pulse width adjustable laser components Download PDF

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CN215816819U
CN215816819U CN202121681766.2U CN202121681766U CN215816819U CN 215816819 U CN215816819 U CN 215816819U CN 202121681766 U CN202121681766 U CN 202121681766U CN 215816819 U CN215816819 U CN 215816819U
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frequency
pulse width
doubling
laser
switch
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刘学胜
刘洪才
贾文增
董霖
杨博义
刘树
梅凯
葛廷武
王智勇
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Beijing University of Technology
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Beijing University of Technology
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Abstract

The embodiment of the utility model relates to the technical field of lasers and provides a laser assembly with an adjustable pulse width. The laser assembly with adjustable pulse width provided by the embodiment of the utility model comprises: the frequency doubling laser comprises two paths of frequency doubling lasers, wherein each path of frequency doubling laser is electrically connected with a Q-switching driving source, and each path of frequency doubling laser comprises a frequency doubling crystal; the upper computer is electrically connected with the two Q-switching drive sources respectively so as to adjust the output delay of the two Q-switching drive sources; and the beam combining module is positioned at the downstream of the two frequency-doubling lasers and is used for carrying out two-way synthesis on the linear polarization signal light output by the two frequency-doubling lasers. According to the laser component with the adjustable pulse width, which is provided by the embodiment of the utility model, the modes of intracavity frequency doubling and two-way polarization beam combination are adopted, and the relative delay of two paths of Q-switched drive sources is accurately controlled through the upper computer, so that the large-range and accurate adjustment of the pulse width of the light pulse of the combined beam is realized.

Description

Laser assembly with adjustable pulse width
Technical Field
The utility model relates to the technical field of lasers, in particular to a laser assembly with adjustable pulse width.
Background
With the rapid development of high-brightness semiconductor side pumping laser technology, Q-switching technology and nonlinear frequency conversion technology, the all-solid-state laser is making continuous breakthrough in the direction of high power, high stability, wide band and tuning. The semiconductor pumped all-solid-state laser is widely applied to the fields of scientific research, military and national defense, laser medical treatment, laser processing, laser display and the like. Meanwhile, the development of the industry puts higher and higher requirements on the reliability and stability of the performance of the laser, the convenience of operation, the compact and portable structure, the engineering and the like.
In some application occasions, such as welding, cutting or precision machining of aluminum, copper and alloys thereof, composite materials and the like, a laser is required to realize pulse output, and the pulse width of the laser is required to be accurately adjusted in a large range, so that the machining quality and the machining efficiency of the materials are improved. However, the existing pulse width adjusting technology generally has the obvious defects of narrow adjusting range, low precision, complex structure, high difficulty in installation and adjustment, insufficient power, poor stability and the like, and the actual application scene also puts higher requirements on the working wavelength range and the polarization mode of the laser, so that the frequency doubling laser capable of realizing large-range and precise adjustment on the laser pulse width is imperative to be provided.
SUMMERY OF THE UTILITY MODEL
In order to solve the problems of narrow pulse width adjustment range and low precision in the prior art, the embodiment of the utility model provides a laser assembly with adjustable pulse width.
According to an embodiment of the present invention, an embodiment of the present invention provides a pulse width tunable laser assembly, including: the frequency doubling laser comprises two paths of frequency doubling lasers, wherein each path of frequency doubling laser is electrically connected with a Q-switching driving source, and each path of frequency doubling laser comprises a frequency doubling crystal; the upper computer is electrically connected with the two Q-switching drive sources respectively so as to adjust the output delay of the two Q-switching drive sources; and the beam combining module is positioned at the downstream of the two frequency-doubling lasers and is used for carrying out two-way synthesis on the linear polarization signal light output by the two frequency-doubling lasers.
According to one embodiment of the present invention, each of the frequency-doubled lasers includes: the device comprises a rear cavity mirror, a polarization element, a first Q-switching switch, a DPSS pumping gain module, a second Q-switching switch, a harmonic mirror, a frequency doubling crystal and an output cavity mirror which are sequentially arranged according to the propagation direction of an optical path, wherein the first Q-switching switch and the second Q-switching switch are mutually perpendicular and orthogonal in a plane perpendicular to the propagation direction of the optical path; and the DPSS pumping gain module is equal to the optical paths between the rear cavity mirror and the output cavity mirror.
