CN214496472U - Gas replacement control system - Google Patents
Gas replacement control system Download PDFInfo
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- CN214496472U CN214496472U CN202023281421.6U CN202023281421U CN214496472U CN 214496472 U CN214496472 U CN 214496472U CN 202023281421 U CN202023281421 U CN 202023281421U CN 214496472 U CN214496472 U CN 214496472U
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Abstract
The utility model relates to the technical field of gas control, and discloses a gas replacement control system, which comprises a steel cylinder and a reaction furnace, wherein the steel cylinder is connected with the reaction furnace through a first connecting pipeline, and the first connecting pipeline is provided with a first manual valve; still include electronic three-way valve. When the electric three-way valve is in a first working state, the first air port is communicated with the second air port, and the first air port is disconnected with the third air port, so that the gas in the first connecting pipeline is discharged along the second connecting pipeline and the exhaust pipeline in sequence; when the electric three-way valve is in a second working state, the first air port is disconnected from the second air port, and the first air port is communicated with the third air port, so that inert gas sequentially enters the first connecting pipeline along the air inlet pipeline and the second connecting pipeline.
Description
Technical Field
The utility model relates to a gas control technical field especially relates to a gas replacement control system.
Background
At present, the inorganic thin film material can be produced by chemical reaction using a gaseous compound such as zinc selenide or zinc sulfide according to a CVD method (chemical vapor deposition method). Therefore, a gas-phase compound such as zinc selenide or zinc sulfide is stored in a container such as a steel cylinder, and the steel cylinder is introduced into the reaction furnace through a connecting pipeline to perform a chemical reaction. Because the raw materials required for manufacturing various inorganic films are different, the original reaction gas in the connecting pipeline needs to be discharged before introducing new reaction gas into the reaction furnace, and the current common operation is to introduce inert gas (such as argon) into the connecting pipeline to fulfill the aim of gas replacement.
The traditional gas replacement method is as follows: adopt an air inlet pipeline and an exhaust pipe to communicate the connecting line respectively, all be provided with manual valve on air inlet pipeline and the exhaust pipe, through the manual valve who controls air inlet pipeline and exhaust pipe respectively, when aerifing, inert gas lets in inert gas in the connecting line through the air inlet pipeline, and after a period, pass through exhaust pipe with the argon gas in the connecting line and original reaction gas and discharge, repeat repetitious operation and can will get rid of original reaction gas in the connecting line completely. Therefore, the gas replacement operation requires manual field work, and has the following disadvantages:
(1) the number of various switches or manual valves is large, the operation process is easy to be mixed, and accidents are easy to happen.
(2) The manual valve is difficult to accurately control the unscrewing amount of the manual valve by manpower, the air pressure in an air inlet pipe or an exhaust pipe is difficult to control, and incomplete air inlet or exhaust is easy to cause.
(3) Zinc selenide or zinc sulfide belongs to toxic gas, and when the toxic gas leaks, great potential safety hazard exists to operators;
(4) the valve is greatly abraded by screwing the valve manually for a long time, and needs to be maintained or replaced regularly, so that the maintenance cost is high.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a gas replacement control system, it is easy and simple to handle, can avoid artifical field operation, improve the safety in utilization to and reduce and use the human cost.
In order to achieve the purpose, the utility model provides a gas replacement control system, which comprises a steel cylinder and a reaction furnace, wherein the steel cylinder is connected with the reaction furnace through a first connecting pipeline, the first connecting pipeline is provided with a first manual valve, and the gas replacement control system also comprises an electric three-way valve;
the electric three-way valve is provided with a first air port, a second air port and a third air port, the first air port is connected with the first connecting pipeline through a second connecting pipeline, and a second manual valve is arranged on the second connecting pipeline; the second air port is connected with an exhaust pipeline, and a vacuum generator is arranged on the exhaust pipeline; the third gas port is connected with a gas inlet pipeline for inert gas to flow in;
when the electric three-way valve is in a first working state, the first air port is communicated with the second air port, and the first air port is disconnected with the third air port, so that the gas in the first connecting pipeline is discharged along the second connecting pipeline and the exhaust pipeline in sequence;
when the electric three-way valve is in a second working state, the first air port is disconnected from the second air port, and the first air port is communicated with the third air port, so that inert gas sequentially enters the first connecting pipeline along the air inlet pipeline and the second connecting pipeline.
The device further comprises a plurality of third connecting pipelines which are connected with the first connecting pipeline after being connected in parallel;
the number of the steel cylinders is multiple, and the multiple steel cylinders are respectively connected with the multiple third connecting pipelines one by one.
