CN215785403U - Chip dirt and dust adhering device - Google Patents
Chip dirt and dust adhering device Download PDFInfo
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- CN215785403U CN215785403U CN202122161594.2U CN202122161594U CN215785403U CN 215785403 U CN215785403 U CN 215785403U CN 202122161594 U CN202122161594 U CN 202122161594U CN 215785403 U CN215785403 U CN 215785403U
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- sticking rod
- dust sticking
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Abstract
The utility model discloses a chip dirt and dust adhering device, which comprises an installation plate and a dust adhering device arranged on the installation plate, wherein the dust adhering device comprises: the X-axis moving device is arranged in the horizontal direction, a dust sticking rod rotating device is fixed on the X-axis moving device through a first fixing frame, and a dust sticking rod is arranged on the dust sticking rod rotating device; the Z-axis moving device is vertically arranged on one side of the X-axis moving device, and a dust sticking rod grabbing device is fixed on the Z-axis moving device through a second fixing frame; and the dust sticking rod positioning device is arranged at the bottom of the Z-axis moving device and used for detecting and judging the position of the dust sticking rod. This dirty binding dust device of chip can automatic positioning dirty and dirt point on the chip, and the stick dirt stick of automatic change has improved the production efficiency and the quality of chip.
Description
Technical Field
The utility model relates to the technical field of dust removing equipment, in particular to a chip dirt and dust adhering device.
Background
With the development and progress of science and technology, chips are used in more and more products, and chip cleaning is a necessary link in the chip manufacturing process, the existing chip cleaning mostly adopts the manual work to determine the positions of dirt and dust points on the chip under a microscope, and then the dust stick is manually stuck and removed, so that the operation can consume human resources, the production efficiency is low, and secondary pollution is easily caused, and the quality of the chip is unstable.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a chip dirt and dust adhering device which is matched with the front and rear processes, can automatically position dirt and dust points on a chip and automatically replace a dust adhering rod, and solves the problems that the existing chip dust removing and cleaning efficiency is low and the quality cannot be guaranteed.
In order to achieve the purpose, the utility model provides the following technical scheme:
the utility model provides a dirty binding dust device of chip, includes the mounting panel and sets up on the mounting panel: the X-axis moving device is arranged in the horizontal direction, a dust sticking rod rotating device is fixed on the X-axis moving device through a first fixing frame, and a dust sticking rod is arranged on the dust sticking rod rotating device; the Z-axis moving device is vertically arranged on one side of the X-axis moving device, and a dust sticking rod grabbing device is fixed on the Z-axis moving device through a second fixing frame; and the dust sticking rod positioning device is arranged at the bottom of the Z-axis moving device and used for detecting and judging the position of the dust sticking rod.
Preferably, the X-axis moving device is an X-axis linear module, including: the X-axis servo motor and the X-axis lead screw transmission module are connected, and an output shaft of the X-axis servo motor is connected with the X-axis lead screw transmission module through a coupler;
z axle mobile device is Z axle straight line module, includes: the Z-axis servo motor and the Z-axis lead screw transmission module are connected, and an output shaft of the Z-axis servo motor is connected with the Z-axis lead screw transmission module through a coupler.
Preferably, the stick dust rotating device comprises: the dust sticking rod rack is arranged outside the rotating shaft of the dust sticking rod rack, and the rotating shaft of the dust sticking rod rack is in transmission connection with the output shaft of the dust sticking rod rotating motor through a belt;
the dust sticking rod rack is uniformly provided with a plurality of clamping grooves along the circumferential direction of the dust sticking rod rack, and each clamping groove is clamped with one dust sticking rod.
Preferably, the stick dust gripping device comprises: the dust sticking rod clamping device comprises a dust sticking rod clamping jaw and a dust sticking rod clamping cylinder, wherein the dust sticking rod clamping cylinder is fixed on the Z-axis moving device, and a piston rod of the dust sticking rod clamping cylinder is fixedly connected with the dust sticking rod clamping jaw.
Preferably, the dust sticking rod positioning device is a CCD camera.