According to an embodiment of the present invention, the Q-switching driving source is electrically connected to the first Q-switching switch and the second Q-switching switch respectively to control the on and off of the first Q-switching switch and the second Q-switching switch, the first Q-switching switch and the second Q-switching switch are acousto-optic switches or electro-optic switches, and the first Q-switching switch and the second Q-switching switch are heat-dissipating in an air cooling manner or a water cooling manner.
According to one embodiment of the utility model, the rear cavity mirror is plated with a high reflection film of fundamental frequency light.
According to one embodiment of the utility model, the harmonic mirror is coated with a high-transmission film for fundamental frequency light on the first end face and a high-reflection film for frequency doubling harmonic on the second end face.
According to one embodiment of the utility model, the frequency doubling crystal is arranged close to the output cavity mirror, the frequency doubling crystal is a nonlinear LBO or BBO crystal, and antireflection films of fundamental frequency light and frequency doubling harmonic are plated on the first end face and the second end face of the frequency doubling crystal.
According to one embodiment of the utility model, the first end face of the output cavity mirror is coated with a high reflection film for fundamental frequency light, and the second end face is coated with a high transmission film for frequency doubling harmonic.
According to one embodiment of the utility model, the DPSS pump gain module adopts a diode array side-pumping structure, and the heat dissipation manner of the DPSS pump gain module adopts a water cooling manner.
According to an embodiment of the utility model, the beam combining module comprises: the polarization prism is positioned at the downstream of the output cavity mirror of one path of the frequency doubling laser; the plane total reflection mirror is positioned at the downstream of the output cavity mirror of the other path of the frequency doubling laser; wherein the beam combining module is configured to: and the polarization direction of the linearly polarized signal light entering the polarization prism is perpendicular to the polarization direction of the linearly polarized signal light entering the polarization prism after passing through the plane total reflection mirror.
According to an embodiment of the present invention, the beam combining module further includes: 1/2 wave plate, wherein the 1/2 wave plate is located between the plane total reflection mirror and the output cavity mirror, and is used for adjusting the polarization direction of the linearly polarized signal light output by the output cavity mirror.
According to the laser component with the adjustable pulse width, which is provided by the embodiment of the utility model, the modes of intracavity frequency doubling and two-way polarization beam combination are adopted, and the relative delay of two paths of Q-switched drive sources is accurately controlled through the upper computer, so that the large-range and accurate adjustment of the pulse width of the light pulse of the combined beam is realized.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a pulse width adjustable laser module according to an embodiment of the present invention.
Description of reference numerals:
1-a rear cavity mirror; 3-a polarizing element; 5-a first Q-switch; a 7-DPSS pump gain module; 9-a second Q-switch; 11-harmonic mirrors; 13-frequency doubling crystals; 15-an output cavity mirror; 17-Q-switched drive source; 19-an upper computer; 20-1/2 wave plates; 21-plane total reflection mirror; 22-a polarizing prism; a-a laser light path; a B-radio frequency signal transmission line; c-serial port patch cords; d-the optical path propagation direction; e-sound field direction in the first Q-switch and the second Q-switch.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; either directly or indirectly through intervening media, or through both elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In addition, in the description of the present invention, unless otherwise specified, "plurality", "plural groups" means two or more, and "several", "several groups" means one or more.
Referring now to fig. 1, an embodiment of the present invention will be described. It should be understood that the following description is only exemplary embodiments of the present invention and does not constitute any particular limitation of the present invention. It should be noted here that reference sign a in the figure shows the laser beam path of the laser; reference numeral B, C shows a radio frequency signal transmission line and a serial port patch cord for electrical connection between components; reference numeral D shows an optical path propagation direction; reference character E shows the sound field directions in the first Q-switch and the second Q-switch. It should be understood that the lines and arrows shown in the above-described reference numerals are only for the purpose of illustrating the embodiments and principles of the present invention, and do not limit the present invention in any way.
Fig. 1 is a schematic structural diagram of a pulse width adjustable laser module according to an embodiment of the present invention. As shown in fig. 1, a pulse width adjustable laser assembly provided by an embodiment of the present invention includes: the frequency doubling laser comprises two paths of frequency doubling lasers, wherein each path of frequency doubling laser is respectively and electrically connected with a Q-switching driving source 17, and each path of frequency doubling laser comprises a frequency doubling crystal 13; the upper computer 19 is electrically connected with the two Q-switching drive sources 17 respectively, so that the output time delay of the two Q-switching drive sources 17 is adjusted; and the beam combining module is positioned at the downstream of the two frequency doubling lasers and is used for carrying out two-way synthesis on the linear polarization signal light output by the two frequency doubling lasers.
