CN207031544U - A kind of PECVD device fire door air intake structure - Google Patents
A kind of PECVD device fire door air intake structure Download PDFInfo
- Publication number
- CN207031544U CN207031544U CN201720481224.8U CN201720481224U CN207031544U CN 207031544 U CN207031544 U CN 207031544U CN 201720481224 U CN201720481224 U CN 201720481224U CN 207031544 U CN207031544 U CN 207031544U
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- Prior art keywords
- air inlet
- inlet pipe
- flange
- interior air
- pipe
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Ventilation (AREA)
Abstract
The utility model discloses a kind of PECVD device fire door air intake structure, including flange, multiple external admission pipes are provided with the lateral wall of the flange, multiple interior air inlet pipe are from top to bottom installed on the madial wall of the flange, and it is each in air inlet pipe respectively along the flange madial wall circumferentially, one end of air inlet pipe is inlet end in each, the other end is blind end, the inlet end of air inlet pipe connects with the outlet side of an external admission pipe in each, the venthole at multiple centers towards the flange is uniformly provided with the tube wall of each interior air inlet pipe along the circumference of each interior air inlet pipe.The utility model causes multiple gases are mixed uniformly after injection to enter reaction chamber, easily reaches preferable technique；And when needing to clean or change the PECVD device fire door air intake structure, it is only necessary to pull down interior air inlet pipe, and need to change whole flange compared with prior art, saved cost and resource.
Description
Technical field
PECVD device technical field is the utility model is related to, more particularly to a kind of PECVD device fire door air inlet
Structure.
Background technology
In photovoltaic industry, PECVD device is used to plate the surface of monocrystalline silicon piece, polysilicon chip antireflective film, at present each production
The lifting of technique is being pursued always by producer, and intake method is the key of technique lifting.The fire door of PECVD device in the prior art
Air intake structure has at following 2 points：
First, two kinds of gases are respectively enterd inside flange outside flange, then pass through simple Y types air inlet inside flange
For mouth by two kinds of gas mixings, the path that it is mixed is short, causes both gases to be mixed before reaction chamber is entered uneven, technique is difficult
To reach preferable effect.
Second, flange is internally provided with inlet duct, but inlet duct and flange are integral, it is impossible to are dismantled.And air inlet
The air inlet of device is easy to block again, because inlet duct and flange are integral, the air inlets of such inlet duct
It is difficult to be cleaned after blocking, but needs the flange more renewed, so as to causes the wasting of resources and cost increase.
Utility model content
The technical problems to be solved in the utility model is to provide a kind of PECVD device stove that can be well mixed multiple gases
Mouth air intake structure.
The technical solution of the utility model is：A kind of PECVD device fire door air intake structure, including flange, the flange
Multiple external admission pipes are provided with lateral wall, it is characterised in that be from top to bottom provided with the madial wall of the flange in multiple
Air inlet pipe, and it is each in air inlet pipe respectively along the flange madial wall circumferentially, it is each in one end of air inlet pipe be
Inlet end, the other end are blind end, and the inlet end of each interior air inlet pipe connects with the outlet side of an external admission pipe, described each
The venthole at multiple centers towards the flange is uniformly provided with the tube wall of interior air inlet pipe along the circumference of each interior air inlet pipe.
The external admission pipe quantity be two, the interior air inlet pipe quantity be two, two interior air inlet pipe respectively along
The madial wall of flange it is whole circumferentially, the whole week of multiple ventholes in two interior air inlet pipe along air inlet pipe in each
To being uniformly arranged.
The mutual stagger setting of venthole in upper and lower two neighboring interior air inlet pipe.
It is described it is each in the outlet side of inlet end and an external admission pipe of air inlet pipe be detachably connected, the flange it is interior
Set in side wall madial wall fluted and along the flange it is whole circumferentially, the multiple interior air inlet pipe is dismountable
It is installed in the groove.
The outlet side of the inlet end and an external admission pipe of each interior air inlet pipe connects together.
Sealing is provided with the socket overlapping of the inlet end of each interior air inlet pipe and the outlet side of an external admission pipe
Circle.
The multiple interior air inlet pipe is positioned in the groove and fixed with briquetting by screw.
