CN215354423U - Monomer feeding device - Google Patents
Monomer feeding device Download PDFInfo
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- CN215354423U CN215354423U CN202022278364.XU CN202022278364U CN215354423U CN 215354423 U CN215354423 U CN 215354423U CN 202022278364 U CN202022278364 U CN 202022278364U CN 215354423 U CN215354423 U CN 215354423U
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Abstract
The monomer feeding device comprises at least one energy storage unit, a process gas unit and at least one monomer storage unit, wherein the energy storage unit, the process gas unit and the monomer storage unit are respectively communicated through at least one first tee joint, and the process gas unit, the energy storage unit and the monomer storage unit can be completely or partially communicated. According to the monomer feeding device, the energy storage unit, the process gas unit and the monomer storage unit are respectively communicated through different pipelines by arranging the plurality of pipelines and the plurality of branches, so that the monomer can be isolated from air in the feeding process, the monomer is prevented from reacting with components in the air to generate quality change, and the purity of the fed monomer can be improved.
Description
Technical Field
The utility model relates to the field of feeding, in particular to a liquid feeding device capable of avoiding a target liquid from reacting with air components in a feeding process.
Background
With the implementation of the RoHS directive of the European Union and the successive legislation of various countries on the environmental protection problem, the vacuum coating industry is in force. The traditional electroplating industry with high pollution is not in accordance with the environmental protection requirement and is replaced by the new environmental protection technology. Vacuum coating has no pollution of waste water, waste gas and the like, and has absolute advantages in environmental protection, so the vacuum coating is more and more applied to various industries.
In the prior art, the plating method includes a vapor phase formation method, an oxidation method, an ion implantation method, a diffusion method, an electroplating method, a coating method, a liquid phase formation method, and the like. The vapor phase formation method can be divided into a physical vapor phase deposition method, a chemical vapor phase deposition method, a discharge polymerization method and the like, wherein the physical vapor phase deposition method is carried out in a vacuum environment, and a film coating is formed on the surface of a product to be coated by forming a raw material of a film to be formed on the surface of the product to be coated.
The monomer is used as a raw material for forming the film and becomes an indispensable part in the film coating process. However, in the prior art, in the process of coating, the feeding devices of the monomers are in direct contact with the air, so that for the monomer materials which are easy to react with the components in the air, if the monomer materials react with the components in the air in the feeding process to generate a deterioration phenomenon, the purity of the fed monomer is inevitably influenced, and the coating effect of the product to be coated is further directly influenced.
SUMMERY OF THE UTILITY MODEL
One advantage of the present invention is to provide a monomer feeding device that can isolate a monomer material from air during feeding without reacting with components in the air, thereby ensuring the purity of the monomer material after feeding.
One advantage of the present invention is to provide a monomer feeding device, which has a simple structure, and can not only simultaneously feed different monomers, but also ensure that a plurality of different monomers do not react with air during feeding, thereby improving the working efficiency of the monomer feeding device of the present invention.
An advantage of the present invention is to provide a monomer feeding device that can improve the purity of monomer material by preventing the monomer material from reacting with air components in the feeding device after feeding by exhausting gas contained in the feeding device before feeding.
One advantage of the present invention is to provide a monomer feeding device, which can determine the type and amount of fed monomers according to the requirement, so that the monomer feeding device can meet the working requirement under different conditions.
One advantage of the present invention is to provide a monomer feeding device, which can feed different kinds and quantities of monomers simultaneously or sequentially by providing a multi-stage switching valve, and has a simple structure and stable performance.
An advantage of the present invention is to provide a monomer feeding device, which not only can prevent monomer materials from reacting with components in the air during feeding, but also can control the amount of monomer feeding, thereby ensuring the amount controllability of the monomer feeding device during operation.
One advantage of the present invention is to provide a monomer feeding device, which can check whether there is an air leakage phenomenon after a monomer material is fed, thereby ensuring the safety of the monomer feeding device during operation.
An advantage of the present invention is to provide a monomer feeding device that can know whether the contents of monomers and gases stored therein are sufficient by detecting the internal pressure, thereby further improving the reliability of the monomer feeding device during operation.