The utility model has the beneficial effects that:
1. according to the chip dirt and dust adhering device, the X-axis moving device and the Z-axis moving device are adopted, automatic dust adhering actions are achieved, original manual operation is replaced, convenience and rapidness are achieved, and human resources are not consumed;
2. according to the chip dirt and dust adhering device, the dust adhering rod rotating device and the dust adhering rod grabbing device are adopted, so that the dust adhering rod is replaced, the effectiveness of dust adhering is guaranteed, and the problem of secondary pollution to a chip caused by manual operation is avoided;
3. this dirty binding dust device of chip adopts dirt spare positioner to guarantee that the stick dust removes the accuracy of changing the action, ensures the smooth automatic operation of this device.
Drawings
FIG. 1 is a schematic structural diagram of the chip dirt and dust adhering apparatus;
FIG. 2 is an enlarged view of the stick bar rotating apparatus;
in the figure: 1. the mounting panel, 2, Z axle servo motor, 3, Z axle lead screw transmission module, 4, stick dirt stick centre gripping cylinder, 5, stick dirt stick clamping jaw, 6, stick dirt stick positioner, 7, stick dirt stick work or material rest, 8, stick dirt stick rotating electrical machines, 9, X axle lead screw transmission module, 10, X axle servo motor, 11, stick dirt stick work or material rest rotation axis, 12, stick dirt stick.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Unless otherwise indicated, all references to up, down, left, right, front, back, inner and outer directions herein are to be interpreted as referring to up, down, left, right, front, back, inner and outer directions in the drawings to which the utility model is directed.
The utility model provides a chip dirt and dust adhering device as shown in fig. 1, which comprises a mounting plate 1 and: the X-axis moving device is arranged in the horizontal direction, a dust sticking rod rotating device is fixed on the X-axis moving device through a first fixing frame, and a dust sticking rod 12 is arranged on the dust sticking rod rotating device; the Z-axis moving device is vertically arranged on one side of the X-axis moving device, and a dust sticking rod grabbing device is fixed on the Z-axis moving device through a second fixing frame; and the dust sticking rod positioning device 6 is arranged at the bottom of the Z-axis moving device and is used for detecting and judging the position of the dust sticking rod 12.
Specifically, X axle mobile device is X axle straight line module, includes: the dust sticking rod device comprises an X-axis servo motor 10 and an X-axis lead screw transmission module 9, wherein an output shaft of the X-axis servo motor 10 is connected with the X-axis lead screw transmission module 9 through a coupler, and the X-axis lead screw transmission module 9 is used for driving the dust sticking rod rotating device to move;
z axle mobile device is Z axle straight line module, includes: z axle servo motor 2 and Z axle lead screw transmission module 3, the output shaft of Z axle servo motor 2 pass through the shaft coupling with Z axle lead screw transmission module connects 3, Z axle lead screw transmission module 3 is used for driving stick dust grabbing device removes.
Specifically, as shown in fig. 2, the stick-dust rotating device includes: the dust sticking rod feeding frame 7, the dust sticking rod feeding frame rotating shaft 11 and the dust sticking rod rotating motor 8 are arranged, the dust sticking rod feeding frame 7 is arranged outside the dust sticking rod feeding frame rotating shaft 11, and the dust sticking rod feeding frame rotating shaft 11 is in transmission connection with an output shaft of the dust sticking rod rotating motor 8 through a belt;
a plurality of clamping grooves are uniformly formed in the dust sticking rod material frame 7 along the circumferential direction of the dust sticking rod material frame 7, one dust sticking rod 12 is clamped in each clamping groove, in one embodiment, the dust sticking rod material frame 7 is a disc-shaped material frame, and in other embodiments, the dust sticking rod material frame 7 can be in different shapes according to needs.
Specifically, stick dirt stick grabbing device includes: stick dirt stick clamping jaw 5 and stick dirt stick centre gripping cylinder 4, stick dirt stick centre gripping cylinder 4 is fixed on the Z axle mobile device, stick dirt stick centre gripping cylinder 4's piston rod with stick dirt stick clamping jaw 5 fixed connection.
Specifically, the stick dust 12 is an ESD stick dust, and the stick dust positioning device 6 is a CCD camera.
