CN215465759U - Coating and spin-coating machine of photoetching machine - Google Patents
Coating and spin-coating machine of photoetching machine Download PDFInfo
- Publication number
- CN215465759U CN215465759U CN202121306784.2U CN202121306784U CN215465759U CN 215465759 U CN215465759 U CN 215465759U CN 202121306784 U CN202121306784 U CN 202121306784U CN 215465759 U CN215465759 U CN 215465759U
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- rotating shaft
- glass
- coating
- outer shell
- coater
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- Expired - Fee Related
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- 238000000576 coating method Methods 0.000 title claims abstract description 22
- 239000011248 coating agent Substances 0.000 title claims abstract description 19
- 238000001259 photo etching Methods 0.000 title claims abstract description 8
- 238000004528 spin coating Methods 0.000 title claims description 12
- 239000011521 glass Substances 0.000 claims abstract description 69
- 230000007246 mechanism Effects 0.000 claims abstract description 35
- 238000007789 sealing Methods 0.000 claims abstract description 23
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 21
- 230000005540 biological transmission Effects 0.000 claims abstract description 21
- 238000010438 heat treatment Methods 0.000 claims abstract description 21
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 16
- 238000000926 separation method Methods 0.000 claims abstract description 6
- 239000003292 glue Substances 0.000 claims description 26
- 230000006835 compression Effects 0.000 claims description 14
- 238000007906 compression Methods 0.000 claims description 14
- 230000006978 adaptation Effects 0.000 claims 3
- 210000005056 cell body Anatomy 0.000 claims 2
- 238000009434 installation Methods 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 abstract description 23
- 238000003860 storage Methods 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000005381 potential energy Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004146 energy storage Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
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Abstract
The utility model belongs to the technical field of spin coaters, and particularly relates to a coating spin coater of a photoetching machine, which comprises an outer shell, wherein an upper cover body and a glass sight glass are bonded on a lower cover body connected with the top side of the outer shell through a rotating shaft, a sealing gasket is bonded on the bottom side of the glass sight glass, a working cavity and a vacuum cavity are separated from the inside of the outer shell through a separation plate, a motor arranged in the working cavity is in transmission connection with a rotating shaft through a belt transmission mechanism, the side surface of a conductive sliding ring arranged on the rotating shaft is in sliding connection with a carbon brush, a heating sheet is arranged at the bottom of a storage groove arranged on a storage tray fixedly connected with the top end of the rotating shaft, a plurality of clamping mechanisms are arranged on the top surface of the storage tray, a vacuum meter, a check valve and a quick connector are arranged on the side surface of the outer shell, the rotating heating sheet can stably heat a substrate, the influence on the product quality caused by the carbon powder generated by the friction between the carbon brush and the conductive sliding ring is avoided, and the glass sight glass and the sealing gasket which are tightly attached to each other after vacuum cavity is vacuumized can ensure the airtightness of the device, the clamping mechanism can stably clamp the substrate.
Description
Technical Field
The utility model belongs to the technical field of spin coaters, and particularly relates to a coating spin coater of a photoetching machine.
Background
The principle of the glue homogenizing machine is that various glue solutions are dripped on a substrate rotating at a high speed, the glue solution dripped on the substrate is uniformly coated on the substrate by utilizing centrifugal force, the thickness is different according to the viscosity coefficients of different glue solutions and the substrate, and the thickness is also related to the rotating speed and time. The existing spin coater can only realize the spin coating function, the vacuum equipment can be matched with a heating instrument for use, but cannot realize the spin coating function at the same time, the existing spin coater has a mature spin coating instrument, a heating table and a vacuum device on the market at present, but the functions are single, the complex process requirements cannot be met, and in addition, the existing spin coater cannot perform better fixed clamping on a substrate.
SUMMERY OF THE UTILITY MODEL
At present, the spin coater, the heating table and the vacuum device are mature in the market, but the functions of the spin coater, the heating table and the vacuum device are single, complex process requirements cannot be met, and in addition, the existing spin coater cannot well fix and clamp a substrate. The utility model provides a coating spin coater of a photoetching machine, wherein a substrate can be stably heated by a rotating heating plate, the influence of carbon powder generated by friction of a carbon brush and a conductive slip ring on the product quality is avoided, the air tightness of the device can be ensured by a glass viewing mirror and a sealing gasket which are tightly attached to each other after vacuum pumping of a vacuum cavity, and the substrate can be stably clamped by a clamping mechanism.