In order to achieve at least one of the above advantages, the present invention mainly provides a monomer feeding device, which includes at least one energy storage unit, a process gas unit, and at least one monomer storage unit, wherein the energy storage unit, the process gas unit, and the monomer storage unit are respectively communicated through at least one first tee joint.
In some embodiments, the system further comprises at least one pipeline unit for communicating the monomer storage unit, the process gas unit and the energy storage unit, wherein the pipeline unit comprises a first pipeline, a second pipeline and a third pipeline, one end of the first pipeline, one end of the second pipeline and one end of the third pipeline are respectively connected to the first three-way joint, the other end of the first pipeline is communicated with the monomer storage unit, the other end of the second pipeline is communicated with the process gas unit, and the other end of the third pipeline is communicated with the energy storage unit.
In some embodiments, the energy storage unit further comprises at least one opening and closing valve unit for opening or closing the process gas unit and the monomer storage unit, wherein the opening and closing valve unit comprises at least one first opening and closing valve, the first opening and closing valve is arranged on the first pipeline and located between the first three-way joint and the monomer storage unit, and therefore the monomer storage unit can be communicated with or closed off from the energy storage unit through the first opening and closing valve.
In some embodiments, the open/close valve unit further comprises at least one second open/close valve connected to the second pipeline and located between the first three-way joint and the process gas unit, so that the process gas unit can be communicated with or closed off from the energy storage unit through the second open/close valve.
In some embodiments, the gas flow control device further comprises at least one flow control unit to control the flow rate in the first pipeline and the second pipeline, wherein the flow control unit comprises at least one first flow control valve, and the first flow control valve is fixedly arranged at the outlet of the first three-way joint and positioned in the first pipeline to control the flow rate of the gas flowing from the first three-way joint to the first pipeline.
In some embodiments, the flow control unit further comprises at least one second flow control valve fixedly disposed at the outlet of the first three-way joint and located in the second pipeline to control the flow of gas from the first three-way joint to the second pipeline.
In some embodiments, the gas supply system further comprises at least one pressure regulating valve, wherein the pressure regulating valve is fixedly arranged on the second pipeline and positioned between the second opening and closing valve and the process gas unit so as to control the pressure of the second pipeline between the process gas unit and the second opening and closing valve.
In some of these embodiments, the pressure regulating valve is provided as a secondary pressure regulating valve.
In some embodiments, the energy storage device further comprises at least one energy storage unit pressure display meter, wherein the energy storage unit pressure display meter is connected to the energy storage unit and is close to the first tee joint for detecting the pressure of the energy storage unit.
In some embodiments, the pressure regulating device further comprises at least one pressure regulating valve pressure display meter connected to the pressure regulating valve for displaying the pressure of the pressure regulating valve.
In some embodiments, the monomer storage unit comprises at least a first monomer feeding device, a second monomer feeding device and a third monomer feeding device, the first monomer feeding device, the second monomer feeding device and the third monomer feeding device are respectively communicated with the first pipeline, and the first monomer feeding device, the second monomer feeding device and the third monomer feeding device can realize separate or simultaneous feeding through the first pipeline.
In some embodiments, the apparatus further comprises at least a first branch, a second branch and a third branch, wherein the first branch, the second branch and the third branch are respectively connected in parallel to the first pipeline through a second tee joint, a third tee joint and a fourth tee joint, and the first monomer feeding device is connected to the first branch, the second monomer feeding device is connected to the second branch, and the third feeding device is connected to the third branch, so that the first monomer feeding device, the second monomer feeding device and the third monomer feeding device are respectively and independently connected to the first pipeline.
In some embodiments, the opening and closing valve unit further comprises at least a third opening and closing valve and a fourth opening and closing valve, wherein the first opening and closing valve is disposed on the first branch before the first monomer feeding device, the third opening and closing valve is disposed on the second branch before the second monomer feeding device, and the fourth opening and closing valve is disposed on the third branch before the third monomer feeding device, so as to control feeding of the first monomer feeding device, the second monomer feeding device and the third monomer feeding device respectively.
