CN215415529U

CN215415529U - Integrated circuit detection equipment

Info

Publication number: CN215415529U
Application number: CN202121569857.7U
Authority: CN
Inventors: 赵坤鹏; 杨征
Original assignee: Wuxi Weishi Semiconductor Technology Co ltd
Current assignee: Wuxi Weishi Semiconductor Technology Co ltd
Priority date: 2021-07-09
Filing date: 2021-07-09
Publication date: 2022-01-04
Anticipated expiration: 2031-07-09

Abstract

The utility model discloses integrated circuit detection equipment which comprises a machine body, wherein a detection table is arranged on the top surface of the machine body, an adsorption component is arranged above the detection table and is connected with the machine body through a displacement device, the adsorption component comprises an installation disc, a plurality of first sucker units and a plurality of second sucker units are arranged on the installation disc, each first sucker unit is connected with a first vacuum pump through a first hose, each second sucker unit is connected with a second vacuum pump through a second hose, and a detection device is further arranged on the installation disc. The first sucker units and the second sucker units can suck the integrated circuit at the same time, and the first sucker units and the second sucker units can be vacuumized by different vacuum pumps, so that the redundant arrangement of the sucker units is realized, and the probability of falling or no sucking of the integrated circuit is reduced.

Description

Integrated circuit detection equipment

Technical Field

The utility model belongs to the technical field of integrated circuit manufacturing, and particularly relates to integrated circuit detection equipment.

Background

The finished integrated circuits are usually tested, then the integrated circuits are sorted by using a sorting machine according to the test result, the integrated circuits are sucked up by a vacuum suction head when the sorting machine transfers the integrated circuits, and the integrated circuits fall or are not sucked up in the transferring process. The situation can be detected by measuring the vacuum degree in the vacuum suction head, but false alarm is easy to occur due to the influence of the material of the detection table in the detection process, so that the separator is frequently stopped. Meanwhile, when the integrated circuit falls or is not sucked, the integrated circuit is easy to stack on the detection table, the stacking of the integrated circuit is difficult to detect, products which are not tested and are missed to be tested are mixed together and cannot be distinguished, finally, the retest can be carried out, and the appearance of the products with the solder balls and the pins is damaged, so that the chips are scrapped.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide integrated circuit detection equipment to solve the technical problems that in the process of testing an integrated circuit, the condition that the integrated circuit falls off from a sorting machine or is not sucked up cannot be detected in time, so that the integrated circuit is stacked on a detection table, and the integrated circuit is missed to be tested and damaged.

In order to achieve the above object, the specific technical solution of the integrated circuit testing device of the present invention is as follows:

the utility model provides an integrated circuit check out test set, includes the organism, the organism top surface is provided with examines test table, it is provided with adsorption component to examine test table top, adsorption component pass through displacement device with the organism is connected, adsorption component includes the mounting disc, be provided with a plurality of first sucking disc units and a plurality of second sucking disc unit on the mounting disc, each first sucking disc unit all through first hose with first vacuum pump connection, each second sucking disc unit all through the second hose with second vacuum pump connection, still be provided with detection device on the mounting disc.

Preferably, each of the first suction cup units and each of the second suction cup units are arranged around an axial center line of the mounting plate.

Preferably, the number of the first sucker units is equal to the number of the second sucker units, and the first sucker units and the second sucker units are arranged in a staggered manner.

Preferably, the first suction disc unit and the second suction disc unit both comprise vacuum tubes, the axial lines of the vacuum tubes are parallel to the axial line of the mounting disc, the top ends of the vacuum tubes are provided with quick connectors, the vacuum tubes of the first suction disc unit are connected with the first hose, the vacuum tubes of the second suction disc unit are connected with the second hose, and the bottom ends of the vacuum tubes are provided with adsorption pieces.

Preferably, the adsorption part comprises a connecting sleeve, a sucker is arranged on the connecting sleeve, and the inner side of the sucker is communicated with the vacuum tube.

Preferably, the inner side of the sucker is provided with a plurality of sealing rings, and the circle center of each sealing ring coincides with the circle center of the sucker.

Preferably, the vacuum tube penetrates through the mounting disc, threads are arranged on the outer peripheral surface of the vacuum tube, two nuts are connected to the vacuum tube in a threaded mode, and the two nuts are respectively abutted to the two sides of the mounting disc.

Preferably, the mounting disc is provided with a sliding groove, and the vacuum tube penetrates through the sliding groove.

Preferably, the sliding grooves are distributed along the radial direction of the mounting plate.

Preferably, the detection device is located at the center of the circle of the mounting disc, and the detection device is a distance measuring sensor or a proximity switch.

