CN214933747U - Conveying mechanism of automatic feeding and discharging system for multi-cavity plasma treatment - Google Patents
Conveying mechanism of automatic feeding and discharging system for multi-cavity plasma treatment Download PDFInfo
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- CN214933747U CN214933747U CN202120642425.8U CN202120642425U CN214933747U CN 214933747 U CN214933747 U CN 214933747U CN 202120642425 U CN202120642425 U CN 202120642425U CN 214933747 U CN214933747 U CN 214933747U
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Abstract
The utility model discloses a conveying mechanism of a multi-cavity plasma processing automatic feeding and discharging system, which is provided with at least two plasma processing cavities, a feeding area and a switching area, wherein a trolley pushes or pulls out the plasma processing cavities; a lifter for lifting or descending the trolley is arranged in the conveying cavity. The conveying system of the plasma processing single-groove trolley utilizes the matching of the lifter, the ball slide rail and the conveying roller table, solves the problem of conveying interference caused by a conveying mechanism between horizontal conveying and vertical conveying in the full-automatic conveying system of plasma processing in the current stage, can realize free separation between the trolley and the lifting table, can continuously ascend or descend when the trolley is in a waiting period, shortens the waiting time of the trolley during substrate processing, and improves the whole processing efficiency of the plasma processing system.
Description
Technical Field
The utility model relates to a plasma processing technology field, in particular to automatic conveying mechanism who goes up unloading system of multi-chamber plasma processing.
Background
Currently, a plasma processing apparatus commonly used in the industry is a single-cavity multi-chip processing system, manual intervention is needed for loading and unloading, and it is known that a loading procedure for processing a substrate by plasma is an important procedure in a plasma processing flow and has strict process requirements. When the substrate loading process is performed, due to the limitation of the equipment, the manual work is often required to position and mount each substrate on the trolley, and then the trolley loaded with the substrate is manually sent to the plasma processing system for processing. The single-cavity processing system needs more workers, basically needs one worker to be responsible for the work of the upper plate of one trolley, needs one worker to be responsible for receiving and delivering the substrate in the plasma processing cavity, and is low in working efficiency and high in labor cost.
SUMMERY OF THE UTILITY MODEL
In order to overcome the defects, the utility model provides a conveying mechanism of automatic unloading system of going up of multi-chamber plasma processing can cooperate the unloading system of going up of current single groove platform truck to use, realizes the whole automatic operation of defeated material of plasma processing base plate.
The utility model discloses a solve the technical scheme that its technical problem adopted and be: a conveying mechanism of a multi-cavity plasma processing automatic loading and unloading system is provided with at least two plasma processing cavities, the front end of each plasma processing cavity is correspondingly provided with a feeding area consisting of an upper layer of conveying cavity and a lower layer of conveying cavity, at least one trolley can be accommodated in each conveying cavity, a transfer area for transferring the trolley is arranged between the two feeding areas, the transfer area also consists of the upper layer of conveying cavity and the lower layer of conveying cavity, the plasma processing cavities are arranged behind the upper layer of conveying cavity of the feeding area and are pushed into or pulled out of the plasma processing cavities by the trolley in the upper layer of conveying cavity; the lifting machine is characterized in that lifting or descending trolleys are arranged in the upper layer conveying cavity and the lower layer conveying cavity, connected conveying trolley ball slide rails are arranged on two sides of the upper layer conveying cavity, and connected conveying trolley conveying roller tables are arranged at the bottoms of the lower layer conveying cavities.
As a further improvement, the lift is located the centre of both sides ball slide rail when ascending to the upper conveying cavity, when going up and down to the lower floor conveying cavity, be equipped with the cavity that supplies the lift holding in the conveying roller platform.
As a further improvement, the trolley is arranged on the adapter plate through a slide rail, and the two sides of the adapter plate slide through the ball slide rail which is clamped into the two sides by the sliding clamping pin.
As a further improvement, the top of ball slide rail is equipped with the transmission locating pin, and the transmission locating pin is fixed on the driven belt drive along the slide rail direction, goes into the location pinhole connection keysets of keysets both sides through the transmission locating pin card to it slides along ball slide rail direction to drive the keysets.
The utility model has the advantages that: the utility model discloses a conveying system of single groove platform truck is handled to plasma utilizes the lift, the cooperation of ball slide rail and transport roller platform, solve exist among the full-automatic conveying system of present stage plasma processing because conveying that conveying mechanism leads to between horizontal transport and the vertical transport interferes the problem, can let simultaneously can realize the free separation between platform truck and the elevating platform, be in during waiting period at the platform truck, the elevating platform can continue to rise or descend, the latency of platform truck when shortening the base plate and handling, improve the holistic treatment effeciency of plasma processing system.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a side view of FIG. 1;
the following are marked in the figure: 1-plasma processing chamber; 2-conveying the cavity; 3-a feeding zone; 4-trolley; 5-a transfer zone; 6-a lifter; 7-ball slide rail; 8-conveying roller table; 9-a patch panel; 10-a drive pin; 11-belt drive.
Detailed Description
In order to deepen the understanding of the present invention, the present invention will be further described in detail with reference to the following embodiments and the attached drawings, and the embodiments are only used for explaining the present invention, and do not constitute the limitation to the protection scope of the present invention.
