CN204111863U - A kind of vacuum optical coating system of the dynamic monitoring thickness in place with workpiece motion s - Google Patents
A kind of vacuum optical coating system of the dynamic monitoring thickness in place with workpiece motion s Download PDFInfo
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- CN204111863U CN204111863U CN201420374888.0U CN201420374888U CN204111863U CN 204111863 U CN204111863 U CN 204111863U CN 201420374888 U CN201420374888 U CN 201420374888U CN 204111863 U CN204111863 U CN 204111863U
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Abstract
A kind of vacuum optical coating system of the dynamic monitoring thickness in place with workpiece motion s, film-thickness monitoring main frame of the present utility model is positioned at above body of heater top board and is arranged on rotating shaft upper end, crystal oscillator probe is arranged on workpiece rotating frame, the electrical lead of crystal oscillator probe and signal wire seal and pass body of heater from the cavity of the hollow on the top of rotating shaft, chilled(cooling) water return (CWR) seals and passes body of heater from the cavity of the hollow of the bottom of rotating shaft, and namely the utility model achieves separately transmitting of crystal oscillator probe water power.The chilled(cooling) water return (CWR) that the utility model pops one's head in crystal oscillator and electrical lead thereof and signal wire separate and transmit from the bottom of body of heater transmission shaft and top respectively, change in prior art the mode concentrating on transmission shaft top and transmit, electricity separation transmission, the above-mentioned numerous and jumbled structure of the front propeller shaft simplified, be conducive to the reliability of raising equipment, reduce failure rate.
Description
Technical field
The utility model relates to a kind of vacuum optical coating system of dynamic monitoring thickness in place, particularly a kind of full-automatic optical coating equipment with in place real-time Thickness Monitoring device with workpiece motion s.
Background technology
Optical coating system coating process many employings quartz crystal film thickness gauge (abbreviation film thickness gauge) monitors Thickness Variation, the most traditional using method be the plating material in earthenware Crucible evaporated from bottom to top by heating, be deposited on above workpiece on, now quartz crystal probe (be called for short probe) of film thickness gauge is generally arranged on one, furnace roof central authorities not with on the fixed position of workpiece motion s, by transfer wire thickness signal is delivered on the film thickness gauge main frame outside stove.
The most traditional this method that probe is fixed on above stove, install, transmit and use the easiest all, but be only applicable to the type of furnace of evaporating film plating from bottom to top, and represent the film thickness value of whole stove each point with the film thickness value of this stove furnace roof central point, error is larger.
Occurred that vertical dress hung workpiece, the vertical layout of earthenware Crucible from side oblique evaporation direction afterwards, or adopt vertical sputtering target to carry out sputtering sedimentation, probe then stretches in stove near workpiece place instead, side is contained on a motionless fixed position, carry out film thickness monitoring, moving the thickness of workpiece with the whole stove of thickness information being representative of this fixed point, there is the large problem of error in this mode equally.
Recently; the optics plating mould machine of vertical dress extension workpiece has occurred crystal oscillator probe to be fixed on by workpiece; the method of the in place dynamic thickness measuring moved together along with workpiece rotating frame; although be also the thickness representing whole furnaceman's part with the thickness measuring value of a bit; as long as but thickness measuring point is selected in uniform coated district; thickness on moving probe and workpiece thickness basically identical, the precision that this mode is monitored improves greatly.The difficulty that this method realizes is the extraction of its probe electrical lead and signal wire and the process of its chilled(cooling) water return (CWR) turnover body of heater.
A kind of existing method is by installing a set of vacuum-packed rotating shaft system in position, furnace roof axis, the actuating unit drive shaft external by furnace roof is rotated, film thickness gauge main frame is fixed on rotating shaft by pallet and passes on the upper surface of furnace roof, workpiece rotating frame in stove is fixed on the bottom of rotating shaft, and workpiece rotating frame and thickness tester main frame are with rotating shaft synchronous axial system.The electrical lead of probe and signal wire are turned in the sealed structure at middle part by axle draws, and pops one's head in pivot, but is motionless relative to workpiece rotating frame and thickness tester main frame.
The chilled(cooling) water return (CWR) of probe must configure the swivel rotated with rotating shaft, allows into, return water pipe passing body of heater from the axis of rotating shaft by vacuum-sealing with particular design process, then is connected by swivel and the outer motionless water supply and return system of stove.
Thickness tester main frame adopts powered battery, but regularly must change battery.The test result of thickness tester main frame is wirelessly transmitted to the other computer system of stove by WiFi and carries out showing, processes and the feedback control of receiving computer system.