Specifically, the laser component with adjustable pulse width provided by the embodiment of the utility model is composed of two paths of active Q-switched linear polarization frequency doubling lasers and a polarization beam combining module. The two-path frequency doubling laser adopts a quasi-symmetrical cavity structure, outputs two paths of linear polarized signal light with power close to pulse width through intracavity frequency doubling and a double-switch active Q-switching technology, then carries out two-path synthesis through a beam combining module, and simultaneously realizes the adjustment of the pulse width of the combined beam by controlling the relative delay of the two paths of signal pulses by using an upper computer 19.
According to the laser component with the adjustable pulse width, provided by the embodiment of the utility model, each path of frequency doubling laser is respectively and electrically connected with a Q-switching driving source 17, and each path of pulse signal is respectively controlled by the Q-switching driving source 17. The beam combining module is positioned at the downstream of the two frequency doubling lasers and is used for carrying out two-way synthesis on the linear polarization signal light output by the two frequency doubling lasers. The upper computer 19 is respectively electrically connected with the two Q-switched driving sources 17, the output delay precision of the two Q-switched driving sources 17 can be accurately controlled to reach 1ns through the FPGA and the clock, the relative delay of the two pulse lasers can reach 1000ns, the adjustment of the pulse width of the combined beam is realized, and meanwhile, the polarization direction of the two laser beams is unchanged in the time domain.
In order to adjust the pulse width, the upper computer 19 can precisely control the relative delay (the relative delay should be within the range of the pulse width of the combined pulse) of the two Q-switched driving sources 17 by using a high-speed FPGA technology, that is, the relative delay of the two laser pulses increases the pulse width of the superimposed pulse after the combination with the increase of the relative delay. The pulse width adjusting range of the laser component with the adjustable pulse width is positively correlated with the pulse width of the beam combining pulse, so that when different laser structure parameters are selected, such as different transmission rates of output cavity mirrors, different types of Q-switch and the like, signal light outputs with different pulse widths can be obtained, and different pulse width adjusting ranges can be realized. In addition, the relative delay amount of the two Q-switched driving sources 17 can be accurately controlled through the upper computer 19, and is very small compared with the laser pulse width, so that the technical scheme provided by the utility model has high pulse width adjustment precision, and in the embodiment, the pulse width adjustment of 1ns precision on the hundred-nanosecond laser is realized by adopting acousto-optic Q switching. In addition, when the technical scheme of the utility model is made into an actual product, the module can be used for debugging and fixing, the pulse width can be adjusted only by controlling the upper computer 19, and the operation is convenient and no secondary debugging is needed.
The laser assembly with the adjustable pulse width provided by the embodiment of the utility model adopts intracavity frequency doubling and two-way polarization beam combination, and realizes large-range and accurate adjustment of the pulse width of the combined light pulse by accurately controlling the relative delay of two Q-switched drive sources through an upper computer, wherein the accuracy control is divided into two steps: 1, precision of a gear: 1 ns; the 2 nd gear precision is 10 ps. Meanwhile, the output of high-power frequency doubling laser is realized, and the method is suitable for processing various materials.
Referring to fig. 1, in one embodiment of the present invention, each path of frequency-doubled laser includes: the device comprises a rear cavity mirror 1, a polarization element 3, a first Q-switching switch 5, a DPSS pumping gain module 7, a second Q-switching switch 9, a harmonic mirror 11, a frequency doubling crystal 13 and an output cavity mirror 15 which are sequentially arranged according to an optical path propagation direction D, wherein the first Q-switching switch 5 and the second Q-switching switch 9 are mutually and orthogonally arranged in a plane perpendicular to the optical path propagation direction; the optical path of the DPSS pumping gain module 7 from the rear cavity mirror 1 to the output cavity mirror 15 is equal.
Specifically, in each frequency-doubled laser, a polarization element 3 is disposed downstream of the back cavity mirror 1 in the optical path propagation direction D, and is configured to convert the random linearly polarized signal light passing through the back cavity mirror 1 into a horizontal line deviation.
Specifically, the back cavity mirror 1 is plated with a high reflection film of fundamental frequency light, and further, the back cavity mirror 1 is plated with a high reflection film of 1064 nm.