Fig. 1 and 2 show an embodiment of a conveying mechanism of a multi-cavity plasma processing automatic feeding and discharging system of the present invention, which is provided with at least two plasma processing cavities 1, wherein the front end of each plasma processing cavity 1 is correspondingly provided with a feeding area 3 consisting of upper and lower conveying cavities 2, at least one trolley 4 can be accommodated in each conveying cavity 2, a transfer area 5 for trolley transfer is arranged between the two feeding areas 3, the transfer area 5 also consists of the upper and lower conveying cavities 2, the plasma processing cavity 1 is arranged behind the upper conveying cavity 2 of the feeding area 3, and the trolley in the upper conveying cavity 2 pushes or pulls out the plasma processing cavity 1; the lifting or descending device is characterized in that a lifter 6 for lifting or descending trolleys 4 is arranged in the upper layer conveying cavity body 2 and the lower layer conveying cavity body 2, ball slide rails 7 for connecting the conveying trolleys are arranged on two sides of the upper layer conveying cavity bodies 2, and conveying roller tables 8 for connecting the conveying trolleys are arranged at the bottoms of the lower layer conveying cavity bodies 2.
When the lifter 6 ascends to the upper-layer conveying cavity, the lifter is positioned in the middle of the ball slide rails 7 on the two sides, and when the lifter 6 descends to the lower-layer conveying cavity 2, a cavity for accommodating the lifter 6 is arranged in the conveying roller table 8.
The trolley 4 is arranged on the adapter plate 9 through a slide rail, and two sides of the adapter plate 9 slide through the sliding bayonet locks clamped into the ball slide rails 7 on two sides.
And a transmission positioning pin 10 is arranged above the ball slide rail 7, the transmission positioning pin 10 is fixed on a belt transmission device 11 which is driven along the slide rail direction, and is clamped into positioning pin holes at two sides of the adapter plate 9 through the transmission positioning pin to be connected with the adapter plate 9 and drive the adapter plate 9 to slide along the ball slide rail 7 direction.
The working principle of the embodiment is as follows: the trolley 4 enters the upper conveying cavity 2 of the feeding area 3 from the upper substrate area and the lower substrate area on one side of the left feeding area 3, the trolley 4 is conveyed to the feeding area 3 on the right side by the ball slide rail 7, a plasma substrate in the trolley 4 is pushed into the right plasma processing cavity 1 to be processed, the lifting platform 6 below the waiting trolley descends to the lower conveying cavity 2 at the moment, the left feeding area 3 is continuously conveyed to the trolley filled with the substrate to be processed, the lifting machine 6 of the left feeding area 3 descends to the lower conveying cavity 2 and is conveyed to the lower conveying cavity 2 of the right feeding area 3 by the conveying roller platform, the trolley 4 filled with the substrate to be processed is conveyed to the switching area 5 by the ball slide rail 7 after the trolley processing of the upper conveying cavity 2 of the right feeding area 3 is completed, and the lifting machine 6 of the right feeding area 3 ascends to push the trolley 4 filled with the substrate to be processed into the right plasma processing cavity again to be processed. In the same way, the trolley 4 in the left feeding area performs the same operation as the trolley 4 in the right feeding area, and the trolley 4 waits for exchange in the transfer area 5 to complete circulation.
Claims (4)
1. The utility model provides a conveying mechanism of unloading system in multi-chamber plasma processing automation is equipped with two at least plasma processing chamber (1), its characterized in that: the front end of each plasma processing cavity (1) is correspondingly provided with a feeding area (3) consisting of an upper layer of conveying cavity (2) and a lower layer of conveying cavity (2), at least one trolley (4) can be accommodated in each conveying cavity (2), a switching area (5) for switching the trolleys is arranged between the two feeding areas (3), the switching area (5) also consists of the upper layer of conveying cavity (2) and the lower layer of conveying cavity (2), the plasma processing cavity (1) is arranged behind the upper layer of conveying cavity (2) of the feeding area (3), and the trolleys in the upper layer of conveying cavity (2) are pushed into or pulled out of the plasma processing cavity (1); be equipped with lift (6) of lifting or decline platform truck (4) in every upper and lower two-layer transport cavity (2), the both sides of a plurality of upper strata transport cavity (2) are equipped with ball slide rail (7) of the transport platform truck of connection, the bottom of a plurality of lower floor transport cavity (2) is equipped with transport roller platform (8) of the transport platform truck of connection.
2. The conveying mechanism of the multi-cavity plasma processing automatic loading and unloading system according to claim 1, wherein: the elevator (6) is located in the middle of the ball slide rails (7) on the two sides when ascending to the upper conveying cavity, and when the elevator (6) descends to the lower conveying cavity (2), a cavity for accommodating the elevator (6) is arranged in the conveying roller table (8).
3. The conveying mechanism of the multi-cavity plasma processing automatic loading and unloading system according to claim 1, wherein: the trolley (4) is arranged on the adapter plate (9) through a sliding rail, and two sides of the adapter plate (9) slide through ball sliding rails (7) clamped into the two sides through sliding clamping pins.
4. The conveying mechanism of the multi-cavity plasma processing automatic loading and unloading system according to claim 3, wherein: the transmission positioning pin (10) is arranged above the ball sliding rail (7), the transmission positioning pin (10) is fixed on a belt transmission device (11) which is driven along the direction of the sliding rail, the transmission positioning pin is clamped into positioning pin holes on two sides of the adapter plate (9) to be connected with the adapter plate (9), and the adapter plate (9) is driven to slide along the direction of the ball sliding rail (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120642425.8U CN214933747U (en) | 2021-03-30 | 2021-03-30 | Conveying mechanism of automatic feeding and discharging system for multi-cavity plasma treatment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120642425.8U CN214933747U (en) | 2021-03-30 | 2021-03-30 | Conveying mechanism of automatic feeding and discharging system for multi-cavity plasma treatment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214933747U true CN214933747U (en) | 2021-11-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120642425.8U Active CN214933747U (en) | 2021-03-30 | 2021-03-30 | Conveying mechanism of automatic feeding and discharging system for multi-cavity plasma treatment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214933747U (en) |
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2021
- 2021-03-30 CN CN202120642425.8U patent/CN214933747U/en active Active
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