CN207483845U - A kind of PECVD stoves - Google Patents
A kind of PECVD stoves Download PDFInfo
- Publication number
- CN207483845U CN207483845U CN201721482014.7U CN201721482014U CN207483845U CN 207483845 U CN207483845 U CN 207483845U CN 201721482014 U CN201721482014 U CN 201721482014U CN 207483845 U CN207483845 U CN 207483845U
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- China
- Prior art keywords
- sealing
- furnace body
- plug
- sealing cover
- groove
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Abstract
The utility model discloses a kind of PECVD stoves, include furnace body, sealing cover, sealing-plug, furnace body is in a tubular form, furnace body is equipped with the first pneumatic tube, and the inner spout sealing of sealing-plug and furnace body coordinates, and sealing cover is set on side of the sealing-plug far from furnace body, the sealing cover side opposite with sealing-plug is equipped with groove, sealing cover is equipped with the second pneumatic tube, and second pneumatic tube one end is set in groove, the side wall of the other end through-going recess of the second pneumatic tube；The outer spout of sealing cover and furnace body is tightly connected；Sealing cover, sealing-plug and furnace body close groove into a sealing space.Compared with prior art, the utility model can improve temperature uniformity in pipe, simplify the process of sealing and solution sealing, improve sealing performance, improve processing efficiency.
Description
Technical field
The utility model is related to solar battery sheet production field more particularly to a kind of PECVD stoves.
Background technology
With the increasingly maturation of polysilicon solar battery slice production technology, industry will to producing the equipment precision of cell piece
Ask higher and higher.Solar silicon wafers need to use PECVD device during processing.PECVD device is closed by one
Pipe realize technique productions, chief component is the penetrating quartz ampoule in a both ends, and additional two sets of flanges and fire door will
It is combined, and forms a seal, and then with vacuum pump by its internal vacuum state, past tube interior is passed through ammonia
The special gas such as gas, silane are reacted.Wherein, temperature, sealing performance have the quality of product significant impact, current equipment
Temperature in the position close to nozzle is often more slightly lower than the temperature in pipe elsewhere, this can reduce product quality；In addition, at present
Equipment sealing performance it is not good enough, be easy to cause gas leak phenomenon, and the process of its sealing and solution sealing is numerous and diverse, reduces and processes
Efficiency.
Utility model content
The utility model provides a kind of PECVD stoves, it is uniform to improve temperature in pipe to solve existing technological deficiency
Property, simplify the process of sealing and solution sealing, improve sealing performance, improve processing efficiency.Its specific technical solution is as follows：
The utility model discloses a kind of PECVD stoves, includes furnace body, sealing cover, sealing-plug, furnace body in a tubular form, on furnace body
Equipped with the first pneumatic tube, the inner spout sealing cooperation of sealing-plug and furnace body, sealing cover is set on side of the sealing-plug far from furnace body, close
The capping side opposite with sealing-plug is equipped with groove, and sealing cover is equipped with the second pneumatic tube, and second pneumatic tube one end is set on groove
It is interior, the side wall of the other end through-going recess of the second pneumatic tube；The outer spout of sealing cover and furnace body is tightly connected；Sealing cover, sealing
Plug and furnace body close groove into a sealing space.
Further, the insertion end of sealing-plug is set on the inside of furnace body, and the sealed end of sealing-plug is equipped with the first skirtboard, furnace body
Inner spout edge be equipped with the first heavy platform, the first skirtboard and the first heavy platform coordinate, equipped with the between the first skirtboard and the first heavy platform
One sealant.
Further, the outer spout edge of furnace body is equipped with the second skirtboard, and the second skirtboard side opposite with seal cover board is set
There is the second heavy platform；The end sidewalls of sealing cover coordinate with the second heavy platform, and the second sealing is equipped between the second heavy platform and the second skirtboard
Layer.
