CN214782123U

CN214782123U - Cooling turntable mechanism for vacuum coating

Info

Publication number: CN214782123U
Application number: CN202022943236.2U
Authority: CN
Inventors: 傅其裕
Original assignee: Baiteng Technology Suzhou Co ltd
Current assignee: Baiteng Technology Suzhou Co ltd
Priority date: 2020-12-10
Filing date: 2020-12-10
Publication date: 2021-11-19
Anticipated expiration: 2030-12-10

Abstract

The utility model discloses a vacuum coating is with cooling carousel mechanism, this kind of vacuum coating is with cooling carousel mechanism includes the magnetic current body, the main shaft, freezing carousel, the heat conduction clamp plate, the cooling tube, the locking flange, rotary joint, the inlet channel, outlet conduit, cavity bottom plate and drive assembly, the rotating part cartridge of magnetic current body has the main shaft, freezing carousel is installed at the main shaft top, freezing carousel up end is equipped with the cooling corridor that the disc set up, freezing carousel upper end is packaged with the heat conduction clamp plate, be equipped with in the main shaft with the communicating cooling tube in cooling corridor both ends, main shaft bottom and rotary joint's rotating part fixed connection, rotary joint's outside fixed part is installed respectively with communicating inlet channel of cooling tube and outlet conduit, the rotating part of magnetic current body passes through the drive assembly drive and rotates. In this way, the utility model discloses simple structure is compact, design benefit, and the cooling rate is fast, and the cooling cost is low, can adjust cooling temperature through external cold water machine.

Description

Cooling turntable mechanism for vacuum coating

Technical Field

The utility model relates to a coating film production technical field especially relates to a vacuum coating is with cooling carousel mechanism.

Background

Vacuum coating refers to a method of forming a thin film by heating a metal or non-metal material under a high vacuum condition to evaporate and condense the metal or non-metal material on the surface of a coated part (metal, semiconductor or insulator), for example, vacuum aluminum plating, vacuum chromium plating, etc., wherein a plurality of different processes are involved in the vacuum coating process, the required temperature of each process is different, the product needs to be cooled after high temperature, the temperature change directly affects the quality of the coated product, the coating is performed in a highly sealed vacuum environment, the whole coating environment is difficult to set to a uniform cooling temperature due to the different processes and the required temperature, and the cooling method has high cost, the cooling temperature is difficult to adjust, and based on the defects and shortcomings, it is necessary to improve the existing technology and design a cooling turntable mechanism for vacuum coating.

SUMMERY OF THE UTILITY MODEL

The utility model discloses the main technical problem who solves provides a vacuum coating is with cooling carousel mechanism, simple structure is compact, design benefit, and the cooling is fast, and the cooling cost is low, can adjust cooling temperature through external cold water machine, cooperates the follow-up coating film temperature demand of being convenient for.

In order to solve the technical problem, the utility model discloses a technical scheme be: the cooling turntable mechanism for vacuum coating comprises a magnetic fluid, a main shaft, a freezing turntable, a heat conducting pressure plate, a cooling pipeline, a locking flange, a rotary joint, a water inlet pipeline, a water outlet pipeline, a cavity bottom plate and a driving assembly, wherein the magnetic fluid is installed on the lower bottom surface of the cavity bottom plate, the main shaft is inserted into a rotating part of the magnetic fluid, the freezing turntable is installed at the top of the main shaft, a cooling channel which is arranged in a disc shape is arranged on the upper end surface of the freezing turntable, the heat conducting pressure plate for packaging the cooling channel is embedded at the upper end of the freezing turntable, two Teflon pipelines are installed in the main shaft, the cooling pipeline is installed in each Teflon pipeline, the tops of the two cooling pipelines are respectively communicated with two ends of the cooling channel, the bottom of the main shaft is fixedly connected with the rotating part of the rotary joint through the locking flange, and the water inlet pipeline and the water outlet pipeline which are respectively communicated with the cooling pipeline are installed at the external fixing part of the rotary joint, the rotating part of the magnetic fluid is driven to rotate by the driving assembly.

Preferably, the freezing turntable is positioned in the vacuum coating cavity, the magnetic fluid and the components below the magnetic fluid are positioned outside the coating cavity, the water inlet pipeline and the water outlet pipeline are externally connected with a water cooler, and the water cooler can be connected with cooling liquid at the temperature of-30 ℃.

Preferably, the heat-conducting pressure plate is made of brass.

Preferably, the drive assembly includes a motor, a driving pulley, a driven pulley and a belt, the motor drives the driving pulley to rotate, the driven pulley is installed on the rotating part of the magnetic fluid, and the driving pulley and the driven pulley are rotatably connected through the belt.

Compared with the prior art, the beneficial effects of the utility model are that:

simple structure is compact, design benefit, and the cooling rate is fast, and the cooling cost is low, can adjust cooling temperature through external cold water machine, and the cooperation is convenient for follow-up coating film temperature demand.

Drawings

Fig. 1 is a schematic structural diagram of a cooling turntable mechanism for vacuum coating.

Fig. 2 is a sectional view of a cooling turntable mechanism for vacuum deposition.