Furthermore, a third pressure regulating valve is arranged on the third connecting pipeline, and the third pressure regulating valve is connected with a third electronic alarm.
Furthermore, the bottom of the steel cylinder is provided with an electronic scale for detecting the weight of the steel cylinder.
Furthermore, a first pressure regulating valve is arranged on the first connecting pipeline and connected with a first electronic alarm.
Further, a second pressure regulating valve is arranged on the exhaust pipeline.
Further, a first one-way valve is arranged on the first connecting pipeline.
Furthermore, a second one-way valve is arranged on the exhaust pipeline.
Furthermore, a third one-way valve is arranged on the air inlet pipeline.
The embodiment of the utility model provides a gas replacement control system compares with prior art, and its beneficial effect lies in:
the utility model discloses a control electric three-way valve's operating condition to go into inert gas through intake pipe way to first connecting pipeline, and let the gas in the first connecting pipeline discharge along exhaust pipe, and then reach the purpose with gas outgoing such as zinc selenide or zinc sulfide in the first connecting pipeline, the operation intelligence is convenient, avoid artifical field operation, the security is high and control is accurate, effectively guarantee that inert gas or first connecting pipeline's gas smoothly flows, adjust efficiently simultaneously, use or maintenance cost are reduced.
Drawings
Fig. 1 is a schematic structural diagram of a gas replacement control system according to the present invention;
in the figure:
1-steel cylinder 1; 2-an electric three-way valve; 3-a first manual valve; 4-second manual valve; 5-a vacuum generator; 6-a third pressure regulating valve; 7-electronic scale; 8-a first pressure regulating valve; 9-a second pressure regulating valve; 10-a first one-way valve; 11-a second one-way valve; 12-a third one-way valve; 13-a reaction furnace;
100-a first connecting line; 200-a second connecting line; 300-an exhaust line; 400-an air intake line; 500-third connecting line.
Detailed Description
The following detailed description of the embodiments of the present invention is provided with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and to simplify the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
Fig. 1 is a schematic structural diagram of a gas replacement control system according to a preferred embodiment of the present invention. Specifically, the utility model discloses a gas replacement control system includes steel bottle 1, reacting furnace 13 and electric three-way valve 2. The steel cylinder 1 is used for storing gas-phase compounds such as zinc selenide or zinc sulfide and supplying raw materials for preparing inorganic thin film materials to the reaction furnace 13, so that the steel cylinder 1 is connected with the reaction furnace 13 through the first connecting pipeline 100, the first connecting pipeline 100 is provided with the first manual valve 3, and the reaction gas in the steel cylinder 1 is controlled to be communicated with or disconnected from the reaction furnace 13 through the first manual valve 3.
The electric three-way 2 valve has a first port A, a second port B and a third port C. Specifically, according to the general structure of the conventional electric three-way valve, the electric three-way valve 2 includes a valve seat and a valve element movably inserted in the valve seat, and the first air port a, the second air port B and the third air port C are disposed on the valve seat, so that the first air port a and the second air port B, or the first air port a and the third air port C are communicated in the valve seat by controlling the position of the valve element on the valve seat.
Further, the first air port a is connected with the first connecting pipeline 100 through a second connecting pipeline 200, and a second manual valve 4 is arranged on the second connecting pipeline 200; the second air port B is connected with an exhaust pipeline 300, and a vacuum generator 5 is arranged on the exhaust pipeline 300; the third gas port C is connected with a gas inlet pipeline 400 for inert gas to flow in; when the electric three-way valve 2 is in the first working state, the first air port a is communicated with the second air port B, and the first air port a is disconnected with the third air port C, so that the air in the first connecting pipeline 100 is sequentially discharged along the second connecting pipeline 200 and the exhaust pipeline 300; when the electric three-way valve 2 is in the second working state, the first gas port a is disconnected from the second gas port B, and the first gas port a is communicated with the third gas port C, so that the inert gas sequentially enters the first connecting pipeline 100 along the gas inlet pipeline 400 and the second connecting pipeline 200.
Based on above-mentioned structure, through the operating condition who controls electric three-way valve 2, in order to let in inert gas to first connecting line 100 through air inlet pipeline 400, and let the gas in first connecting line 100 discharge along exhaust pipe 300, and then reach the purpose with gas outgoing such as zinc selenide or zinc sulfide in first connecting line 100, it is convenient to operate intelligence, avoid manual site operation, the security is high and control is accurate, effectively guarantee that inert gas or the gas of first connecting line 100 smoothly flow, adjust efficiently simultaneously, reduce use or maintenance cost.
Further, this application can store different reaction gas through being equipped with a plurality of steel bottle 1, and each steel bottle 1 evenly communicates with retort 13 to after reaction gas in one of them steel bottle 1 is used up, utilize another steel bottle 1 to provide reaction gas for retort 13, so 1 cabinets of steel bottle are constituteed jointly to a plurality of steel bottles 1. In order to connect the plurality of steel cylinders 1 to the reaction furnace 13, the gas replacement control system further includes a plurality of third connecting lines 500, and the plurality of third connecting lines 500 are connected in parallel to each other and then connected to the first connecting line 100; the plurality of steel cylinders 1 are connected to the plurality of third connecting pipes 500 one by one, respectively. Exemplarily, fig. 1 shows the cylinder 1 as two.
Further, in order to monitor the remaining amount of the reaction gas supplied to the reaction furnace 13 in each of the steel cylinders 1, a third pressure regulating valve 6 is provided in the third connecting line 500, and a third electronic alarm is connected to the third pressure regulating valve 6. By setting the threshold value of the third pressure regulating valve 6, when the air pressure value on the third connecting pipeline 500 is smaller than the threshold value, the switch of the steel cylinder 1 corresponding to the third connecting pipeline 500 can be closed, and the steel cylinder 1 stops introducing the reaction gas into the reaction furnace 13.
Preferably, the present application may further include an electronic scale 7 for detecting the weight of the steel cylinder 1 at the bottom of the steel cylinder 1. Can learn the surplus of steel bottle 1 interior reaction gas through the weight of real-time detection steel bottle 1, can with the electronic scale 7 with the control unit electric connection of system, when the weight that electronic scale 7 detected steel bottle 1 was less than the setting value, the control unit stopped the gassing after closing the switch that corresponds steel bottle 1.
Further, this application can also be equipped with first pressure regulating valve 8 on first connecting line 100, and this first pressure regulating valve 8 is connected with first electronic alarm, and through setting for the threshold value of first pressure regulating valve 8, when the atmospheric pressure value on first connecting line 100 is less than this threshold value, can detect and learn that the surplus of the reaction gas in current steel bottle 1 is not enough, need change and use other steel bottles 1 to provide reaction gas.
Further, in order to monitor the air pressure condition of the exhaust pipeline 300 in the exhaust process, the second pressure regulating valve 9 is arranged on the exhaust pipeline 300, and by setting a threshold value of the second pressure regulating valve 9, when the air pressure of the exhaust pipeline 300 is lower than the threshold value, the exhaust is stopped, and the inert gas is introduced into the first connecting pipeline 100 to prepare for the next exhaust.
Further, in order to improve the reliability and safety of the gas replacement control system of the present application, a first check valve 10 is disposed on the first connecting pipeline 100, a second check valve 11 is disposed on the exhaust pipeline 300, and a third check valve 12 is disposed on the intake pipeline 400, so as to ensure that the gas flows in a predetermined direction.
The utility model discloses a working process does:
(1) when the steel cylinder 1 or the steel cylinder 1 tank normally supplies the reaction gas to the reaction furnace 13, the second manual valve 4 is closed, and the first manual valve 3 is opened, so that the reaction gas in the steel cylinder 1 smoothly enters the reaction furnace 13 along the third connecting pipeline 500 and the first connecting pipeline 100 in sequence.
(2) When the reaction gas in the first connecting pipeline 100 and the third connecting pipeline 500 needs to be exhausted, the second manual valve 4 is opened, the first manual valve 3 is closed, the electric three-way valve 2 is controlled to be in the first working state in an electric control mode, at the moment, the first air port A is communicated with the second air port B, the first air port A is disconnected with the third air port C, and under the working of the vacuum generator 5, the air pressure of the first connecting pipeline 100, the third connecting pipeline 500 or the second connecting pipeline 200 is larger than that of the exhaust pipeline 300, so that the reaction gas in the first connecting pipeline 100 and the third connecting pipeline 500 is sequentially exhausted along the second connecting pipeline 200 and the exhaust pipeline 300; after the exhaust is performed for a period of time, the electric three-way valve 2 is controlled to be in the second working state, at this time, the first air port a is disconnected from the second air port B, and the first air port a is communicated with the third air port C, so that the inert gas sequentially enters the first connecting pipeline 100 along the air inlet pipeline 400 and the second connecting pipeline 200, and the electric three-way valve 2 is then in the first working state after the first connecting pipeline 100 and the third connecting pipeline 500 are filled with the inert gas. After the operating state of the electric three-way valve 2 is repeatedly switched for a plurality of times, the purpose of completely discharging the reaction gas in the first connecting pipeline 100 or the third connecting pipeline 500 is achieved.
To sum up, the embodiment of the utility model provides a gas replacement control system, its operating condition through controlling electric three-way valve 2, in order to let in inert gas to first connecting tube 100 through air inlet pipe way 400, and let the gas in first connecting tube 100 discharge along exhaust pipe 300, and then reach the purpose with gas outgoing such as zinc selenide or zinc sulfide in first connecting tube 100, the operation intelligence is convenient, avoid manual site operation, the security is high and control is accurate, effectively guarantee inert gas or first connecting tube 100's gas and smoothly flow, adjust efficiently simultaneously, reduce and use or maintenance cost.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.
Claims (9)
1. A gas replacement control system comprises a steel cylinder and a reaction furnace, wherein the steel cylinder is connected with the reaction furnace through a first connecting pipeline, and a first manual valve is arranged on the first connecting pipeline;
the electric three-way valve is provided with a first air port, a second air port and a third air port, the first air port is connected with the first connecting pipeline through a second connecting pipeline, and a second manual valve is arranged on the second connecting pipeline; the second air port is connected with an exhaust pipeline, and a vacuum generator is arranged on the exhaust pipeline; the third gas port is connected with a gas inlet pipeline for inert gas to flow in;
when the electric three-way valve is in a first working state, the first air port is communicated with the second air port, and the first air port is disconnected with the third air port, so that the gas in the first connecting pipeline is discharged along the second connecting pipeline and the exhaust pipeline in sequence;
when the electric three-way valve is in a second working state, the first air port is disconnected from the second air port, and the first air port is communicated with the third air port, so that inert gas sequentially enters the first connecting pipeline along the air inlet pipeline and the second connecting pipeline.
2. The gas replacement control system according to claim 1, further comprising a plurality of third connecting lines connected in parallel to the first connecting line;
the number of the steel cylinders is multiple, and the multiple steel cylinders are respectively connected with the multiple third connecting pipelines one by one.
3. The gas substitution control system according to claim 2, wherein a third pressure regulating valve is provided on said third connecting line, and a third electronic alarm is connected to said third pressure regulating valve.
4. A gas replacement control system according to any one of claims 1 to 3, wherein the bottom of the cylinder is provided with an electronic scale for detecting the weight of the cylinder.
5. The gas substitution control system according to claim 1, wherein a first pressure regulating valve is provided on the first connection line, and a first electronic alarm is connected to the first pressure regulating valve.
6. The gas substitution control system according to claim 1, wherein a second pressure regulating valve is provided on said exhaust line.
7. The gas substitution control system of claim 1, wherein a first one-way valve is disposed on the first connection line.
8. The gas substitution control system according to claim 1, wherein a second one-way valve is provided on said exhaust line.
9. The gas substitution control system of claim 1, wherein a third one-way valve is provided on the inlet line.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023281421.6U CN214496472U (en) | 2020-12-29 | 2020-12-29 | Gas replacement control system |
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| CN202023281421.6U CN214496472U (en) | 2020-12-29 | 2020-12-29 | Gas replacement control system |
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| CN214496472U true CN214496472U (en) | 2021-10-26 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114152322A (en) * | 2021-12-06 | 2022-03-08 | 中国科学院光电技术研究所 | Monitoring device for chemical vapor deposition liquid source material |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114152322A (en) * | 2021-12-06 | 2022-03-08 | 中国科学院光电技术研究所 | Monitoring device for chemical vapor deposition liquid source material |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: FIRST SEMICONDUCTOR MATERIALS Co.,Ltd. Assignor: Anhui Zhongfei Technology Co.,Ltd. Contract record no.: X2022980007179 Denomination of utility model: A gas displacement control system Granted publication date: 20211026 License type: Common License Record date: 20220608 |
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| EE01 | Entry into force of recordation of patent licensing contract | ||
| EC01 | Cancellation of recordation of patent licensing contract |
Assignee: FIRST SEMICONDUCTOR MATERIALS Co.,Ltd. Assignor: Anhui Zhongfei Technology Co.,Ltd. Contract record no.: X2022980007179 Date of cancellation: 20230103 |
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| EC01 | Cancellation of recordation of patent licensing contract |