CN215059989U - 一种半导体设备l型真空阀门 - Google Patents
一种半导体设备l型真空阀门 Download PDFInfo
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- CN215059989U CN215059989U CN202120817433.1U CN202120817433U CN215059989U CN 215059989 U CN215059989 U CN 215059989U CN 202120817433 U CN202120817433 U CN 202120817433U CN 215059989 U CN215059989 U CN 215059989U
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 21
- 238000007789 sealing Methods 0.000 claims description 17
- 238000009423 ventilation Methods 0.000 claims 1
- 238000012423 maintenance Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 12
- 230000008569 process Effects 0.000 description 10
- 235000012431 wafers Nutrition 0.000 description 9
- 230000009471 action Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000003068 static effect Effects 0.000 description 3
- 238000001125 extrusion Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000002688 persistence Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
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CN202120817433.1U CN215059989U (zh) | 2021-04-21 | 2021-04-21 | 一种半导体设备l型真空阀门 |
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Address after: 637200 Duofu Industrial Park, Xichong County, Nanchong City, Sichuan Province Patentee after: SICHUAN JIUTIAN VACUUM TECHNOLOGY CO.,LTD. Country or region after: China Patentee after: CHUANBEI VACUUM TECHNOLOGY (BEIJING) Co.,Ltd. Address before: 637200 Duofu Industrial Park, Xichong County, Nanchong City, Sichuan Province Patentee before: SICHUAN JIUTIAN VACUUM TECHNOLOGY Co.,Ltd. Country or region before: China Patentee before: CHUANBEI VACUUM TECHNOLOGY (BEIJING) Co.,Ltd. |