CN100400960C - Valve system for inert gas - Google Patents
Valve system for inert gas Download PDFInfo
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- CN100400960C CN100400960C CNB2004100665020A CN200410066502A CN100400960C CN 100400960 C CN100400960 C CN 100400960C CN B2004100665020 A CNB2004100665020 A CN B2004100665020A CN 200410066502 A CN200410066502 A CN 200410066502A CN 100400960 C CN100400960 C CN 100400960C
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- inert gas
- valve
- valves
- gas
- testing
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Abstract
The present invention relates to a valve system for inert gas, which comprises a trace quantity valve, two high purity gas insulation valves, two inert gas steel cylinders, two adapters, two high pressure exhaust valves, two high voltage insulation valves, two regulators, a vacuum generator, an exhausting hole, two testing valves, two manually-operated valves, two air supply switches and an inert gas outlet. The present invention is characterized in that the testing valves can be used for exhausting the low pressure inert gas or for connecting with a detector to measure whether the inert gas is leaked in an abnormal way. The present invention has the advantages that one single testing valve replaces the existing low pressure exhaust valve and the existing low pressure insulation valve so that the present invention not only can reach the purpose of reducing the number of parts in the whole valve system, but also can reduce the operational difficulty and shorten the operational time. Furthermore, the manufacturing cost and the maintenance cost are reduced because the parts are simplified. In addition, the testing valves can be connected with the detector to measure whether the inert gas in the pipeline is leaked in an abnormal way.
Description
Technical field
The present invention can be used in the general processing system that needs to supply with inert gas relevant for a kind of valve system that is used for inert gas.
Background technique
The valve system that is used for inert gas in the known technology, as shown in Figure 1, comprise: microsample valve 102, two high-pure gas isolation valves 104, two inert gas steel cylinders 106, two adapters 108, two high pressure air exhaust valves 110, two High-Voltage Insulation valves 112, two regulators 114, vacuum generator 116, exhaust port 118, two low pressure exhaust valves 120, two low-voltage insulation valves 122, two manually operated valves 124, two air supply valves 126, inert gas outlet 128.
Generally speaking, the supply of inert gas must be continuously, two air supply systems about therefore needing, and when supplying with inert gas by left-sided system, right-sided system is standby, vice versa.When the inert gas of left-sided system inert gas steel cylinder uses up, then close the air supply valve in left side, open the air supply valve on right side simultaneously, so can keep the supply of inert gas can not interrupt, can carry out the replacing of left side inert gas steel cylinder this moment.In like manner, when the inert gas of right-sided system inert gas steel cylinder used up, the air supply valve of then closing the right side was opened the air supply valve in left side simultaneously, so can keep the supply of inert gas can not interrupt, and can carry out the replacing of right side inert gas steel cylinder this moment.Inert gas steel cylinder 106 is the pipeline of connected system by adapter 108.When desire is changed inert gas steel cylinder 106, the for example highly purified nitrogen of highly purified gas can via in microsample valve 102 and the high-pure gas isolation valve 104 inflow systems as the purging effect, use and avoid that outside air and aqueous vapor enter system when changing inert gas steel cylinder 106.After inert gas steel cylinder 106 is changed, can close high-pure gas isolation valve 104 simultaneously and open high pressure air exhaust valve 110, and, discharge with the outer of the extraction of the gas in system system and via exhaust port 118 by vacuum generator 116.After the system for the treatment of is evacuated, can close high pressure air exhaust valve 110 and high-pure gas isolation valve 104, to carry out the normal air feed of inert gas steel cylinder 106.
When the normal air feed of inert gas steel cylinder 106, inert gas flow to regulator 114 via High-Voltage Insulation valve 112, and this moment, inert gas was a high pressure conditions.Via regulator 114, the inert gas of high pressure is adjustable as the inert gas of low pressure.During normal air feed, low-voltage insulation valve 122 be open and low pressure exhaust valve 120 cuts out.The inert gas of low pressure flow to manually operated valve 124 via low-voltage insulation valve 122, and then flow to inert gas outlet 128 and reach the normal air feed of inert gas via air supply valve 126.The effect of manually operated valve 124 is to prevent the fault of air supply valve 126.The prevention inert gas is discharged if air supply valve 126 faults can be closed manually operated valve 124.About two air supply valves 126 be to be used for control system to supply with inert gas by left side or right side.
