CN215727469U - Variable-depth ruling device for critical shear thickness determination of engineering ceramics - Google Patents
Variable-depth ruling device for critical shear thickness determination of engineering ceramics Download PDFInfo
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Abstract
The utility model discloses a variable depth ruling device for measuring critical shear thickness of engineering ceramics, which comprises: the base is provided with a camera, a fine adjustment mechanism, an XY axial direction feeding mechanism, a rotating mechanism, an angle adjusting mechanism capable of adjusting the inclination angle of the cutter and a Z axial moving mechanism for carrying the cutter to move in the Z axial direction, wherein the length direction of the base is the Y axial direction, the width direction of the base is the X axial direction, and the direction vertical to the upper surface of the base is the Z axial direction; the fine adjustment mechanism comprises a double-shaft tilting table and an XZ-axis sliding table which is arranged below the double-shaft tilting table and used for driving the double-shaft tilting table to move in the X-axis direction and the Z-axis direction; according to the utility model, different scoring depths in the Z-axis direction are realized through the movement of the XZ-axis sliding table; the inclination angle of the workpiece is adjusted through the double-shaft inclination table, the variable scribing depth with high precision is realized, the mechanism is simple, the operation is convenient, the testing precision is high, and the use cost is low; the method can be used for accurately analyzing the removal mechanism of the engineering ceramic material and determining the critical cutting thickness of the material, and is convenient for subsequent processing.
Description
Technical Field
The utility model relates to the technical field of material processing and testing equipment, in particular to a variable-depth ruling device for measuring critical shear thickness of engineering ceramics.
Background
Advanced engineering ceramic materials have become indispensable and potential structural materials at the present stage, and have excellent physical and chemical properties, and have better corrosion resistance than common metal materials under various severe chemical conditions. Is widely used in the fields of national defense, aerospace, modern high-tech industry and the like. However, due to the characteristics of poor toughness, high hardness and the like, brittle failure easily occurs in processing, the processing quality is affected, and the material belongs to a material which is difficult to process, so that the performance test needs to be carried out on the material scribing, the engineering ceramic material is scribed by simulating a single abrasive particle, and the measured result can be used for analyzing the material removing mechanism and the deformation mechanism, so that the processing quality and the processing effect are ensured; the existing scribing equipment has single function, is inconvenient to adjust, cannot accurately perform scribing and influences analysis results.
SUMMERY OF THE UTILITY MODEL
The technical purpose is as follows: aiming at the defects that the existing scribing equipment is low in precision and results in inaccurate analysis results, the utility model discloses a variable-depth scribing device for measuring critical cut thickness of engineering ceramics, which can realize micron-scale scribing with variable scribing depth.
The technical scheme is as follows: in order to achieve the technical purpose, the utility model adopts the following technical scheme:
a variable-depth scoring device for measuring critical shear thickness of engineering ceramics comprises: the base takes the length direction of the base as the Y-axis direction, the width direction of the base as the X-axis direction and the direction vertical to the upper surface of the base as the Z-axis direction;
a camera for observing the surface of the etched ceramic, a fine adjustment mechanism for adjusting the position of the ceramic and an XY-axis direction feeding mechanism for driving a cutter to move along the X-axis direction and the Y-axis direction are arranged on the base;
the XY-axis direction feeding mechanism comprises an XY-axis direction feeding mechanism, a rotating mechanism, an angle adjusting mechanism for adjusting the inclination angle of the cutter and a Z-axis moving mechanism for carrying the cutter and moving in the Z-axis direction;
the XY-axis direction feeding mechanism is arranged on the base; the rotating mechanism is arranged on the XY-axis direction feeding mechanism, and the lower part of the rotating mechanism is rotationally connected with the XY-axis direction feeding mechanism; the angle adjusting mechanism is arranged on the rotating mechanism; the Z-axis moving mechanism is arranged at the moving end of the angle adjusting mechanism.
The camera is arranged on the camera support, the camera is rotatably connected with the camera, and the shooting angle of the camera is rotatably adjusted.