In some embodiments, the gas-liquid separator further comprises at least a fifth three-way joint and a fourth pipeline, two ends of the fifth three-way joint are connected to the first pipeline and located between the first three-way joint and the first branch, and two ends of the fourth pipeline are respectively connected to the fifth three-way joint and the fourth three-way joint, so that the gas coming out of the first three-way joint can simultaneously enter the first branch, the second branch and the third branch through the first pipeline and the fourth pipeline.
In some of these embodiments, the process gas unit is configured to provide an inert gas or nitrogen.
Further objects and advantages of the utility model will be fully apparent from the ensuing description and drawings.
These and other objects, features and advantages of the present invention will become more fully apparent from the following detailed description, the accompanying drawings and the claims.
Drawings
FIG. 1 is a schematic structural view of a first embodiment of a monomer feed device according to the present invention.
Fig. 2 is a schematic view of a modified structure of the first embodiment of the monomer feed device according to the present invention.
Detailed Description
The following description is presented to disclose the utility model so as to enable any person skilled in the art to practice the utility model. The preferred embodiments in the following description are given by way of example only, and other obvious variations will occur to those skilled in the art. The basic principles of the utility model, as defined in the following description, may be applied to other embodiments, variations, modifications, equivalents, and other technical solutions without departing from the spirit and scope of the utility model.
It will be understood by those skilled in the art that in the present disclosure, the terms "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in an orientation or positional relationship indicated in the drawings for ease of description and simplicity of description, and do not indicate or imply that the referenced devices or components must be in a particular orientation, constructed and operated in a particular orientation, and thus the above terms are not to be construed as limiting the present invention.
It is understood that the terms "a" and "an" should be interpreted as meaning that a number of one element or element is one in one embodiment, while a number of other elements is one in another embodiment, and the terms "a" and "an" should not be interpreted as limiting the number.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
The present invention mainly provides a monomer feeding device 10, as shown in fig. 1, which is a schematic structural diagram of a first embodiment of the monomer feeding device 10 according to the present invention. The monomer feeding device 10 comprises at least one energy storage unit 13, a process gas unit 12 and at least one monomer storage unit 11, wherein the energy storage unit 13, the process gas unit 12 and the monomer storage unit 11 are respectively communicated through at least one first tee joint 171 of a tee joint unit 17, and the process gas unit 12, the energy storage unit 13 and the monomer storage unit 11 can be respectively or completely communicated.
In detail, the monomer feeding device 10 of the present invention includes a pipeline unit 14 for communicating the monomer storage unit 11, the process gas unit 12, and the energy storage unit 13, where the pipeline unit 14 includes at least a first pipeline 141, a second pipeline 142, and a third pipeline 143, one end of each of the first pipeline 141, the second pipeline 142, and the third pipeline 143 is connected to three ports of the first three-way joint 171, respectively, where the other end of the first pipeline 141 is communicated with the monomer storage unit 11, the other end of the second pipeline 142 is communicated with the process gas unit 12, and the other end of the third pipeline 143 is communicated with the energy storage unit 13, so that the energy storage unit 13, the process gas unit 12, and the monomer storage unit 11 can be communicated individually or completely.
Further, in the first embodiment of the cell feeding device 10 according to the present invention, at least one opening and closing valve unit 15 is further included for opening or closing the process gas unit 12 and the cell storage unit 11, and the opening and closing valve unit 15 includes at least one first opening and closing valve 151, wherein the first opening and closing valve 151 is disposed in the first pipeline 141 and between the first three-way joint 171 and the cell storage unit 11, so that the cell storage unit 11 can be connected or disconnected with the energy storage unit 13 and/or the process gas unit 12 by opening or closing the first opening and closing valve 151. In other words, the first line 141 can be communicated with or closed off from the second line 142 and/or the third line 143 by opening or closing the first opening/closing valve 151, so that the first line 141 or the second line 142 can be operated independently.
The opening and closing valve unit 15 includes at least one second opening and closing valve 152, and the second opening and closing valve 152 is connected to the second pipeline 142 and located between the first three-way joint 171 and the process gas unit 12, so that the process gas unit 12 can be connected to or disconnected from the energy storage unit 13 and/or the cell storage unit 11 by opening or closing the second opening and closing valve 152. That is, by opening or closing the second opening/closing valve 152, the second line 142 can be communicated or closed with the first line 141 and/or the third line 143, and thus the first line 141 and the second line 142 can be communicated with the energy storage unit 13 individually or entirely.