The utility model proposes PECVD device fire door air intake structure, multiple gases enter from corresponding external admission pipe, then
Uniformly projected after into interior air inlet pipe by multiple ventholes in interior air inlet pipe towards the center of flange so that multiple gases exist
It is mixed uniformly after injection to enter reaction chamber, easily reach preferable technique.In addition, the inlet end and one of each interior air inlet pipe
The outlet side of individual external admission pipe is detachably connected, and multiple interior air inlet pipe are positioned in the groove on flange inner wall, and with briquetting pressure
After firmly, briquetting is fixed by screws on the inwall of flange, need clean or change the PECVD device fire door enter it is depressed
During structure, it is only necessary to pull down interior air inlet pipe, and need to change whole flange compared with prior art, saved cost and money
Source.
Brief description of the drawings
Fig. 1 is the top schematic diagram of flange in the utility model PECVD device fire door air intake structure.
Fig. 2 be Fig. 1 in A-A to sectional view.
Fig. 3 is the sectional view of B-B direction in Fig. 1.
Fig. 4 is the sectional view of plane where the circumference formed along the center line of air inlet pipe in first.
Fig. 5 is the enlarged drawing at C in Fig. 4.
Fig. 6 is the sectional view of plane where the circumference formed along the center line of air inlet pipe in second.
Embodiment
Such as Fig. 1, the utility model proposes PECVD device fire door air intake structure, including flange 1, the lateral wall of the flange 1
On be provided with multiple external admission pipes 2, multiple external admission pipes 2 input for gas, and the flange 1 is arranged on the fire door of PECVD device
On.
Such as Fig. 2, multiple interior air inlet pipe 3 are from top to bottom installed on the madial wall of flange 1, and it is each in air inlet pipe along method
Circumferentially, one end of each interior air inlet pipe is inlet end to the madial wall of orchid 1, and the other end is blind end, each interior air inlet pipe
Inlet end connected with the outlet side of an external admission pipe, it is each in air inlet pipe tube wall on along this it is each in air inlet pipe circumference
It is uniformly arranged the venthole 5 at multiple centers towards flange.Multiple gases enter from corresponding external admission pipe, enter back into interior air inlet
Uniformly projected after pipe by multiple ventholes in interior air inlet pipe towards the center of flange so that multiple gases are uniform after injection
Mixing enters reaction chamber, easily reaches preferable technique.
In the present embodiment, it is each in air inlet pipe along the madial wall of flange it is whole circumferentially, it is each in air inlet pipe
The venthole at multiple centers towards flange is uniformly arranged on tube wall along the whole circumference of each interior air inlet pipe.
Such as Fig. 2, the 5 mutual stagger setting of venthole in upper and lower two neighboring interior air inlet pipe so that multiple gases are uniformly mixed
The effect of conjunction is more preferable.
Such as Fig. 2 and Fig. 3, the outlet side of the inlet end and an external admission pipe of each interior air inlet pipe is detachably connected, flange 1
Madial wall on set fluted 11 and along flange 1 madial wall it is whole circumferentially, multiple interior air inlet pipe are dismountable
It is installed in groove.In the present embodiment, multiple interior air inlet pipe 3 are positioned in groove 11 and fixed with briquetting 4 by screw.So
Multiple interior air inlet pipe can be easy to pull down from flange, need to clean or change the PECVD device fire door air intake structure
When, it is only necessary to interior air inlet pipe is pulled down, and needs to change whole flange compared with prior art, has saved cost and resource.
First interior air inlet pipe is positioned in the groove on flange madial wall during air inlet pipe in installation, is then pressed in interior air inlet with briquetting again
Guan Shang, then connected the inwall of briquetting one end or both ends and flange with screw.Groove can be one, or it is multiple,
When number of recesses is multiple, each interior air inlet pipe is placed into a groove.The quantity of briquetting has multiple, uniform distribution
On the inwall of flange.
In the present embodiment, the outlet side of the inlet end and an external admission pipe of each interior air inlet pipe connects together.Each
Sealing ring is provided with the socket overlapping of the outlet side of the inlet end of interior air inlet pipe and an external admission pipe, ensure that sealing effect
Fruit, the quantity of sealing ring are at least one.The outlet side of multiple external admission pipes is plugged on the lateral wall of flange respectively.
Such as Fig. 1, two external admission pipes, respectively the first external admission pipe are provided with the lateral wall of flange 1 in the present embodiment
21 and the second external admission pipe 22.First external admission pipe 21 and the second external admission pipe on the lateral wall of flange and are about 22
Stagger, beneficial to ventilation.