Preferably, the fine adjustment mechanism comprises a double-shaft tilting table and an XZ-axis sliding table which is arranged below the double-shaft tilting table and used for driving the double-shaft tilting table to move in the X-axis direction and the Z-axis direction, wherein a force sensor is arranged on the double-shaft tilting table and used for detecting the stress of the ceramic; the bottom of the double-shaft tilting table is provided with a micrometer adjusting knob for adjusting the tilting angle of the double-shaft tilting table along the X-axis direction; the inclination angle of the ceramic wafer along the X-axis direction is adjusted through the micrometer adjusting knob, so that the variable scribing depth with high precision is realized.
Preferably, the XY-axis direction feeding mechanism of the present invention includes a first servo motor and a first ball screw module arranged along the Y-axis direction, and the first servo motor and the first ball screw module are connected through a first coupling; the X-axis direction of the first servo motor is parallel to the X-axis direction of the second ball screw module, the driving end of the first servo motor is connected with the first ball screw module through a first coupler, the first ball screw module is positioned above the second ball screw module, the bottom of the first ball screw module is fixed on the surface of a workbench of the first ball screw module through a countersunk screw, a bottom plate is arranged above the first ball screw module, the bottom of the bottom plate is connected with the first ball screw module through a linear sliding table parallel to the direction of the first ball screw module, and the bottom of the rotating mechanism is rotatably connected with the bottom plate; through the structure of the double-ball screw, the position of the cutter is accurately adjusted, and the accuracy of the scribing result is ensured.
Preferably, the rotating mechanism comprises a guide shaft, a rotating bearing seat, a knob plunger and a U-shaped seat; the guide shaft is vertically arranged on the bottom plate, the bottom of the guide shaft is in threaded connection with the bottom plate, a rotating bearing seat is sleeved on an outer ring of the guide shaft, and a U-shaped seat is vertically arranged above the rotating bearing seat and fixedly connected with the rotating bearing seat through a bolt; the knob plunger is vertically arranged on the U-shaped seat, the bottom of the knob plunger is matched with a positioning hole formed in the bottom plate, the knob plunger is fixed by a bolt after being positioned, and the rotation of the U-shaped seat is limited in the scribing process; the angle adjusting mechanisms are symmetrically arranged on the U-shaped seat; the U-shaped seat can realize the flexible switching of cutter, and the rethread knob plunger is locked after the adjustment, prevents to rotate at the ruling in-process.
Preferably, the steel ball rollers are uniformly distributed on the upper surface of the bottom plate, the tops of the steel ball rollers are in contact with the bottom of the U-shaped seat, the rotation of the U-shaped seat is assisted, the rotation resistance is reduced, and the operation is convenient for personnel.
Preferably, the angle adjusting mechanism of the utility model comprises a rotating plate, an adjusting screw block and an adjusting screw assembly; the rotating plates are arranged on two sides of the U-shaped seat and are fixed on the side surface of the U-shaped seat through countersunk bolts, the rotating plates are in a convex shape, and the adjusting screw blocks are symmetrically arranged on the left side and the right side of the raised head of the rotating plate through bolts; the adjusting screw is arranged in the adjusting screw block, and the rotation angle of the rotating plate is slightly adjusted by rotating the adjusting screw; the adjusting screw slightly adjusts the rotating angle of the rotating plate, the working angle of the cutter is changed accordingly, and the effect of accurate adjustment is achieved.
Preferably, the Z-axis moving mechanism of the present invention includes a sliding table, a tool post, and a tool; the sliding table is arranged on the plate surface of the rotating plate and is in sliding connection with the rotating plate along the vertical direction; a knob for locking is arranged on the sliding table; the tool apron is fixed on the sliding table top through a countersunk bolt; the cutting tool is a single-edge diamond scribing cutting tool, and a tool shank of the cutting tool is vertically arranged in the tool apron and is fixed through a locking bolt arranged on one side of the cutting tool; the sliding table drives the cutter to move along the vertical direction, the position of the cutter can be adjusted up and down, accurate tool setting is carried out, and the scribing accuracy is guaranteed.
Has the advantages that: the variable-depth ruling device for measuring the critical shear thickness of the engineering ceramics, provided by the utility model, has the following beneficial effects:
1. according to the utility model, the double-shaft inclined table is added on the basis of the feeding control device, micron-scale scribing with low cost, high efficiency, high precision and variable scribing depth is realized, a scribing sample is not influenced by the size, the scribing length, the scribing speed and the scribing depth can be controlled by setting corresponding values, and the device has the advantages of higher flexibility and simplicity in operation.
