CN215064382U - Geometric tolerance measuring device - Google Patents
Geometric tolerance measuring device Download PDFInfo
- Publication number
- CN215064382U CN215064382U CN202121521073.7U CN202121521073U CN215064382U CN 215064382 U CN215064382 U CN 215064382U CN 202121521073 U CN202121521073 U CN 202121521073U CN 215064382 U CN215064382 U CN 215064382U
- Authority
- CN
- China
- Prior art keywords
- laser interferometer
- laser
- geometric tolerance
- instrument
- platform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Abstract
The utility model discloses a geometric tolerance measuring equipment, geometric tolerance measuring equipment include base, guide rail, moving platform, fixed platform, revolving stage. The measuring method comprises the geometric tolerance measuring equipment and further comprises the following steps of constructing two standard straight lines, one standard plane and the perpendicularity of the two standard straight lines; installing a tested instrument; measuring the straightness; measuring flatness; and (6) measuring the verticality. The calibration method of the laser geometric tolerance parameter measuring instrument can be perfected, the traceability system of the laser geometric tolerance parameter measuring instrument can be perfected, the standard device for measuring the indication error of the laser geometric tolerance parameter measuring instrument with high accuracy can provide good technical support for the localization of the laser geometric tolerance parameter measuring instrument, the cost of purchasing equipment is reduced, and the economic benefit of enterprises is improved.
Description
Technical Field
The utility model relates to a measure technical field, in particular to geometric tolerance measuring equipment.
Background
In order to meet the requirements of the modern industry and the aerospace field on high-precision large-size geometric quantity accurate measurement and match with the requirements of large-size equipment such as industrial manufacturing, energy equipment, aerospace and the like, large-space coordinate measurement is expanded to 6-dimensional parameter measurement of large-space pose, and a coordinate measurement system is developed from a traditional orthogonal system to a non-orthogonal coordinate measurement system. Particularly, with the rapid development of laser measurement and sensor technologies, there is a laser measurement instrument which can measure geometric tolerance parameters such as straightness, flatness, verticality, parallelism, coaxiality and the like of large-size mechanical products without a coordinate measurement system.
The laser geometric tolerance parameter measuring instrument for measuring parameters such as straightness accuracy, planeness, verticality, parallelism and coaxiality mainly comprises: the device comprises a laser planometer, a laser straightness measuring instrument, a laser verticality measuring instrument, a machine tool machining center calibration system, a two-axis and three-axis scanning system and the like. The instrument is widely applied to measurement of the manufacturing industry of large-scale mechanical equipment such as electric power, ships, aerospace, railways, numerical control machining centers and the like and dynamic monitoring of equipment in operation. Because the accuracy of the instrument is high, the instrument is simple and convenient to use, the number of laser geometric tolerance parameter measuring instruments imported in China is continuously increased, and the instrument has a large growth space. However, no unified measurement basis exists for the measuring instruments in China, and the measurement standard is not established yet.
Although the laser geometric tolerance parameter measuring instrument has high measuring precision, simple operation and high efficiency, the laser geometric tolerance parameter measuring instrument commercialized abroad has high price, and the popularization and the application of the laser geometric tolerance parameter measuring instrument in domestic enterprises are limited. In recent years, a great deal of research is carried out on the aspects of the measurement principle, the algorithm optimization and the like of the laser geometric tolerance parameter measuring instrument by many people in China, mathematical models of various measurement principles are provided, and a foundation is laid for the localization. However, the localization is still very low at present, and the measurement accuracy has a larger gap compared with that of an imported instrument, so that the development of a domestic laser geometric tolerance parameter measurement instrument with independent intellectual property rights, which is simple and convenient to operate and high in precision, has great significance for improving the economic benefit and the product quality of enterprises. The measurement accuracy of the laser geometric tolerance parameter measurement instrument is not only related to theoretical values of mathematical models of seating quantity, distance and the like, but also needs to be subjected to nonlinear compensation to establish a more accurate model, so that the instrument needs to be accurately measured to determine a mathematical relation model of indicating value error, the seating quantity, the distance and the like. At present, no measuring method and high-accuracy measuring equipment for measuring the indication value error of a laser geometric tolerance parameter measuring instrument exist in China, and good technical support cannot be provided for the localization of the instrument.