FIG. 3 is a schematic view of a freezing turntable structure of a cooling turntable mechanism for vacuum coating.

Detailed Description

The following detailed description of the preferred embodiments of the present invention will be provided to enable those skilled in the art to more easily understand the advantages and features of the present invention, and to make clear and definite definitions of the protection scope of the present invention.

Referring to fig. 1 to 3, an embodiment of the present invention includes:

a cooling turntable mechanism for vacuum coating comprises a magnetic fluid 1, a main shaft 2, a freezing turntable 3, a heat conducting pressure plate 4, a cooling pipeline 5, a locking flange 6, a rotary joint 7, a water inlet pipeline 8, a water outlet pipeline 9, a cavity bottom plate 10 and a driving assembly 11, wherein the magnetic fluid 1 is arranged on the lower bottom surface of the cavity bottom plate 10, the main shaft 2 is inserted into a rotating part of the magnetic fluid 1, the freezing turntable 3 is arranged on the top of the main shaft 2, a cooling channel 30 which is arranged in a disc shape is arranged on the upper end surface of the freezing turntable 3, the heat conducting pressure plate 4 for encapsulating the cooling channel 30 is embedded in the upper end of the freezing turntable 3, two Teflon pipelines are arranged in the main shaft 2, the cooling pipelines 5 are arranged in the Teflon pipelines, the tops of the two cooling pipelines 5 are respectively communicated with the two ends of the cooling channel 30, and the bottom of the main shaft 2 is fixedly connected with the rotating part of the rotary joint 7 through the locking flange 6, and a water inlet pipeline 8 and a water outlet pipeline 9 which are respectively communicated with the cooling pipeline 5 are arranged on an external fixed part of the rotary joint 7, and the rotary part of the magnetic fluid 1 is driven to rotate by a driving assembly 11.

The freezing rotary table 3 is positioned in the vacuum coating cavity, the magnetic fluid 1 and the components below the magnetic fluid are positioned outside the coating cavity, the water inlet pipeline 8 and the water outlet pipeline 9 are externally connected with a water cooler, and the water cooler can be connected with cooling liquid at the temperature of-30 ℃.

The heat-conducting pressing plate 4 is made of brass.

The driving assembly 11 comprises a motor 111, a driving pulley 112, a driven pulley 113 and a belt 114, the motor 111 drives the driving pulley 112 to rotate, the driven pulley 113 is installed on the rotating part of the magnetic fluid 1, and the driving pulley 112 and the driven pulley 113 are rotatably connected through the belt 114.

The utility model relates to a vacuum coating is with cooling carousel mechanism, simple structure is compact, design benefit, and the cooling rate is fast, and the cooling cost is low, can adjust cooling temperature through external cold water machine, cooperates the follow-up coating film temperature demand of being convenient for.

The above only is the embodiment of the present invention, not limiting the patent scope of the present invention, all the equivalent structures or equivalent processes that are used in the specification and the attached drawings or directly or indirectly applied to other related technical fields are included in the patent protection scope of the present invention.

Claims

1. The utility model provides a vacuum coating is with cooling carousel mechanism which characterized in that: the cooling turntable mechanism for vacuum coating comprises a magnetic fluid, a main shaft, a freezing turntable, a heat conducting pressure plate, a cooling pipeline, a locking flange, a rotary joint, a water inlet pipeline, a water outlet pipeline, a cavity bottom plate and a driving assembly, wherein the magnetic fluid is arranged on the lower bottom surface of the cavity bottom plate, the rotary part cartridge of magnetic current body has the main shaft, and freezing carousel is installed at the main shaft top, and freezing carousel up end is equipped with the cooling corridor of discoid setting, and the heat conduction clamp plate of encapsulation cooling corridor is embedded to freezing carousel upper end, is equipped with two Teflon pipelines in the main shaft, and the cooling duct is equipped with in the Teflon pipeline, and two cooling duct tops communicate with each other with cooling corridor both ends respectively, and locking flange and rotary joint's rotary part fixed connection are passed through to the main shaft bottom, and rotary joint's outside fixed part is installed and is communicated with each other inlet channel and outlet conduit with the cooling duct respectively, the rotary part of magnetic current body passes through drive assembly drive and rotates.

2. The cooling turntable mechanism for vacuum coating according to claim 1, wherein: the freezing rotary table is positioned in the vacuum coating cavity, the magnetic fluid and the components below the magnetic fluid are positioned outside the coating cavity, the water inlet pipeline and the water outlet pipeline are externally connected with a water cooler, and the water cooler is connected with cooling liquid at the temperature of minus 30 ℃.

3. The cooling turntable mechanism for vacuum coating according to claim 1, wherein: the heat conduction pressure plate is made of brass.

4. The cooling turntable mechanism for vacuum coating according to claim 1, wherein: the drive assembly comprises a motor, a driving belt wheel, a driven belt wheel and a belt, the motor drives the driving belt wheel to rotate, the driven belt wheel is installed on the rotating part of the magnetic fluid, and the driving belt wheel and the driven belt wheel are connected in a rotating mode through the belt.