CN214586048U - Quartz boat top tooth fragment detection device - Google Patents
Quartz boat top tooth fragment detection device Download PDFInfo
- Publication number
- CN214586048U CN214586048U CN202023243014.6U CN202023243014U CN214586048U CN 214586048 U CN214586048 U CN 214586048U CN 202023243014 U CN202023243014 U CN 202023243014U CN 214586048 U CN214586048 U CN 214586048U
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- tooth
- top tooth
- quartz boat
- mounting
- teeth
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Abstract
The utility model discloses a quartz boat top tooth fragment detection device, which comprises a frame, wherein a top tooth mechanism and a detection mechanism are arranged on the frame, the top tooth mechanism comprises two top tooth mounting plates and a lifting driving assembly, the top tooth mounting plates are connected with the lifting driving assembly through a mounting frame, each top tooth mounting plate is provided with a group of top teeth, and tooth sockets for supporting silicon wafers are arranged on the top teeth; the detection mechanism comprises four groups of correlation sensors, two sensors in each group of correlation sensors are respectively arranged at two ends of the top teeth, the correlation sensors can detect silicon chip fragments extending from the tooth sockets, and the four groups of correlation sensors can respectively detect the silicon chip fragments extending from the tooth sockets on the two groups of top teeth to two sides. The utility model discloses a quartz boat top tooth piece detection device is rational in infrastructure, can detect the piece in the tooth's socket fast accurately, is convenient for in time clear up the piece to guarantee the normal production of silicon chip.
Description
Technical Field
The utility model relates to a silicon chip processing technology field, concretely relates to quartz boat top tooth piece detection device.
Background
The silicon chip is in the course of working, need with the top tooth with silicon chip jack-up from the quartz boat, then utilize the sucking disc to suck away the silicon chip, and after the silicon chip was sucked away, some silicon chip fragments can remain often in the tooth's socket of top tooth, and these silicon chip fragments can exert an influence to the normal operation of top tooth, consequently, need in time take place the piece to clear up it, and lack a device that can detect the piece fast accurately at present.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is to provide a quartz boat apical tooth piece detection device that piece in the tooth's socket can be detected fast accurately to rational in infrastructure. The technical scheme is as follows:
in order to solve the problems, the invention provides a quartz boat top tooth fragment detection device, which comprises a rack, wherein the rack is provided with:
the top tooth mechanism comprises two top tooth mounting plates and a lifting driving assembly, the top tooth mounting plates are connected with the lifting driving assembly through mounting frames, each top tooth mounting plate is provided with a group of top teeth, and tooth grooves for supporting silicon wafers are formed in the top teeth;
the detection mechanism comprises four groups of correlation sensors, two sensors in each group of correlation sensors are respectively arranged at two ends of the top teeth, the correlation sensors can detect silicon chip fragments extending from the tooth sockets, and the four groups of correlation sensors can respectively detect the silicon chip fragments extending from the tooth sockets on the two groups of top teeth to two sides.
As a further improvement of the utility model, the correlation sensor pass through the assembly plate with the frame is connected, and two sets of correlation sensors are located the bottom of assembly plate, two sets of correlation sensors are located the top of assembly plate.
As a further improvement, the assembling plate is provided with a waist-shaped groove for adjusting the assembling position of the correlation sensor.
As a further improvement of the present invention, the mounting frame includes a bottom plate and a supporting block, the top tooth mounting plate passes through the supporting block and is connected to the bottom plate.
As a further improvement of the present invention, the mounting frame further includes a reinforcing rib, and the bottom plate is connected to the lifting driving assembly through the reinforcing rib.
As a further improvement of the utility model, be equipped with the regulation on the mounting panel the waist type groove of bottom plate mounted position.
As a further improvement, the top tooth mounting plate is provided with a slot matched with the top tooth, and the bottom of the top tooth is inserted into the slot.
As a further improvement, the lifting driving assembly is a linear motor.
The utility model has the advantages that:
the utility model discloses a quartz boat top tooth piece detection device is rational in infrastructure, can detect the piece in the tooth's socket fast accurately, is convenient for in time clear up the piece to guarantee the normal production of silicon chip.
The foregoing description is only an overview of the technical solutions of the present invention, and in order to make the technical means of the present invention more clearly understood, the present invention may be implemented according to the content of the description, and in order to make the above and other objects, features, and advantages of the present invention more obvious and understandable, the following preferred embodiments are described in detail with reference to the accompanying drawings.
Drawings
FIG. 1 is a schematic structural view of a quartz boat top tooth fragment detection device and a flower basket according to a preferred embodiment of the present invention;
fig. 2 is a schematic structural view of the correlation sensor and the mounting plate in the preferred embodiment of the present invention.