The utility model provides the following technical scheme: a coating spin coater of a photoetching machine comprises an outer shell, wherein the top side of the outer shell is rotatably connected with a lower cover body through a rotating shaft, the top surface of the lower cover body is fixedly bonded with the bottom surface of an upper cover body, a glass viewing mirror is fixedly clamped between the lower cover body and the upper cover body, the bottom side of the glass viewing mirror is attached and connected with the top surface of a sealing gasket, the inside of the outer shell is divided into a working cavity and a vacuum cavity from bottom to top through a fixedly installed separation plate, a motor is fixedly installed inside the working cavity, the motor is connected with a rotating shaft through transmission of a belt transmission mechanism, the bottom end of the rotating shaft is rotatably connected with the top surface of a control box, the top surface of the control box outside the rotating shaft is fixedly installed with a photoelectric door, a conductive sliding ring is fixedly installed on the rotating shaft above the photoelectric door, the side surface of the conductive sliding ring is slidably connected with a carbon brush, and the mechanical seal fixedly installed on the separation plate is rotatably sleeved outside the rotating shaft, the top fixed connection of axis of rotation carries the bottom surface of thing dish, the bottom fixed mounting who carries the thing groove of seting up on carrying the thing dish has the heating plate, the top fixed mounting who carries the thing dish has a plurality of fixture, the top fixed mounting of division board has the mechanism of glue dripping, the screw thread through-hole of fixed mounting vacuum gauge, check valve, quick-operation joint is seted up to the lateral wall of vacuum cavity, the one end of check valve, quick-operation joint fixedly connected with vacuum line and compressed air pipeline respectively.
The glass sight glass is of a flat cylindrical structure, UV glue is coated at the joint of the glass sight glass, the lower cover body and the upper cover body, the lower cover body is of a circular tube type structure, a cylindrical groove body which is matched and sleeved on the outer side of the glass sight glass is formed in the top surface of the lower cover body, the upper cover body is of a circular tube type structure, a cylindrical groove body which is matched and sleeved on the outer side of the glass sight glass is formed in the bottom surface of the upper cover body, a cylindrical through hole which is collinear with the axis of the object carrying disc and has a diameter not smaller than the diameter of the object carrying disc is formed in the top surface of the outer shell, and the axes of the lower cover body, the upper cover body, the glass sight glass and the object carrying disc are collinear; the coating state of the inside observation shell body of operating personnel accessible glass sight glass audio-visual carries out accurate grasp to the production condition.
The sealing gasket is of an annular rubber gasket structure, an annular groove structure which is collinear with the axis of the object carrying disc and is matched with the sealing gasket is formed in the top surface of the outer shell, and UV (ultraviolet) glue is coated at the joint of the sealing gasket and the outer shell; after the outer shell is vacuumized, the bottom surface of the glass sight glass can be tightly attached to the sealing pad under the action of air pressure, and the air tightness of the device is effectively improved.
The axis of an output shaft of the motor is parallel to the axis of a rotating shaft, a driving belt wheel in a belt transmission mechanism is fixedly installed on the output shaft of the motor, and a driven belt wheel in the belt transmission mechanism is fixedly installed on the rotating shaft; the motor drives the rotating shaft to rotate through the belt transmission mechanism, so that the influence on the rotating shaft caused by the vibration of the motor is effectively reduced, and the uniformity of glue liquid in the rotary coating process is effectively improved.
The working cavity and the vacuum cavity are mutually independent and sealed, a threading groove pipe is arranged on a rotating shaft above the conductive sliding ring, one end of the threading groove pipe penetrates through the side surface of the rotating shaft between the transmission mechanism and the conductive sliding ring, the other end of the threading groove pipe penetrates through the side surface of the rotating shaft between the isolating plate and the object carrying disc, a lead hole is vertically arranged on the bottom surface of the object carrying disc below the object carrying groove, the photoelectric door, the carbon brush and the heating plate are electrically connected with the control box, and sealing glue is filled at two ends of the threading groove pipe; the carbon brush can supply power to the conductive slip ring, and stably supplies power to the rotating heating plate through the threading slot pipe and the lead hole, so that the heating plate heats the substrate, and the mutually isolated working cavity and vacuum cavity can prevent carbon powder generated in the friction between the carbon brush and the conductive slip ring from falling on glue solution and the substrate to influence the product quality.