The monomer feeding device 10 further comprises at least one flow control unit 16 for controlling the flow rate in the first pipeline 141 and the second pipeline 142, wherein the flow control unit 16 comprises at least one first flow control valve 161, and the first flow control valve 161 is fixedly arranged at the outlet of the first three-way joint 171 and positioned in the first pipeline 141, so as to control the flow rate of the gas flowing from the first three-way joint 171 to the first pipeline 141.
Correspondingly, the flow control unit 16 further includes at least one second flow control valve 162, and the second flow control valve 162 is fixedly disposed at the outlet of the first three-way joint 171 and located on the second pipeline 142 to control the flow of the gas flowing from the first three-way joint 171 to the second pipeline 142.
As a further preference of the first embodiment of the monomer feeding device 10 according to the present invention, the monomer feeding device 10 further comprises at least one pressure regulating valve 18, wherein the pressure regulating valve 18 is fixedly disposed on the second pipeline 142 and located between the second opening and closing valve 152 and the process gas unit 12, so as to control the pressure on the second pipeline 142 between the process gas unit 12 and the second opening and closing valve 152, thereby facilitating the control of the working pressure and working environment of the process gas unit 12.
Preferably, in the first embodiment of the present invention, the pressure regulating valve 18 is provided as a two-stage pressure regulating valve 18, thereby performing two-stage pressure regulation of the pressure on the second pipe 142 between the process gas unit 12 and the second opening and closing valve 152.
Furthermore, as a variation of the first embodiment of the present invention, a person skilled in the art may also change or adjust the type of the pressure regulating valve 18 according to actual circumstances. As long as the same or similar technical solution as the present invention is adopted on the basis of the above disclosure, the same or similar technical problem as the present invention is solved, and the same or similar technical effect as the present invention is achieved, all of which belong to the protection scope of the present invention, and the specific embodiments of the present invention are not limited thereto.
Furthermore, the monomer feeding device 10 further includes at least one energy storage unit pressure display gauge 131, and the energy storage unit pressure display gauge 131 is connected to the energy storage unit 13 and near the first tee joint 171 and is used for detecting the pressure of the energy storage unit 13, so that the pressure in the energy storage unit 13 can be controlled in real time, and the stability of the feeding process of the monomer feeding device 10 of the present invention is improved.
The monomer feeding device 10 further comprises at least one pressure regulating valve pressure display gauge 181, wherein the pressure regulating valve pressure display gauge 181 is operatively connected to the pressure regulating valve 18, so as to display the pressure in the pressure regulating valve 18 in real time, and facilitate a worker to control the pressure in the pressure regulating valve 18 in real time during the monomer feeding process.
Accordingly, the pressure regulating valve pressure display gauge 181 is provided as a secondary pressure regulating pressure display gauge matching the secondary pressure regulating valve 18, thereby displaying the pressure inside the secondary pressure regulating valve 18.
It is worth mentioning that in the first embodiment of the monomer feeding device 10 according to the present invention, the process gas unit 12 is implemented as a helium gas unit, and the use of helium gas facilitates the feeding and storage of the monomer due to its very excellent stability characteristics.
As a variation of the first embodiment of the present invention, a person skilled in the art may choose different process gas units 12 according to the actual situation, for example, nitrogen or other inert gases such as argon, etc. may be used. As long as the same or similar technical solution as the present invention is adopted on the basis of the above disclosure, the same or similar technical problem as the present invention is solved, and the same or similar technical effect as the present invention is achieved, all of which belong to the protection scope of the present invention, and the specific embodiments of the present invention are not limited thereto.
