CN215066835U

CN215066835U - Vertical spring needle type probe card

Info

Publication number: CN215066835U
Application number: CN202121311348.4U
Authority: CN
Inventors: 孙锐锋; 刘志广; 刘俊
Original assignee: Shenzhen Doctor Technology Co ltd
Current assignee: Shenzhen Doctor Technology Co ltd
Priority date: 2021-06-11
Filing date: 2021-06-11
Publication date: 2021-12-07
Anticipated expiration: 2031-06-11

Abstract

The utility model relates to the technical field of probe cards, and discloses a vertical spring needle type probe card, which is arranged on the upper end wall of a lower plate through an upper plate detachable, a plurality of first plug holes and second plug holes are respectively oppositely and concavely arranged in the middle of the upper end wall of the upper plate and the upper end wall of the lower plate, a spring probe comprises a first needle shaft, a second needle shaft, a needle tube and a spring, the needle tube is respectively and sequentially and detachably embedded in the first plug holes and the second plug holes, the peripheral wall of the needle tube is respectively and respectively abutted against the inner peripheral walls of the first plug holes and the second plug holes, the needle shaft of the spring probe is vertically contacted with the electrode of a test wafer sheet to carry out electrical test, the spring in the needle tube is used for helping the test probe to realize stable contact with the electrode of a test chip, the reliability of the probe card is effectively improved, thereby the test yield is improved, and a single spring probe can be detached and replaced, the maintenance is convenient, the maintenance time is reduced, the operation is simple, the use is convenient, and the practicability is strong.

Description

Vertical spring needle type probe card

Technical Field

The utility model relates to a probe card technical field, in particular to vertical spring needle type probe card.

Background

A probe card (probe card) is a jig for electrically testing LSI (large scale integrated circuit) chips on a wafer during a wafer testing process in an LSI manufacturing process. The probe card is butted against a wafer prober to serve as a connector between electrodes of an LSI chip and an LSI tester (as a measuring machine). The needles of the probe card are brought into contact with the electrodes of the LSI chip to perform electrical testing for pass/fail testing. The wafer test process is very important and highly dependent on the reliability of the probe card.

However, the existing probe card has the disadvantages that the contact between the test probe and the electrode of the test chip is not stable enough, the product test yield is affected, and the maintenance is inconvenient, so that further improvement is needed.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a perpendicular spring needle type probe card aims at solving current probe card test probe and test chip electrode contact and is not stable enough, influences the product test yield, and maintains inconvenient technical problem.

In order to achieve the above object, the vertical spring needle type probe card provided by the present invention comprises an upper plate, a lower plate and a spring probe, wherein the upper plate and the lower plate are arranged in a disc shape, the upper plate is detachably disposed on the upper end wall of the lower plate, a plurality of first insertion holes and second insertion holes arranged in a matrix form are respectively oppositely and concavely disposed in the middle of the upper end wall of the upper plate and the lower plate, the spring probe comprises a first needle shaft, a second needle shaft, a needle tube and a spring, a through accommodating cavity is disposed in the needle tube, the spring is disposed in the accommodating cavity of the needle tube, the first needle shaft and the second needle shaft are respectively inserted into two ends of the accommodating cavity of the needle tube in a vertically sliding manner, two ends of the spring are respectively abutted against the lower end portions of the first needle shaft and the second needle shaft, and the outer peripheral walls of the first needle shaft and the second needle shaft are respectively electrically connected with the inner peripheral wall of the accommodating cavity of the needle tube in an abutting manner, the needle tubing is detachably embedded in the first inserting hole and the second inserting hole in sequence, the outer peripheral wall of the needle tubing is abutted to the inner peripheral wall of the first inserting hole and the inner peripheral wall of the second inserting hole, the upper end portions of the first needle shaft and the second needle shaft can be movably arranged in the first inserting hole and the second inserting hole from top to bottom, and the first needle shaft and the second needle shaft are perpendicular to the upper plate and the lower plate.

Further, the periphery wall of the lower tip of first needle axle and second needle axle is protruding respectively and is equipped with a first limit flange and the second limit flange that extend along the circumferencial direction, the both ends of spring respectively with first limit flange and second limit flange butt set up, the internal perisporium at the both ends of the holding cavity of needle tubing is protruding respectively and is equipped with a third limit flange that extends along the circumferencial direction, first limit flange and second limit flange respectively can with third limit flange butt sets up.