The clamping mechanisms are circumferentially and orderly arranged on the top surface of the object carrying disc in an equal sequence by taking the axis of the object carrying disc as a surrounding center, the number of the clamping mechanisms is at least three, each clamping mechanism comprises an outer sleeve, the outer sleeve is fixedly arranged on the top surface of the object carrying disc, an inner cavity matched with and provided with a compression spring is formed in the inner side of the outer sleeve, the compression spring is slidably sleeved on the outer side of a sliding rod, a sliding block is fixedly arranged on the side surface of the sliding rod, the sliding block is slidably arranged on the inner side of a sliding groove, the sliding groove is formed in one side of the inner cavity and is communicated with the inner cavity, and two ends of the sliding rod are slidably communicated with the end surfaces of two ends of the outer sleeve and are respectively and fixedly provided with a compression head and a pulling block; an operator can pull the pulling block to drive the sliding rod and the sliding block to slide towards one end of the outer sleeve, and then the side face of the substrate placed at the center of the top face of the loading disc is stably clamped and fixed under the action of elastic potential energy of the compression spring.
The flow direction of the check valve is from the outer shell to the vacuum pipeline; the check valve can directly avoid the occurrence of the back suction condition caused by improper operation of an operator after the vacuum pump stops rotating.
The utility model has the beneficial effects that: an operator can visually observe the coating state inside the outer shell through a glass sight glass, and the production condition is accurately mastered; after the outer shell is vacuumized, the bottom surface of the glass sight glass can be tightly attached to the sealing pad under the action of air pressure, so that the air tightness of the device is effectively improved; the motor drives the rotating shaft to rotate through the belt transmission mechanism, so that the influence on the rotating shaft caused by the vibration of the motor is effectively reduced, and the uniformity of glue solution in the rotary coating process is effectively improved; the carbon brush can supply power to the conductive slip ring, and stably supplies power to the rotating heating plate through the threading slot pipe and the lead hole, so that the heating plate heats the substrate, and the mutually isolated working cavity and vacuum cavity can prevent carbon powder generated in the friction between the carbon brush and the conductive slip ring from falling on glue solution and the substrate to influence the product quality; an operator can pull the pulling block to drive the sliding rod and the sliding block to slide towards one end of the outer sleeve, and then the side surface of the substrate placed at the center of the top surface of the carrying disc is stably clamped and fixed under the action of the elastic potential energy of the compression spring; the check valve can directly avoid the occurrence of the back suction condition caused by improper operation of an operator after the vacuum pump stops rotating.
The parts of the device not involved are the same as or can be implemented using prior art.
Drawings
FIG. 1 is a schematic cross-sectional view of the present invention;
FIG. 2 is a schematic cross-sectional view of a clamping mechanism according to the present invention;
in the figure: 1. an outer housing; 101. a working chamber; 102. a vacuum chamber; 2. a rotating shaft; 3. a lower cover body; 4. an upper cover body; 5. a glass sight glass; 6. a gasket; 7. a separator plate; 8. a motor; 9. a belt drive mechanism; 10. a rotating shaft; 1001. threading a slot pipe; 11. a control box; 12. a photogate; 13. a conductive slip ring; 14. a carbon brush; 15. machine sealing; 16. a carrying tray; 17. a storage groove; 18. a heating plate; 19. a wire hole; 20. a clamping mechanism; 2001. an outer sleeve; 2002. a compression spring; 2003. an inner cavity; 2004. a slide bar; 2005. a slider; 2006. a chute; 2007. pressing and fixing the head; 2008. pulling the block; 21. a glue dripping mechanism; 22. a vacuum gauge; 23. a compressed air line; 24. a check valve; 25. a vacuum line; 26. and (4) quickly connecting a joint.