Further, sealing-plug is equipped with thermal insulation layer, and thermal insulation layer is set on the sealed end end face of sealing-plug.
Further, connecting seat is equipped in groove, connecting seat is equipped with pilot hole, and the orifice area of pilot hole is less than pilot hole
Internal diameter sectional area；Sealing-plug is equipped with guide rod, and guide rod is set on the sealing-plug side opposite with groove, guide rod and pilot hole
Cooperation, the one end of guide rod far from sealing-plug are equipped with stop block, and the area of stop block is more than the orifice area of pilot hole.
Further, the sealing cover end face side wall opposite with furnace body is equipped with connecting rod, the one end of connecting rod far from sealing cover
It is threadedly coupled with furnace body outer wall.
The beneficial effects of the utility model：The sealing cover, sealing-plug and furnace body of the utility model close groove into one
Sealing space by changing the air pressure in air pressure and furnace body in groove, makes to form a pressure differential between the two, close so as to make
Blocking enters or exits furnace body inner tube, so that the nozzle of furnace body is sealed or be solved sealing, simplifies the mistake of sealing or solution sealing
Journey improves efficiency；It is vacuum state in groove when furnace body works, vacuum heat-preserving effect can be formed to furnace body nozzle, improves stove
The uniformity of body temperature；Sealing cover is connect with furnace body port sealing, can further increase the sealing performance of furnace body.
Description of the drawings
Fig. 1 is the overall structure diagram of the utility model embodiment；
Fig. 2 is the parts combination diagram of the utility model embodiment.
It is marked in figure：Furnace body 100, the first pneumatic tube 101, the first heavy platform 102, the second heavy platform 103, the second skirtboard 104 are close
Capping 200, the second pneumatic tube 201, connecting seat 202, groove 203, connecting rod 204, sealing-plug 300, the first skirtboard 301 are heat-insulated
Layer 302, guide rod 303, stop block 304, the second sealant 400, the first sealant 500.
Specific embodiment
The embodiment of the utility model is described below in detail, the example of the embodiment is shown in the drawings, wherein from beginning
Same or similar element is represented to same or similar label eventually or there is the element of same or like function.Below by ginseng
The embodiment for examining attached drawing description is exemplary, it is intended to for explaining the utility model, and it is not intended that the utility model
Limitation.
The utility model is described in further detail below by specific embodiment combination attached drawing.Please refer to Fig.1 to
Fig. 2.
The utility model discloses a kind of PECVD stoves, includes furnace body 100, columned sealing cover 200, columned close
Blocking 300, in a tubular form, the position of neighbouring 100 port of furnace body is equipped with the first pneumatic tube 101, sealing-plug to furnace body 100 on furnace body 100
300 one end puts in the inner tube of furnace body 100 and coordinates to be sealed with the inner spout of furnace body 100, and sealing cover 200 is set on sealing-plug
300 sides far from furnace body 100, the side opposite with sealing-plug 300 of sealing cover 200 are equipped with cylindrical grooves 203, sealing cover
200 are equipped with the second pneumatic tube 201, and 201 one end of the second pneumatic tube is set in groove 203, and the other end of the second pneumatic tube 201 passes through
It wears the side wall of groove 203, stretch out outside 200 plate of sealing cover；Sealing cover 200 is fixed on furnace body by screw or the merging of snap close piece lid
100 port is simultaneously tightly connected with the outer spout of furnace body 100；When sealing-plug 300 puts in 100 inner tube of furnace body and sealing cover 200
When being connect with the port sealing of furnace body 100, groove 203 is closed into a sealing by sealing cover 200, sealing-plug 300 and furnace body 100
Space, to carry out vacuumize process to groove 203.The sealing cover 200, sealing-plug 300 and furnace body 100 of the utility model are recessed
Slot 203 closes into a sealing space, by changing the air pressure in groove 203 and the air pressure in furnace body 100, makes shape between the two