At present, a movable platform is basically adopted at home and abroad to calibrate the indicating value error of a receiving sensor, a 0-level flat plate is used for measuring the linearity and the planeness of the receiving sensor, and a 0-level flat plate and a square are combined for measuring the verticality of the receiving sensor. At present, a platform with high accuracy can meet the measurement requirement of a measured instrument for receiving the indicating value error of a sensor. The measuring range of the flat plate and the square is limited, so that the straightness accuracy, the flatness accuracy and the verticality accuracy of the instrument cannot be comprehensively measured and evaluated in the effective measuring range of the instrument, and the accuracy of the straightness accuracy, the flatness accuracy and the verticality accuracy of the 0-level flat plate and the square are not high, so that the laser geometric tolerance parameter measuring instrument is limited to be developed towards higher accuracy. The method for solving the measurement calibration of the geometric instrument comprises the following steps: and the large-size standard straight line, standard plane and standard verticality which have higher accuracy than the flat plate and the square are used for measurement and calibration. However, it is difficult to build a large-sized standard linear, planar, and perpendicular physical standard due to manufacturing costs, installation sites, deformation of the standard, measurement methods, and the like. The combination of a long platform, a guide rail, a laser interferometer and a rotating platform can be utilized to construct a high-accuracy standard device with large-size standard straight lines, planes and verticality, and the standard device can directly trace to the laser interferometer, so that the measurement precision is greatly improved, and the measurement problem of the laser geometric tolerance parameter measuring instrument is solved.
SUMMERY OF THE UTILITY MODEL
According to an aspect of the utility model, a geometric tolerance measuring equipment is provided, guide rail on including the base and locating the base still includes following parts:
the movable platform and the fixed platform are arranged on the guide rail and distributed along the direction of the central axis of the base, and the movable platform can move on the guide rail along the direction of the central axis of the base relative to the fixed platform;
the rotating platform is arranged on the fixed platform and is positioned on the central shaft of the base, and the instrument to be measured can be placed on the rotating platform;
the device comprises a first laser interferometer and a second laser interferometer, wherein the first laser interferometer and the second laser interferometer are arranged on a fixed platform and are symmetrically distributed along a central axis;
the first reflector and the second reflector are arranged on the mobile platform and symmetrically distributed along the central axis;
the connecting line of the first reflecting mirror and the first laser interferometer and the connecting line of the second reflecting mirror and the second laser interferometer are parallel to the middle shaft.
The utility model provides a device for measuring the geometric tolerance parameter of an instrument by combining the laser interference and the angle coding principle, which establishes a traceability system of a laser geometric tolerance parameter measuring instrument according to the quantity value transmission rule of the laser geometric tolerance parameter measuring instrument; the problem that the straightness, flatness and verticality of a laser geometric tolerance parameter measuring instrument cannot be accurately calibrated at home can be solved, the unification of the quantity values is realized, the calibration method and the traceability system of the instrument are established and perfected, and the accuracy and reliability of the measurement of the instrument are guaranteed.
In some embodiments, the rotation stage is located on a link between the first laser interferometer and the second laser interferometer.
In some embodiments, the measured instrument, the receiving sensor, the first laser interferometer, the second laser interferometer, the first mirror, and the second mirror are all located in the same plane.
Therefore, the measurement is accurate and reliable.
In some embodiments, the first laser interferometer and the first mirror cooperate to construct a standard straight line in a vertical direction on a horizontal plane.
Thus, a straight line in the vertical direction on the horizontal plane is constructed between the first laser interferometer and the first mirror, and the straight line is used as a standard straight line in the vertical direction.
In some embodiments, the second laser interferometer and the second mirror cooperate to construct a standard straight line in a horizontal direction on a horizontal plane.
Thus, a horizontal straight line is formed between the second laser interferometer and the second reflecting mirror, and the horizontal straight line is used as a standard horizontal straight line.
In some embodiments, the guide rail extends along the central axis of the base, the fixed platform is disposed at one end of the guide rail, and the movable platform is movably disposed on the guide rail, and the movable platform is far away from or close to the fixed platform along the guide rail.
Therefore, the moving track of the moving platform is ensured by the guide rail.
