CN214817233U

CN214817233U - Fixing and clamping tool for ultrathin glass wafer

Info

Publication number: CN214817233U
Application number: CN202121064464.0U
Authority: CN
Inventors: 李长坤; 谢永奕; 王永
Original assignee: Guangdong Sifeng Semiconductor Material Co ltd
Current assignee: Guangdong Sifeng Semiconductor Material Co ltd
Priority date: 2021-05-18
Filing date: 2021-05-18
Publication date: 2021-11-23
Anticipated expiration: 2031-05-18

Abstract

The utility model relates to a glass wafer processing technology field just discloses a fixed clamping instrument of ultra-thin glass wafer, the camera includes a supporting plate, the top fixed mounting of backup pad has the storehouse body, the inner wall right side fixed mounting of the storehouse body has servo motor, servo motor's output fixed mounting has first threaded rod, the left side fixed mounting of first threaded rod has one end and storehouse body swing joint's second threaded rod, the equal threaded connection in the outside of first threaded rod and second threaded rod has the sleeve. This fixed clamping instrument of ultra-thin glass wafer, through servo motor, first threaded rod and the second threaded rod that sets up, the user is when using, and accessible controller, operation servo motor take first threaded rod and second threaded rod relative or back of the body motion, adjusts the distance between two fixed plates to the wafer work piece of different diameters size is held, so realized being convenient for adjust the purpose of centre gripping scope.

Description

Fixing and clamping tool for ultrathin glass wafer

Technical Field

The utility model relates to a glass wafer processing technology field specifically is a fixed clamping instrument of ultra-thin glass wafer.

Background

The wafer is a silicon wafer used for manufacturing a silicon semiconductor circuit, the raw material of the wafer is silicon, high-purity polycrystalline silicon is dissolved and doped into a silicon crystal seed crystal, then the silicon crystal seed crystal is slowly pulled out to form cylindrical monocrystalline silicon, and a silicon crystal rod is ground, polished and sliced to form a silicon wafer, namely the wafer.

When the existing wafer is polished, the polishing machine is required to be used for processing, when the traditional polishing machine is used for fixing wafer workpieces with different sizes, the clamping range is required to be adjusted by means of professional tools, and the whole process is very time-consuming and labor-consuming, so that the fixing and clamping tool for the ultrathin glass wafer is provided.

SUMMERY OF THE UTILITY MODEL

Technical problem to be solved

The utility model provides a not enough to prior art, the utility model provides a fixed clamping instrument of ultra-thin glass wafer possesses the advantage such as be convenient for adjust the centre gripping scope, has solved the problem that needs carry out the adjustment of centre gripping scope with the help of the instrument of specialty.

(II) technical scheme

For the purpose of realizing above-mentioned centre gripping scope of being convenient for adjust, the utility model provides a following technical scheme: a fixed clamping tool for ultra-thin glass wafers comprises a supporting plate, wherein a bin body is fixedly mounted at the top of the supporting plate, a servo motor is fixedly mounted on the right side of the inner wall of the bin body, a first threaded rod is fixedly mounted at the output end of the servo motor, a second threaded rod with one end movably connected with the bin body is fixedly mounted at the left side of the first threaded rod, sleeves are respectively in threaded connection with the outer sides of the first threaded rod and the second threaded rod, a push rod with one end extending to the upper part of the bin body is fixedly mounted at the top of each sleeve, a transverse plate is fixedly mounted at the top of each push rod, a vertical plate is fixedly mounted at the top of each transverse plate, a driving motor is fixedly mounted at one side opposite to each vertical plate, a connecting shaft is fixedly mounted at the output end of each driving motor, a fixed plate is fixedly mounted at one end, far away from the driving motor, a supporting frame is fixedly mounted at the top of the bin body, the top fixed mounting of support frame has the mounting panel, the positive movable mounting of mounting panel has grinding machanism, the right side fixed mounting of the storehouse body has the controller, the top of the storehouse body just is located two fixed mounting has the platform of placing between the fixed plate, the positive movable mounting of the storehouse body has the door.

Preferably, the top of the bin body is provided with a push rod hole, and the size of the push rod hole is matched with the moving range of the push rod.

Preferably, the first threaded rod and the second threaded rod are opposite in thread direction, and the second threaded rod is movably connected with the bin body through a bearing.