The method of this dynamic thickness measuring in place has significant progress, but also have following not ideal enough part: the turnover of chilled(cooling) water return (CWR) that (1) thickness tester main frame is drawn with probe electrical lead and signal wire, popped one's head in, in stove, the driving of workpiece rotating frame connects, the transmission rig, vacuum dynamic seal etc. of the outer power of stove all concentrate on rotating shaft and are positioned in the structure of furnace roof section, cause the superstructure of rotating shaft crowded numerous and jumbled, reliability is low, easily break down; (2) vibration of workpiece rotating frame stability of motion difference is large, affects precision and the repeatability of film thickness measuring; (3) thickness tester main frame needs to regularly replace supplying cell.
Utility model content
Technical problem to be solved in the utility model is to provide the vacuum optical coating system of a kind of energy simple and reliable for structure dynamic monitoring thickness in place.
Above-mentioned technical problem of the present utility model solves by following technical solution: a kind of vacuum optical coating system of the dynamic monitoring thickness in place with workpiece motion s, comprise body of heater, rotating shaft, workpiece rotating frame, rotating shaft driving mechanism, crystal oscillator probe and film-thickness monitoring main frame, described body of heater is by furnace wall, furnace body chassis and body of heater top board composition, rotating shaft is vertically arranged in the middle part of body of heater, on, lower end respectively with described body of heater top board, furnace body chassis sealing is installed, rotating shaft upper end passes described body of heater top board, film-thickness monitoring main frame is positioned at above described body of heater top board and is arranged on described rotating shaft upper end, workpiece rotating frame is arranged in described rotating shaft and is positioned at furnace interior, crystal oscillator probe is arranged on described workpiece rotating frame, its electrical lead passes described body of heater with signal wire sealing and is connected with described film-thickness monitoring main frame, the sealing of its chilled(cooling) water return (CWR) passes described body of heater and is connected with the swivel joint being connected outside water supply and return system, rotating shaft driving mechanism rotates from the outside drive shaft that to be connected with described rotating shaft of body of heater, described workpiece rotating frame, film-thickness monitoring main frame and crystal oscillator probe are with described rotating shaft synchronous axial system,
All there is the cavity of hollow the inside, upper and lower of described rotating shaft, the electrical lead of described crystal oscillator probe and signal wire seal and pass described body of heater from the cavity of the described hollow on the top of described rotating shaft, described chilled(cooling) water return (CWR) seals and passes described body of heater from the cavity of the described hollow of the bottom of described rotating shaft, namely separately transmitting of water power is realized, be conducive to simplifying circuit in prior art, the water route turnover that exists together mixes intensive structure, to improve reliability reducing failure rate.
Described rotating shaft is by the lower drive shaft be connected successively from bottom to top, upwards transmission connection piece, universal coupling, upper extension rotating shaft and upload moving axis composition, the cavity of described hollow is positioned at described lower drive shaft and uploads moving axis inside, described workpiece rotating frame is arranged on described lower drive shaft, the lower end that described rotating shaft driving mechanism and described lower drive shaft pass described furnace body chassis is connected, rotating shaft driving mechanism Direct driver lower drive shaft and workpiece rotating frame rotate, be conducive to the stability of motion of raising workpiece rotating frame and vibrate little, utilize universal coupling to upper driving simultaneously, on universal coupling ensures, can automatically adapt to while lower drive shaft synchronous axial system, the deviation of lower drive shaft centering.
The one section diameter of cavity near its upper surface of the hollow of described lower drive shaft inside increases, for enlarged cavity, be fixed on the upper surface of described lower drive shaft the sealing bottom surface of described upwards transmission connection piece, the bottom surface of described upwards transmission connection piece has the stripper loop stretching into described enlarged cavity, a water inlet pipe is provided with in the cavity of the hollow of described lower drive shaft inside, annular backwater road is formed between the inwall of the cavity of the hollow of described water inlet pipe outer wall and described lower drive shaft inside, described stripper loop inside is stretched in the upper end of described water inlet pipe, be connected by movable sealing structure between its outer wall with the inwall of described stripper loop, make to form intake antrum in described stripper loop inside, and backwater cavity is formed between described enlarged cavity and described stripper loop, described upwards transmission connection piece also has two passages be communicated with described backwater cavity with described intake antrum respectively, and be connected with water return pipeline by the suction culvert that these two passages are popped one's head in described crystal oscillator respectively, the lower port of the cavity of the lower end of described water inlet pipe and the hollow of described lower drive shaft inside is connected with described swivel joint.