2. The utility model adopts double stations which are symmetrically arranged at two sides of the rotating plate, can effectively reduce the tool changing time, ensures the accurate positioning of the tool after the stations are switched by utilizing the matching shape entering and accurate positioning of the knob plunger and the base positioning hole when the tool is switched, reduces the tool setting operation and improves the efficiency. In addition, an angle adjusting mechanism is additionally arranged, so that the working angle of the cutter can be slightly changed, the stress in the machining process is reduced, and the service life of the cutter is prolonged.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below.
FIG. 1 is an overall structural view of the present invention;
FIG. 2 is a view taken from the direction A of FIG. 1 in accordance with the present invention;
FIG. 3 is a view of the structure of the rotating mechanism of the present invention;
FIG. 4 is a schematic view of an angle adjustment mechanism of the present invention;
the device comprises a base 1, a first coupler 2, a first servo motor 3, a tool apron 4, a sliding table 5, a U-shaped seat 6, a rotary bearing seat 7, a knob plunger 8, a steel ball roller 9, a bottom plate 10, a linear sliding table 11, a cutter 12, an experimental sample 13, a camera 14, a force sensor 15, a double-shaft tilting table 16, an XZ shaft sliding table 17, a first ball screw module 18, a rotating plate 19, an adjusting screw block 20, an adjusting screw 21, a second ball screw module 22, a second coupler 23, a second servo motor 24, a guide shaft 25, a camera support 26 and a locking bolt 27.
Detailed Description
The present invention will be more clearly and completely described below by way of a preferred embodiment in conjunction with the accompanying drawings, without thereby limiting the scope of the utility model to the described embodiment.
As shown in fig. 1 to 4, the present invention discloses a variable depth scribing apparatus for critical shear thickness measurement of engineering ceramics, comprising: the base 1, regard length direction of the base 1 as Y axle direction, the width direction is X axle direction, perpendicular and upper surface direction of the base is Z axle direction;
a camera 14 for observing the surface of the scribed ceramic, a fine adjustment mechanism for adjusting the position of the ceramic and an XY-axis direction feeding mechanism for driving a cutter to move along the X-axis direction and the Y-axis direction are arranged on the base 1;
the XY-axis direction feeding mechanism comprises an XY-axis direction feeding mechanism, a rotating mechanism, an angle adjusting mechanism for adjusting the inclination angle of the cutter and a Z-axis moving mechanism for carrying the cutter 12 and moving in the Z-axis direction;
the XY-axis direction feeding mechanism is arranged on the base 1; the rotating mechanism is arranged on the XY-axis direction feeding mechanism, and the lower part of the rotating mechanism is rotationally connected with the XY-axis direction feeding mechanism; the angle adjusting mechanism is arranged on the rotating mechanism; the Z-axis moving mechanism is arranged at the moving end of the angle adjusting mechanism.
The camera 14 is arranged on a camera support 26, and the camera is rotatably connected with the camera to rotatably adjust the shooting angle of the camera.
The fine adjustment mechanism comprises a double-shaft tilting table 16 and an XZ-shaft sliding table 17 which is arranged below the double-shaft tilting table and used for driving the double-shaft tilting table to move in the X-axis direction and the Z-axis direction, wherein the XZ-shaft sliding table 17 is adjusted in the position of X, Z-axis direction through a knob of a variable-depth ruling device for measuring the critical cutting thickness of the engineering ceramics; a force sensor 15 is arranged on the double-shaft inclined table 16 to detect the stress of the ceramic; the bottom of the double-shaft tilting table 16 is provided with a micrometer adjusting knob used for adjusting the tilting angle of the double-shaft tilting table along the X-axis direction, and the tilting angle between the tilting table and the XY plane can be changed by adjusting the micrometer adjusting knob on the lower surface of the double-shaft tilting table 16.
The positioning accuracy of the XZ axis sliding table 17 is 0.03mm, the X axis stroke is 12.5mm, and the Z axis feeding stroke is 10 mm; the adjusting range of the double-shaft tilting table is +/-5 degrees, the minimum adjusting scale is 0.01mm, and the minimum adjusting range of the table top is 5', so that the requirements of scribing tests of various materials can be met.