Such as Fig. 2 and Fig. 3, two interior air inlet pipe are installed on the lateral wall of flange 1, air inlet pipe 31 and in respectively first
Air inlet pipe 32 in two, in first in air inlet pipe 31 and second air inlet pipe about 32 installed in flange madial wall groove（Here
Number of recesses is one）It is interior and fixed with briquetting 4 by screw.In first in air inlet pipe 31 and second air inlet pipe 32 each along method
Blue madial wall it is whole circumferentially, the whole week of multiple ventholes air inlet pipe 31 along first in first in air inlet pipe 31
To being uniformly arranged, the whole circumference of air inlet pipe 32 along second of multiple ventholes in second in air inlet pipe 32 is uniformly arranged, the
Multiple ventholes in one in air inlet pipe 31 and second in air inlet pipe 32 are offset from each other.Such as Fig. 4 and Fig. 5, air inlet in first
The inlet end of pipe 31 is inserted in the outlet side of the first external admission pipe 21, and the inlet end of air inlet pipe 31 and the first external admission pipe in first
Sealing ring 6 is set at the socket overlapping of 21 outlet side.Such as Fig. 6, the inlet end of air inlet pipe is inserted in the second external admission pipe in second
Outlet side, and in second at the socket overlapping of the outlet side of the inlet end of air inlet pipe 31 and the second external admission pipe 21 set sealing
Circle.Radian between air inlet pipe in first, the two neighboring venthole in second in air inlet pipe is 15 degree.A gases are outside first
Air inlet pipe enters, and enters back into first after air inlet pipe by multiple ventholes in air inlet pipe in first uniformly towards in flange
The heart projects, and B gases enter from the second external admission pipe, enter back into second after air inlet pipe by air inlet pipe in second it is multiple go out
Stomata uniformly projects towards the center of flange, and such A gases and B gases mixed uniformly will enter reaction chamber after injection
Room.
Three external admission pipes, respectively the first external admission pipe, are provided with the lateral wall of flange in another embodiment
Two external admission pipes and the 3rd external admission pipe, are provided with three interior air inlet pipe on the madial wall of flange, air inlet pipe in respectively first,
Air inlet pipe in air inlet pipe and the 3rd in second.Air inlet pipe connects with the first external admission pipe in first, air inlet pipe and second in second
External admission pipe connects, and air inlet pipe connects with the 3rd external admission pipe in the 3rd.
Only to illustrate design of the present utility model, one of ordinary skill in the art's specific embodiment above exists
Various deformation and change can be made under design of the present utility model, these deformations and change are included in guarantor of the present utility model
Within the scope of shield.
Claims (7)
1. a kind of PECVD device fire door air intake structure, including flange, multiple external admissions are provided with the lateral wall of the flange
Pipe, it is characterised in that multiple interior air inlet pipe, and each interior air inlet pipe difference are from top to bottom provided with the madial wall of the flange
Along the flange madial wall circumferentially, it is each in one end of air inlet pipe be inlet end, the other end is blind end, each
The inlet end of interior air inlet pipe connects with the outlet side of an external admission pipe, each interior along this on the tube wall of each interior air inlet pipe
The circumference of air inlet pipe is uniformly provided with the venthole at multiple centers towards the flange.
2. PECVD device fire door air intake structure according to claim 1, it is characterised in that the external admission pipe quantity is
Two, the interior air inlet pipe quantity is two, two interior air inlet pipe respectively along the madial wall of flange it is whole circumferentially,
Whole circumference of multiple ventholes along each interior air inlet pipe in two interior air inlet pipe is uniformly arranged.
3. PECVD device fire door air intake structure according to claim 2, it is characterised in that upper and lower two neighboring interior air inlet
The mutual stagger setting of venthole on pipe.
4. the PECVD device fire door air intake structure according to claim 1 or 3, it is characterised in that each interior air inlet pipe
The outlet side of inlet end and an external admission pipe be detachably connected, set on the madial wall of the flange fluted and along institute
State the madial wall of flange it is whole circumferentially, the multiple interior air inlet pipe is mounted in the groove.
5. PECVD device fire door air intake structure according to claim 4, it is characterised in that each interior air inlet pipe
The outlet side of inlet end and an external admission pipe connects together.
6. PECVD device fire door air intake structure according to claim 5, it is characterised in that each interior air inlet pipe
Sealing ring is provided with the socket overlapping of the outlet side of inlet end and an external admission pipe.