Described movable sealing structure is made up of the pressure pad set gradually from top to bottom, dynamic seal, transmission spacer ring, deep groove ball bearing, transmission spacer ring, dynamic seal, pressure pad, and this movable sealing structure upper end is pressed on described stripper loop inside by the annular flange flange be positioned on described stripper loop inwall, lower end by the compaction plug being arranged on described stripper loop opening end inwall.
Described rotating shaft driving mechanism is made up of motor and synchronizing wheel transmission rig, and this type of drive stable drive is shockproof, is conducive to the accuracy and the repeatability that improve monitoring.
The power end of described film-thickness monitoring main frame is connected with dispatch from foreign news agency by copper ring-carbon brush mechanism, described copper ring-carbon brush mechanism has three copper rings and three carbon brush, three described copper rings are arranged with one heart around described moving axis of uploading, three described carbon brush are relative one by one with three described copper rings, and the elastic force effect lower front end of carbon brush spring is in its back-end against on described copper ring;
Upload with uploading moving axis synchronous axial system on moving axis described in described copper ring is arranged on, described carbon brush position is fixedly mounted in above described body of heater top board, and the power end of described film-thickness monitoring main frame is connected with described copper ring, is connected with dispatch from foreign news agency by described carbon brush;
Or described carbon brush be arranged on described in upload on moving axis with uploading moving axis synchronous axial system, described copper ring position to be fixedly mounted in above described body of heater top board and to insulate with it, the power end of described film-thickness monitoring main frame is connected with described carbon brush, is connected with dispatch from foreign news agency by described copper ring.
Film-thickness monitoring main frame is powered by copper ring-carbon brush mechanism, instead of battery powered mode in prior art, without the need to regularly replacing battery, makes film-thickness monitoring main frame can long time continuous working.
Described copper ring and carbon brush are covered by a protective guard be arranged on described body of heater top board.
Described film-thickness monitoring main frame is by WiFi wireless transport module and the computer communication that is positioned near body of heater.
Described lower drive shaft is arranged on described furnace body chassis by underdrive axle bed, described underdrive axle bed is the tubular of both ends open, be sleeved on described lower drive shaft, outer wall has the annular flange flange extended radially outwardly, and fixed by the edge seal of perforate in the middle part of this annular flange flange and described furnace body chassis, described underdrive axle bed inwall has an annular flange flange near its upper end open place, this annular flange flange has a thrust block, described thrust block press-fits in described annular flange flange thereunder by the projective structure on described lower drive shaft outer wall, the below of described underdrive axle bed inner annular flange is disposed with packing ring from top to bottom, dynamic seal, underdrive spacer ring, deep groove ball bearing, bearing sleeve, deep groove ball bearing, underdrive spacer ring, dynamic seal, and at the lower ending opening place of described underdrive axle bed by underdrive axle bed gland by above-mentioned each compressing parts in the inner chamber of described underdrive axle bed, ensure can also realize lightly rotating neatly the while of realizing vacuum-packed between lower drive shaft and described underdrive axle bed.
Described moving axis of uploading is arranged on described body of heater top board by upper driving axle bed, described upper driving axle bed is tubular, there is perforate at cylinder the end, upload moving axis and be arranged on upper driving axle bed inside, lower end passes from the perforate at the bottom of described upper driving axle bed cylinder, upper driving axle bed upper end open place has the flanging of level, upper driving axle bed is fixed by the edge seal of perforate in the middle part of described flanging and described body of heater top board, deep groove ball bearing is provided with successively from bottom to up between the inwall of upper driving axle bed and the described outer wall uploading moving axis, transmission spacer ring, dynamic seal, transmission spacer ring, deep groove ball bearing, these lower are bearing at the bottom of the cylinder of described upper driving axle bed, in upper end, outer both sides are uploaded the annular, outer structure on moving axis outer wall respectively and are arranged on the bearing trim ring compression of described upper driving axle bed upper end open described in being positioned at.
Relative to prior art, the utility model has following beneficial effect: 1) the utility model chilled(cooling) water return (CWR) that crystal oscillator is popped one's head in and electrical lead thereof and signal wire separate respectively from the lower drive shaft of body of heater with upload moving axis transmission, change in prior art the mode concentrating on and upload moving axis and transmit, electricity separation transmission, the structure that moving axis is numerous and jumbled is uploaded before simplifying, be conducive to the reliability of raising equipment, reduce failure rate;
2) adopt universal coupling to connect between upper and lower transmission shaft, universal coupling can adapt to the deviation of upper and lower transmission shaft centering automatically, ensures upper and lower transmission shaft synchronous axial system;
3) driving of rotating shaft have employed motor and synchronizing wheel transmission rig, the feature that the type of drive stable drive engaged by teeth between synchronizing wheel and synchronous wheel belt and teeth groove precision is shockproof, improves accuracy and the repeatability of monitoring;
4) the utility model film-thickness monitoring main frame is connected with dispatch from foreign news agency by copper ring-carbon brush mechanism, replaces powered battery mode of the prior art, makes film-thickness monitoring main frame can long time continuous working, need not regularly shut down replacing battery.