Into a pressure differential, so as to which sealing-plug 300 be made to enter or exit 100 inner tube of furnace body, so as to be sealed to the nozzle of furnace body 100
Or solution sealing, simplify the process of sealing or solution sealing, improve efficiency；It is vacuum state in groove 203 when furnace body 100 works, it is recessed
Air pressure in slot 203 is slightly larger than the air pressure in furnace body 100, so that sealing-plug 300 tightly clogs the inner tube nozzle of furnace body 100, vacuum
State can form 100 nozzle of furnace body vacuum heat-preserving effect, improve the uniformity of temperature in furnace body 100；Sealing cover 200 and stove
100 port sealing of body connects, and can further increase the sealing performance of furnace body 100
Further, it is preferable to ground, the insertion end of sealing-plug 300 is inserted into the inside of furnace body 100, the sealed end of sealing-plug 300
It is overhanging go out furnace body 100 inner spout, and the end be equipped with the first skirtboard 301, the first skirtboard 301 along sealing-plug 300 circumference
Side surrounding is set.The inner spout edge of furnace body 100 has the first heavy platform 102 of annular, the first skirtboard 301 and the first heavy platform
102 cooperations, are equipped with the first sealant 500, it is preferable that the first sealant 500 is between the first skirtboard 301 and the first heavy platform 102
Cricoid high temperature resistant silicon glue-line, the first sealant 500 are fixed on the first skirtboard 301.This design can improve sealing performance.
Further, the outer spout edge of furnace body 100 is equipped with the second skirtboard 104, and the second skirtboard 104 is around furnace body 100
Circumferential side wall surrounds ring-type, and the second skirtboard 104 side opposite with 200 plate of sealing cover is equipped with cricoid second heavy platform 103；Sealing
Lid 200 opens up the end sidewalls of fluted 203 one end and the second heavy platform 103 coordinates, the second heavy platform 103 and the second skirtboard 104
Between be equipped with the second sealant 400, it is preferable that the second sealant 400 is fixed in the second heavy platform 103, and the second sealant 400 is excellent
It is selected as high temperature resistant silicon glue material.Such design can improve the sealing performance of furnace body 100.
Further, sealing-plug 300 is equipped with thermal insulation layer 302, it is preferable that the ceramics good for heat-proof quality of thermal insulation layer 302
Fibrous layer, thermal insulation layer 302 are fixed on the sealed end end face of sealing-plug 300.Thermal insulation layer 302 can play insulation effect to furnace body 100,
It is also possible to play heat-insulated effect, the high temperature in furnace body 100 is avoided to damage the second sealant 400 and avoid influencing recessed
Pressure in slot 203.
Further, the end wall of the innermost end of groove 203 is equipped with connecting seat 202, and connecting seat 202 is screwed in
On groove 203, connecting seat 202 is equipped with pilot hole, and pilot hole section is rounded, and pilot hole penetrates through entire connecting seat 202, pilot hole
The orifice area of one end far from sealing cover 200 is less than the internal diameter sectional area of pilot hole；Sealing-plug 300 is equipped with guide rod 303, leads
It being screwed in the one side wall opposite with groove 203 of sealing-plug 300 to bar 303, guide rod 303 coordinates with pilot hole,
There is stop block 304 in the one end of guide rod 303 far from sealing-plug 300 by screw connection, and the area of stop block 304 is more than pilot hole
Orifice area.This structure design can be movably connected sealing-plug 300 and sealing cover 200 together, not only simplify close
Envelope and the process of solution sealing, moreover it is possible to improve the stability of the movement of sealing-plug 300.
Further, the end face side wall opposite with furnace body 100 of sealing cover 200 is equipped with connecting rod 204, and connecting rod 204 is separate
One end of sealing cover 200 is connect with 100 outer wall thread of furnace body.Preferably, the outer wall of furnace body 100 is equipped with convex block, and convex block is equipped with logical
Hole, one end of connecting rod 204 are equipped with screw thread, and the end pass through convex block by rear, then upper fixing nut is fixed.This can
To improve connective stability, sealing effect is improved.