The shortcoming that becomes known for the valve system of inert gas is that required part is too many, can cause manufacture cost too high and difficult in maintenance, and the program that also can cause behaviour to do simultaneously is more and difficulty is higher.For the consideration of time and money, be necessary that at how reducing manufacture cost and maintenance cost the program on simplifying the operation is simultaneously designed.
Summary of the invention
The present invention promptly is in order to solve the shortcoming of the valve system that becomes known for inert gas, a kind of valve system that is used for inert gas is provided, can effectively reduce unnecessary part and reduce manufacture cost and maintenance cost, owing to use the minimizing of part, can reduce operational degree of difficulty and save the operating time simultaneously.
According to a viewpoint of the present invention, a kind of valve system that is used for inert gas is provided, comprises: microsample valve 202, two high-pure gas isolation valves 204, two inert gas steel cylinders 206, two adapters 208, two high pressure air exhaust valves 210, two High-Voltage Insulation valves 212, two regulators 214, vacuum generator
216, exhaust port 218, two testing valves 230, two manually operated valves 224, two air supply valves 226, inert gas outlet 228 is characterized in that testing valve can be used for discharging the inert gas of low pressure or is used to connect a detector to measure whether improper spilling of inert gas.
According to another viewpoint of the present invention, a kind of valve system that is used for inert gas is provided, wherein testing valve is a three-way valve, and first direction and second direction be as the usefulness of normal air feed, and third direction is as the usefulness of exhaust or as detecting whether improper spilling of inert gas piping.
The valve system that is used for inert gas according to embodiments of the invention, its advantage is to replace known low pressure exhaust valve and low-voltage insulation valve with single testing valve, the number of parts that not only can reach whole valve system reduces, and also can reduce operational complicated degree of difficulty.Because simplifying of part can and then reduce manufacture cost and maintenance cost.In addition, whether improper testing valve can be connected with a detector and measure inert gas situation that spills in pipeline and take place.
Description of drawings
Fig. 1 is the Block Diagram that becomes known for the valve system of inert gas.
Fig. 2 is the Block Diagram according to the valve system that is used for inert gas of the embodiment of the invention.
Embodiment
Below referring to Fig. 2, be described in further detail detail structure and the function that is used for the valve system of inert gas of the present invention.
At first, as shown in Figure 2, the valve system that is used for inert gas of the present invention comprises: microsample valve 202, two high-pure gas isolation valves 204, two inert gas steel cylinders 206, two adapters 208, two high pressure air exhaust valves 210, two High-Voltage Insulation valves 212, two regulators 214, vacuum generator 216, exhaust port 218, two testing valves 230, two manually operated valves 224, two air supply valves 226, inert gas outlet 228.
As the valve system that becomes known for inert gas, two air supply systems about design of the present invention is divided into equally.When supplying with inert gas by left-sided system, right-sided system is standby.It is to be controlled by left and right sides air supply valve 226 that the air feed of left-sided system and right-sided system is selected.When desiring by left-sided system supply inert gas, then open the left side air supply valve and close the right side air supply valve simultaneously, vice versa.
Left-sided system and right-sided system respectively have one group of high-pure gas isolation valve 204, inert gas steel cylinder 206, adapter 208, high pressure air exhaust valve 210, High-Voltage Insulation valve 212, regulator 214, testing valve 230, manually operated valve 224, air supply valve 226.
The whole valve system that is used for inert gas has a vacuum generator 216 and is provided with an exhaust port 218 on the right side, after its function will be described in.The whole valve system that is used for inert gas has a microsample valve 202, high-purity nitrogen (PN in the left side
2) can be supplied to system via microsample valve 202.The design department of microsample valve allows the high-purity nitrogen (PN of trace
2) flow through microsample valve on a small quantity.High-purity nitrogen (PN then
2) control in the whether inflow system via high-pure gas isolation valve 204 again.When desire is changed inert gas steel cylinder 206, enter in the system via adapter 208 for preventing outside aqueous vapor or air, can open high-pure gas isolation valve 204 and close high pressure air exhaust valve 210 and High-Voltage Insulation valve 212 this moment, so that high-purity nitrogen (PN
2) flow in the pipeline of system as the usefulness of scavenging pipeline, can prevent that outside aqueous vapor or air from entering in the system via adapter 208.
After the replacing of finishing inert gas steel cylinder 206, can close high-pure gas isolation valve 204 and High-Voltage Insulation valve 212 and open high pressure air exhaust valve 210, by vacuum generator 216 pipeline is evacuated then and discharges gas to exhaust port 218.After finishing the application of vacuum of pipeline, can close high-pure gas isolation valve 204 and high pressure air exhaust valve 210 and open High-Voltage Insulation valve 212 this moment, so the inert gas in the inert gas steel cylinder 206 can flow out via High-Voltage Insulation valve 212.This moment, inert gas was in high pressure conditions.
Subsequently, the inert gas of high pressure can be adjusted into the inert gas of low pressure by regulator 214.Then, the inert gas of low pressure can be controlled the system that whether discharges by the testing valve 230 of unique design of the present invention, or the manually operated valve 224 of flowing through, air supply valve 226 and the inert gas that arrives outlet 228.
The inert gas flow of low pressure is valve 230 and deliver to manually operated valve 224 after tested, and then delivers to inert gas outlet 228 via air supply valve 226.The effect of manually operated valve 224 is: if when the air feed of system can't normally be closed, and can be by the manually operated valve 224 urgent air feed of shutdown system manually.The effect of air supply valve 226 as aforementioned, is that the whole valve system that is used for inert gas of may command is to supply with inert gas by left side or right side.
According to the valve system that is used for inert gas of embodiments of the invention, its advantage is simplified system design and operation.Whether in addition, testing valve also can be optionally and an external detector connects, have the improper situation that spills to take place in pipeline and measure inert gas.Not only the number of parts of whole valve system reduces, and also can reduce at operational complicated degree of difficulty.Because simplifying of part can and then reduce manufacture cost and maintenance cost.Simultaneously testing valve can be connected with a detector and whether accurately measure the quality flow of inert gas normal.Except the effect of leaking hunting, testing valve also has the function that can discharge inert gas, need not come exhaust by vacuum generator 216, also can save the tired multiple programmed sequence of operations that must open or close low pressure exhaust valve and low-voltage insulation valve in the known system.Can be reduced in operational complicated degree of difficulty.
Though specific embodiment of the present invention has been described in above narration, must notice that above narration just is used for helping to understand enforcement of the present invention, be not to be used to limit spirit of the present invention.Be familiar with present technique field person and can under the announcement of this case specification, in not breaking away from spiritual scope of the present invention, make many different modifications.Therefore, scope of the present invention is to be defined by following appended claim.
Claims (2)
1. valve system that is used for inert gas comprises:
One microsample valve allows high-pure gas to pass through by trace;
Two high-pure gas isolation valves, one end all link to each other with described microsample valve and the inflow of may command high-pure gas;
Two inert gas steel cylinders link to each other with corresponding one the other end in described two high-pure gas isolation valves respectively and are used to supply with inert gas;
Two adapters are arranged at respectively in the connecting path between described inert gas steel cylinder and the high-pure gas isolation valve, are used to be connected this inert gas steel cylinder to system;
Two high pressure air exhaust valves, one end link to each other with a described adapter with a corresponding described high-pure gas isolation valve respectively and the other end of these two high pressure air exhaust valves interconnects, the inflow or the discharge of described high pressure air exhaust valve may command gas;
Two High-Voltage Insulation valves, one end link to each other with a described high pressure air exhaust valve with a corresponding described adapter, described high-pure gas isolation valve respectively and the inflow of may command gas;
Two regulators, one end link to each other with the other end of a corresponding described High-Voltage Insulation valve respectively also can be adjusted into the inert gas of high pressure the inert gas of low pressure;
One vacuum generator, one end are connected to the connecting path between described two high pressure air exhaust valves, can be used for the pipeline in the system is evacuated;
One exhaust port links to each other with the other end of described vacuum generator and is used for the unnecessary gas of discharge system;
Two testing valves, one end are connected respectively to the other end of corresponding described regulator and are used to discharge inert gas or the flow of control inert gas;
Two manually operated valves, one end are connected respectively to the other end of corresponding described testing valve and are used for promptly manually closing air supply system;
The other end and the whole valve system that is used for inert gas of may command that two air supply valves, one end are connected respectively to corresponding described manually operated valve are to come air feed by left side or right side; And
The outlet of one inert gas is connected with the other end of described two air supply valves,
This testing valve can be used for discharging the inert gas of low pressure or is used to connect a detector measures whether improper spilling of inert gas.
2. the valve system that is used for inert gas as claimed in claim 1, it is characterized in that, this testing valve is a three-way valve, and first direction and second direction be as the usefulness of normal air feed, and third direction is as the usefulness of exhaust or as detecting whether improper spilling of inert gas piping.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100665020A CN100400960C (en) | 2004-09-20 | 2004-09-20 | Valve system for inert gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100665020A CN100400960C (en) | 2004-09-20 | 2004-09-20 | Valve system for inert gas |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1752509A CN1752509A (en) | 2006-03-29 |
| CN100400960C true CN100400960C (en) | 2008-07-09 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100665020A Expired - Fee Related CN100400960C (en) | 2004-09-20 | 2004-09-20 | Valve system for inert gas |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100400960C (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NO328089B1 (en) * | 2007-09-03 | 2009-11-30 | Weltec As | Tire gas flow controller for a welding apparatus |
| TWI489054B (en) * | 2011-06-21 | 2015-06-21 | Au Optronics Corp | Valve box module |
| CN102751219A (en) * | 2012-07-26 | 2012-10-24 | 上海宏力半导体制造有限公司 | Semiconductor device |
| CN105439067B (en) * | 2015-11-24 | 2018-06-29 | 南京国盛电子有限公司 | Suitable for the trichlorosilane feeding mechanism of 8 inches of silicon epitaxy process systems |
| CN106523181B (en) * | 2016-12-28 | 2019-06-18 | 宁波华斯特林电机制造有限公司 | A kind of the inert gas output device and its method of Stirling motor |
| CN111207303A (en) * | 2018-11-21 | 2020-05-29 | 苏州工业园区可伦坡系统集成科技有限公司 | Device for preventing nitrogen gas inner leakage |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1103158A (en) * | 1993-07-08 | 1995-05-31 | 液体空气乔治洛德方法利用和研究有限公司 | High pressure gas supply installation |
| CN1148526A (en) * | 1995-07-19 | 1997-04-30 | 石川岛播磨重工业株式会社 | Method for making molten metal in two-roller continuous casting machine generate vibration, and apparatus thereof |
| GB2323683A (en) * | 1997-03-22 | 1998-09-30 | British Gas Plc | Controlling a pressure regulating system with an underground module |
| CN1068422C (en) * | 1997-03-21 | 2001-07-11 | 张慎发 | Automatic gasifying pipeline gas supply device for light hydrocarbon fuel |
| JP2003172497A (en) * | 2001-12-05 | 2003-06-20 | Koatsu Gas Kogyo Co Ltd | Natural gas filling equipment for automobile |
-
2004
- 2004-09-20 CN CNB2004100665020A patent/CN100400960C/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1103158A (en) * | 1993-07-08 | 1995-05-31 | 液体空气乔治洛德方法利用和研究有限公司 | High pressure gas supply installation |
| CN1148526A (en) * | 1995-07-19 | 1997-04-30 | 石川岛播磨重工业株式会社 | Method for making molten metal in two-roller continuous casting machine generate vibration, and apparatus thereof |
| CN1068422C (en) * | 1997-03-21 | 2001-07-11 | 张慎发 | Automatic gasifying pipeline gas supply device for light hydrocarbon fuel |
| GB2323683A (en) * | 1997-03-22 | 1998-09-30 | British Gas Plc | Controlling a pressure regulating system with an underground module |
| JP2003172497A (en) * | 2001-12-05 | 2003-06-20 | Koatsu Gas Kogyo Co Ltd | Natural gas filling equipment for automobile |
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| Publication number | Publication date |
|---|---|
| CN1752509A (en) | 2006-03-29 |
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| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING |
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| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20111121 Address after: 201203 No. 18 Zhangjiang Road, Shanghai Co-patentee after: Semiconductor Manufacturing International (Beijing) Corporation Patentee after: Semiconductor Manufacturing International (Shanghai) Corporation Address before: 201203 No. 18 Zhangjiang Road, Shanghai Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080709 Termination date: 20180920 |