Accompanying drawing explanation
Fig. 1 is the primary structure schematic diagram of the vacuum optical coating system of the utility model preferred embodiment;
Fig. 2 is the enlarged view of vacuum optical coating system part A in Fig. 1;
Fig. 3 is the enlarged view of vacuum optical coating system C part in Fig. 1;
Fig. 4 is the enlarged view of vacuum optical coating system part B in Fig. 1.
Embodiment
The primary structure schematic diagram of the vacuum optical coating system of Fig. 1 the present embodiment.As shown in Figure 1, vacuum optical coating system, comprises body of heater, rotating shaft, workpiece rotating frame 5, rotating shaft driving mechanism, crystal oscillator probe 6 and film-thickness monitoring main frame 73.Body of heater is made up of furnace wall 3, furnace body chassis 2 and body of heater top board 7, is supported below body of heater by furnace body support 1, and furnace wall 3 is provided with the bleeding point 4 be connected with vacuum pump set, to be evacuated in body of heater when plated film.Rotating shaft is vertically arranged in the middle part of body of heater, by the lower drive shaft 21 be connected successively from bottom to top, upwards transmission connection piece 37, universal coupling 11, upper extension rotating shaft 9 with upload moving axis 52 and form, the upper end of uploading moving axis 52 being positioned at rotating shaft top passes body of heater top board 7 and seals and is arranged on body of heater top board 7, and the lower end being positioned at the lower drive shaft 21 of rotating shaft bottom passes furnace body chassis 2 and seals and is arranged on furnace body chassis 2.Film-thickness monitoring main frame 73 is positioned at the upper end being arranged on above body of heater top board 7 and uploading moving axis 52, workpiece rotating frame 5 is arranged on lower drive shaft 21 and is positioned at furnace interior, workpiece dress to be coated hangs on the side of workpiece rotating frame 5, workpiece surfacing, towards furnace wall 3, accepts the plating material deposition that furnace body inside face is sudden.Crystal oscillator probe 6 is fixed on the side of workpiece rotating frame 5, and the crystal-vibration-chip surface of crystal oscillator probe 6 needs in the same plane with the surfacing of workpiece.Upload the cavity that moving axis 52 and lower drive shaft 21 inside are hollow, the electrical lead of crystal oscillator probe 6 and signal wire 8 from upload moving axis 52 inside hollow cavity pass body of heater hermetically and be connected with film-thickness monitoring main frame 73.10 is magnetron sputtering target (can also select the earthenware Crucible of vertical layout in other embodiments as plating material evaporation source), it is generally arranged on furnace interior near furnace wall 3 place, for to the directed sputtering target material of stove central axis direction, so that at workpiece surface deposited plating layer to be plated.12 be crystal oscillator probe 6 suction culvert and water return pipeline.Rotating shaft driving mechanism is positioned at below body of heater, is made up of motor 14 and synchronizing wheel transmission rig
,motor 14 is arranged on furnace body support 1, and it drives lower drive shaft 21 to rotate by synchronizing wheel transmission rig, and 13 is the synchronous wheel belt of synchronizing wheel transmission rig.
Fig. 2 is mainly the enlarged view of part A in Fig. 1, and 21 is lower drive shaft, and 26 is underdrive axle bed, and lower drive shaft 21 is arranged on furnace body chassis 2 by the rotating sealing of underdrive axle bed 26.The tubular of underdrive axle bed 26 in both ends open, is sleeved on lower drive shaft 21, outer wall has the annular flange flange extended radially outwardly, and is sealed fixing by vaccum seal ring 29, screw by the edge of perforate in the middle part of this annular flange flange and furnace body chassis 2.Underdrive axle bed 26 inwall has an annular flange flange near its upper end open place, this annular flange flange has a thrust block 34, thrust block 34 by the projective structure on lower drive shaft 21 outer wall press-fit below it in described annular flange flange.The below of underdrive axle bed 26 inner annular flange is disposed with packing ring 33, dynamic seal 32, underdrive spacer ring 31, deep groove ball bearing 30, bearing sleeve 28, deep groove ball bearing 27, underdrive spacer ring 25, dynamic seal 24 from top to bottom, and is loaded onto underdrive axle bed gland 23 by screw at the lower ending opening place of underdrive axle bed 26 by above-mentioned each compressing parts in the inner chamber of underdrive axle bed 26.Above-mentioned bearing, dynamic seal are ensureing can also realize lightly rotating neatly the while of realizing vacuum-packed between lower drive shaft 21 and underdrive axle bed 26.