Furthermore, the spring is a cylindrical spiral spring, the rear end walls of the first limiting flange and the second limiting flange are respectively provided with a first limiting column and a second limiting column in a protruding mode, and two ends of the spring are respectively detachably sleeved on the first limiting column and the second limiting column.

The positioning device further comprises positioning pins, wherein two sides of the upper end wall of the upper plate are respectively provided with a first positioning hole in a concave mode, the upper end wall of the lower plate is provided with a second positioning hole in a concave mode, the second positioning holes correspond to the first positioning holes in a one-to-one mode, and the positioning pins are sequentially embedded in the first positioning holes and the second positioning holes respectively.

Furthermore, the clamping device further comprises a fastening bolt, wherein a first threaded hole is respectively and concavely formed in two sides of the upper end wall of the upper plate, a second threaded hole in one-to-one correspondence with the first threaded hole is concavely formed in the upper end wall of the lower plate, and the fastening bolt is respectively and sequentially screwed in the first threaded hole and the second threaded hole.

Furthermore, a plurality of first mounting holes are concavely formed in the upper end wall of the upper plate along the circumferential direction, and a plurality of second mounting holes corresponding to the first mounting holes in a one-to-one manner are concavely formed in the upper end wall of the lower plate.

Furthermore, the lower end walls of the second mounting holes are respectively provided with a containing groove in a concave mode.

Further, the upper plate and the lower plate are both formed by PEEK engineering plastics.

Adopt the technical scheme of the utility model, following beneficial effect has: the technical proposal of the utility model is that the upper plate is detachably arranged on the upper end wall of the lower plate, a plurality of first inserting holes and second inserting holes which are arranged in a matrix form are respectively oppositely and concavely arranged in the middle of the upper end wall of the upper plate and the upper end wall of the lower plate, the spring probe comprises a first needle shaft, a second needle shaft, a needle tube and a spring, a through holding cavity is arranged in the needle tube, the spring is arranged in the holding cavity of the needle tube, the first needle shaft and the second needle shaft can be respectively inserted into two ends of the holding cavity of the needle tube in a vertical sliding way, two ends of the spring are respectively butted with the lower end parts of the first needle shaft and the second needle shaft, the peripheral walls of the first needle shaft and the second needle shaft are respectively and electrically connected with the inner peripheral wall butt of the holding cavity of the needle tube, the needle tube is respectively and detachably embedded in the first inserting holes and the second inserting holes in sequence, and the peripheral wall of the needle tube is respectively butted with the inner peripheral walls of the first inserting holes and the second inserting holes, the upper end of first needle axle and second needle axle equally divide and do not can follow first spliced eye and the downthehole activity setting from top to bottom of second spliced eye, help the test probe to realize the stable contact with test chip electrode through the spring in the needle pipe, effectively improved the reliability of probe card to improve the test yield, and still can dismantle the single spring probe of change, it is convenient to maintain, has reduced the maintenance time, easy operation, convenient to use, the practicality is strong.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.

Fig. 1 is a schematic view of an overall structure of a vertical pogo pin type probe card according to the present invention;

fig. 2 is a schematic view of another view angle of the vertical pogo pin type probe card according to the present invention;

FIG. 3 is an enlarged view taken at A in FIG. 1;

fig. 4 is an exploded schematic view of a vertical pogo pin type probe card according to the present invention;

fig. 5 is a schematic view of an overall structure of a spring probe of a vertical spring probe type probe card according to the present invention;

fig. 6 is a schematic view of an overall structure of a spring probe of a vertical spring probe type probe card according to the present invention.

The objects, features and advantages of the present invention will be further described with reference to the accompanying drawings.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

It should be noted that all the directional indicators (such as upper, lower, left, right, front and rear … …) in the embodiment of the present invention are only used to explain the relative position relationship between the components, the motion situation, etc. in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indicator is changed accordingly.

In addition, the technical solutions in the embodiments may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should not be considered to exist, and is not within the protection scope of the present invention.

The utility model provides a vertical spring needle type probe card.