The XY axial direction feed mechanism comprises a first servo motor 3 and a first ball screw module 18 which are arranged along the X direction, wherein the first servo motor 3 and the first ball screw module 18 are connected through a first coupler 2; the automatic feeding device is characterized by further comprising a second servo motor 24 and a second ball screw module 22 which are arranged along the Y-axis direction, wherein the driving end of the second servo motor 24 is connected with the second ball screw module 22 through a second coupler 23, the second ball screw module 22 is located above the first ball screw module 18, the bottom of the second ball screw module is fixed on the surface of a workbench of the first ball screw module through a countersunk head screw, and the workbench is connected with a nut of the first ball screw module; a bottom plate 10 is arranged above the second ball screw module 22, the bottom of the bottom plate 10 is connected with the second ball screw module 22 through a linear sliding table 11 parallel to the direction of the second ball screw module 22, steel ball rollers 9 are uniformly distributed on the upper surface of the bottom plate 10, and the tops of the steel ball rollers 9 are in contact with the bottom of the U-shaped seat to assist the U-shaped seat in rotating; the bottom of the rotating mechanism is rotatably connected with the bottom plate 10.
Drive second ball screw module 22 through first servo motor 3 and the cooperation of first ball screw module 18 and remove along the Y axle direction, adjust the position of cutter in the Y axle direction, rethread second servo motor 24 and second ball screw module 22 drive bottom plate 10 and remove along the X direction, adjust the position of cutter 12 in the X axle direction, finally make the cutter be located experimental sample 13 directly over.
The rotating mechanism comprises a guide shaft 25, a rotating bearing seat 7, a knob plunger 8 and a U-shaped seat 6; the guide shaft 25 is vertically arranged on the bottom plate 10, the bottom of the guide shaft is in threaded connection with the bottom plate, the rotating bearing seat 7 is sleeved on the outer ring of the guide shaft 25, and the U-shaped seat 6 is vertically arranged above the rotating bearing seat 7 and is fixedly connected with the rotating bearing seat 7 through bolts; the knob plunger 8 is vertically arranged on the U-shaped seat 6, the bottom of the knob plunger is matched with a positioning hole formed in the bottom plate 10, and the rotation of the U-shaped seat 6 is limited in the scribing process; the angle adjusting mechanisms are symmetrically arranged on the U-shaped seat 6.
When the cutter stations need to be switched, the knob plunger 8 is pulled up, the spring head of the knob plunger 8 is separated from the positioning hole in the bottom plate 10, the U-shaped seat 6 is rotated, the rotating bearing seat 7 rotates around the guide shaft 25, the spring head of the knob plunger 8 is in a compressed state, and after the cutter rotates in place, the spring head is pressed into the other positioning hole under the action of elastic force, so that the switching and positioning of the cutter are completed; and the U-shaped seat of the rotating mechanism is accurately positioned after the station is switched through the knob plunger 8 and the positioning hole.
The angle adjusting mechanism of the utility model comprises a rotating plate 19, an adjusting screw block 20 and an adjusting screw component 21; the rotating plate 19 is arranged on two sides of the U-shaped seat 6 and is fixed on the side surface of the U-shaped seat through countersunk bolts, the rotating plate 19 is in a convex shape, and the adjusting screw blocks 20 are symmetrically arranged on the left side and the right side of a raised head of the rotating plate 19 through bolts; the adjustment screw 21 is attached to the adjustment screw block 20, and the rotation angle of the rotating plate 19 is finely adjusted by turning the adjustment screw.
The Z-axis moving mechanism comprises a sliding table 5, a tool apron 4 and a tool 12; the sliding table 5 is arranged on the plate surface of the rotating plate 19 and is in sliding connection with the rotating plate 19 along the vertical direction; a knob for locking is arranged on the sliding table 5; the tool apron 4 is fixed on the surface of the sliding table 5 through a countersunk head bolt; the cutter 12 is a single-edge diamond scribing cutter, a cutter handle of the cutter 12 is vertically installed in the cutter holder 4 and fixed through a locking bolt 27 arranged on one side of the cutter, and the height of the cutter 12 in the Z-axis direction is adjusted through the sliding table 5.