Synchronizing wheel transmission rig comprises the synchronizing wheel 22 be arranged on lower drive shaft 21, is arranged on the rotating shaft of the output terminal of motor 14 wheel (not shown) and is wrapped in the synchronous wheel belt 13 on synchronizing wheel 22 and described rotating shaft wheel, synchronous wheel belt 13 and synchronizing wheel 22 and described rotating shaft wheel by the teeth of precision and tooth slot structure engagement, stable drive and there is shockproof effect.
The chilled(cooling) water return (CWR) composition structure of crystal oscillator probe 6 is as follows: the one section diameter of cavity near its upper surface of the hollow of lower drive shaft 21 inside increases, and is enlarged cavity.Upwards the underrun vaccum seal ring 36 of transmission connection piece 37 is fixed on the upper surface of lower drive shaft 21 hermetically, and upper end is connected with telescopic universal coupling 11, the rotation of lower drive shaft 21 is upwards extended rotating shaft 9 and transmits.Telescopic universal coupling 11 can regulate the alignment deviation adapting to upper and lower transmission shaft 52,21 automatically.The edge of lower drive shaft 21 upper surface and the chassis 35 of workpiece rotating frame 5 fixedly mount.Upwards the bottom surface of transmission connection piece 37 has the stripper loop stretching into described enlarged cavity, a water inlet pipe 18 is provided with in the cavity of the hollow of lower drive shaft 21 inside, annular backwater road 20 is formed between the inwall of the cavity of the hollow of water inlet pipe 18 outer wall and lower drive shaft 21 inside, water inlet pipe 18 inside forms inlet channel 19, described stripper loop inside is stretched in the upper end of water inlet pipe 18, as shown in Figure 3, pass through by the pressure pad 42 be sleeved on successively from top to bottom on lower drive shaft 21 between the inwall of its outer wall and described stripper loop, dynamic seal 43, transmission spacer ring 44, deep groove ball bearing 45, transmission spacer ring 46, dynamic seal 47, the movable sealing structure that pressure pad 48 forms is connected, this movable sealing structure upper end is by the annular flange flange be positioned on described stripper loop inwall, it is inner that lower end is pressed on described stripper loop by the compaction plug 49 being arranged on described stripper loop opening end inwall, make to form intake antrum 41 in described stripper loop inside, and backwater cavity 50 is formed between described enlarged cavity and described stripper loop, upwards transmission connection piece 37 also has two passages 40 be communicated with described backwater cavity 50 with described intake antrum 41 respectively, 38, and by these two passages 40, 38 pop one's head in crystal oscillator respectively 6 suction culvert be connected with water return pipeline 12, the lower port of the cavity of the lower end of water inlet pipe 18 and the hollow of lower drive shaft 21 inside is connected with swivel joint 17.The muzzle that goes out in the lower port of the cavity of the hollow of lower drive shaft 21 inside and annular backwater road 20 is ined succession swivel joint 17, this part of swivel joint 17 is rotated with lower drive shaft 21, and by motionless water coolant faucet 16 side joint of swivel joint 17 with outside water supply and return system, it is inner that water inlet pipe 18 stretches into swivel joint 17, is connected by the elbow water inlet tap 15 of swivel joint 17 with the outside water supply and return system be connected with swivel joint 17 by below.
As shown in Figure 4, upload moving axis 52 to be arranged on body of heater top board 7 by upper driving axle bed 53.Upload the tubular of moving axis 52 in both ends open, nozzle position, upper end has the flanging of level, upper extension rotating shaft 9 be welded on by screw with upload on end plate 51 that moving axis 52 bottom surface is fixedly connected with, end plate 51 upper shed hole, electrical lead and the signal wire 8 of crystal oscillator probe 6 are entered by this hole in the cavity uploading moving axis 52 inner hollow.