The above content is combine specific embodiment further detailed description of the utility model, it is impossible to assert
The specific implementation of the utility model is confined to these explanations.For the utility model person of an ordinary skill in the technical field
For, without departing from the concept of the premise utility, several simple deduction or replace can also be made.
Claims (6)
1. a kind of PECVD stoves include furnace body (100), sealing cover (200), sealing-plug (300), the furnace body (100) is in pipe
Shape, the furnace body (100) are equipped with the first pneumatic tube (101), the sealing-plug (300) and the inner spout of the furnace body (100)
Sealing cooperation, the sealing cover (200) is set on side of the sealing-plug (300) far from the furnace body (100), the sealing cover
(200) groove (203) is equipped with the opposite side of the sealing-plug (300), the sealing cover (200) is equipped with the second pneumatic tube
(201), described second pneumatic tube (201) one end is set in the groove (203), the other end of second pneumatic tube (201)
Side wall through the groove (203)；The sealing cover (200) and the outer spout of the furnace body (100) are tightly connected；It is described close
(200), the sealing-plug (300) and the furnace body (100) is covered to close into a sealing space groove (203).
2. PECVD stoves as described in claim 1, which is characterized in that sealing-plug (300) insertion end is set on the furnace body
(100) inside, the sealed end of the sealing-plug (300) are equipped with the first skirtboard (301), the inner spout side of the furnace body (100)
Edge is equipped with the first heavy platform (102), and first skirtboard (301) coordinates with first heavy platform (102), first skirtboard
(301) the first sealant (500) is equipped between first heavy platform (102).
3. PECVD stoves as claimed in claim 2, which is characterized in that the outer spout edge of the furnace body (100) is equipped with the second skirt
Plate (104), second skirtboard (104) side opposite with the sealing cover (200) plate are equipped with the second heavy platform (103)；It is described
The end sidewalls of sealing cover (200) coordinate with second heavy platform (103), second heavy platform (103) and second skirtboard
(104) the second sealant (400) is equipped between.
4. PECVD stoves as claimed in claim 3, which is characterized in that the sealing-plug (300) is equipped with thermal insulation layer (302), institute
Thermal insulation layer (302) is stated set on the sealed end end face of the sealing-plug (300).
5. PECVD stoves as described in claim 1, which is characterized in that connecting seat (202) is equipped in the groove (203), it is described
For connecting seat (202) equipped with pilot hole, the orifice area of the pilot hole is less than the internal diameter sectional area of the pilot hole；The sealing
(300) are filled in equipped with guide rod (303), and the guide rod (303) is opposite set on the sealing-plug (300) and the groove (203)
Side, the guide rod (303) and the pilot hole coordinate, the guide rod (303) far from the sealing-plug (300) one
End is equipped with stop block (304), and the area of the stop block (304) is more than the orifice area of the pilot hole.
6. PECVD stoves as described in claim 1, which is characterized in that the sealing cover (200) is opposite with the furnace body (100)
End face side wall be equipped with connecting rod (204), one end and the furnace body of the connecting rod (204) far from the sealing cover (200)
(100) outer wall thread connects.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721482014.7U CN207483845U (en) | 2017-11-08 | 2017-11-08 | A kind of PECVD stoves |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721482014.7U CN207483845U (en) | 2017-11-08 | 2017-11-08 | A kind of PECVD stoves |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207483845U true CN207483845U (en) | 2018-06-12 |
Family
ID=62475994
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721482014.7U Expired - Fee Related CN207483845U (en) | 2017-11-08 | 2017-11-08 | A kind of PECVD stoves |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207483845U (en) |
-
2017
- 2017-11-08 CN CN201721482014.7U patent/CN207483845U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180612 Termination date: 20211108 |