Detailed Description
Referring to fig. 1-2, the present invention provides the following technical solutions: a coating spin coater of a photoetching machine comprises an outer shell 1, wherein the top side of the outer shell 1 is rotatably connected with a lower cover body 3 through a rotating shaft 2, the top surface of the lower cover body 3 is fixedly adhered to the bottom surface of an upper cover body 4, a glass viewing mirror 5 is fixedly clamped between the lower cover body 3 and the upper cover body 4, the bottom side of the glass viewing mirror 5 is attached to the top surface of a connecting sealing gasket 6, the inside of the outer shell 1 is divided into a working cavity 101 and a vacuum cavity 102 from bottom to top through a fixedly installed separation plate 7, a motor 8 is fixedly installed inside the working cavity 101, the motor 8 is in transmission connection with a rotating shaft 10 through a belt transmission mechanism 9, the bottom end of the rotating shaft 10 is rotatably connected with the top surface of a control box 11, a photoelectric door 12 is fixedly installed on the top surface of the control box 11 outside the rotating shaft 10, and a conductive slip ring 13 is fixedly installed on the rotating shaft 10 above the photoelectric door 12, the side sliding connection of electrically conductive sliding ring 13 has carbon brush 14, fixed mounting's mechanical seal 15 rotates the suit in the outside of axis of rotation 10 on the division board 7, the bottom surface of the thing dish 16 is carried in the top fixed connection of axis of rotation 10, the bottom fixed mounting who carries the thing groove 17 of seting up on carrying the thing dish 16 has heating plate 18, the top surface fixed mounting who carries the thing dish 16 has a plurality of fixture 20, the top surface fixed mounting of division board 7 has the mechanism of dripping to glue 21, the threaded through-hole of fixed mounting vacuum gauge 22, check valve 24, quick-operation joint 26 is seted up to the lateral wall of vacuum chamber 102, the one end difference fixed connection of check valve 24, quick-operation joint 26 has vacuum pipeline 25 and compressed air pipeline 23.
The glass sight glass 5 is of a flat cylindrical structure, UV glue is coated at the joint of the glass sight glass 5, the lower cover body 3 and the upper cover body 4, the lower cover body 3 is of a circular tube type structure, a cylindrical groove body which is matched and sleeved on the outer side of the glass sight glass 5 is formed in the top surface of the lower cover body 3, the upper cover body 4 is of a circular tube type structure, a cylindrical groove body which is matched and sleeved on the outer side of the glass sight glass 5 is formed in the bottom surface of the upper cover body 4, a cylindrical through hole which is collinear with the axis of the object carrying disc 16 and has a diameter not smaller than the diameter of the object carrying disc 16 is formed in the top surface of the outer shell 1, and the axes of the lower cover body 3, the upper cover body 4, the glass sight glass 5 and the object carrying disc 16 are collinear; the operator can visually observe the coating state inside the outer case 1 through the glass mirror 5, and accurately grasp the production condition.
The sealing gasket 6 is of an annular rubber gasket structure, an annular groove structure which is collinear with the axis of the object carrying disc 16 and is matched with the sealing gasket 6 is formed in the top surface of the outer shell 1, and UV (ultraviolet) glue is coated at the joint of the sealing gasket 6 and the outer shell 1; after the outer shell 1 is vacuumized, the bottom surface of the glass sight glass 5 can be tightly attached to the sealing gasket 6 under the action of air pressure, and the air tightness of the device is effectively improved.
The axis of the output shaft of the motor 8 is parallel to the axis of the rotating shaft 10, a driving belt wheel in the belt transmission mechanism 9 is fixedly installed on the output shaft of the motor 8, and a driven belt wheel in the belt transmission mechanism 9 is fixedly installed on the rotating shaft 10; the motor 8 drives the rotating shaft 10 to rotate through the belt transmission mechanism 9, so that the influence on the rotating shaft 10 caused by the vibration of the motor 8 is effectively reduced, and the uniformity of glue liquid in the rotary coating process is effectively improved.
The working cavity 101 and the vacuum cavity 102 are sealed independently, a threading slot pipe 1001 is arranged on a rotating shaft 10 above the conductive sliding ring 13, one end of the threading slot pipe 1001 penetrates through the side surface of the rotating shaft 10 between the belt transmission mechanism 9 and the conductive sliding ring 13, the other end of the threading slot pipe 1001 penetrates through the side surface of the rotating shaft 10 between the isolation plate 7 and the object carrying disc 16, a lead hole 19 is vertically arranged on the bottom surface of the object carrying disc 16 below the object carrying groove 17, the photoelectric door 12, the carbon brush 14 and the heating plate 18 are electrically connected with the control box 11, and sealant is filled at both ends of the threading slot pipe 1001; the carbon brush 14 can supply power to the conductive slip ring 13, and stably supply power to the heating sheet 18 in rotation through the threading slot pipe 1001 and the lead hole 19, so that the heating sheet 18 heats the substrate, and the working chamber 101 and the vacuum chamber 102 which are separated from each other can prevent carbon powder generated in the friction between the carbon brush 14 and the conductive slip ring 13 from falling on glue solution and the substrate to influence the product quality.