As shown in fig. 1 to 6, in an embodiment of the present invention, the vertical spring needle type probe card includes an upper plate 100, a lower plate 200 and a spring probe 300, wherein the upper plate 100 and the lower plate 200 are both disposed in a disc structure, the upper plate 100 is detachably disposed on an upper end wall of the lower plate 200, a plurality of first insertion holes 101 and second insertion holes 102 arranged in a matrix form are respectively oppositely recessed in the middle of the upper end wall of the upper plate 100 and the lower plate 200, the spring probe 300 includes a first needle shaft 301, a second needle shaft 302, a needle tube 303 and a spring 304, a through receiving cavity is disposed in the needle tube 303, the spring 304 is disposed in the receiving cavity of the needle tube 303, the first needle shaft 301 and the second needle shaft 302 are respectively inserted into two ends of the receiving cavity of the needle tube 303 in an up-and-down slidable manner, two ends of the spring 304 are respectively abutted against lower ends of the first needle shaft 301 and the second needle shaft 302, and the peripheral walls of the first needle shaft 301 and the second needle shaft 302 are all in butt joint with the inner peripheral wall of the containing cavity of the needle tube 303, the needle tube 303 is respectively detachably embedded in the first inserting hole 101 and the second inserting hole 102 in sequence, the peripheral wall of the needle tube 303 is equally divided into two parts which are respectively in butt joint with the inner peripheral walls of the first inserting hole 101 and the second inserting hole 102, the upper end parts of the first needle shaft 301 and the second needle shaft 302 are equally divided into two parts which can be respectively arranged along the inner upper and lower movable parts of the first inserting hole 101 and the second inserting hole 102, and the first needle shaft 301 and the second needle shaft 302 are vertically arranged with the upper plate 100 and the lower plate 200.

Specifically, the outer peripheral walls of the lower end portions of the first needle shaft 301 and the second needle shaft 302 are respectively provided with a first limit flange 3011 and a second limit flange 3021 which extend along the circumferential direction in a protruding manner, two ends of the spring 304 are respectively arranged in an abutting manner with the first limit flange 3011 and the second limit flange 3021, the inner peripheral walls of two ends of the accommodating cavity of the needle tube 304 are respectively provided with a third limit flange (not shown) which extends along the circumferential direction in a protruding manner, and the first limit flange 3011 and the second limit flange 3021 can be respectively arranged in an abutting manner with the third limit flange.

Specifically, the spring 304 is a cylindrical coil spring, a first limiting post 3012 and a second limiting post 3022 are respectively and convexly disposed on the rear end walls of the first limiting flange 3011 and the second limiting flange 3021, and two ends of the spring 304 are respectively detachably sleeved on the first limiting post 3012 and the second limiting post 3022.

Specifically, the positioning device further comprises positioning pins (not shown), two sides of the upper end wall of the upper plate 100 are respectively provided with a first positioning hole 102 in a concave manner, the upper end wall of the lower plate 200 is provided with a second positioning hole 202 in a concave manner, the second positioning holes are in one-to-one correspondence with the first positioning holes 102, the positioning pins are respectively embedded in the first positioning hole 102 and the second positioning hole 202 in sequence, and the positioning pins can improve the assembly precision of the upper plate and the lower plate.

Specifically, the fastening device further comprises fastening bolts (not shown), wherein a first threaded hole 103 is respectively concavely formed in two sides of the upper end wall of the upper plate 100, second threaded holes 203 corresponding to the first threaded holes 103 in a one-to-one manner are concavely formed in the upper end wall of the lower plate 200, and the fastening bolts are respectively screwed in the first threaded hole 103 and the second threaded hole 203 in sequence.

Specifically, the upper end wall of the upper plate 100 is recessed with a plurality of first mounting holes 104 along the circumferential direction, and the upper end wall of the lower plate 200 is recessed with a plurality of second mounting holes 204 corresponding to the first mounting holes 104 one to one.

Specifically, the lower end walls of the second mounting holes 204 are respectively provided with a receiving groove 205 in a concave manner.

Specifically, the upper plate 100 and the lower plate 200 are both made of PEEK engineering plastics, PEEK resin materials are high in temperature resistance, good in rigidity and strength, corrosion-resistant, ageing-resistant, wear-resistant, and good in antistatic electrical insulation performance, and the service life and the test precision of the probe card can be improved.

Specifically, the utility model is arranged on the upper end wall of the lower plate through the upper plate detachable, the middle of the upper end wall of the upper plate and the lower plate is respectively provided with a plurality of first plug holes and second plug holes which are arranged in a matrix form in a relative concave way, the spring probe comprises a first needle shaft, a second needle shaft, a needle tube and a spring, a through containing cavity is arranged in the needle tube, the spring is arranged in the containing cavity of the needle tube, the first needle shaft and the second needle shaft can be respectively inserted into two ends of the containing cavity of the needle tube in a vertical sliding way, two ends of the spring are respectively arranged in a butt joint with the lower end parts of the first needle shaft and the second needle shaft, the peripheral walls of the first needle shaft and the second needle shaft are respectively electrically connected with the inner peripheral wall butt joint of the containing cavity of the needle tube, the needle tube is respectively and detachably embedded in the first plug holes and the second plug holes in sequence, and the peripheral wall of the needle tube is respectively arranged in a butt joint with the inner peripheral wall of the first plug holes and the second plug holes, the upper end of first needle axle and second needle axle equally divide and do not can follow first spliced eye and the downthehole activity setting from top to bottom of second spliced eye, help the test probe to realize the stable contact with test chip electrode through the spring in the needle pipe, effectively improved the reliability of probe card to improve the test yield, and still can dismantle the single spring probe of change, it is convenient to maintain, has reduced the maintenance time, easy operation, convenient to use, the practicality is strong.