Further, the polarizing element 3 is a brewster polarizer.
As shown in fig. 1, in one embodiment of the present invention, the Q-switching drive source 17 is electrically connected to the first Q-switching switch 5 and the second Q-switching switch 9, respectively, to control the opening and closing of the first Q-switching switch 5 and the second Q-switching switch 9. Specifically, in one embodiment of the present invention, the first Q-switch 5 and the second Q-switch 9 are acousto-optic switches, and the same Q-switch driving source 17 provides sound field driving signals to ensure the synchronism of the operation of the two switches. In order to achieve the best turn-off effect, the dual acousto-optic Q-switch needs to be ensured to be perpendicularly and orthogonally arranged when being adjusted, so that the optimal matching of the aperture of the fundamental frequency oscillation light and the aperture of the sound field is realized. Further, as shown in fig. 1, E is the direction of the sound field in the first Q-switch 5 and the second Q-switch 9, and the directions of the sound field in the first Q-switch 5 and the second Q-switch 9 are orthogonal to each other.
In one embodiment of the present invention, the first Q-switch 5 and the second Q-switch 9 are acousto-optic switches or electro-optic switches, and the first Q-switch 5 and the second Q-switch 9 are air-cooled or water-cooled. Specifically, in one embodiment of the present invention, the first Q-switch 5 and the second Q-switch 9 are acousto-optic switches, and the first Q-switch 5 and the second Q-switch 9 are heat-dissipated by circulating water of 20 ℃.
In one embodiment of the present invention, the first end face of the harmonic mirror 11 is coated with a high-transmission film for fundamental frequency light, and the second end face is coated with a high-reflection film for frequency-doubled harmonics. Specifically, the pulse width adjustable laser component provided by the embodiment of the present invention adopts a flat cavity structure with a large mode field volume, according to the light path propagation direction D, the harmonic mirror 11 is located downstream of the second Q-switch 9, the first end surface of the harmonic mirror 11 is plated with a high transmission film of 1064nm, and the second end surface is plated with a high reflection film of 532 nm.
In an embodiment of the present invention, the frequency doubling crystal 13 is disposed close to the output cavity mirror 15, the frequency doubling crystal 13 is a nonlinear LBO or BBO crystal, and the first end face and the second end face of the frequency doubling crystal 13 are both plated with antireflection films for fundamental frequency light and frequency doubling harmonic.
Specifically, according to the light path propagation direction D, the frequency doubling crystal 13 is located at the downstream of the harmonic mirror 11 and at the upstream of the output cavity mirror 15, and when the frequency doubling crystal 13 is set, the frequency doubling crystal 13 should be fixed as close to the output mirror 15 as possible, so that the fundamental frequency light has a small spot size and a high peak power density, and a high frequency doubling conversion efficiency can be obtained. Further, the frequency doubling crystal 13 is a nonlinear BBO crystal, and the temperature control is performed by the TEC, and the temperature control precision can reach +/-0.1 ℃. And the first end face and the second end face of the frequency doubling crystal 13 are both plated with anti-reflection films of 1064nm and 532 nm.
In one embodiment of the utility model, the first end face of the output cavity mirror 15 is coated with a high reflection film for fundamental frequency light, and the second end face is coated with a high transmission film for frequency doubling harmonics. Specifically, the output cavity mirror 15 is located downstream of the frequency doubling crystal 13, and a high-reflection film of 1064nm is plated on a first end face of the output cavity mirror 15, and a high-transmission film of 532nm is plated on a second end face.
In an embodiment of the present invention, the DPSS pump gain module 7 adopts a diode array side pump structure, and the heat dissipation manner of the DPSS pump gain module 7 adopts a water cooling manner. Specifically, the DPSS pumping gain module 7 adopts a 808nm laser diode array side pumping structure, and the gain medium is Nd: YAG crystal, and can generate 1064nm continuous fundamental oscillation light. The heat dissipation mode of the DPSS pumping gain module 7 is circulating water cooling at 20 ℃. In the process of installation and adjustment, the optical distances from the DPSS pumping gain module 7 to the rear cavity mirror 1 and the output cavity mirror 15 are controlled to be equal, so that the resonant cavity can work in a thermal stable region.