Upper driving axle bed 53 is also in tubular, there is perforate at cylinder the end, upload moving axis 52 and be arranged on upper driving axle bed 53 inside, lower end passes from the perforate at the bottom of upper driving axle bed 53, upper driving axle bed 53 upper end open place also has the flanging of level, upper driving axle bed 53 seals fixing by the edge of perforate in the middle part of this flanging and body of heater top board 7 by vaccum seal ring 59, between the inwall of upper driving axle bed 53 and the outer wall uploading moving axis 52, closed assembly has deep groove ball bearing 54 successively from bottom to up, transmission spacer ring 55, dynamic seal 56, transmission spacer ring 57, deep groove ball bearing 58, these lower are bearing at the bottom of the cylinder of upper driving axle bed 53, in upper end, outer both sides compress with the bearing trim ring 60 being arranged on upper driving axle bed 53 upper end open by being positioned at the annular outer structure uploaded on moving axis 52 outer wall respectively.Be provided with adjacent with the inwall of upper driving axle bed 53 one at the bottom of the cylinder of upper driving axle bed 53 and enclose projection, deep groove ball bearing 58 is bearing in this circle projection, to make the inner side of deep groove ball bearing 58 unsettled, avoids rubbing when rotating and at the bottom of the cylinder of upper driving axle bed 53.
Upper driving axle head gland 69 is by vaccum seal ring 68 and the edge Flange joint of upper surface upper end open uploading moving axis 52, the sealing of crystal oscillator probe lead wire seat 70 is arranged on the middle part of upper driving axle head gland 69, crystal oscillator probe lead wire seat 70 is special spare unit of film-thickness monitoring main frame 73, tool sealing function, electrical lead and the signal wire 8 of crystal oscillator probe 6 are drawn outside stove by this seat by body of heater, are connected with signal wire terminal 74 with the probe electric wire of film-thickness monitoring main frame 73.
Connect electrolytic copper ring bench insulator 61 be arranged on by standing screw 72 upload nozzle position, moving axis 52 upper end flanging on.Standing screw 72 is longer, and upper end passes and connects electrolytic copper ring bench insulator 61, and is positioned at the horizontally disposed instrument retaining plate 71 connect above electrolytic copper ring bench insulator 61 and is connected, and SQC310 film-thickness monitoring main frame 73 is fixed on instrument retaining plate 71.3 copper rings 62 around uploading the concentric setting of moving axis 52 insulated from each other are flatly arranged on and connect on electrolytic copper ring bench insulator 61,3 carbon brush 66 are relatively arranged on above copper ring 62 one by one with copper ring 62, the elastic force effect lower front end of spring 67 is against on copper ring 62 in its back-end, 3 carbon brush 66 are connected with supply lead 65 with dispatch from foreign news agency ground wire 64 respectively, and spring 67 and carbon brush 66 are inlaid on the bottom surface of carbon brush bench insulator 63.Protective guard 76 is fixed on body of heater top board 7, and carbon brush bench insulator 63 is fixed on protective guard 76, copper ring 62 and carbon brush 66 is covered.Protective guard 76 top has perforate, and standing screw 72 passes from this perforate.3 copper ring lead terminals 77 are arranged on and connect in electrolytic copper ring bench insulator 61, upper end is connected with 3 copper ring 62 one_to_one corresponding, lower end is drawn wire and is connected with the power end 75 of film-thickness monitoring main frame 73, the power end of film-thickness monitoring main frame 73 is directly connected with dispatch from foreign news agency by copper ring 62, carbon brush 66, save battery structure, can long time continuous working.Because above-mentioned each parts rotate with uploading moving axis 52, so be geo-stationary between each parts, there is not the problem of wire being wound.In addition, obviously the position of copper ring and carbon brush also can exchange here.
WiFi wireless transport module film-thickness monitoring main frame 73 is equipped with, host supervision to real-time being sent in the other computer of stove of data.
Above-described embodiment of the present utility model is not the restriction to the utility model protection domain; embodiment of the present utility model is not limited thereto; according to foregoing of the present utility model; according to ordinary technical knowledge and the customary means of this area; do not departing under the utility model basic fundamental thought prerequisite; to the amendment of other various ways that the utility model said structure is made, replacement or change, all drop within protection domain of the present utility model.