Preferably, the vertical plate is made of stainless steel, and the vertical plate and the transverse plate are connected in a welding mode.

Preferably, one side opposite to the fixing plate is fixedly provided with a non-slip mat, and the non-slip mat is a rubber non-slip mat.

Preferably, the controller is a button type controller, and the servo motor, the push rod and the driving motor are all electrically connected with the controller.

(III) advantageous effects

Compared with the prior art, the utility model provides a fixed clamping instrument of ultra-thin glass wafer possesses following beneficial effect:

1. this fixed clamping instrument of ultra-thin glass wafer, through servo motor, first threaded rod and the second threaded rod that sets up, the user is when using, and accessible controller, operation servo motor take first threaded rod and second threaded rod relative or back of the body motion, adjusts the distance between two fixed plates to the wafer work piece of different diameters size is held, so realized being convenient for adjust the purpose of centre gripping scope.

2. This fixed clamping instrument of ultra-thin glass wafer, through push rod and the driving motor that sets up, the user is when using, and accessible controller, the wafer work piece that the operation push rod area centre gripping rises, starts driving motor and takes the connecting axle to rotate for the fixed plate overturns, realizes the turn-over of wafer, makes things convenient for the another side to polish, so made things convenient for user's use, promoted the practicality of device.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is an enlarged view of the point A in FIG. 1 according to the present invention;

fig. 3 is a front view of the present invention.

In the figure: 1 backup pad, 2 storehouse bodies, 3 servo motor, 4 first threaded rods, 5 second threaded rods, 6 sleeves, 7 push rods, 8 diaphragm, 9 riser, 10 driving motor, 11 connecting axles, 12 fixed plates, 13 support frames, 14 mounting panels, 15 grinding machanism, 16 controllers, 17 place platform, 18 door.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-3, a fixing and clamping tool for ultra-thin glass wafers comprises a supporting plate 1, a bin body 2 is fixedly installed at the top of the supporting plate 1, a servo motor 3 is fixedly installed at the right side of the inner wall of the bin body 2, a first threaded rod 4 is fixedly installed at the output end of the servo motor 3, a second threaded rod 5 with one end movably connected with the bin body 2 is fixedly installed at the left side of the first threaded rod 4, the thread directions of the first threaded rod 4 and the second threaded rod 5 are opposite, the second threaded rod 5 is movably connected with the bin body 2 through a bearing, sleeves 6 are respectively in threaded connection with the outer sides of the first threaded rod 4 and the second threaded rod 5, a push rod 7 with one end extending to the upper part of the bin body 2 is fixedly installed at the top of each sleeve 6, a push rod hole is formed at the top of the bin body 2, the size of the push rod hole is matched with the moving range of the push rod 7, a transverse plate 8 is fixedly installed at the top of each push rod 7, a vertical plate 9 is fixedly arranged at the top of the transverse plate 8, the vertical plate 9 is made of stainless steel, the vertical plate 9 and the transverse plate 8 are connected in a welding manner, a driving motor 10 is fixedly arranged at one side opposite to the vertical plate 9, a connecting shaft 11 is fixedly arranged at the output end of the driving motor 10, a fixed plate 12 is fixedly arranged at one end of the connecting shaft 11 far away from the driving motor 10, an anti-slip mat is fixedly arranged at one side opposite to the fixed plate 12, the anti-slip mat is a rubber anti-slip mat, a supporting frame 13 is fixedly arranged at the top of the bin body 2, an installing plate 14 is fixedly arranged at the top of the supporting frame 13, a polishing mechanism 15 is movably arranged at the front of the installing plate 14, a controller 16 is fixedly arranged at the right side of the bin body 2, the controller 16 is a push-button controller, the servo motor 3, the push rod 7 and the driving motor 10 are all electrically connected with the controller 16, a placing table 17 is fixedly arranged at the top of the bin body 2 and positioned between the two fixed plates 12, the front side of the bin body 2 is movably provided with a bin door 18, the fixed clamping tool for the ultrathin glass wafer can adjust the distance between two fixed plates 12 by arranging a servo motor 3, a first threaded rod 4 and a second threaded rod 5, when a user uses the fixed clamping tool, the controller 16 can be used for operating the servo motor 3 to drive the first threaded rod 4 and the second threaded rod 5 to move oppositely or oppositely, so that wafer workpieces with different diameters can be clamped, the purpose of conveniently adjusting the clamping range is realized, the fixed clamping tool for the ultrathin glass wafer can drive the push rod 7 and the driving motor 10 to be arranged, when the user uses the fixed clamping tool, the controller 16 can be used for operating the push rod 7 to drive the clamped wafer workpieces to ascend, the driving motor 10 is started to drive the connecting shaft 11 to rotate, so that the fixed plates 12 are overturned, the overturning of the wafer is realized, and the other side is convenient to polish, thus, the use of the device is facilitated for users, and the practicability of the device is improved.

