CN215698845U - Laser processing apparatus using spatial light modulator - Google Patents
Laser processing apparatus using spatial light modulator Download PDFInfo
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- CN215698845U CN215698845U CN202121786647.3U CN202121786647U CN215698845U CN 215698845 U CN215698845 U CN 215698845U CN 202121786647 U CN202121786647 U CN 202121786647U CN 215698845 U CN215698845 U CN 215698845U
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Abstract
The utility model discloses a laser processing device utilizing a spatial light modulator, which comprises a laser source capable of emitting a laser beam, a spatial light modulation system and a table board, wherein the spatial light modulation system is used for forming a light-gathering point on a processed object so as to realize processing in a Z-axis direction, the table board stabilizes the processed object, the spatial light modulation system comprises a first reflecting mirror used for receiving the laser beam, the spatial light modulator used for converting the laser beam from the first reflecting mirror, and an optical system used for focusing the laser beam converted by the spatial light modulator on the processed object, the optical system is positioned between the spatial light modulator and the table board, the table board can be movably arranged on a worktable in an X, Y axis direction, and a driving mechanism used for driving the table board to move in a X, Y axis direction is arranged on the worktable. The object to be processed is subjected to punching, deburring and the like to obtain a desired processing shape on the object to be processed, thereby improving the processing quality and efficiency.
Description
Technical Field
The present invention relates to a laser processing apparatus using a spatial light modulator.
Background
In the past, through holes are processed on a PCB substrate by using photolithography, chemical etching, and the like, and recently, a processing method using laser drilling has become a great trend, for example, a laser device is moved to process the PCB substrate by using a single pulse, a striking, a hole opening, a spiral shape, and the like according to a target to be processed.
SUMMERY OF THE UTILITY MODEL
The utility model provides a laser processing device using a spatial light modulator.
In order to solve the technical problem, the technical scheme adopted by the utility model is as follows: a laser processing device using a spatial light modulator comprises a laser source capable of emitting the laser beam, a spatial light modulation system for forming a light-converging point on a processing object so as to realize processing in a Z-axis direction, and a table top for stabilizing the processing object, wherein the spatial light modulation system comprises a first reflecting mirror for receiving the laser beam, a spatial light modulator for converting the laser beam from the first reflecting mirror, and an optical system for focusing the laser beam converted by the spatial light modulator on the processing object, the optical system is positioned between the spatial light modulator and the table top, the table top is movably arranged on a worktable in an X, Y-axis direction, and a driving mechanism for driving the table top to move in an X, Y-axis direction is arranged on the worktable.
In some of the modes, the spatial light modulator comprises a silicon substrate, a driving circuit layer, a plurality of pixel electrodes, a reflective film, an alignment film, a liquid crystal layer, an alignment film, a transparent conductive film and a transparent substrate which are sequentially stacked.
In some of the aspects, the optical system includes three lenses, and the first lens, the second lens, and the third lens are respectively arranged in sequence from the spatial light modulator, the focal lengths of the first lens and the second lens are respectively f1 to form a 4f optical system, and the focal length of the third lens is f 2.
In some such aspects, the optical system includes a lens.
In some of the modes, a second mirror and a third mirror for moving the laser beam output from the laser source to the first mirror are provided between the laser source and the spatial light modulation system.
In some of the above-described aspects, the object is a plate-shaped member, and the object is a semiconductor substrate made of a semiconductor material, a piezoelectric substrate made of a piezoelectric material, or a PCB substrate.
In some of the modes, the laser source is a gas laser source, or a liquid laser source, or a solid laser source, and the laser source can release a pulse-type laser beam, or can release a continuous waveform laser beam.
The scope of the present invention is not limited to the specific combinations of the above-described features, and other embodiments in which the above-described features or their equivalents are arbitrarily combined are also intended to be encompassed. For example, the technical features (but not limited to) disclosed in the present application and having similar functions are replaced with each other to form the technical solution.
Due to the application of the technical scheme, compared with the prior art, the utility model has the following advantages: the utility model provides a laser processing device using a spatial light modulator, which utilizes the spatial light modulator to improve the laser beam, focuses the improved laser beam on a processing object, moves the processing object in X, Y axis direction through a table board, processes holes, burrs and the like on the processing object, and the spatial light modulation system carries out Z axis direction movement on the processing object to realize processing, so that the processing object can obtain a desired processing shape, and the processing quality and efficiency are improved.