According to one aspect of the present invention, there is also provided a measuring method comprising the above-mentioned geometric tolerance measuring apparatus, further comprising the steps of,
two standard straight lines were constructed: the first laser interferometer and the first reflecting mirror are matched to obtain a characteristic point which is constructed on a standard straight line in the vertical direction on the horizontal plane, and the second laser interferometer and the second reflecting mirror are matched to obtain a characteristic point which is constructed on a standard straight line in the horizontal direction on the horizontal plane;
a standard plane is constructed: the horizontal rotation angle of the rotating platform, the first laser interferometer and the first reflecting mirror are matched, and the obtained characteristic points are constructed on a standard plane on a horizontal plane;
constructing a standard two-line verticality: the rotation angle of the rotating platform in the vertical direction, the first laser interferometer and the first reflecting mirror are matched to obtain the standard verticality of two straight lines between the horizontal and vertical planes of the characteristic point structure;
constructing a standard straight line and plane perpendicularity: the rotating table, the first laser interferometer and the first reflecting mirror are matched to obtain the standard verticality of the characteristic point structure horizontal plane and the vertical plane straight line;
installing a tested instrument;
and (3) measuring the straightness:
respectively setting the laser interferometer and the measured instrument to zero at the initial position of the guide rail, enabling the movable platform to be far away from the fixed platform along the direction of the middle shaft, uniformly distributing at least 10 measuring points in the full-length range of the standard straight line, and respectively reading the readings of the first laser interferometer, the second laser interferometer and the measured instrument;
constructing a characteristic point of the straightness in the vertical direction of the measured instrument according to the reading difference between the reading of the first laser interferometer and the reading of the corresponding point in the vertical direction of the measured instrument, and obtaining the straightness in the vertical direction of the measured instrument according to a straightness calculation method;
the reading difference between the reading of the second laser interferometer and the reading of the corresponding point of the measured instrument in the horizontal direction is constructed to the characteristic point of the straightness of the measured instrument in the horizontal direction, and the straightness of the measured instrument in the horizontal direction can be obtained according to a straightness calculation method;
and (3) flatness measurement: the method is obtained by combining a plurality of points with specific straightness through calculation of a minimum condition principle;
and (3) measuring the verticality of two straight lines:
respectively setting the laser interferometer and the measured instrument to zero at the initial position of the guide rail, keeping the movable platform away from the fixed platform to a farthest point along the direction of a middle shaft to obtain the reading difference between the reading of the first laser interferometer and the corresponding point of the measured instrument in the vertical direction, keeping a laser transmitter of the measured instrument still, rotating the vertical rotating angle of the rotating platform by 90 degrees, enabling the laser beam of the measured instrument in the vertical plane to be emitted to a receiving sensor at the moment, respectively setting the laser interferometer and the measured instrument to zero at the initial position of the guide rail, keeping the movable platform away from the fixed platform to the farthest point along the direction of the middle shaft, reading the reading difference between the first laser interferometer and the measured instrument again, wherein the sum of the two reading differences is the perpendicularity of two straight lines;
plane and straight line verticality measurement:
respectively setting the laser interferometer and the measured instrument to zero at the initial position of the guide rail, enabling the movable platform (3) to be far away from the fixed platform to a farthest point along the direction of a middle shaft, rotating the horizontal rotation angle of the rotating platform for a circle, reading the readings of the first laser interferometer and the measured instrument, and obtaining the maximum and minimum reading difference of the laser scanning plane at the longest point of a standard straight line in a circle of rotation;
the laser emitter of the measured instrument is fixed, the vertical rotation angle of the rotating platform rotates 90 degrees, at the moment, the laser beam of the measured instrument on the vertical plane is emitted to the receiving sensor, the laser interferometer and the measured instrument are respectively set to zero at the initial position of the guide rail, the movable platform is far away from the fixed platform to the farthest point along the direction of the middle shaft, at the moment, the light beam of the measured instrument in the vertical direction is emitted to the receiving sensor, the reading difference between the first laser interferometer and the measured instrument is read, the sum of the reading difference and the maximum and minimum reading difference of the laser scanning plane at the longest point of the standard straight line is the verticality of the laser beam of the laser scanning plane and the vertical plane, and the maximum absolute value of the two calculation results is the verticality of the laser beam of the laser scanning plane and the vertical plane.
According to the measuring principle of the laser geometric tolerance parameter measuring instrument and the measuring method of the straightness, the planeness and the verticality, the method for constructing the standard straightness, the standard planeness and the standard verticality with the long guide rail, the laser interferometer and the high-precision rotating platform is provided.
In some embodiments, the apparatus under test is installed with: installing a laser transmitter of a measured instrument on a horizontal rotary table, and installing a receiving sensor on a mobile platform; the positions of the laser transmitter and the receiving sensor are adjusted, so that the instrument to be measured can normally work in the whole range of the guide rail.
Therefore, the measuring instrument is measured by the method.
