CN111992065A

CN111992065A - Gas mixing device

Info

Publication number: CN111992065A
Application number: CN202010815712.4A
Authority: CN
Inventors: 田加团; 袁茂圣; 吴锐军; 于雷
Original assignee: Guangdong Champon New Energy Technology Co ltd
Current assignee: Guangdong Champon New Energy Technology Co ltd
Priority date: 2020-08-13
Filing date: 2020-08-13
Publication date: 2020-11-27

Abstract

The invention relates to the field of gas-gas mixing devices, in particular to a gas mixing device. The device is characterized in that the plurality of gas mixing chambers are sequentially communicated through the arrangement of the vent holes, so that a unique gas passage passing through each gas mixing chamber in sequence is formed between the gas inlet and the gas inlet hole of the exhaust pipe. The multi-gas realizes vortex flow and multi-stage mixing under the combined action of the gas mixing chamber and the vent hole, so that the mixing effect is more uniform, and the utilization efficiency of the gas is improved.

Description

Gas mixing device

[ technical field ] A method for producing a semiconductor device

The invention relates to the field of gas-gas mixing devices, in particular to a gas mixing device.

[ background of the invention ]

The gas mixing device is mainly used for uniformly mixing two or even a plurality of different gases according to a certain proportion according to the requirements of the production process, such as air and fuel gas mixing, protective gas mixing, reaction gas mixing and the like. In the industrial production process, different gases are generally directly introduced into production equipment, or introduced into a sealed cavity to be simply and freely mixed and then enter the equipment, so that the gases are not mixed or uniformly mixed, gas resources are wasted, and the production process is influenced. And a large amount of pipelines need to be arranged for the independent conveying of different gases, the mixed gas pipe has a large number of joints, the pipelines move towards a relatively complex direction, and the pipeline is neither beautiful nor practical, and is easy to cause the problems of gas dosage imbalance, gas leakage and the like due to improper operation, and is inconvenient for daily maintenance.

[ summary of the invention ]

The present invention is directed to solving the above problems and providing a gas mixing device. The device is characterized in that the plurality of gas mixing chambers are sequentially communicated through the arrangement of the vent holes, so that a unique gas passage passing through each gas mixing chamber in sequence is formed between the gas inlet and the gas inlet hole of the exhaust pipe. The multi-gas realizes vortex flow and multi-stage mixing under the combined action of the gas mixing chamber and the vent hole, so that the mixing effect is more uniform, and the utilization efficiency of the gas is improved.

In order to achieve the above purpose, the gas mixing device of the present invention comprises a mixing bin 20 provided with a gas inlet 10 and a gas exhaust pipe 30, wherein the mixing bin 20 is arranged in a cylindrical shape, the gas inlet 10 is tangentially arranged on the mixing bin 20, the gas exhaust pipe 30 is vertically inserted into the mixing bin 20 and is not contacted with the bottom and the side wall of the mixing bin 20, the mixing bin 20 is divided into a plurality of gas mixing chambers 23 by a plurality of horizontal partition plates 21 and vertical partition plates 22, and the horizontal partition plates 21 and/or the vertical partition plates 22 forming the same gas mixing chamber 23 are provided with vent holes 24; the position of the air inlet hole 31 of the exhaust pipe 30 is lower than the horizontal position of the horizontal clapboard 21 at the lowest layer, and the air inlet 10 is communicated with one of the gas mixing chambers 23 arranged at the uppermost layer; the vent holes 24 communicate the gas mixing chambers 23 in sequence, so that a unique gas passage passing through each gas mixing chamber 23 in sequence is formed between the gas inlet 10 and the gas inlet hole 31 of the exhaust pipe 30.

Further, the exhaust pipe 30 is inserted into the center of the mixing bin 20, one end of the vertical partition 22 contacts with the inner wall of the mixing bin 20, and the other end is connected to the exhaust pipe 30.

Further, the inner diameter of the lower portion of the mixing chamber 20 is gradually reduced, and the air inlet hole 31 of the exhaust pipe 30 is disposed at the position where the inner diameter of the mixing chamber 20 is the smallest.

Further, the gas inlet 10 is connected with a mixed gas input main pipe 40, the mixed gas input main pipe 40 is connected with a plurality of gas input branch pipes 41, and a ball valve 42 and a pressure regulating device 43 are sequentially arranged on any one of the gas input branch pipes 41.