In summary, in the fixing and clamping tool for the ultrathin glass wafer, through the servo motor 3, the first threaded rod 4 and the second threaded rod 5, when a user uses the fixing and clamping tool, the controller 16 can be used for operating the servo motor 3 to drive the first threaded rod 4 and the second threaded rod 5 to move oppositely or oppositely, and adjusting the distance between the two fixing plates 12, so as to clamp wafer workpieces with different diameters, thereby achieving the purpose of conveniently adjusting the clamping range, through the push rod 7 and the driving motor 10, when the user uses the fixing and clamping tool for the ultrathin glass wafer, the controller 16 can be used for operating the push rod 7 to drive the clamped wafer workpiece to ascend, and the driving motor 10 is started to drive the connecting shaft 11 to rotate, so that the fixing plates 12 are turned over, the turning over of the wafer is achieved, the other side of the wafer is convenient to polish, and the use of the user is facilitated, the practicality of the device is improved, and the problem that the clamping range needs to be adjusted by means of a professional tool is solved.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a fixed clamping instrument of ultra-thin glass wafer, includes backup pad (1), its characterized in that: the top fixed mounting of backup pad (1) has storehouse body (2), the inner wall right side fixed mounting of the storehouse body (2) has servo motor (3), the output fixed mounting of servo motor (3) has first threaded rod (4), the left side fixed mounting of first threaded rod (4) has one end and storehouse body (2) swing joint's second threaded rod (5), the equal threaded connection in outside of first threaded rod (4) and second threaded rod (5) has sleeve (6), the top fixed mounting of sleeve (6) has push rod (7) that one end extends to storehouse body (2) top, the top fixed mounting of push rod (7) has diaphragm (8), the top fixed mounting of diaphragm (8) has riser (9), one side fixed mounting that riser (9) are relative has driving motor (10), the output fixed mounting of driving motor (10) has connecting axle (11), the one end fixed mounting that driving motor (10) was kept away from in connecting axle (11) has fixed plate (12), the top fixed mounting of the storehouse body (2) has support frame (13), the top fixed mounting of support frame (13) has mounting panel (14), the positive movable mounting of mounting panel (14) has grinding machanism (15), the right side fixed mounting of the storehouse body (2) has controller (16), the top of the storehouse body (2) just is located two fixed mounting has between fixed plate (12) and places platform (17), the positive movable mounting of the storehouse body (2) has door (18).

2. The ultra-thin glass wafer fixing and clamping tool as claimed in claim 1, wherein: the top of the bin body (2) is provided with a push rod hole, and the size of the push rod hole is matched with the moving range of the push rod (7).

3. The ultra-thin glass wafer fixing and clamping tool as claimed in claim 1, wherein: the first threaded rod (4) and the second threaded rod (5) are opposite in thread direction, and the second threaded rod (5) is movably connected with the bin body (2) through a bearing.

4. The ultra-thin glass wafer fixing and clamping tool as claimed in claim 1, wherein: the vertical plate (9) is made of stainless steel, and the vertical plate (9) and the transverse plate (8) are connected in a welding mode.

5. The ultra-thin glass wafer fixing and clamping tool as claimed in claim 1, wherein: and one side opposite to the fixed plate (12) is fixedly provided with an anti-slip pad, and the anti-slip pad is a rubber anti-slip pad.

6. The ultra-thin glass wafer fixing and clamping tool as claimed in claim 1, wherein: the controller (16) is a button type controller, and the servo motor (3), the push rod (7) and the driving motor (10) are all electrically connected with the controller (16).