In some embodiments, in the flatness measurement:
the measurement of the flatness adopts diagonal distribution, and the number of measurement points is not less than 49;
a standard plane is constructed by using a standard rotary table and a standard straight line in the vertical direction on the horizontal plane, n measuring points (not including 0 point, n is more than 3) are uniformly distributed in the 0.7071 length range of the full length of the standard straight line, and the distance between every two measuring points is L;
respectively setting the laser interferometer and the measured instrument to zero at the initial position of the guide rail, moving the platform to a corresponding measuring point, and respectively reading the readings in the vertical direction of the first laser interferometer and the measured instrument;
the difference between the reading of the first laser interferometer and the reading of the corresponding point in the vertical direction of the measured instrument is Ai0(i ═ n to n, i ≠ 0), and the characteristic point A of the 0 th straight line of the measured instrument on the horizontal plane is obtainedi0(ii) a The laser transmitter of the measured instrument rotates at a rotation angle of
Reverse rotation of standard turntable alphai1To make laser lightThe line is also sensed on a receiver sensor of the mobile platform, the mobile platform is moved to corresponding measuring points, and the distance between each measuring point is
Respectively reading the first laser interferometer and the reading of the measured instrument in the vertical direction to obtain a first straight line characteristic point A of the measured instrument on the horizontal planei1；
The laser transmitters of the measured instrument rotate in sequence
Reverse rotation of standard turntable alphaijThe mobile platform moves correspondingly
The laser line is still made to fall on a receiving sensor of the mobile platform, and a characteristic point A of a corresponding measuring point of a jth straight line (j is-n to n, j is not equal to 0) is obtainedijThe laser emitter rotates for one circle to obtain (2n +1)2The flatness of the laser surface of the measured instrument can be calculated according to the flatness calculation method by using the characteristic point data.
Thus, flatness measurement is performed by this method.
In some embodiments, in the flatness measurement: the measuring points are distributed in a rectangular array.
Therefore, the measurement accuracy is ensured.
The beneficial effects of the utility model are that: the utility model provides a measuring equipment and measuring method can perfect laser geometric tolerance parameter measurement instrument calibration method, can perfect laser geometric tolerance parameter measurement instrument system of tracing to the source, and the measuring laser geometric tolerance parameter measurement instrument's of the high accuracy standard ware can provide good technical support for laser geometric tolerance parameter measurement instrument's localization, reduces purchase equipment cost, improves the economic benefits of enterprise.
Drawings
Fig. 1 is a schematic perspective view of a geometric tolerance measuring apparatus according to an embodiment of the present invention.
Fig. 2 is a schematic structural view of a construction standard plane of the geometric tolerance measuring apparatus shown in fig. 1.
Fig. 3 is a structural diagram illustrating the standard verticality of the geometric tolerance measuring apparatus shown in fig. 1.
Fig. 4 is a schematic structural diagram of a laser interferometer in the geometric tolerance measurement apparatus shown in fig. 1.
Fig. 5 is a schematic diagram showing a distribution structure of flatness measurement points in the geometric tolerance measurement apparatus shown in fig. 1.
Reference numbers in the figures: 1-base, 2-guide rail, 3-mobile platform, 4-fixed platform, 5-rotary platform, 6-receiving sensor, 7-first laser interferometer, 8-second laser interferometer, 9-first reflector, 10-second reflector and A-measured instrument.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
Fig. 1 schematically shows a geometric tolerance measuring apparatus according to an embodiment of the present invention, including a base 1 and a guide rail 2 provided on the base 1.
To better explain each component in the present embodiment, the X, Y, Z-axis three-dimensional concept is introduced into the present embodiment, and each component of the present embodiment is explained in detail. The central axis direction of the base 1 is taken as an X axis, the longitudinal direction vertical to the X axis is a Y axis, and the vertical direction vertical to the X axis is a Z axis; the plane formed by the X axis and the Z axis is an XZ plane, the plane formed by the X axis and the Y axis is an XY plane, and the plane formed by the Y axis and the Z axis is a YZ plane. Moreover, with reference to fig. 1, the positive direction of the X-axis is the right-side direction, and the negative direction is the left-side direction; the positive direction of the Z axis is the upper side direction, otherwise, the lower side direction is the lower side direction; the forward direction of the Y-axis is the anterior lateral direction, and vice versa the posterior lateral direction.
In the geometric tolerance measuring apparatus in this embodiment, the end surface of the base 1 is located in a horizontal plane formed by the X axis and the Y axis, and the guide rail 2 extends in the X axis direction.