Furthermore, in the first embodiment of the monomer feeding device 10 of the present invention, the monomer storage unit 11 includes at least a first monomer feeding device 111, a second monomer feeding device 112, and a third monomer feeding device 113, the first monomer feeding device 111, the second monomer feeding device 112, and the third monomer feeding device 113 are respectively communicated with the first pipeline 141, and the first monomer feeding device 111, the second monomer feeding device 112, and the third monomer feeding device 113 can respectively realize feeding through the first pipeline 141 separately or simultaneously, so as to improve the working efficiency of the monomer feeding device 10 of the present invention, and improve the adaptability of the monomer feeding device 10 to different working requirements.
Preferably, in the first embodiment of the monomer feeding device 10 of the present invention, wherein the opening and closing valve unit 15 further comprises at least a third opening and closing valve 153 and a fourth opening and closing valve 154, wherein the third opening and closing valve 153 is used for controlling the second monomer feeding equipment 112, and the fourth opening and closing valve 154 is used for controlling the third monomer feeding equipment 113. In other words, in the first embodiment of the present invention, the first opening and closing valve 151 can individually control the connection or disconnection of the first monomer feed apparatus 111 to or from the first pipe 141, the third opening and closing valve 153 can individually control the connection or disconnection of the second monomer feed apparatus 112 to or from the first pipe 141, and the fourth opening and closing valve 154 can individually control the connection or disconnection of the third monomer feed apparatus 113 to or from the first pipe 141.
Therefore, the first monomer feeding means 111, the second monomer feeding means 112, and the third monomer feeding means 113 can be fed individually or simultaneously by opening or closing the first opening and closing valve 151, the third opening and closing valve 153, and the fourth opening and closing valve 154 individually or simultaneously.
Preferably, in the first embodiment of the present invention, the monomer feeding apparatus 10 further comprises at least a first branch 1411, a second branch 1412 and a third branch 1413, the three-way joint unit 17 further comprises a second three-way joint 172, a third three-way joint 173 and a fourth three-way joint 174, wherein the first branch 1411, the second branch 1412 and the third branch 1413 are respectively connected in parallel to the first pipeline 141 through the second three-way joint 172, the third three-way joint 173 and the fourth three-way joint 174, so that the first branch 1411 is communicated with the first monomer feeding device 111, the second branch 1412 is communicated with the second monomer feeding device 112, and the third branch 1413 is communicated with the third monomer feeding device 113, so that the first monomer feeding device 111, the second monomer feeding device 112 and the third monomer feeding device 113 can be respectively communicated with the first pipeline 141 to realize feeding.
Accordingly, the first opening and closing valve 151 is provided on the first branch 1411 to enable individual control of the first monomer feeding apparatus 111, the third opening and closing valve 153 is provided on the second branch 1412 to enable individual control of the second monomer feeding apparatus 112, and the fourth opening and closing valve 154 is provided on the third branch 1413 to enable individual control of the third monomer feeding apparatus 113.
In addition, as shown in fig. 2, as a variation of the first embodiment of the monomer feeding device 10 according to the present invention, the monomer feeding device 10 includes at least a fifth three-way joint 175 and a fourth pipeline 144, the fifth three-way joint 175 is connected to the first pipeline 141 and located between the first three-way joint 171 and the first branch 1411, wherein two ends of the fifth three-way joint 175 are respectively connected to the first pipeline 141 and located between the first three-way joint 171 and the monomer storage unit 11, and wherein two ends of the fourth pipeline 144 are respectively connected to the other end of the fifth three-way joint 175 and an outlet of the fourth three-way joint 174, so that the gas entering the first pipeline 141 from the first three-way joint 171 can respectively enter the first branch 1411 through the fourth pipeline 144 and the first pipeline 141 respectively, The second branch 1412 and the third branch 1413 are configured to aerate the first monomer feeding device 111, the second monomer feeding device 112 and the third monomer feeding device 113, respectively, so as to improve aeration efficiency of the first monomer feeding device 111, the second monomer feeding device 112 and the third monomer feeding device 113.
As an optimization of this variant of the first embodiment of the monomer feeding device 10 according to the present invention, a person skilled in the art may adjust the connection mode of the fourth pipeline 144 according to actual conditions, for example, the other end of the fourth pipeline 144 is connected to the first pipeline 141 between the second branch 1412 and the third branch 1413. That is, as long as the technical solution identical to or similar to the present invention is adopted on the basis of the above disclosure of the present invention, the technical problem identical to or similar to the present invention is solved, and the technical effect identical to or similar to the present invention is achieved, all of which belong to the protection scope of the present invention, and the specific implementation manner of the present invention is not limited thereto.