When the utility model is used, the origin of coordinates is selected to establish a coordinate system, and the test platform is leveled to operate: the cutter is positioned right above the experimental sample 13 through the XY-axis direction feeding mechanism, the experimental sample 13 is gradually close to the cutter 12 by adjusting the Z-axis moving mechanism, the distance between the cutter 12 and the experimental sample 13 from a certain two points in the X-axis direction to the cutter is observed, the two points are measured through a contact method to obtain Z coordinates, the cutter 12 is further adjusted to the other end of the experimental sample in the Y-axis direction through the Y-axis direction feeding device, the measurement operation is repeated to observe the Z-axis coordinate of the certain point at the moment, the three-point coordinates are integrated to obtain an initial height difference, and then the experimental surface of the experimental sample 13 is adjusted to be parallel to the XY-axis feeding direction through the double-axis tilting table 16.
Tool setting operation: when observing that the cutter 12 is about to contact the experimental sample 13, observe and adjust the Z-axis micrometer knob of the XZ-axis sliding table 17 through the camera 14, further approach in a small range, meanwhile, if the force sensor 15 detects obvious force signal changes, the cutter 12 is indicated to be in contact with the experimental sample 13, the Z-axis coordinate of the cutter at the moment is recorded, and the cutter setting operation is completed.
Adjusting the working angle of the cutter: the rotation angle of the rotating plate 19 is controlled by the bolt and nut and the adjusting screw 21, thereby changing the working angle of the tool 12.
The method comprises the following steps of scribing an experimental sample, controlling the scribing depth of a cutter 12 on a Z axis through an XZ axis sliding table 17, further controlling the inclination angle of the experimental sample and an XY plane through a double-axis tilting table 16, and then changing the rotating speed of a servo motor 24 to control the feeding speed, so as to realize different scribing depths, variable scribing depths and different scribing speeds; further, the micro-etching operation is performed on the surface of the test sample 13.
The above description is only of the preferred embodiments of the present invention, and it should be noted that: it will be apparent to those skilled in the art that various modifications and adaptations can be made without departing from the principles of the utility model and these are intended to be within the scope of the utility model.
Claims (7)
1. A variable-depth scoring device for measuring critical shear thickness of engineering ceramics is characterized by comprising: the base (1) takes the length direction of the base (1) as the Y-axis direction, the width direction as the X-axis direction, and the direction vertical to the upper surface of the base is the Z-axis direction;
a camera (14) for observing the surface of the scribed ceramic, a fine adjustment mechanism for adjusting the position of the ceramic and an XY-axis direction feeding mechanism for driving a cutter to move along the X-axis direction and the Y-axis direction are arranged on the base (1);
the XY-axis direction feeding mechanism comprises an XY-axis direction feeding mechanism, a rotating mechanism, an angle adjusting mechanism for adjusting the inclination angle of the tool and a Z-axis moving mechanism for carrying the tool (12) and moving in the Z-axis direction;
the XY-axis direction feeding mechanism is arranged on the base (1); the rotating mechanism is arranged on the XY-axis direction feeding mechanism, and the lower part of the rotating mechanism is rotationally connected with the XY-axis direction feeding mechanism; the angle adjusting mechanism is arranged on the rotating mechanism; the Z-axis moving mechanism is arranged at the moving end of the angle adjusting mechanism;
the camera (14) is arranged on the camera support (26), the camera is rotatably connected with the camera, and the shooting angle of the camera is rotatably adjusted.
2. The variable-depth scoring device for measuring the critical shear thickness of the engineering ceramics according to claim 1, wherein the fine adjustment mechanism comprises a double-shaft tilting table (16) and an XZ-axis sliding table (17) which is arranged below the double-shaft tilting table and used for driving the double-shaft tilting table to move in the X-axis direction and the Z-axis direction, a force sensor (15) is arranged on the double-shaft tilting table (16) and used for detecting the stress of the ceramics; and a micrometer adjusting knob for adjusting the inclination angle of the double-shaft tilting table is arranged at the bottom of the double-shaft tilting table (16) along the X-axis direction.