The geometric tolerance measurement apparatus in the present embodiment further includes the following components:
the movable platform 3 and the fixed platform 4 are arranged on the guide rail 2 and distributed along the direction of the middle shaft of the base 1, and the fixed platform 4 is positioned at the left end of the guide rail 2. In this embodiment, the moving platform 3 and the fixed platform 4 are both air-floating moving platforms; as the name implies, the fixed platform 4 is fixedly arranged, and the movable platform 3 can move on the guide rail 2 along the central axis direction of the base 1 relative to the fixed platform 4.
The rotating platform 5 is arranged on the fixed platform 4 and is positioned on the central shaft of the base 1, and the tested instrument A can be placed on the rotating platform 5; the rotary table 5 is a standard rotary table with two rotating shafts, horizontal and vertical, and has a definition in the field of high precision.
And the receiving sensor 6 is arranged on the moving platform 3 and positioned on the central shaft of the base 1, and is used for sensing in cooperation with the measured instrument A.
The first laser interferometer 7 and the second laser interferometer 8 are arranged on the fixed platform 4, and the first laser interferometer 7 and the second laser interferometer 8 are symmetrically distributed along the central axis;
the first reflector 9 and the second reflector 10 are arranged on the mobile platform 3, and the first reflector 9 and the second reflector 10 are symmetrically distributed along the central axis;
the connecting line of the first reflecting mirror 9 and the first laser interferometer 7 and the connecting line of the second reflecting mirror 10 and the second laser interferometer 8 are parallel to the central axis.
The utility model provides a device for measuring the geometric tolerance parameter of an instrument by utilizing the laser stem related angle coding principle, which establishes a traceability system of a laser geometric tolerance parameter measuring instrument according to the quantity value transmission rule of the laser geometric tolerance parameter measuring instrument; the problem that the straightness, flatness and verticality of the laser geometric tolerance parameter measuring instrument cannot be measured and calibrated accurately in China can be solved, the unification of the quantity values is realized, the instrument calibration method and the traceability system are established and perfected, and the accuracy and reliability of the measurement of the instrument calibration method and the traceability system are guaranteed.
Referring to FIG. 1, the turntable 5 is located on a line connecting the first laser interferometer 7 and the second laser interferometer 8.
Referring to fig. 1, the device under test a, the receiving sensor 6, the first laser interferometer 7, the second laser interferometer 8, the first reflecting mirror 9, and the second reflecting mirror 10 are all located on the same plane.
Referring to fig. 1, the first laser interferometer 7 and the first reflecting mirror 9 are engaged with each other to construct a vertical standard straight line. The second laser interferometer 8 and the second reflecting mirror 10 are matched with each other to construct a standard straight line in the horizontal direction.
As shown in FIG. 1, the first laser interferometer 7 measures the straightness in the vertical direction, the second laser interferometer 8 measures the straightness in the horizontal direction, and two standard straight lines are constructed using some characteristic points. The laser emitter of the measured instrument A is arranged on the rotating platform 5, the receiving sensor 6 is arranged on the moving platform 3, the receiving sensor 6, the first reflecting mirror 9 and the second reflecting mirror 10 move simultaneously, the measuring point collected by the measured instrument A is ensured to be consistent with the measuring point collected by the first laser interferometer 7 and the second laser interferometer 8, the reading of the laser interferometer and the measured instrument A is obtained, the reading difference is the characteristic point of the straightness of the measured instrument A, the straightness is obtained through the minimum condition principle calculation, as shown in figure 2, after a large-length standard straight line is established, the laser emitter of the measured instrument A is rotated to form a laser measuring plane, and in order to enable the receiving sensor 6 arranged on the moving platform 3 to receive light spots sent by the laser emitter of the measured instrument A, the high-precision rotating platform 5 needs to rotate reversely by the same angle. Measuring some characteristic points in the vertical direction, rotating corresponding angles according to the requirement of flatness measurement to measure a plurality of groups of characteristic point values in the vertical direction, and calculating the flatness of the laser surface of the measured instrument A according to a flatness calculation method.
As shown in fig. 3, after the large-length standard straight line is constructed, the standard straight line in the vertical direction is used as a reference, the laser emitter of the measured instrument a is not moved, the rotating shaft in the vertical direction of the high-precision rotating platform 5 rotates 90 °, the laser beam in the vertical plane is emitted to the receiving sensor 6 at the moment, the straightness in the vertical direction of the light beam is measured again, the reading sum of the two straight lines at the farthest points is the perpendicularity of the two laser beams in the horizontal plane and the vertical plane, and the maximum perpendicularity value of the laser beam in the vertical plane and all the laser beams in the horizontal plane is the perpendicularity of the laser beam in the vertical plane and the laser scanning plane.