Drawings
FIG. 1 is a schematic diagram of a laser processing apparatus utilizing a spatial light modulator;
FIG. 2 is a schematic diagram of an optical system according to an embodiment;
FIG. 3 is a schematic view of an optical system according to a second embodiment;
FIG. 4 is a schematic view of a first CGH image;
FIG. 5 is a schematic view of a second CGH image;
wherein, 1, a laser source; 2. an object to be processed; 3. a table top; 4. a spatial light modulation system; 41. a spatial light modulator; 42. an optical system; 42a, a first lens; 42b, a second lens; 42c, a third lens; m1, a first mirror; m2, second mirror; m3, a third mirror; f1, focal length of the first lens and the second lens; f2, focal length of the third lens; p1, round area; p2, circular ring area.
Detailed Description
The first embodiment is as follows: as shown in figures 1 and 2 of the drawings,
a laser processing apparatus using a spatial light modulator comprises a laser light source 1 capable of emitting the laser beam, a spatial light modulation system 4 for forming a light-converging point on a processing object 2 to realize processing in a Z-axis direction, and a table 3 for stabilizing the processing object 2, wherein the spatial light modulation system 4 comprises a first mirror m1 for receiving the laser beam, a spatial light modulator 41 for converting the laser beam from the first mirror m1, and an optical system 42 for focusing the laser beam converted by the spatial light modulator 41 on the processing object 2, the optical system 42 is located between the spatial light modulator 41 and the table 3, the table 3 is movably arranged on a table in a X, Y axis direction, and the table is provided with a driving mechanism for driving the table 3 to be capable of processing in an X direction, A driving mechanism moving in the Y-axis direction.
The structure of the driving mechanism in the machining production is various and is not the utility model point of the utility model. The worktable is slidably disposed on the Y-direction guide rail along the Y-direction as long as it satisfies the mechanism capable of moving along the X, Y axis direction, such as the X-direction guide rail, the Y-direction guide rail slidably disposed on the X-direction guide rail along the X-direction, the motor, and the like.
The spatial light modulator 41 includes a silicon substrate, a driving circuit layer, a plurality of pixel electrodes, a reflective film, an alignment film, a liquid crystal layer, an alignment film, a transparent conductive film, and a transparent substrate, which are sequentially stacked.
The spatial light modulator transforms the laser beam in a manner that forms an electric field on the liquid crystal layer to change an arrangement of liquid crystal molecules.
The liquid crystal layer of the spatial light modulator may change the laser beam according to an electric field formed by the pixel electrode and the transparent conductive film. That is, the arrangement of the liquid crystal molecules is changed according to the magnitude of the electric quantity formed in the liquid crystal layer, and thus the refractive index of the liquid crystal layer corresponding to each pixel position is also changed. With this change in refractive index, the phase of the laser beam will change with the approved voltage. That is, each pixel may display a modulation pattern of a hologram pattern imparted to change by the liquid crystal layer on the liquid crystal layer of the spatial light modulator, and the modulation pattern displayed by the liquid crystal layer may be represented by a CGH image.
When liquid crystal molecules corresponding to the CGH image are arranged and displayed on a liquid crystal layer of the spatial light modulator to be laser-processed, a laser beam having energy distribution in a gaussian form entering the spatial light modulator is reflected in the spatial light modulator and can be changed into a laser beam in a flat top form.
As shown in FIGS. 4 and 5, 2 kinds of CGH images and a combination of the two are formed by the spatial light modulator that a laser beam incident into the spatial light modulator is formed in a circular shape in a central circular region P1; and a plurality of circular ring regions P2 having the same center point as the circular region, the circular region P1 and the plurality of circular ring regions P2 presenting a first CGH image whose luminance becomes gradually brighter from the radially outer side to the inner side; and a plurality of blazed grating-shaped modes, wherein the brightness of the second CGH image gradually becomes brighter in unidirectional development.
The optical system 42 includes a lens. The laser beam entering the spatial light modulator is reflected according to a modulation mode displayed on a liquid crystal layer of the spatial light modulator, and enters the first lens after being converted according to a conversion mode. The laser beam in the first lens is parallel light. Specifically, the laser beam is collected by the first lens, emitted through the spherical focus, and then made into parallel light again by the first lens.
A second mirror m2 and a third mirror m3 for moving the laser beam output from the laser source to a first mirror m1 are provided between the laser source 1 and the spatial light modulation system 4.