Specifically, the working principle of the device is as follows: the vision system of the previous process automatically detects dirt and dust points on the chip, then the product flows into a dust sticking station, the X-axis servo motor 10 drives the X-axis lead screw transmission module 9 to move, the dust sticking rod material rack 7 fixed on the X-axis lead screw transmission module 9 is moved to a clamping position, the Z-axis servo motor 2 drives the Z-axis lead screw transmission module 3 to move, the dust sticking rod clamping cylinder 4 fixed on the Z-axis lead screw transmission module 3 is driven to descend, then the dust sticking rod clamping cylinder 4 controls the dust sticking rod clamping jaw 5 to clamp a dust sticking rod 12 from the dust sticking rod material rack 7, the Z-axis moving device drives the dust sticking rod clamping jaw 5 to descend again to reach a photographing position of the dust sticking rod positioning device 6, the dust sticking rod positioning device 6 photographs and positions the dust sticking rod 12, the Z-axis moving device drives the dust sticking rod clamping jaw 5 to continuously descend to the position of the dirt and the dust points and stick off, the Z-axis moving device drives the dust sticking rod clamping jaw 5 to ascend, the dust sticking rod 12 is placed at the original position of the dust sticking rod material rack 7, and the X-axis moving device returns to the original position to wait for the next work.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments or portions thereof without departing from the spirit and scope of the utility model.
Claims (5)
1. A dirty binding dust device of chip, its characterized in that includes:
mounting panel and setting are in on the mounting panel:
the X-axis moving device is arranged in the horizontal direction, a dust sticking rod rotating device is fixed on the X-axis moving device through a first fixing frame, and a dust sticking rod is arranged on the dust sticking rod rotating device;
the Z-axis moving device is vertically arranged on one side of the X-axis moving device, and a dust sticking rod grabbing device is fixed on the Z-axis moving device through a second fixing frame;
and the dust sticking rod positioning device is arranged at the bottom of the Z-axis moving device and used for detecting and judging the position of the dust sticking rod.
2. A chip soil and dust binding apparatus according to claim 1, wherein:
x axle mobile device is X axle straight line module, includes: the X-axis servo motor and the X-axis lead screw transmission module are connected, and an output shaft of the X-axis servo motor is connected with the X-axis lead screw transmission module through a coupler;
z axle mobile device is Z axle straight line module, includes: the Z-axis servo motor and the Z-axis lead screw transmission module are connected, and an output shaft of the Z-axis servo motor is connected with the Z-axis lead screw transmission module through a coupler.
3. A chip soil and dust binding apparatus according to claim 1, wherein:
the dust sticking rod rotating device comprises: the dust sticking rod rack is arranged outside the rotating shaft of the dust sticking rod rack, and the rotating shaft of the dust sticking rod rack is in transmission connection with the output shaft of the dust sticking rod rotating motor through a belt;
the dust sticking rod rack is uniformly provided with a plurality of clamping grooves along the circumferential direction of the dust sticking rod rack, and each clamping groove is clamped with one dust sticking rod.
4. A chip soil and dust binding apparatus according to claim 1, wherein:
the stick dirt stick grabbing device includes: the dust sticking rod clamping device comprises a dust sticking rod clamping jaw and a dust sticking rod clamping cylinder, wherein the dust sticking rod clamping cylinder is fixed on the Z-axis moving device, and a piston rod of the dust sticking rod clamping cylinder is fixedly connected with the dust sticking rod clamping jaw.
5. A chip soil and dust binding apparatus according to claim 1, wherein:
the dust sticking rod positioning device is a CCD camera.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202122161594.2U CN215785403U (en) | 2021-09-08 | 2021-09-08 | Chip dirt and dust adhering device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202122161594.2U CN215785403U (en) | 2021-09-08 | 2021-09-08 | Chip dirt and dust adhering device |
Publications (1)
Publication Number | Publication Date |
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CN215785403U true CN215785403U (en) | 2022-02-11 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN202122161594.2U Active CN215785403U (en) | 2021-09-08 | 2021-09-08 | Chip dirt and dust adhering device |
Country Status (1)
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CN (1) | CN215785403U (en) |
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2021
- 2021-09-08 CN CN202122161594.2U patent/CN215785403U/en active Active
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