Referring to fig. 1, the guide rail 2 extends along the central axis of the base 1, the fixed platform 4 is disposed at one end of the guide rail 2, the movable platform 3 is movably disposed on the guide rail 2, and the movable platform 3 is far away from or close to the fixed platform 4 along the guide rail 2.
According to one aspect of the present invention, there is also provided a measuring method comprising the above-mentioned geometric tolerance measuring apparatus, further comprising the steps of,
s1.1, constructing two standard straight lines: the first laser interferometer 7 and the first reflecting mirror 9 are matched to obtain a characteristic point which forms a standard straight line in the vertical direction, and the second laser interferometer 8 and the second reflecting mirror 10 are matched to obtain a characteristic point which forms a standard straight line in the horizontal direction;
s1.2, constructing a standard plane: the horizontal rotation angle of the rotating platform 5, the first laser interferometer 7 and the first reflecting mirror 9 are matched to obtain a characteristic point which constitutes a standard plane of a horizontal plane;
s1.3, constructing a standard verticality: the two rotation angles of the rotating platform 5, the first laser interferometer 7 and the first reflecting mirror 9 are matched, and the obtained characteristic points construct the standard verticality of two straight lines of a horizontal plane and a vertical plane and construct the standard verticality of one straight line of the horizontal plane and the vertical plane;
s2, mounting the tested instrument A: installing a laser transmitter of a measured instrument A on a horizontal turntable, and installing a receiving sensor 6 on a mobile platform 3; the positions of the laser transmitter and the receiving sensor 6 are adjusted, so that the measured instrument A can normally work in the whole range of the guide rail 2.
S3.1, measuring straightness:
respectively setting the laser interferometer and the measured instrument A to zero at the initial position of the guide rail 2, uniformly distributing no less than 10 measuring points on the moving platform 3 along the direction of the middle shaft away from the fixed platform 4 in the full-length range of the standard straight line, and respectively reading the readings of the first laser interferometer 7, the second laser interferometer 8 and the measured instrument A;
the difference between the reading of the first laser interferometer 7 and the reading of the corresponding point in the vertical direction of the measured instrument A is constructed to the characteristic point of the straightness in the vertical direction of the measured instrument A, and the straightness in the vertical direction of the measured instrument A can be obtained according to a straightness calculation method;
the difference between the reading of the second laser interferometer 8 and the reading of the corresponding point of the measured instrument A in the horizontal direction is constructed to the characteristic point of the straightness of the measured instrument A in the horizontal direction, and the straightness of the measured instrument A in the horizontal direction can be obtained according to a straightness calculation method;
s3.2, flatness measurement: the method is obtained by combining a plurality of points with specific straightness through the minimum condition principle. In some embodiments, in the flatness measurement:
the measurement of the flatness adopts diagonal distribution, the number of measurement points is not less than 49, the distribution of the measurement points is shown in figure 5, and the measurement points are distributed in a rectangular array; in this example, the number of measurement points was 49 in a 7 × 7 rectangular array.
Constructing a standard plane by using the rotating platform 5 and a standard straight line in the horizontal direction, and uniformly distributing n measuring points (not including 0 point, n is more than 3) within 0.7071 length range of the full length of the standard straight line, wherein the distance between every two measuring points is L;
respectively setting the first laser interferometer 7 and the measured instrument A to zero at the initial position of the guide rail 2, moving the platform 3 to a corresponding measuring point, and respectively reading the readings in the vertical direction of the first laser interferometer 7 and the measured instrument A;
the difference between the reading of the first laser interferometer 7 and the reading of the corresponding point in the vertical direction of the measured instrument A is Ai0(i ═ n to n, i ≠ 0), and the characteristic point A of the 0 th straight line of the measured instrument A on the horizontal plane is obtainedi0(ii) a The laser emitter of the measured instrument A rotates at a rotation angle of
Reverse rotation of standard turntable alphai1So that the laser line still falls on the receiving sensor 6 of the mobile platform 3, moving the platform 3 to the corresponding measuring points, each measuring point being spaced apart by a distance of
Respectively reading the first laser interferometer 7 and the reading of the measured instrument A in the vertical direction;
to obtainThe first straight line characteristic point A of the measured instrument A on the horizontal planei1. The laser transmitters of the measured instrument A rotate in sequence
Reverse rotation of standard turntable alphaijThe mobile platform 3 moves correspondingly
The laser line is also made to fall on the receiving sensor 6 of the moving platform 3, and the characteristic point A of the corresponding measuring point of the j (j is-n to n, j is not equal to 0) th straight line is obtainedijThe laser emitter rotates for one circle to obtain (2n +1)2Individual feature point data;
and the flatness of the laser surface of the measured instrument A can be calculated according to a flatness calculation method.