In one embodiment of the utility model, the beam combining module comprises: the polarizing prism 22, the polarizing prism 22 locates at the downstream of the output cavity mirror 15 of one of the frequency doubling lasers; the plane total reflection mirror 21 is positioned at the downstream of the output cavity mirror 15 of the other path of frequency doubling laser; wherein, close and restraint the module setting as follows: the polarization direction of the linearly polarized signal light entering the polarization prism 22 is made to be perpendicular to the polarization direction of the linearly polarized signal light entering the polarization prism 22 after passing through the plane total reflection mirror 21.
Specifically, the two frequency doubling lasers all adopt the same cavity structure, that is, the time domain and phase distribution of the two lines of polarized signal light on the beam combining module are ensured to be consistent. In order to realize high beam combination efficiency, the polarization directions of the linearly polarized signal lights output by the two frequency doubling lasers are ensured to be perpendicular to each other, and at the moment, the two linearly polarized signal lights with horizontal polarization and vertical polarization can be respectively generated by rotating the directions of the polarization elements 3 of the two frequency doubling lasers. Further, the polarizing prism 22 is a high damage threshold PBS.
In an embodiment of the present invention, the beam combining module further includes: 1/2 wave plates 20 and 1/2 wave plates 20 are located between the plane total reflection mirror 21 and the output cavity mirror 15, and are used for adjusting the polarization direction of the linearly polarized signal light output by the output cavity mirror 15. Specifically, in order to ensure that the polarization directions of the linearly polarized signal light output by the two frequency doubling lasers entering the polarizing prism 22 are perpendicular to each other, the 1/2 wave plate 20 is arranged between the output cavity mirror 15 and the plane total reflection mirror 21, and the polarization direction of the linearly polarized signal light output by the second frequency doubling laser can be adjusted to be perpendicular polarization by rotating the 1/2 wave plate 20.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.

Claims (10)

1.一种脉宽可调节的激光器组件,其特征在于,包括:1. a pulse width adjustable laser assembly, is characterized in that, comprises: 两路倍频激光器,每路所述倍频激光器上分别电连接有调Q驱动源,每路所述倍频激光器包括倍频晶体;Two frequency-doubling lasers, each frequency-doubling laser is electrically connected with a Q-switching drive source, and each frequency-doubling laser includes a frequency-doubling crystal; 上位机,所述上位机分别与两个所述调Q驱动源电连接,以调节两个所述调Q驱动源的输出延时;a host computer, the host computer is electrically connected to the two Q-switching driving sources respectively, so as to adjust the output delay of the two Q-switching driving sources; 合束模块,所述合束模块位于两路所述倍频激光器的下游,用于对两路所述倍频激光器输出的线偏振信号光进行双路合成。A beam combining module, the beam combining module is located downstream of the two channels of the frequency-doubling lasers, and is used for dual-channel combining of the linearly polarized signal lights output by the two channels of the frequency-doubling lasers. 2.根据权利要求1所述的脉宽可调节的激光器组件,其特征在于,每路所述倍频激光器包括:按照光路传播方向按顺序依次设置的后腔镜、偏振元件、第一调Q开关、DPSS泵浦增益模块、第二调Q开关、谐波镜、所述倍频晶体和输出腔镜,2 . The laser assembly with adjustable pulse width according to claim 1 , wherein each frequency-doubling laser comprises: a rear cavity mirror, a polarizing element, a first Q-switching mirror arranged in sequence according to the propagation direction of the optical path. 3 . a switch, a DPSS pump gain module, a second Q-switch, a harmonic mirror, the frequency doubling crystal, and an output cavity mirror, 其中,所述第一调Q开关和所述第二调Q开关在垂直于所述光路传播方向的平面中互相垂直正交设置;所述DPSS泵浦增益模块距离所述后腔镜和所述输出腔镜的光程相等。Wherein, the first Q-switch and the second Q-switch are arranged perpendicular to each other in a plane perpendicular to the propagation direction of the optical path; the DPSS pumping gain module is far from the back cavity mirror and the The optical paths of the output cavity mirrors are equal. 