The above only be the preferred embodiment of the utility model discloses a not consequently restriction the utility model discloses a patent range, all are in the utility model discloses a conceive, utilize the equivalent structure transform of what the content was done in the description and the attached drawing, or direct/indirect application all is included in other relevant technical field the utility model discloses a patent protection within range.

Claims

1. A vertical spring needle type probe card is characterized by comprising an upper plate, a lower plate and a spring probe, wherein the upper plate and the lower plate are arranged in a disc-shaped structure, the upper plate is detachably arranged on the upper end wall of the lower plate, a plurality of first plug holes and second plug holes which are arranged in a matrix form are correspondingly and concavely arranged in the middles of the upper end walls of the upper plate and the lower plate respectively, the spring probe comprises a first needle shaft, a second needle shaft, a needle tube and a spring, a through containing cavity is arranged in the needle tube, the spring is arranged in the containing cavity of the needle tube, the first needle shaft and the second needle shaft can be respectively inserted into two ends of the containing cavity of the needle tube in a vertically sliding manner, two ends of the spring are respectively abutted against the lower end parts of the first needle shaft and the second needle shaft, the peripheral walls of the first needle shaft and the second needle shaft are respectively and electrically connected with the inner peripheral wall of the containing cavity of the needle tube in an abutted manner, the needle tubing is detachably embedded in the first inserting hole and the second inserting hole in sequence, the outer peripheral wall of the needle tubing is abutted to the inner peripheral wall of the first inserting hole and the inner peripheral wall of the second inserting hole, the upper end portions of the first needle shaft and the second needle shaft can be movably arranged in the first inserting hole and the second inserting hole from top to bottom, and the first needle shaft and the second needle shaft are perpendicular to the upper plate and the lower plate.

2. The vertical pogo pin type probe card of claim 1, wherein the outer peripheral walls of the lower end portions of the first and second pin shafts are respectively provided with a first and second position-limiting flanges protruded and extending in the circumferential direction, the two ends of the spring are respectively disposed in abutment with the first and second position-limiting flanges, the inner peripheral walls of the two ends of the receiving cavity of the needle tube are respectively provided with a third position-limiting flange protruded and extending in the circumferential direction, and the first and second position-limiting flanges are respectively disposed in abutment with the third position-limiting flange.

3. The vertical pogo pin type probe card of claim 2, wherein the springs are cylindrical coil springs, a first position-limiting post and a second position-limiting post are respectively protruded from rear end walls of the first position-limiting flange and the second position-limiting flange, and both ends of the springs are respectively detachably fitted over the first position-limiting post and the second position-limiting post.

4. The vertical pogo pin type probe card of claim 1, further comprising positioning pins, wherein first positioning holes are respectively concavely formed in both sides of an upper end wall of the upper plate, second positioning holes corresponding to the first positioning holes one to one are concavely formed in an upper end wall of the lower plate, and the positioning pins are respectively and sequentially inserted into the first positioning holes and the second positioning holes.

5. The vertical pogo pin-type probe card of claim 1, further comprising fastening bolts, wherein first screw holes are recessed in both sides of an upper end wall of the upper plate, second screw holes corresponding to the first screw holes one to one are recessed in an upper end wall of the lower plate, and the fastening bolts are sequentially screwed into the first screw holes and the second screw holes, respectively.

6. The vertical pogo pin-type probe card of claim 1, wherein a plurality of first mounting holes are recessed in an upper end wall of the upper plate in a circumferential direction, and a plurality of second mounting holes corresponding to the first mounting holes one to one are recessed in an upper end wall of the lower plate.

7. The vertical pogo pin type probe card of claim 6, wherein the lower end walls of the second mounting holes are each recessed with a receiving groove.

8. The vertical pogo pin-type probe card of claim 1, wherein the upper and lower plates are formed of PEEK engineering plastic.