Claims (10)
1. the vacuum optical coating system with the dynamic monitoring thickness in place of workpiece motion s, comprise body of heater, rotating shaft, workpiece rotating frame, rotating shaft driving mechanism, crystal oscillator probe and film-thickness monitoring main frame, described body of heater is by furnace wall, furnace body chassis and body of heater top board composition, rotating shaft is vertically arranged in the middle part of body of heater, on, lower end respectively with described body of heater top board, furnace body chassis sealing is installed, rotating shaft upper end passes described body of heater top board, film-thickness monitoring main frame is positioned at above described body of heater top board and is arranged on described rotating shaft upper end, workpiece rotating frame is arranged in described rotating shaft and is positioned at furnace interior, crystal oscillator probe is arranged on described workpiece rotating frame, its electrical lead passes described body of heater with signal wire sealing and is connected with described film-thickness monitoring main frame, the sealing of its chilled(cooling) water return (CWR) passes described body of heater and is connected with the swivel joint being connected outside water supply and return system, rotating shaft driving mechanism is connected from body of heater outside with described rotating shaft and drive shaft is rotated, described workpiece rotating frame, film-thickness monitoring main frame and crystal oscillator probe are with described rotating shaft synchronous axial system,
It is characterized in that, all there is the cavity of hollow the inside, upper and lower of described rotating shaft, the electrical lead of described crystal oscillator probe and signal wire seal and pass described body of heater from the cavity of the described hollow on the top of described rotating shaft, described chilled(cooling) water return (CWR) seals and passes described body of heater from the cavity of the described hollow of the bottom of described rotating shaft, namely realizes separately transmitting of water power.
2. the vacuum optical coating system of the dynamic monitoring thickness in place with workpiece motion s according to claim 1, it is characterized in that, described rotating shaft is by the lower drive shaft be connected successively from bottom to top, upwards transmission connection piece, universal coupling, upper extension rotating shaft and upload moving axis and form, the cavity of described hollow is positioned at described lower drive shaft and uploads moving axis inside, described workpiece rotating frame is arranged on described lower drive shaft, and the lower end that described rotating shaft driving mechanism and described lower drive shaft pass described furnace body chassis is connected.
3. the described vacuum optical coating system with the dynamic monitoring thickness in place of workpiece motion s according to claim 2, it is characterized in that, the one section diameter of cavity near its upper surface of the hollow of described lower drive shaft inside increases, for enlarged cavity, be fixed on the upper surface of described lower drive shaft the sealing bottom surface of described upwards transmission connection piece, the bottom surface of described upwards transmission connection piece has the stripper loop stretching into described enlarged cavity, a water inlet pipe is provided with in the cavity of the hollow of described lower drive shaft inside, annular backwater road is formed between the inwall of the cavity of the hollow of described water inlet pipe outer wall and described lower drive shaft inside, described stripper loop inside is stretched in the upper end of described water inlet pipe, be connected by movable sealing structure between its outer wall with the inwall of described stripper loop, make to form intake antrum in described stripper loop inside, and backwater cavity is formed between described enlarged cavity and described stripper loop, described upwards transmission connection piece also has two passages be communicated with described backwater cavity with described intake antrum respectively, and be connected with water return pipeline by the suction culvert that these two passages are popped one's head in described crystal oscillator respectively, the lower port of the cavity of the lower end of described water inlet pipe and the hollow of described lower drive shaft inside is connected with described swivel joint.
4. the described vacuum optical coating system with the dynamic monitoring thickness in place of workpiece motion s according to claim 3, it is characterized in that, described movable sealing structure is made up of the pressure pad set gradually from top to bottom, dynamic seal, transmission spacer ring, deep groove ball bearing, transmission spacer ring, dynamic seal, pressure pad, and this movable sealing structure upper end is pressed on described stripper loop inside by the annular flange flange be positioned on described stripper loop inwall, lower end by the compaction plug being arranged on described stripper loop opening end inwall.
5. the vacuum optical coating system of the dynamic monitoring thickness in place with workpiece motion s according to claim 2, it is characterized in that, described rotating shaft driving mechanism is made up of motor and synchronizing wheel transmission rig.
6. the vacuum optical coating system of the dynamic monitoring thickness in place with workpiece motion s according to any one of claim 2 ~ 5 claim, it is characterized in that, the power end of described film-thickness monitoring main frame is connected with dispatch from foreign news agency by copper ring-carbon brush mechanism, described copper ring-carbon brush mechanism has three copper rings and three carbon brush, three described copper rings are arranged with one heart around described moving axis of uploading, three described carbon brush are relative one by one with three described copper rings, and the elastic force effect lower front end of carbon brush spring is in its back-end against on described copper ring;
Upload with uploading moving axis synchronous axial system on moving axis described in described copper ring is arranged on, described carbon brush position is fixedly mounted in above described body of heater top board, and the power end of described film-thickness monitoring main frame is connected with described copper ring, is connected with dispatch from foreign news agency by described carbon brush;
Or described carbon brush be arranged on described in upload on moving axis with uploading moving axis synchronous axial system, described copper ring position to be fixedly mounted in above described body of heater top board and to insulate with it, the power end of described film-thickness monitoring main frame is connected with described carbon brush, is connected with dispatch from foreign news agency by described copper ring.