Next, the use of the monomer feeding device 10 according to the present invention will be briefly described.
First, checking the first monomer feeding device 111, the second monomer feeding device 112, and the third monomer feeding device 113, filling the first monomer feeding device 111, the second monomer feeding device 112, and the third monomer feeding device 113 with the required monomer usage amount, and slightly screwing the covers of the first monomer feeding device 111, the second monomer feeding device 112, and the third monomer feeding device 113, because the covers are opened when the first monomer feeding device 111, the second monomer feeding device 112, and the third monomer feeding device 113 are inflated;
closing the first flow rate control valve 161, the second flow rate control valve 162, and the first opening/closing valve 151, the second opening/closing valve 152, the third opening/closing valve 153, and the fourth opening/closing valve 154;
the secondary pressure regulating valve 18 is rotated to the loosest state, wherein the pressure regulating valve 18 connected with the process gas unit 12 is the 1-stage pressure regulating valve 18;
connecting said second conduit 142 to a low pressure end of a pressure regulating valve of said process gas unit 12, wherein said low pressure end is indicated by a value not exceeding 0.4 Mpa;
the display value of a pressure gauge for adjusting the secondary pressure regulating valve 18 to the secondary pressure regulating valve 18 is 0.1Mpa and is stable for 30 seconds to 60 seconds;
opening the second open-close valve 152 and slowly opening the first flow control valve 161 to charge the energy storage unit 13, closing the second open-close valve 152 and the first flow control valve 161 when the pressure gauge value of the energy storage unit 13 indicates that the pressure of the energy storage unit 13 is at 20-30KPa, stopping for 30-60 seconds, and checking again whether the displayed value of the energy storage unit 13 is accurate;
releasing the upper cover of the first monomer feeding means 111, and opening the first opening and closing valve 151, and then rotating the second flow rate control valve 162 left half to one turn;
checking whether process gas flows out from the upper cover of the first monomer feeding device 111, and quickly screwing the upper cover of the first monomer feeding device 111 to a gas-tight state if the process gas flows out;
if no process gas flows out above the top cover of the first monomer feed apparatus 111, it is checked whether the second flow control valve 162 is opened;
loosening the second monomer feeding device 112, opening the third opening and closing valve 153, checking whether process gas flows out from the upper cover of the second monomer feeding device 112, and quickly screwing the upper cover of the second monomer feeding device 112 to a gas-tight state if the process gas flows out;
loosening the upper cover of the third monomer feeding device 113, opening the fourth opening/closing valve 154, checking whether process gas flows out from the upper cover of the third monomer feeding device 113, and rapidly screwing the upper cover of the third monomer feeding device 113 to a gas-tight state if the process gas flows out;
fully opening the second flow control valve 162 and checking whether the upper covers of the first, second and third monomer feeding apparatuses 111, 112 and 113 are air-leaked by a water spray method, respectively;
checking whether joints of the first, second, third and fourth lines 141, 142, 143 and 144 are air-leaking, thereby ensuring that no joint of the first, second, third and fourth lines 141, 142, 143 and 144 is air-leaking;
and checking a pressure display table of the energy storage unit 13, and controlling the pressure in the energy storage unit 13 to be not less than 20KPa and not more than 30 KPa.
When the air pressure of the energy storage unit 13 is insufficient, the energy storage unit 13 needs to be supplemented with air, and the air supplementing steps are as follows:
closing the first flow rate control valve 161 and the second flow rate control valve 162, and closing the second opening/closing valve 152;
the secondary pressure regulating valve 18 is rotated to the loosest state, wherein the pressure regulating valve 18 connected with the process gas unit 12 is the 1-stage pressure regulating valve 18;
connecting said second conduit 142 to a low pressure end of a pressure regulating valve of said process gas unit 12, wherein said low pressure end is indicated by a value not exceeding 0.4 Mpa;
the display value of a pressure gauge for adjusting the secondary pressure regulating valve 18 to the secondary pressure regulating valve 18 is 0.1Mpa and is stable for 30 seconds to 60 seconds;
opening the second open-close valve 152 and slowly opening the first flow control valve 161 to charge the energy storage unit 13, closing the second open-close valve 152 and the first flow control valve 161 when the pressure gauge value of the energy storage unit 13 indicates that the pressure of the energy storage unit 13 is at 20-30KPa, stopping for 30-60 seconds, and checking again whether the displayed value of the energy storage unit 13 is accurate;
the second flow control valve 162 is then opened.