S3.3, measuring verticality errors:
and (3) measuring the verticality of two straight lines:
respectively setting zero to the laser interferometer and the measured instrument A at the initial position of the guide rail 2, enabling the moving platform 3 to be far away from the fixed platform 4 to the farthest point along the direction of a middle shaft to obtain the reading difference between the reading of the first laser interferometer 7 and the corresponding point of the measured instrument A in the vertical direction, enabling a laser transmitter of the measured instrument A to be fixed, enabling the vertical rotation angle of the rotating platform 5 to rotate 90 degrees, enabling the laser beam of the measured instrument A in the vertical plane to be emitted to the receiving sensor 6 at the moment, respectively setting zero to the laser interferometer and the measured instrument A at the initial position of the guide rail 2, enabling the moving platform 3 to be far away from the fixed platform 4 to the farthest point along the direction of the middle shaft, reading the reading difference between the first laser interferometer 7 and the measured instrument A again, and the sum of the two reading differences is the perpendicularity of two straight lines;
plane and straight line verticality measurement:
respectively setting the laser interferometer and the measured instrument A to zero at the initial position of the guide rail 2, enabling the moving platform 3 to be far away from the fixed platform 4 to the farthest point along the direction of the central axis, rotating the horizontal rotation angle of the rotating platform 5 for a circle, reading the readings of the first laser interferometer 7 and the measured instrument A, and obtaining the maximum and minimum reading difference of the laser scanning plane at the longest point of the standard straight line in the circle of rotation;
the laser emitter of the measured instrument A is fixed, the vertical rotation angle of the rotating platform 5 rotates 90 degrees, at the moment, the laser beam of the measured instrument A on the vertical plane is emitted to the receiving sensor 6, the starting position of the guide rail 2 is respectively provided with a laser interferometer and the measured instrument A, the moving platform 3 is far away from the fixed platform 4 to the farthest point along the direction of the middle axis, at the moment, the light beam of the measured instrument A in the vertical direction is emitted to the receiving sensor 6, the reading difference between the first laser interferometer 7 and the measured instrument A is read, the sum of the reading difference and the maximum and minimum reading difference of the laser scanning plane at the longest position of the standard straight line is the verticality between the laser scanning plane and the vertical plane, and the maximum absolute value of the two calculation results is the verticality between the laser scanning plane and the vertical plane.
The utility model provides a measuring equipment and measuring method can perfect laser geometric tolerance parameter measuring instrument calibration method, can perfect laser geometric tolerance parameter measuring instrument system of tracing to the source, and the standard ware of the measurement laser geometric tolerance parameter measuring instrument indication error of the high accuracy can provide good technical support for the localization of laser geometric tolerance parameter measuring instrument, reduces purchase equipment cost, improves the economic benefits of enterprise.
What has been described above are only some embodiments of the invention. For those skilled in the art, without departing from the inventive concept, several modifications and improvements can be made, which are within the scope of the invention.
Claims (8)
1. Geometric tolerance measuring equipment, including base (1) and locate guide rail (2) on base (1), its characterized in that still includes following part:
the movable platform (3) and the fixed platform (4) are arranged on the guide rail (2) and distributed along the central axis direction of the base (1), and the movable platform (3) can move on the guide rail (2) along the central axis direction of the base (1) relative to the fixed platform (4);
the rotating platform (5) is a standard rotating platform with a horizontal rotating shaft and a vertical rotating shaft, is arranged on the fixed platform (4) and is positioned on the middle shaft of the base (1), and the rotating platform (5) can be used for placing an instrument to be measured (A);
the receiving sensor (6) is arranged on the moving platform (3) and positioned on the middle shaft of the base (1) and is used for sensing in a matched manner with the measured instrument (A);
the device comprises a first laser interferometer (7) and a second laser interferometer (8), wherein the first laser interferometer (7) and the second laser interferometer (8) are arranged on a fixed platform (4);
the device comprises a first reflecting mirror (9) and a second reflecting mirror (10), wherein the first reflecting mirror (9) and the second reflecting mirror (10) are arranged on the moving platform (3).