The integrated circuit detection device of the utility model has the following advantages:

1. the integrated circuit is simultaneously adsorbed by the first sucker units and the second sucker units, and the first sucker units and the second sucker units are vacuumized by different vacuum pumps, so that the redundant arrangement of the sucker units is realized, and the probability of falling or no sucking of the integrated circuit is reduced;

2. the position of the adsorption unit on the mounting disc can be adjusted according to the size of the integrated circuit, so that the detection equipment can adsorb various integrated circuits, and the practicability of the detection equipment is improved;

3. the plurality of sealing rings are arranged on the sucker, so that a plurality of independent vacuum cavities can be formed between the sucker and the integrated circuit during adsorption, and the firmness of adsorption of the integrated circuit is improved.

Drawings

FIG. 1 is a schematic structural diagram of an integrated circuit inspection apparatus according to the present invention;

FIG. 2 is a front view of the adsorbent assembly of the present invention;

FIG. 3 is a top view of the adsorbent assembly of the present invention;

FIG. 4 is a cross-sectional view of a suction assembly of the present invention;

FIG. 5 is a schematic view of the connection structure of the vacuum tube and the adsorbing member of the present invention;

the notation in the figure is: 1. a body; 2. a detection table; 3. a displacement device; 4. a nut; 5. mounting a disc; 6. a first vacuum pump; 7. a first hose; 8. a second hose; 9. a detection device; 10. a vacuum tube; 11. a second vacuum pump; 12. a suction cup; 13. a chute; 14. a quick coupling; 15. connecting sleeves; 16. and (4) a sealing ring.

Detailed Description

For a better understanding of the objects, structure and function of the present invention, an integrated circuit testing device of the present invention will be described in detail with reference to the accompanying drawings.

As shown in the figure 1-2, an integrated circuit detection device comprises a machine body 1, a detection table 2 is arranged on the top surface of the machine body 1, an adsorption component is arranged above the detection table 2 and is connected with the machine body 1 through a displacement device 3, the adsorption component comprises a mounting plate 5, three first sucker units and three second sucker units are arranged on the mounting plate 5, each first sucker unit is connected with a first vacuum pump 6 through a first hose 7, each second sucker unit is connected with a second vacuum pump 11 through a second hose 8, each first sucker unit and each second sucker unit are uniformly arranged around the axial lead of the mounting plate 5, the first sucker units and the second sucker units are arranged in a staggered mode, so that the first sucker units and the second sucker units are uniformly distributed on the mounting plate 5, and when the first sucker units and the second sucker units adsorb an integrated circuit, the integrated circuit is uniformly stressed, improve absorbent firmness, the centre of a circle department of mounting disc 5 still is provided with range sensor or proximity switch.

When the integrated circuit detection device is used, at least one first sucker unit and one second sucker unit in the three first sucker units and the three second sucker units are adsorbed on an integrated circuit, the integrated circuit is adsorbed by a plurality of sucker units simultaneously, when one or more of the sucker units are not successfully adsorbed or fall off, the other sucker units can realize adsorption and fixation on the integrated circuit, the probability that the integrated circuit falls off or is not sucked up is reduced, meanwhile, the first sucker unit and the second sucker unit are respectively vacuumized by the first vacuum pump 6 and the second vacuum pump 11, the redundant arrangement among the sucker units is realized, the probability that the integrated circuit falls off or is not sucked up is further reduced, when all the sucker units fail and the integrated circuit falls off or is not successfully sucked up, a distance measuring sensor or a proximity switch detects the distance between the integrated circuit and a mounting plate 5, the condition that the integrated circuit falls or is not sucked up can be detected in time, and the probability of false alarm caused by detection error can be greatly reduced by directly detecting the position information of the integrated circuit.

As shown in fig. 5, the first suction cup unit and the second suction cup unit both include a vacuum tube 10, an axial line of the vacuum tube 10 is parallel to an axial line of the mounting plate 5, a quick coupling 14 is disposed at a top end of the vacuum tube 10, the vacuum tube 10 of the first suction cup unit is connected to the first hose 7, the vacuum tube 10 of the second suction cup unit is connected to the second hose 8, a connection sleeve 15 is disposed at a bottom end of the vacuum tube 10, a suction cup 12 is disposed on the connection sleeve 15, an inner side of the suction cup 12 is communicated with the vacuum tube 10, two sealing rings 16 are disposed on an inner side of the suction cup 12, and a circle center of each sealing ring 16 coincides with a circle center of the suction cup 12.