The object 2 is a plate-shaped member, and the object 2 is a semiconductor substrate made of a semiconductor material, a piezoelectric substrate made of a piezoelectric material, or a PCB substrate.
The laser source 1 is a gas laser source, a liquid laser source, or a solid laser source, and the laser source 1 can release a pulse-type laser beam or a continuous waveform laser beam.
The spatial light modulation system forms a focused spot by moving a processing object in a vertical direction by focusing a laser beam on the processing object and processing a through hole in the processing object. The table can move the object to be processed in the horizontal direction.
Example two: as shown in figures 1 and 3 of the drawings,
the difference between the second embodiment and the first embodiment is that: optical system the optical system 42 includes three lenses, and includes a first lens 42a, a second lens 42b, and a third lens 42c in this order from the spatial light modulator 41, and the focal lengths of the first lens 42a and the second lens 42b are f1, respectively, to form a 4f optical system, and the optical system is configured to have different spatial utilization contents by the 4f optical system. The third lens 42c has a focal length f2, and thus can change the optical path even further.
The embodiments are only for illustrating the technical concept and features of the present invention, and the purpose of the embodiments is to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and not to limit the protection scope of the present invention. All equivalent changes and modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.
Claims (7)
1. A laser processing apparatus using a spatial light modulator, comprising a laser source (1) capable of emitting the laser beam, characterized in that: further comprises a spatial light modulation system (4) for forming a light-converging point on the object (2) to be processed to realize processing in the Z-axis direction, and a table top (3) for stabilizing the object (2), the spatial light modulation system (4) comprises a first mirror (m 1) for receiving the laser beam, a spatial light modulator (41) for converting the laser beam from the first mirror (m 1), an optical system (42) for focusing the laser beam converted by the spatial light modulator (41) on the processing object (2), the optical system (42) is located between the spatial light modulator (41) and the mesa (3), the table board (3) can be movably arranged on the workbench along the X, Y axis direction, and a driving mechanism for driving the table board (3) to move along the X, Y axis direction is arranged on the workbench.
2. The laser processing apparatus using a spatial light modulator according to claim 1, characterized in that: the spatial light modulator (41) comprises a silicon substrate, a driving circuit layer, a plurality of pixel electrodes, a reflecting film, an alignment film, a liquid crystal layer, an alignment film, a transparent conductive film and a transparent substrate which are sequentially overlapped.
3. The laser processing apparatus using a spatial light modulator according to claim 1, characterized in that: the optical system (42) comprises three lenses, a first lens (42 a), a second lens (42 b) and a third lens (42 c) are arranged from the spatial light modulator (41) in sequence, the focal lengths of the first lens (42 a) and the second lens (42 b) are respectively f1 to form a 4f optical system, and the focal length of the third lens (42 c) is f 2.
4. The laser processing apparatus using a spatial light modulator according to claim 1, characterized in that: the optical system (42) includes a lens.
5. The laser processing apparatus using a spatial light modulator according to claim 1, characterized in that: a second mirror (m 2) and a third mirror (m 3) for moving the laser beam output from the laser source to a first mirror (m 1) are provided between the laser source (1) and the spatial light modulation system (4).
6. The laser processing apparatus using a spatial light modulator according to claim 1, characterized in that: the object (2) is a plate-shaped member, and the object (2) is a semiconductor substrate made of a semiconductor material, a piezoelectric substrate made of a piezoelectric material, or a PCB substrate.
7. The laser processing apparatus using a spatial light modulator according to claim 1, characterized in that: the laser source (1) is a gas laser source, or a liquid laser source, or a solid laser source, and the laser source (1) can release a pulse-type laser beam, or can release a continuous waveform laser beam.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121786647.3U CN215698845U (en) | 2021-08-03 | 2021-08-03 | Laser processing apparatus using spatial light modulator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121786647.3U CN215698845U (en) | 2021-08-03 | 2021-08-03 | Laser processing apparatus using spatial light modulator |
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| Publication Number | Publication Date |
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| CN215698845U true CN215698845U (en) | 2022-02-01 |
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| CN202121786647.3U Active CN215698845U (en) | 2021-08-03 | 2021-08-03 | Laser processing apparatus using spatial light modulator |
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2021
- 2021-08-03 CN CN202121786647.3U patent/CN215698845U/en active Active
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