The clamping mechanisms 20 are circumferentially and equidistantly mounted on the top surface of the object carrying disc 16 around the axis of the object carrying disc 16, the number of the clamping mechanisms 20 is at least three, each clamping mechanism 20 comprises an outer sleeve 2001, the outer sleeve 2001 is fixedly mounted on the top surface of the object carrying disc 16, an inner cavity 2003 adapted to mount a compression spring 2002 is formed in the inner side of the outer sleeve 2001, the compression spring 2002 is slidably sleeved on the outer side of a sliding rod 2004, a sliding block 2005 is fixedly mounted on the side surface of the sliding rod 2004, the sliding block 2005 is slidably mounted on the inner side of a sliding groove 2006, the sliding groove 2006 is formed in one side of the inner cavity 2003 and is in through connection with the inner cavity 2003, two ends of the sliding rod 2004 are slidably through the end surfaces of the two ends of the outer sleeve 2001 and are respectively and fixedly mounted with a compression head 2007 and a pulling block 2008; an operator can pull the pulling block 2008 to drive the sliding rod 2004 and the sliding block 2005 to slide towards one end of the outer sleeve 2001, and then stably clamp and fix the side surface of the substrate placed at the center position of the top surface of the loading tray 16 under the action of the elastic potential energy of the compression spring 2002.
The flow direction of the check valve 24 is from the outer shell 1 to the vacuum pipeline 25; the check valve 24 directly prevents suck back caused by improper operation of the operator after the vacuum pump is shut down.
The working principle and the using process of the utility model are as follows: when the device is used, an operator rotates to open the glass viewing mirror 5, then pulls the pulling block 2008 to enable the sliding block 2005 to be separated from the sliding groove 2006, the compression spring 2002 is extruded by the sliding block 2005 to generate elastic energy storage, then the operator rotates the pulling block 2008 to enable the end face of the sliding block 2005 facing the press-fixing head 2007 to be attached to the inner end face of the inner cavity 2003, at this time, the operator releases the pulling block 2008, the sliding block 2005 is limited, fixed and kept immovable by the sliding groove 2006 clamped in the inner cavity 2003, after the operator sequentially pulls the pulling blocks 2008 in all the clamping mechanisms 20 according to the operation, the substrate is placed in the placing groove 17 above the heating sheet 18, then the pulling block 2008 is rotated again, and the sliding block 2005 slides into the sliding groove 2006 under the elastic support of the compression spring 2002 to complete fixed clamping of the substrate; then, an operator closes the glass sight glass 5 to enable the bottom surface of the glass sight glass 5 to be attached to the top surface of the sealing gasket 6, then opens a vacuum pump connected with a vacuum pipeline 25 to apply negative pressure to the inside of the outer shell 1, and observes the vacuum degree of the outer shell 1 through a vacuum meter 22; when the rotary coating operation is carried out, the motor 8 drives the rotating shaft 10 to rotate through the belt transmission mechanism 9, the rotating shaft 10 drives the substrate clamped and fixed on the carrying disc 16 to rotate at a high speed, and the glue dripping mechanism 21 carries out glue dripping operation simultaneously; the operator can observe the glue dripping condition in the outer shell 1 through the glass sight glass 5; after the glue is dripped, an operator closes the vacuum pump, opens a compressed air valve connected with the compressed air pipeline 23, and then opens the glass sight glass 5 to take out the substrate.
Claims (7)
1. A coating and spin-coating machine of a photoetching machine is characterized in that: the glass sight glass sealing device comprises an outer shell, wherein the top side of the outer shell is rotatably connected with a lower cover body through a rotating shaft, the top surface of the lower cover body is fixedly bonded with the bottom surface of an upper cover body, a glass sight glass is fixedly clamped between the lower cover body and the upper cover body, the bottom side of the glass sight glass is attached and connected with the top surface of a sealing gasket, the inside of the outer shell is divided into a working cavity and a vacuum cavity from bottom to top through a fixedly-mounted separation plate, a motor is fixedly mounted inside the working cavity, the motor is connected with a rotating shaft through a belt transmission mechanism in a transmission way, the bottom end of the rotating shaft is rotatably connected with the top surface of a control box, a photoelectric door is fixedly mounted on the top surface of the control box outside the rotating shaft, a conductive sliding ring is fixedly mounted on the rotating shaft above the photoelectric door, a carbon brush is slidably connected to the side surface of the conductive sliding ring, and a mechanical seal fixedly mounted on the separation plate is rotatably sleeved outside the rotating shaft, the top fixed connection of axis of rotation carries the bottom surface of thing dish, the bottom fixed mounting who carries the thing groove of seting up on carrying the thing dish has the heating plate, the top fixed mounting who carries the thing dish has a plurality of fixture, the top fixed mounting of division board has the mechanism of glue dripping, the screw thread through-hole of fixed mounting vacuum gauge, check valve, quick-operation joint is seted up to the lateral wall of vacuum cavity, the one end of check valve, quick-operation joint fixedly connected with vacuum line and compressed air pipeline respectively.