7. the vacuum optical coating system of the dynamic monitoring thickness in place with workpiece motion s according to claim 6, is characterized in that, described copper ring and carbon brush are covered by a protective guard be arranged on described body of heater top board.
8. the vacuum optical coating system of the dynamic monitoring thickness in place with workpiece motion s according to claim 7, is characterized in that, described film-thickness monitoring main frame is by WiFi wireless transport module and the computer communication that is positioned near body of heater.
9. the described vacuum optical coating system with the dynamic monitoring thickness in place of workpiece motion s according to claim 8, it is characterized in that, described lower drive shaft is arranged on described furnace body chassis by underdrive axle bed, described underdrive axle bed is the tubular of both ends open, be sleeved on described lower drive shaft, outer wall has the annular flange flange extended radially outwardly, and fixed by the edge seal of perforate in the middle part of this annular flange flange and described furnace body chassis, described underdrive axle bed inwall has an annular flange flange near its upper end open place, this annular flange flange has a thrust block, described thrust block press-fits in described annular flange flange thereunder by the projective structure on described lower drive shaft outer wall, the below of described underdrive axle bed inner annular flange is disposed with packing ring from top to bottom, dynamic seal, underdrive spacer ring, deep groove ball bearing, bearing sleeve, deep groove ball bearing, underdrive spacer ring, dynamic seal, and at the lower ending opening place of described underdrive axle bed by underdrive axle bed gland by above-mentioned each compressing parts in the inner chamber of described underdrive axle bed.
10. the described vacuum optical coating system with the dynamic monitoring thickness in place of workpiece motion s according to claim 9, it is characterized in that, described moving axis of uploading is arranged on described body of heater top board by upper driving axle bed, described upper driving axle bed is tubular, there is perforate at cylinder the end, upload moving axis and be arranged on upper driving axle bed inside, lower end passes from the perforate at the bottom of described upper driving axle bed cylinder, upper driving axle bed upper end open place has the flanging of level, upper driving axle bed is fixed by the edge seal of perforate in the middle part of described flanging and described body of heater top board, deep groove ball bearing is provided with successively from bottom to up between the inwall of upper driving axle bed and the described outer wall uploading moving axis, transmission spacer ring, dynamic seal, transmission spacer ring, deep groove ball bearing, these lower are bearing at the bottom of the cylinder of described upper driving axle bed, in upper end, outer both sides are uploaded the annular, outer structure on moving axis outer wall respectively and are arranged on the bearing trim ring compression of described upper driving axle bed upper end open described in being positioned at.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420374888.0U CN204111863U (en) | 2014-07-08 | 2014-07-08 | A kind of vacuum optical coating system of the dynamic monitoring thickness in place with workpiece motion s |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420374888.0U CN204111863U (en) | 2014-07-08 | 2014-07-08 | A kind of vacuum optical coating system of the dynamic monitoring thickness in place with workpiece motion s |
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| CN204111863U true CN204111863U (en) | 2015-01-21 |
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| CN201420374888.0U Withdrawn - After Issue CN204111863U (en) | 2014-07-08 | 2014-07-08 | A kind of vacuum optical coating system of the dynamic monitoring thickness in place with workpiece motion s |
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| CN (1) | CN204111863U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104131261A (en) * | 2014-07-08 | 2014-11-05 | 东莞市汇成真空科技有限公司 | Vacuum optical coating machine capable of moving along with workpiece and in-place dynamically monitoring membrane thickness |
| CN112647125A (en) * | 2020-11-25 | 2021-04-13 | 西安交通大学 | Wide-temperature-area film thickness monitoring device and monitoring method for ultrahigh vacuum |
-
2014
- 2014-07-08 CN CN201420374888.0U patent/CN204111863U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104131261A (en) * | 2014-07-08 | 2014-11-05 | 东莞市汇成真空科技有限公司 | Vacuum optical coating machine capable of moving along with workpiece and in-place dynamically monitoring membrane thickness |
| CN104131261B (en) * | 2014-07-08 | 2016-09-14 | 东莞市汇成真空科技有限公司 | A kind of vacuum optical coating system of the dynamically Thickness Monitoring in place with workpiece motion s |
| CN112647125A (en) * | 2020-11-25 | 2021-04-13 | 西安交通大学 | Wide-temperature-area film thickness monitoring device and monitoring method for ultrahigh vacuum |
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