3.根据权利要求2所述的脉宽可调节的激光器组件,其特征在于,所述调Q驱动源分别与所述第一调Q开关和所述第二调Q开关电连接,以控制所述第一调Q开关和所述第二调Q开关的开闭,所述第一调Q开关和所述第二调Q开关为声光开关或电光开关,并且所述第一调Q开关和所述第二调Q开关的散热方式为风冷或水冷。3 . The laser assembly with adjustable pulse width according to claim 2 , wherein the Q-switching driving source is electrically connected to the first Q-switching switch and the second Q-switching switch, respectively, so as to control the The opening and closing of the first Q switch and the second Q switch, the first Q switch and the second Q switch are acousto-optic switches or electro-optic switches, and the first Q switch and The cooling mode of the second Q-switch is air cooling or water cooling. 4.根据权利要求2所述的脉宽可调节的激光器组件,其特征在于,所述后腔镜上镀有基频光的高反射膜。4 . The laser assembly with adjustable pulse width according to claim 2 , wherein the rear cavity mirror is coated with a high-reflection film of fundamental frequency light. 5 . 5.根据权利要求2所述的脉宽可调节的激光器组件,其特征在于,所述谐波镜的第一端面上镀有基频光的高透射膜,并且第二端面上镀有倍频谐波的高反射膜。5 . The laser assembly with adjustable pulse width according to claim 2 , wherein the first end face of the harmonic mirror is coated with a high transmission film of fundamental frequency light, and the second end face is coated with a frequency doubling film. 6 . Harmonic high reflection film. 6.根据权利要求2所述的脉宽可调节的激光器组件,其特征在于,所述倍频晶体靠近所述输出腔镜设置,且所述倍频晶体为非线性LBO或BBO晶体,所述倍频晶体的第一端面和第二端面上均镀有基频光和倍频谐波的增透膜。6 . The laser assembly with adjustable pulse width according to claim 2 , wherein the frequency-doubling crystal is arranged close to the output cavity mirror, and the frequency-doubling crystal is a nonlinear LBO or BBO crystal, and the frequency-doubling crystal is a non-linear LBO or BBO crystal. Both the first end face and the second end face of the frequency doubling crystal are coated with antireflection films for fundamental frequency light and frequency doubling harmonics. 7.根据权利要求2所述的脉宽可调节的激光器组件,其特征在于,所述输出腔镜的第一端面上镀有基频光的高反射膜,并且第二端面上镀有倍频谐波的高透射膜。7 . The laser assembly with adjustable pulse width according to claim 2 , wherein the first end face of the output cavity mirror is coated with a high-reflection film of fundamental frequency light, and the second end face is coated with a frequency doubling film. 8 . High transmission film for harmonics. 8.根据权利要求2所述的脉宽可调节的激光器组件,其特征在于,所述DPSS泵浦增益模块采用二极管阵列侧面泵浦结构,并且所述DPSS泵浦增益模块的散热方式采用水冷方式。8. The laser assembly with adjustable pulse width according to claim 2, wherein the DPSS pumping gain module adopts a diode array side pumping structure, and the heat dissipation method of the DPSS pumping gain module adopts a water cooling method . 9.根据权利要求2所述的脉宽可调节的激光器组件,其特征在于,所述合束模块包括:9. The laser assembly with adjustable pulse width according to claim 2, wherein the beam combining module comprises: 偏振棱镜,所述偏振棱镜位于其中一路所述倍频激光器的所述输出腔镜的下游;a polarizing prism, the polarizing prism is located downstream of the output cavity mirror of one of the frequency-doubling lasers; 平面全反镜,所述平面全反镜位于另一路所述倍频激光器的所述输出腔镜的下游;a flat total reflection mirror, the flat total reflection mirror is located downstream of the output cavity mirror of the other frequency-doubling laser; 其中,所述合束模块设置成:使得进入所述偏振棱镜的线偏振信号光的偏振方向,与经过所述平面全反镜后进入所述偏振棱镜的线偏振信号光的偏振方向互相垂直。Wherein, the beam combining module is set so that the polarization direction of the linearly polarized signal light entering the polarizing prism is perpendicular to the polarization direction of the linearly polarized signal light entering the polarizing prism after passing through the flat total reflection mirror. 10.根据权利要求9所述的脉宽可调节的激光器组件,其特征在于,所述合束模块还包括:1/2波片,所述1/2波片位于所述平面全反镜和所述输出腔镜之间,用于对由所述输出腔镜输出的线偏振信号光的偏振方向进行调节。10 . The laser assembly with adjustable pulse width according to claim 9 , wherein the beam combining module further comprises: a 1/2 wave plate, and the 1/2 wave plate is located between the flat total reflection mirror and the 1/2 wave plate. 11 . Between the output cavity mirrors, the polarization direction of the linearly polarized signal light output by the output cavity mirrors is adjusted.
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