Further, a flow meter 44 which can be selectively opened or closed is installed between the pressure regulating device 43 and the gas inlet branch pipe 41.

Further, the exhaust pipe 30 is further provided with an exhaust hole 32 and a sampling hole 33, and the exhaust hole 32 and the sampling hole 33 are both connected with an opening and closing device 34.

The contribution of the invention is a gas mixing device. The device is characterized in that the plurality of gas mixing chambers are sequentially communicated through the arrangement of the vent holes, so that a unique gas passage passing through each gas mixing chamber in sequence is formed between the gas inlet and the gas inlet hole of the exhaust pipe. The multi-gas realizes vortex flow and multi-stage mixing under the combined action of the gas mixing chamber and the vent hole, so that the mixing effect is more uniform, and the utilization efficiency of the gas is improved. The premixing of gas input branch pipe and the auxiliary mixing of mixed gas input main pipe can strengthen the mixing effect, satisfy the technological requirement, and this device compact structure can realize the modularized design, has reduced manufacturing cost when guaranteeing the functionality, and is whole pleasing to the eye practical, and the flowmeter shows directly perceived, easy operation, and the controllability is strong.

[ description of the drawings ]

Fig. 1 is a schematic view of the connection structure of the present invention.

Fig. 2 is a schematic perspective view of the mixing chamber of the present invention.

Fig. 3 is a schematic view of the internal structure of the mixing silo of the present invention.

Figure 4 is a schematic cross-sectional view at the air inlet of the mixing silo of the present invention.

[ detailed description ] embodiments

The following examples are further illustrative and supplementary to the present invention and do not limit the present invention in any way.

Example 1

As shown in fig. 1-4, the gas mixing device of the present embodiment includes a mixing chamber 20 having a gas inlet 10 and a gas outlet 30, the mixing chamber 20 is configured in a cylindrical shape, the gas inlet 10 is tangentially disposed on the mixing chamber 20, the gas outlet 30 is vertically inserted into the mixing chamber 20 and does not contact with the bottom and the sidewall of the mixing chamber 20, the mixing chamber 20 is divided into a plurality of gas mixing chambers 23 by a plurality of horizontal partitions 21 and vertical partitions 22, and the horizontal partitions 21 and/or the vertical partitions 22 forming the same gas mixing chamber 23 are provided with vent holes 24; the position of the air inlet hole 31 of the exhaust pipe 30 is lower than the horizontal position of the horizontal clapboard 21 at the lowest layer, and the air inlet 10 is communicated with one of the gas mixing chambers 23 arranged at the uppermost layer; the vent holes 24 communicate the gas mixing chambers 23 in sequence, so that a unique gas passage passing through each gas mixing chamber 23 in sequence is formed between the gas inlet 10 and the gas inlet hole 31 of the exhaust pipe 30.

The gas inlet 10 is tangentially arranged on the mixing bin 20, the gas inlet 10 is communicated with one of the gas mixing chambers 23 arranged on the uppermost layer, so that a plurality of gases enter the mixing bin 20 and then rotate in the gas mixing chamber 23 along the inner wall of the mixing bin 20 to generate vortex mixing, then the mixed gases enter the next gas mixing chamber 23 to be continuously mixed through the vent holes 24 arranged on the horizontal partition plate 21 or the vertical partition plate 22, and the vent holes 24 play a role in guiding the flow. The multiple gases mixed by the plurality of gas mixing chambers 23 can be completely and uniformly mixed, the utilization efficiency of the gases is improved, and the mixed gases are finally discharged by the exhaust pipe 30.

Example 2

As shown in fig. 1-4, the exhaust pipe 30 is inserted into the center of the mixing bin 20, one end of the vertical partition 22 contacts with the inner wall of the mixing bin 20, and the other end is connected to the exhaust pipe 30. The inner diameter of the lower portion of the mixing chamber 20 is gradually reduced, and the air inlet hole 31 of the exhaust pipe 30 is disposed at the minimum position of the inner diameter of the mixing chamber 20. The mixing chamber 20 is closed except for the air inlet 10 and the exhaust pipe 30. The exhaust pipe 30 is inserted into the mixing bin 20 from top to bottom, and the air inlet 10 is communicated with one of the gas mixing chambers 23 arranged at the uppermost layer, so that the gas is mixed from top to bottom and discharged from bottom to top in the mixing bin 20, and the mixing time and the mixing path of the gas in the mixing bin 20 are prolonged as much as possible, so that the mixing effect is better. The inner diameter of the lower part of the mixing bin 20 is gradually reduced to play a role in guiding, so that the gas is pressed and rapidly enters the gas inlet hole 31 of the exhaust pipe 30.