Accordingly, the gas make-up steps of the first monomer feeding device 111, the second monomer feeding device 112 and the third monomer feeding device 113 after monomer feeding are:
closing the first opening-closing valve 151, the third opening-closing valve 153, and/or the fourth opening-closing valve 154 to open or close the first monomer feed apparatus 111, the second monomer feed apparatus 112, and/or the third monomer feed apparatus 113, i.e., controlling the open or closed states of the first opening-closing valve 151, the second opening-closing valve 152, and the fourth opening-closing valve 154 according to specific demands on the first monomer feed apparatus 111, the second monomer feed apparatus 112, and the third monomer feed apparatus 113;
opening the upper covers of the first monomer feeding device 111, the second monomer feeding device 112 and the third monomer feeding device 113, filling monomer raw materials, and taking care that the monomer raw materials cannot be filled too full, otherwise, the monomer raw materials enter the first pipeline 141;
opening the first open/close valve 151, the second open/close valve 152 and/or the third open/close valve 153, quickly closing the upper covers of the first monomer feeding apparatus 111, the second monomer feeding apparatus 112 and/or the third monomer feeding apparatus 113 when the process gas flows out to the upper covers of the first monomer feeding apparatus 111, the second monomer feeding apparatus 112 and/or the third monomer feeding apparatus 113, and checking that none of the upper covers of the first monomer feeding apparatus 111, the second monomer feeding apparatus 112 and/or the third monomer feeding apparatus 113 leaks gas.
After the first monomer feeding device 111, the second monomer feeding device 112, and/or the third monomer feeding device 113 is fed with monomers, it is necessary to check whether the upper cover is air-leaked and check whether the pressure of the energy storage unit 13 is correct. Before starting the monomer feeding device 10 each time, whether the pressure of the energy storage unit 13 is normal or not needs to be checked, and when the minimum pressure in the energy storage unit 13 is less than 10KPa, gas needs to be supplemented in time.
As described above, the monomer feeding device 10 of the present invention is provided with the first pipeline 141, the second pipeline 142, and the third pipeline 143, and respectively communicates the energy storage unit 13, the process gas unit 12, and the monomer storage unit 11 through different pipelines, so that it is ensured that the monomer can be isolated from air during the feeding process, and the monomer is prevented from reacting with components in the air to cause quality change, thereby improving the purity of the monomer after feeding.
It will be appreciated by persons skilled in the art that the embodiments of the utility model described above and shown in the drawings are given by way of example only and are not limiting of the utility model. The objects of the utility model have been fully and effectively accomplished. The functional and structural principles of the present invention have been shown and described in the examples, and any variations or modifications of the embodiments of the present invention may be made without departing from the principles.
Claims (15)
1. The monomer feeding device is characterized by comprising at least one energy storage unit, a process gas unit and at least one monomer storage unit, wherein the energy storage unit, the process gas unit and the monomer storage unit are respectively communicated through at least one first tee joint.
2. The monomer feeding device of claim 1, further comprising at least one pipeline unit for communicating the monomer storage unit, the process gas unit, and the energy storage unit, wherein the pipeline unit comprises a first pipeline, a second pipeline, and a third pipeline, wherein one end of the first pipeline, one end of the second pipeline, and one end of the third pipeline are connected to the first tee joint respectively, the other end of the first pipeline is communicated with the monomer storage unit, the other end of the second pipeline is communicated with the process gas unit, and the other end of the third pipeline is communicated with the energy storage unit.