3. The variable-depth scoring device for measuring the critical cut thickness of the engineering ceramics is characterized in that the XY-axis direction feeding mechanism comprises a first servo motor (3) and a first ball screw module (18) which are arranged along the Y-axis direction, and the first servo motor (3) and the first ball screw module (18) are connected through a first coupling (2); still include second servo motor (24) and second ball screw module (22) that set up along the X axle direction, the drive end of second servo motor (24) is passed through second shaft coupling (23) and is connected with second ball screw module (22), second ball screw module (22) are located the top of first ball screw module (18), the workstation surface at first ball screw module is fixed through the countersunk screw in the bottom, top at second ball screw module (22) sets up bottom plate (10), the bottom of bottom plate (10) is connected with second ball screw module (22) through straight line slip table (11) parallel with the direction of second ball screw module (22), rotary mechanism's bottom and bottom plate (10) rotate and be connected.
4. The variable-depth scoring device for measuring the critical cut thickness of the engineering ceramics as claimed in claim 3, wherein the rotating mechanism comprises a guide shaft (25), a rotating bearing seat (7), a knob plunger (8) and a U-shaped seat (6); the guide shaft (25) is vertically arranged on the bottom plate (10), the bottom of the guide shaft is in threaded connection with the bottom plate, a rotating bearing seat (7) is sleeved on an outer ring of the guide shaft (25), and the U-shaped seat (6) is vertically arranged above the rotating bearing seat (7) and is fixedly connected with the rotating bearing seat (7) through a bolt; the knob plunger (8) is vertically arranged on the U-shaped seat (6), the bottom of the knob plunger is matched with a positioning hole formed in the bottom plate (10), and the knob plunger is fixed by a bolt after being positioned, so that the rotation of the U-shaped seat (6) is limited in the scribing process; the angle adjusting mechanisms are symmetrically arranged on the U-shaped seat (6).
5. The variable-depth scoring device for measuring the critical shear thickness of the engineering ceramics as claimed in claim 4, wherein steel ball rollers (9) are uniformly distributed on the upper surface of the bottom plate (10), and the tops of the steel ball rollers (9) are in contact with the bottom of the U-shaped seat to assist the rotation of the U-shaped seat.
6. The variable-depth scoring device for critical shear thickness measurement of engineering ceramics according to claim 4, wherein the angle adjusting mechanism comprises a rotating plate (19), an adjusting screw block (20) and an adjusting screw assembly (21); the rotating plates (19) are arranged on two sides of the U-shaped seat (6) and fixed on the side surfaces of the U-shaped seat through countersunk bolts, the rotating plates (19) are in a convex shape, and the adjusting screw blocks (20) are symmetrically arranged on the left side and the right side of a raised head of the rotating plates (19) through bolts; an adjusting screw (21) is attached to the adjusting screw block (20), and the rotation angle of the rotating plate (19) is finely adjusted by turning the adjusting screw.
7. The variable-depth scoring device for measuring the critical shear thickness of the engineering ceramics as claimed in claim 4, wherein the Z-axis moving mechanism comprises a sliding table (5), a tool holder (4) and a tool (12); the sliding table (5) is arranged on the plate surface of the rotating plate (19) and is in sliding connection with the rotating plate (19) along the vertical direction; a knob for locking is arranged on the sliding table (5); the tool apron (4) is fixed on the surface of the sliding table (5) through a countersunk head bolt; the cutting tool (12) is a single-edge diamond scribing tool, and a tool shank of the cutting tool (12) is vertically installed in the tool apron (4) and fixed through a locking bolt (27) arranged on one side of the cutting tool.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121308082.8U CN215727469U (en) | 2021-06-11 | 2021-06-11 | Variable-depth ruling device for critical shear thickness determination of engineering ceramics |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121308082.8U CN215727469U (en) | 2021-06-11 | 2021-06-11 | Variable-depth ruling device for critical shear thickness determination of engineering ceramics |
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| CN215727469U true CN215727469U (en) | 2022-02-01 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114505970A (en) * | 2022-04-15 | 2022-05-17 | 河北圣昊光电科技有限公司 | Scribing head rotation adjusting device and scribing machine |
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2021
- 2021-06-11 CN CN202121308082.8U patent/CN215727469U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114505970A (en) * | 2022-04-15 | 2022-05-17 | 河北圣昊光电科技有限公司 | Scribing head rotation adjusting device and scribing machine |
| CN114505970B (en) * | 2022-04-15 | 2022-07-08 | 河北圣昊光电科技有限公司 | Scribing head rotation adjusting device and scribing machine |
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