2. The geometric tolerance measurement device according to claim 1, wherein the rotary stage (5) is located on a line between the first laser interferometer (7) and the second laser interferometer (8).
3. The geometric tolerance measurement device according to claim 1, wherein the measured instrument (a), the receiving sensor (6), the first laser interferometer (7), the second laser interferometer (8), the first mirror (9), and the second mirror (10) are all located in the same plane.
4. A geometric tolerance measurement device according to claim 1, characterized in that the first laser interferometer (7) and the first mirror (9) cooperate to construct a normal straight line in a vertical direction.
5. The geometric tolerance measurement device according to claim 1, wherein the second laser interferometer (8) and the second mirror (10) are coupled to each other for constructing a standard straight line in a horizontal direction.
6. A geometric tolerance measuring device according to claim 1, characterized in that the guide rail (2) extends along the central axis of the base (1), the fixed platform (4) is provided at one end of the guide rail (2), the moving platform (3) is movably provided on the guide rail (2), and the moving platform (3) is far from or close to the fixed platform (4) along the guide rail (2).
7. The geometric tolerance measurement device according to claim 1, wherein the first and second mirrors (9, 10) are symmetrically distributed along a central axis, and the first and second laser interferometers (7, 8) are symmetrically distributed along the central axis.
8. A geometric tolerance measuring device according to claim 1, characterized in that the line connecting the first mirror (9) and the first laser interferometer (7) and the line connecting the second mirror (10) and the second laser interferometer (8) are parallel to the middle axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121521073.7U CN215064382U (en) | 2021-07-05 | 2021-07-05 | Geometric tolerance measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121521073.7U CN215064382U (en) | 2021-07-05 | 2021-07-05 | Geometric tolerance measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215064382U true CN215064382U (en) | 2021-12-07 |
Family
ID=79226737
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121521073.7U Active CN215064382U (en) | 2021-07-05 | 2021-07-05 | Geometric tolerance measuring device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215064382U (en) |
-
2021
- 2021-07-05 CN CN202121521073.7U patent/CN215064382U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110524309B (en) | Geometric error measuring method of numerical control turntable based on four-base-station laser tracking system | |
| CN105547344B (en) | A kind of test equipment calibrating installation and its calibration method | |
| CA1286382C (en) | Method for calibrating a coordinate measuring machine and the like and system therefor | |
| Ibaraki et al. | Calibration of location errors of rotary axes on five-axis machine tools by on-the-machine measurement using a touch-trigger probe | |
| JP4660779B2 (en) | Method for evaluating position error of moving device and method for improving moving accuracy based on the evaluation result | |
| CN108507466B (en) | The method that three-dimensional precise information is obtained using two-dimentional line laser scanner | |
| CN111678472B (en) | Error identification method for rotary table of four-axis coordinate measuring machine | |
| CN108827149B (en) | Turntable calibration method based on linear laser displacement sensor and diffuse reflection gauge block | |
| CN112902880A (en) | Method and device for measuring parallelism of planar member | |
| WO2013044677A1 (en) | Large-scale, three-dimensional coordinate measuring method and apparatus with laser tracking | |
| CN102636137B (en) | REVO (Resident Encrypted Variable Output) measuring head position posture calibrating method in joint arm type coordinate measuring machine | |
| CN209842399U (en) | Calibrating device for geometric error of machine tool and corner positioning error of rotary table | |
| CN112629435A (en) | Gear measuring system and method based on multi-line structured light | |
| CN115979118B (en) | Device and method for measuring verticality error and error azimuth angle of cylindrical part | |
| CN110487179A (en) | Truss-like industrial measuring system and measurement method based on optical tracking scanner and PLC control system | |
| CN103196386A (en) | Non-contact type rotation part shape error precision detection device and detection method | |
| CN113513986B (en) | Geometric tolerance measuring device and measuring method thereof | |
| CN113624136B (en) | Part detection device and part detection device calibration method | |
| CN113771093A (en) | Mechanical arm calibration and precision measurement device based on linear motion platform | |
| CN109520417A (en) | Lathe geometric error and turntable corner position error calibrating installation and method | |
| CN112504146B (en) | Method for detecting rolling path pitch diameter of rolling linear guide rail pair | |
| CN215064382U (en) | Geometric tolerance measuring device | |
| CN219319352U (en) | Calibrating device for large-size three-coordinate measuring machine | |
| CN216846033U (en) | Inner wall measuring system based on deep rise workpiece | |
| CN115235383A (en) | Method for detecting and debugging orthogonality of spatial cross guide rail |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |