CN215142830U - Ultrasonic cleaning device for silicon disc - Google Patents

Abstract

The utility model discloses an ultrasonic cleaning device for a silicon disc, which is applied to the field of ultrasonic cleaning and comprises a workbench, a cleaning tank, a drying tank and a conveying line, wherein the cleaning tank and the drying tank are arranged in the workbench, the conveying line is arranged above the workbench, and an ultrasonic generator is also arranged in the workbench; a cleaning basket is arranged on the conveying line and comprises a telescopic rod and a placing basket, one end of the telescopic rod is fixed on the conveying line, and the other end of the telescopic rod is connected with the cleaning basket; the utility model provides an ultrasonic cleaning device for silicon disc can realize high degree of automation, the high efficiency washing of silicon chip, is provided with in placing the basket in this device and can dismantle block and space bar, can reduce the influence of washing basket to the cleaning performance, improves the cleaning performance, because it needs to dry in the same entering stoving groove with the silicon chip to wash the basket, consequently the block can be convenient for wash getting rid of when the basket leaves with the setting of space bar, and is easy and simple to handle, simple structure, can promote on a large scale.

Description

Ultrasonic cleaning device for silicon disc

Technical Field

The utility model relates to an ultrasonic cleaning field, in particular to ultrasonic cleaning device for silicon dish.

Background

With the continuous development of the cleaning industry, more and more industries and enterprises use the ultrasonic cleaning machine, and the ultrasonic cleaning machine is widely applied to the surface spraying treatment industry, the mechanical industry, the electronic industry, the medical industry, the semiconductor industry, the clock and jewelry industry, the optical industry and the textile printing and dyeing industry at present. The principle of the ultrasonic cleaning machine is that sound energy of a power ultrasonic frequency source is converted into mechanical vibration through a transducer, ultrasonic waves are radiated to cleaning liquid in a groove through a cleaning groove wall, micro bubbles in liquid in the groove can keep vibrating under the action of the sound waves due to the radiation of the ultrasonic waves, the adsorption of dirt and the surface of a cleaning piece is damaged, the dirt layer is broken by fatigue to be separated, and the solid surface is cleaned by the vibration of gas bubbles.

The silicon chip need wash silicon chip surface attachment and impurity after processing, generally rinse through ultrasonic cleaner, but current ultrasonic cleaner function is comparatively single, and degree of automation is low, can't accomplish the batch cleaning of silicon chip, has restricted production efficiency's promotion, has seriously influenced the economic benefits of enterprise, consequently, it is necessary to provide one kind and can realize silicon chip batch production, improves the novel ultrasonic cleaning device of enterprise economic benefits.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing an ultrasonic cleaning device for silicon dish, its advantage can realize silicon chip batch production, improves enterprise economic benefits.

The above technical purpose of the present invention can be achieved by the following technical solutions: the utility model provides an ultrasonic cleaning device for silicon dish, includes workstation, washing tank, stoving groove and transfer chain, the washing tank with the stoving groove set up in the workstation, the transfer chain set up in the workstation top, still be equipped with supersonic generator in the workstation, be provided with a washing basket on the transfer chain, washing basket includes the telescopic link and places the basket, telescopic link one end is fixed on the transfer chain, the other end with the washing basket is connected.

Through above-mentioned technical scheme, treat abluent silicon chip dress in washing basket, wash the basket and stop in the washing tank top under the drive of conveyer belt, the telescopic link extension is washd in the washing basket gets into the washing tank, washs the back telescopic link that finishes and shortens, leaves the washing tank, is dried in driving the stoving groove by the conveyer belt again, whole process automation degree is high, can practice thrift the cost, improves production efficiency.

The present application further provides that the cleaning basket includes a housing and a plurality of drawer assemblies; the fitting drawer is arranged in the shell.

Through above-mentioned technical scheme, dispose a plurality of built-in drawers in a casing, the abluent silicon chip quantity of multiplicable every time realizes the batch cleaning.

This application further sets up to, be equipped with a plurality of work piece grooves that link up on the dress spare drawer, dress spare drawer bottom is equipped with a detachable block, and is a plurality of be provided with the interval groove between the dress spare drawer.

Through the technical scheme, the through workpiece grooves are formed in the drawer for installing the workpiece, so that the cleaning efficiency can be further improved, and meanwhile, due to the arrangement of the blocking nets and the spacing grooves, the influence of the cleaning basket on the cleaning effect can be reduced to the greatest extent, and the cleaning effect is improved; on the other hand, the cleaning basket and the silicon wafer are required to enter the drying groove together for drying, so that the cleaning liquid can be conveniently removed when the cleaning basket leaves due to the arrangement of the blocking net and the spacing groove, and the silicon wafer can be taken out after the blocking net is detached after cleaning is finished.

This application further sets up to, the inner wall in work piece groove is equipped with one deck silica gel buffer layer, washs and the contact of drying in-process silicon chip ground and block net, and the side is then cushioned by the silica gel buffer layer, has avoided colliding with the damage that causes the silicon chip.

This application further sets up to, the casing both sides be equipped with the outstanding slider that dress drawer quantity is the same, the dress drawer passes through outstanding slider with casing sliding connection, the dress drawer can be convenient load and unload on the casing.

The application is further configured such that the cleaning basket is connected to a motor; the conveying line and the motor are controlled by a numerical control center.

This device carries out holistic control through numerical control center, can set up the speed of transfer chain in advance according to actual conditions, and the fast batch that realizes the silicon chip washs time, stoving time and so on.

To sum up, the utility model discloses following beneficial effect has: the utility model provides an ultrasonic cleaning device for silicon disc, can realize the high degree of automation of silicon chip, the high efficiency is washd, washing basket in this device includes the telescopic link and places the basket, can automatically regulated scavenging period, it is provided with can dismantle block and compartment groove in the basket to place, can reduce washing basket to the at utmost influence to the cleaning performance, improve the cleaning performance, on the other hand, because it needs to dry in getting into the drying bath with the silicon chip together to wash the basket, consequently the block also can be convenient for wash getting rid of washing liquid when the basket leaves with the setting of compartment groove, dismantle the block after the washing is accomplished then can take out the silicon chip, and is easy and simple to handle, moreover, the steam generator is simple in structure, can promote on a large scale.

Drawings

FIG. 1 is a sectional view of an ultrasonic cleaning apparatus for a silicon disk of the present embodiment;

FIG. 2 is a schematic structural view of the wash basket of the present embodiment;

FIG. 3 is a schematic structural diagram of the housing of the present embodiment;

fig. 4 is a schematic structural diagram of the drawer fitting of the embodiment.

Reference numerals: 1. a work table; 2. a cleaning tank; 3. a drying tank; 4. a conveying line; 5. cleaning the basket; 6. a housing; 7. assembling a drawer; 8. a workpiece groove; 9. a spacing groove; 10. a protruding slider; 11. and (7) blocking nets.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings.

Example (b):

referring to fig. 1, an ultrasonic cleaning device for a silicon disc comprises a workbench 1, a cleaning tank 2, a drying tank 3 and a conveying line 4, wherein the cleaning tank 2 and the drying tank 3 are arranged in the workbench 1, the conveying line 4 is arranged above the workbench 1, an ultrasonic generator is further arranged in the workbench 1, a cleaning basket 5 is arranged on the conveying line 4, the cleaning basket 5 comprises a telescopic rod and a placing basket, one end of the telescopic rod is fixed on the conveying line 4, and the other end of the telescopic rod is connected with the cleaning basket 5; treat abluent silicon chip dress in washing basket 5, wash basket 5 and stop in washing tank 2 top under the drive of conveyer belt, the telescopic link extension washs in washing basket 5 gets into washing tank 2, washs the back telescopic link that finishes and shortens, leaves washing tank 2, drives by the conveyer belt again and dries in drying tank 3, whole process automation degree is high, can practice thrift the cost, improves production efficiency.

As shown in fig. 2, the cleaning basket 5 of the present embodiment includes a housing 6 and 3 drawers 7, and the specific number can be adjusted by actual workload without specific limitation; the drawer assembly 7 is arranged in the shell 6; a plurality of piece-mounting drawers 7 are arranged in one shell 6, so that the number of silicon wafers which can be cleaned at a time can be increased, and batch cleaning is realized.

As shown in fig. 3 and 4, 6 through workpiece grooves 8 are formed in the drawer installing units 7, a detachable barrier net 11 is arranged at the bottom end of each drawer installing unit 7, and spacing grooves 9 are formed among the plurality of drawer installing units 7; the device can further improve the cleaning efficiency by arranging a plurality of workpiece grooves 8 on the refitting drawer 7, and meanwhile, the arrangement of the blocking net 11 and the spacing groove 9 can reduce the influence of the cleaning basket 5 on the cleaning effect to the greatest extent and improve the cleaning effect; on the other hand, the cleaning basket 5 and the silicon wafers are required to enter the drying tank 3 together for drying, so the arrangement of the blocking net 11 and the spacing tank 9 is also convenient for removing the cleaning liquid when the cleaning basket 5 leaves, and the silicon wafers can be taken out after the blocking net 11 is detached after the cleaning is finished.

Wherein, the inner wall of work piece groove 8 is equipped with the one deck silica gel buffer layer, washs and dries in-process silicon chip ground and block 11 contacts, and the side is then cushioned by the silica gel buffer layer, has avoided colliding with the damage that causes the silicon chip.

Wherein, the two sides of the shell 6 are provided with protruding sliding blocks 10 with the same number as the drawers 7, and the drawers 7 are connected with the shell 6 in a sliding way through the protruding sliding blocks 10; the drawer 7 can be conveniently assembled and disassembled on the shell 6.

Wherein, the cleaning basket 5 is connected with a motor; the conveying line 4 and the motor are controlled by the numerical control center, the speed, the cleaning time, the drying time and the like of the conveying line 4 can be set in advance according to actual conditions, and the silicon wafers are cleaned in batches quickly.

The specific operation of the device is as follows: the silicon wafer to be cleaned is placed in a workpiece groove 8 in a workpiece loading drawer 7, the workpiece loading drawer 7 is inserted into a shell 6 of the cleaning basket 5 in a sliding mode through a protruding sliding block 10, and at the moment, the telescopic rod is in a contraction state. Starting the numerical control center, the transfer chain 4 drives washing basket 5 to 2 upper ends in washing tank, and the telescopic link extends, and washing basket 5 gets into washing tank 2 and washs, washs to setting up time after, and the telescopic link shrink will wash basket 5 pull-out washing tank 2, removes to stoving groove 3 top, will wash basket 5 again and put into stoving groove 3 and dry, takes out the silicon chip.

The present embodiment is only for explaining the present invention, and it is not limited to the present invention, and those skilled in the art can make modifications to the present embodiment without inventive contribution as required after reading the present specification, but all of them are protected by patent laws within the scope of the claims of the present invention.

Claims (7)

1. An ultrasonic cleaning device for a silicon disc comprises a workbench (1), a cleaning tank (2), a drying tank (3) and a conveying line (4), wherein the cleaning tank (2) and the drying tank (3) are arranged in the workbench (1), the conveying line (4) is arranged above the workbench (1), and an ultrasonic generator is further arranged in the workbench (1);

the automatic cleaning device is characterized in that a cleaning basket (5) is arranged on the conveying line (4), the cleaning basket (5) comprises a telescopic rod and a placing basket, one end of the telescopic rod is fixed on the conveying line (4), and the other end of the telescopic rod is connected with the cleaning basket (5).

2. An ultrasonic cleaning device for silicon disks as claimed in claim 1, characterized in that the cleaning basket (5) comprises a housing (6) and a plurality of casing drawers (7); the piece mounting drawer (7) is arranged in the shell (6).

3. The ultrasonic cleaning device for the silicon disc as claimed in claim 2, wherein a plurality of through workpiece grooves (8) are formed in the assembly drawer (7), a detachable barrier net (11) is arranged at the bottom end of the assembly drawer (7), and spacing grooves (9) are formed among the plurality of assembly drawers (7).

4. The ultrasonic cleaning device for the silicon disc as claimed in claim 3, wherein the inner wall of the workpiece groove (8) is provided with a silica gel buffer layer.

5. The ultrasonic cleaning device for silicon disks as claimed in claim 2, wherein the number of the protruding sliding blocks (10) on both sides of the housing (6) is the same as that of the drawer (7), and the drawer (7) is slidably connected with the housing (6) through the protruding sliding blocks (10).

6. An ultrasonic cleaning device for silicon disks as claimed in claim 1, characterized in that a motor is connected to the cleaning basket (5).

7. The ultrasonic cleaning device for the silicon disc as claimed in claim 6, wherein the conveying line (4) and the motor are controlled by a numerical control center.

Images