3. The cell feeding device according to claim 2, further comprising at least one opening and closing valve unit for opening or closing the process gas unit and the cell storage unit, wherein the opening and closing valve unit comprises at least one first opening and closing valve, and the first opening and closing valve is disposed in the first pipeline and between the first three-way joint and the cell storage unit, so that the cell storage unit can be communicated with or closed off from the energy storage unit through the first opening and closing valve.
4. The monomer feeding device according to claim 3, wherein the opening and closing valve unit further comprises at least a second opening and closing valve connected to the second line and located between the first three-way joint and the process gas unit, so that the process gas unit can be communicated with or closed off from the energy storage unit through the second opening and closing valve.
5. The monomer feed apparatus of claim 4, further comprising at least one flow control unit to control the flow in the first and second lines, wherein the flow control unit comprises at least one first flow control valve fixedly disposed at the outlet of the first tee and located in the first line to control the flow of gas from the first tee to the first line.
6. The monomer feed apparatus of claim 5, wherein the flow control unit further comprises at least a second flow control valve fixedly disposed at the outlet of the first tee and located in the second conduit to control the flow of gas from the first tee to the second conduit.
7. The monomer feed apparatus of claim 5, further comprising at least one pressure regulating valve, wherein the pressure regulating valve is fixedly disposed in the second conduit between the second open/close valve and the process gas unit to control the pressure in the second conduit between the process gas unit and the second open/close valve.
8. The monomer feed device of claim 7, wherein the pressure regulating valve is provided as a secondary pressure regulating valve.
9. The monomer feeding device of claim 8, further comprising at least one energy storage unit pressure display gauge connected to the energy storage unit and near the first tee joint for detecting the pressure of the energy storage unit.
10. The monomer feed device of claim 9, further comprising at least one pressure regulating valve pressure display gauge connected to the pressure regulating valve for displaying the pressure of the pressure regulating valve.
11. The monomer feeding device of claim 9, wherein the monomer storage unit comprises at least a first monomer feeding device, a second monomer feeding device and a third monomer feeding device, the first monomer feeding device, the second monomer feeding device and the third monomer feeding device are respectively communicated with the first pipeline, and the first monomer feeding device, the second monomer feeding device and the third monomer feeding device can realize separate or simultaneous feeding through the first pipeline.
12. The monomer feed apparatus of claim 11, further comprising at least a first branch, a second branch, and a third branch, wherein the first branch, the second branch, and the third branch are connected in parallel to the first pipeline via a second tee, a third tee, and a fourth tee, respectively, and the first monomer feed device is connected to the first branch, the second monomer feed device is connected to the second branch, and the third monomer feed device is connected to the third branch, such that the first monomer feed device, the second monomer feed device, and the third monomer feed device are each connected to the first pipeline separately.
13. The monomer feeding apparatus according to claim 12, wherein the opening and closing valve unit further comprises at least a third opening and closing valve and a fourth opening and closing valve, wherein the first opening and closing valve is disposed on the first branch before the first monomer feeding device, the third opening and closing valve is disposed on the second branch before the second monomer feeding device, and the fourth opening and closing valve is disposed on the third branch before the third monomer feeding device, thereby controlling the feeding of the first, second and third monomer feeding devices, respectively.
14. The monomer feed apparatus of claim 13, further comprising at least a fifth tee and a fourth line, the fifth tee being connected at both ends to the first line between the first tee and the first branch, and the fourth line being connected at both ends to the fifth tee and the fourth tee, respectively, such that gas exiting the first tee can simultaneously enter the first branch, the second branch, and the third branch through the first line and the fourth line, respectively.
15. The monomer feed apparatus of claim 14, wherein the process gas unit is configured to provide an inert gas or nitrogen.
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|---|---|---|---|
| CN202022278364.XU CN215354423U (en) | 2020-10-13 | 2020-10-13 | Monomer feeding device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022278364.XU CN215354423U (en) | 2020-10-13 | 2020-10-13 | Monomer feeding device |
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| CN215354423U true CN215354423U (en) | 2021-12-31 |
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| CN202022278364.XU Active CN215354423U (en) | 2020-10-13 | 2020-10-13 | Monomer feeding device |
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