Example 3

As shown in fig. 1-4, the gas inlet 10 is connected to a main mixed gas inlet pipe 40, the main mixed gas inlet pipe 40 is connected to a plurality of gas inlet branch pipes 41, and a ball valve 42 and a pressure regulating device 43 are sequentially disposed on any one of the gas inlet branch pipes 41. A flow meter 44 which can be selectively opened or closed is installed between the pressure regulating device 43 and the gas input branch pipe 41. The exhaust pipe 30 is further provided with an exhaust hole 32 and a sampling hole 33, and the exhaust hole 32 and the sampling hole 33 are both connected with an opening and closing device 34.

The premixing of the gas input branch pipe 41 and the auxiliary mixing of the mixed gas input main pipe 40 can enhance the mixing effect and meet the process requirements, the gas input of the gas input branch pipe 41 can be selectively opened or closed by arranging the ball valve 42, and the pressure regulation in the gas input branch pipe 41 can be realized by arranging the pressure regulating device 43. The device has compact structure, can realize modular design, reduces the manufacturing cost while ensuring the functionality, is overall beautiful and practical, and has intuitive display, easy operation and strong adjustability of the flowmeter 44.

Although the present invention has been described with reference to the above embodiments, the scope of the present invention is not limited thereto, and modifications, substitutions and the like of the above members are intended to fall within the scope of the claims of the present invention without departing from the spirit of the present invention.

Claims

1. Gas mixing device, including a mixed storehouse (20) that is equipped with air inlet (10) and blast pipe (30), its characterized in that: the mixing bin (20) is arranged in a cylindrical shape, the air inlet (10) is tangentially arranged on the mixing bin (20), the exhaust pipe (30) is vertically inserted into the mixing bin (20) and is not in contact with the bottom and the side wall of the mixing bin (20), the mixing bin (20) is divided into a plurality of gas mixing chambers (23) by a plurality of horizontal partition plates (21) and vertical partition plates (22), and the horizontal partition plates (21) and/or the vertical partition plates (22) forming the same gas mixing chamber (23) are/is provided with vent holes (24);

the position of an air inlet hole (31) of the exhaust pipe (30) is lower than the horizontal position of the horizontal partition plate (21) at the lowest layer, and the air inlet (10) is communicated with one of the gas mixing chambers (23) arranged at the uppermost layer;

the vent holes (24) are used for sequentially communicating the gas mixing chambers (23), so that a unique gas passage sequentially passing through each gas mixing chamber (23) is formed between the gas inlet (10) and the gas inlet hole (31) of the exhaust pipe (30).

2. The gas mixing apparatus of claim 1, wherein: the exhaust pipe (30) is inserted in the center of the mixing bin (20), one end of the vertical partition plate (22) is in contact with the inner wall of the mixing bin (20), and the other end of the vertical partition plate is connected to the exhaust pipe (30).

3. The gas mixing apparatus of claim 2, wherein: the inner diameter of the lower part of the mixing bin (20) is gradually reduced, and an air inlet hole (31) of the exhaust pipe (30) is arranged at the position with the minimum inner diameter of the mixing bin (20).

4. The gas mixing apparatus of claim 3, wherein: the gas inlet (10) is connected with a mixed gas input main pipe (40), the mixed gas input main pipe (40) is connected with a plurality of gas input branch pipes (41), and a ball valve (42) and a pressure regulating device (43) are sequentially arranged on any gas input branch pipe (41).

5. The gas mixing apparatus of claim 4, wherein: a flow meter (44) which can be selectively opened or closed is arranged between the pressure regulating device (43) and the gas input branch pipe (41).

6. The gas mixing apparatus of claim 5, wherein: the exhaust pipe (30) is also provided with an exhaust hole (32) and a sampling hole (33), and the exhaust hole (32) and the sampling hole (33) are both connected with an opening and closing device (34).