2. A coater-coater coating and spin-coating machine according to claim 1, wherein: the glass sight glass is flat cylindrical structure, the glass sight glass has the UV to glue with the junction coating of lower lid, last lid, the cylindrical cell body of adaptation suit in the glass sight glass outside is seted up for round tubular structure and top surface to the lid down, go up the lid and set up the cylindrical cell body of adaptation suit in the glass sight glass outside for round tubular structure and bottom surface, the cylindrical through-hole of the axis collineation and the diameter that carry the thing dish are not less than the diameter that carries the thing dish is seted up to the top surface of shell body, the axis collineation of lid, last lid, glass sight glass, year thing dish down.
3. A coater-coater coating and spin-coating machine according to claim 1, wherein: the sealing gasket is of an annular rubber gasket structure, the top surface of the outer shell is provided with an annular groove structure which is collinear with the axis of the object carrying disc and is matched with the sealing gasket in an installing mode, and the joint of the sealing gasket and the outer shell is coated with UV (ultraviolet) glue.
4. A coater-coater coating and spin-coating machine according to claim 1, wherein: the axis of the output shaft of the motor is parallel to the axis of the rotating shaft, the output shaft of the motor is fixedly provided with a driving belt wheel in a belt transmission mechanism, and the rotating shaft is fixedly provided with a driven belt wheel in the belt transmission mechanism.
5. A coater-coater coating and spin-coating machine according to claim 1, wherein: the working chamber and the vacuum chamber are mutually independent and sealed, a threading groove pipe is arranged on the rotating shaft above the conductive sliding ring, one end of the threading groove pipe penetrates through the side surface of the rotating shaft between the transmission mechanism and the conductive sliding ring, the other end of the threading groove pipe penetrates through the side surface of the rotating shaft between the isolating plate and the object carrying disc, a lead hole is vertically arranged on the bottom surface of the object carrying disc below the object carrying groove, the photoelectric door, the carbon brush and the heating plate are electrically connected with the control box, and sealing glue is filled at two ends of the threading groove pipe.
6. A coater-coater coating and spin-coating machine according to claim 1, wherein: the fixture uses the axis of carrying the thing dish to install on the top surface of carrying the thing dish for surrounding central circumference preface, fixture's quantity is three at least, fixture includes the outer tube, outer tube fixed mounting is on the top surface of carrying the thing dish, the interior cavity of adaptation installation compression spring is seted up to the inboard of outer tube, compression spring sliding sleeve is in the outside of slide bar, the side fixed mounting of slide bar has the slider, slider slidable mounting is in the inboard of spout, the spout is seted up in one side of interior cavity and the interior cavity of through connection, the both ends of slide bar slide to link up the both ends terminal surface of outer tube and be fixed with respectively and press solid head and pull the piece.
7. A coater-coater coating and spin-coating machine according to claim 1, wherein: the flow direction of the check valve is from the outer shell body to the vacuum pipeline.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121306784.2U CN215465759U (en) | 2021-06-11 | 2021-06-11 | Coating and spin-coating machine of photoetching machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121306784.2U CN215465759U (en) | 2021-06-11 | 2021-06-11 | Coating and spin-coating machine of photoetching machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215465759U true CN215465759U (en) | 2022-01-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121306784.2U Expired - Fee Related CN215465759U (en) | 2021-06-11 | 2021-06-11 | Coating and spin-coating machine of photoetching machine |
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| Country | Link |
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| CN (1) | CN215465759U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115138536A (en) * | 2022-06-28 | 2022-10-04 | 上海交通大学 | Vacuum treatment method and device for glue-homogenizing bubbles of embedded chip packaging substrate |
-
2021
- 2021-06-11 CN CN202121306784.2U patent/CN215465759U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115138536A (en) * | 2022-06-28 | 2022-10-04 | 上海交通大学 | Vacuum treatment method and device for glue-homogenizing bubbles of embedded chip packaging substrate |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20220111 |
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| CF01 | Termination of patent right due to non-payment of annual fee |