7. PECVD device fire door air intake structure according to claim 4, it is characterised in that the multiple interior air inlet pipe is put
It is placed in the groove and is fixed with briquetting by screw.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720481224.8U CN207031544U (en) | 2017-05-03 | 2017-05-03 | A kind of PECVD device fire door air intake structure |
| PCT/CN2017/114883 WO2018201717A1 (en) | 2017-05-03 | 2017-12-07 | Furnace-mouth air-intake structure of pecvd device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720481224.8U CN207031544U (en) | 2017-05-03 | 2017-05-03 | A kind of PECVD device fire door air intake structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207031544U true CN207031544U (en) | 2018-02-23 |
Family
ID=61479825
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720481224.8U Active CN207031544U (en) | 2017-05-03 | 2017-05-03 | A kind of PECVD device fire door air intake structure |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN207031544U (en) |
| WO (1) | WO2018201717A1 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109253973A (en) * | 2018-06-28 | 2019-01-22 | 荧飒光学科技（上海）有限公司 | Gas cell for gaseous spectrum qualitative and quantitative analysis |
| CN110565073A (en) * | 2019-10-20 | 2019-12-13 | 湖南玉丰真空科学技术有限公司 | Gas distribution device of chemical vapor deposition coating equipment |
| CN112410757A (en) * | 2019-08-21 | 2021-02-26 | 普乐新能源（蚌埠）有限公司 | Gas distribution flange of tubular reactor |
| CN112410758A (en) * | 2019-08-21 | 2021-02-26 | 普乐新能源（蚌埠）有限公司 | Dual-purpose gas distribution device for LPCVD and ALD |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100862658B1 (en) * | 2002-11-15 | 2008-10-10 | 삼성전자주식회사 | Gas injection apparatus for semiconductor processing system |
| KR100725108B1 (en) * | 2005-10-18 | 2007-06-04 | 삼성전자주식회사 | Apparatus for supplying gas and apparatus for manufacturing a substrate having the same |
| JP2010047818A (en) * | 2008-08-25 | 2010-03-04 | Toshiba Corp | Semiconductor manufacturing equipment and semiconductor manufacturing method |
| US8438990B2 (en) * | 2008-09-30 | 2013-05-14 | Applied Materials, Inc. | Multi-electrode PECVD source |
| CN201778112U (en) * | 2010-07-23 | 2011-03-30 | 深圳市捷佳伟创微电子设备有限公司 | Conveying flange of process gas |
| CN102206813A (en) * | 2010-08-20 | 2011-10-05 | 浙江正泰太阳能科技有限公司 | Apparatus, method and system of gas mixing in PECVD (Plasma Enhanced Chemical Vapor Deposition) system |
| CN201785488U (en) * | 2010-09-02 | 2011-04-06 | 无锡尚德太阳能电力有限公司 | Special gas nozzle and tube-type film coating equipment |
| CN203741411U (en) * | 2013-12-19 | 2014-07-30 | 深圳市捷佳伟创新能源装备股份有限公司 | PECVD (Plasma Enhanced Chemical Vapor Deposition) gas inlet structure |
| CN204490990U (en) * | 2014-12-31 | 2015-07-22 | 深圳市捷佳伟创新能源装备股份有限公司 | A kind of door structure of PECVD device |
-
2017
- 2017-05-03 CN CN201720481224.8U patent/CN207031544U/en active Active
- 2017-12-07 WO PCT/CN2017/114883 patent/WO2018201717A1/en active Application Filing
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109253973A (en) * | 2018-06-28 | 2019-01-22 | 荧飒光学科技（上海）有限公司 | Gas cell for gaseous spectrum qualitative and quantitative analysis |
| CN109253973B (en) * | 2018-06-28 | 2024-04-02 | 荧飒光学科技（上海）有限公司 | Gas pool for qualitative and quantitative analysis of gas spectrum |
| CN112410757A (en) * | 2019-08-21 | 2021-02-26 | 普乐新能源（蚌埠）有限公司 | Gas distribution flange of tubular reactor |
| CN112410758A (en) * | 2019-08-21 | 2021-02-26 | 普乐新能源（蚌埠）有限公司 | Dual-purpose gas distribution device for LPCVD and ALD |
| CN110565073A (en) * | 2019-10-20 | 2019-12-13 | 湖南玉丰真空科学技术有限公司 | Gas distribution device of chemical vapor deposition coating equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2018201717A1 (en) | 2018-11-08 |
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