Quick-operation joint 14 is used for connecting vacuum tube 10 and hose, the air in vacuum tube 10 is taken out in the vacuum pump operation, make the inside negative pressure that produces of vacuum tube 10 form suction, adapter sleeve 15 is used for installing sucking disc 12 on vacuum tube 10, the laminating forms sealedly between sucking disc 12 and the integrated circuit, the suction that produces through vacuum tube 10 holds the integrated circuit, be provided with a plurality of concentric sealing rings 16 on the face of sucking disc 12 and the integrated circuit laminating simultaneously, make and form a plurality of independent vacuum chambers between sucking disc 12 and the integrated circuit, when one of them vacuum chamber takes place to leak gas, all the other chambers also can keep the vacuum, and then keep suction, prevent to take place to break away from between sucking disc 12 and the integrated circuit.

As shown in fig. 3-4, a sliding groove 13 is formed in the mounting plate 5, the sliding groove 13 is distributed along the radial direction of the mounting plate 5, the vacuum tube 10 penetrates through the sliding groove 13 and is slidably connected with the sliding groove 13, a thread is arranged on the outer circumferential surface of the vacuum tube 10, two nuts 4 are connected to the vacuum tube 10 through the thread, and the two nuts 4 are respectively abutted to two sides of the mounting plate 5.

The vacuum tube 10 slides along the sliding groove 13 to realize the position adjustment of the vacuum tube 10, when the vacuum tube 10 is adjusted in place, the vacuum tube 10 and the mounting disc 5 are fixed through the nut 4, so that the position adjustment of each sucker 12 is realized, the device can properly adjust the position of each sucker 12 according to the size and the shape of the integrated circuit, and the device can be suitable for adsorbing different types of integrated circuits.

It is to be understood that the present invention has been described with reference to certain embodiments, and that various changes in the features and embodiments, or equivalent substitutions may be made therein by those skilled in the art without departing from the spirit and scope of the utility model. In addition, many modifications may be made to adapt a particular situation or material to the teachings of the utility model without departing from the essential scope thereof. Therefore, it is intended that the utility model not be limited to the particular embodiment disclosed, but that the utility model will include all embodiments falling within the scope of the appended claims.

Claims

1. The utility model provides an integrated circuit check out test set, includes organism (1), organism (1) top surface is provided with detects platform (2), it is provided with adsorption component to detect platform (2) top, adsorption component pass through displacement device (3) with organism (1) is connected its characterized in that:

the adsorption assembly comprises an installation disc (5), a plurality of first sucker units and a plurality of second sucker units are arranged on the installation disc (5), each first sucker unit is connected with a first vacuum pump (6) through a first hose (7), each second sucker unit is connected with a second vacuum pump (11) through a second hose (8), and a detection device (9) is further arranged on the installation disc (5).

2. The integrated circuit inspection apparatus according to claim 1, wherein each of the first chuck unit and each of the second chuck unit are disposed around an axial center line of the mounting plate (5).

3. The integrated circuit testing device of claim 2, wherein the number of the first suction cup units is equal to the number of the second suction cup units, and the first suction cup units and the second suction cup units are arranged in a staggered manner.

4. The integrated circuit detection apparatus according to claim 3, wherein the first and second suction cup units each comprise a vacuum tube (10), an axial line of the vacuum tube (10) is parallel to an axial line of the mounting plate (5), a quick coupling (14) is provided at a top end of the vacuum tube (10), the vacuum tube (10) of the first suction cup unit is connected to the first hose (7), the vacuum tube (10) of the second suction cup unit is connected to the second hose (8), and a suction member is provided at a bottom end of the vacuum tube (10).

5. The integrated circuit testing apparatus according to claim 4, wherein the suction member comprises a connecting sleeve (15), a suction cup (12) is disposed on the connecting sleeve (15), and the inner side of the suction cup (12) is communicated with the vacuum tube (10).

6. The integrated circuit detection apparatus according to claim 5, wherein a plurality of sealing rings (16) are disposed on an inner side of the suction cup (12), and a center of each sealing ring (16) coincides with a center of the suction cup (12).

7. The integrated circuit detection device according to claim 4, wherein the vacuum tube (10) penetrates through the mounting plate (5), a thread is arranged on the outer circumferential surface of the vacuum tube (10), two nuts (4) are connected to the vacuum tube (10) in a threaded manner, and the two nuts (4) are respectively abutted against two sides of the mounting plate (5).

8. The apparatus according to claim 7, wherein the mounting plate (5) has a slot (13) formed therein, and the vacuum tube (10) passes through the slot (13).

9. An integrated circuit testing device according to claim 8, characterized in that the runners (13) are distributed in the radial direction of the mounting plate (5).

10. Integrated circuit testing device according to claim 1, characterized in that the testing means (9) are located at the center of the circle of the mounting plate (5), the testing means (9) being a distance measuring sensor or a proximity switch.