Description of the labeling: 1. a silicon wafer; 2. a waist-shaped groove; 10. a frame; 20. a top tooth mounting plate; 30. a linear motor; 40. a top tooth; 50. a correlation sensor; 60. assembling a plate; 71. a base plate; 72. a support block; 73. and (5) reinforcing ribs.
Detailed Description
The present invention is further described with reference to the following drawings and specific embodiments so that those skilled in the art can better understand the present invention and can implement the present invention, but the embodiments are not to be construed as limiting the present invention.
As shown in fig. 1, for the quartz boat top tooth fragment detection device in the embodiment of the present invention, the quartz boat top tooth fragment detection device includes a frame 10, and a top tooth mechanism and a detection mechanism are disposed on the frame 10.
The top tooth mechanism comprises two top tooth mounting plates 20 and a lifting driving assembly, the top tooth mounting plates 20 are connected with the lifting driving assembly through mounting frames, each top tooth mounting plate 20 is provided with a group of top teeth 40, and tooth grooves for supporting the silicon wafers 1 are formed in the top teeth 40. The sizes of the two groups of top teeth 40 are matched with each other to support the silicon wafer 1.
The detection mechanism comprises four groups of correlation sensors 50, two sensors in each group of correlation sensors 50 are respectively arranged at two ends of the top teeth 40, the correlation sensors 50 can detect silicon chip fragments extending from the tooth spaces, and the four groups of correlation sensors 50 can respectively detect the silicon chip fragments extending from the tooth spaces on the two groups of top teeth 40 to two sides. Two sets of the correlation sensors 50 respectively detect silicon fragments extending from the tooth spaces of one set of the top teeth 40 to both sides, and the other two sets of the correlation sensors 50 respectively detect silicon fragments extending from the tooth spaces of the other set of the top teeth 40 to both sides.
During operation, the lifting driving assembly moves the top tooth mounting plate 20 to ascend, the top tooth 40 is used for positioning the silicon wafer 1 on the quartz boat, after the suction nozzle sucks away the silicon wafer 1 on the top tooth 40, the lifting driving assembly moves the top tooth mounting plate 20 to descend to a preset position, the correlation sensor 50 starts to work, whether extended silicon wafer fragments exist on two sides of the tooth socket is detected, and if the extended silicon wafer fragments exist, the silicon wafer fragments need to be cleaned.
In some embodiments, the correlation sensors 50 are connected to the rack 10 via a mounting plate 60, as shown in FIG. 2, two sets of correlation sensors 50 are disposed on the bottom of the mounting plate 60, and two sets of correlation sensors 50 are disposed on the top of the mounting plate 60. Wherein, the quantity of pilot plate 60 is two, and two pilot plates 60 are located the both ends of apical tooth 40 respectively, and two sensors in every group correlation sensor 50 are located respectively on two pilot plates 60, and two sensors in every group correlation sensor 50 are highly the same.
Optionally, a waist-shaped groove 2 for adjusting the assembling position of the correlation sensor 50 is formed in the assembling plate 60, and the correlation sensor 50 may be connected to the waist-shaped groove through a bolt. The waist-shaped groove 2 is used for adjusting the horizontal position of the correlation sensor 50, so that light rays emitted by the correlation sensor 50 just pass through two sides of the tooth socket in parallel to detect silicon chip fragments extending out of the tooth socket, and meanwhile, the distance between the light rays and the tooth socket is ensured to be as small as possible to ensure the detection precision.
In some embodiments, the mount includes a base plate 71 and support blocks 72, and the top tooth mounting plate 20 is connected to the base plate 71 through the support blocks 72. Optionally, the mounting frame further comprises a reinforcing rib 73, and the bottom plate 71 is connected with the lifting driving assembly through the reinforcing rib 73, so as to ensure the strength of the structure and ensure the stability of the silicon wafer during lifting.
In some embodiments, the bottom plate 71 is provided with a kidney-shaped groove 2 for adjusting the assembling position of the bottom plate 71.
In some embodiments, the top-tooth mounting plate 20 is provided with a slot for engaging the top tooth 40, and the bottom of the top tooth 40 is inserted into the slot.
Optionally, the lifting drive assembly is a linear motor 30.
The utility model discloses a quartz boat top tooth piece detection device is rational in infrastructure, can detect the piece in the tooth's socket fast accurately, is convenient for in time clear up the piece to guarantee the normal production of silicon chip.
The above embodiments are merely preferred embodiments for fully illustrating the present invention, and the scope of the present invention is not limited thereto. Equivalent substitutes or changes made by the technical personnel in the technical field on the basis of the utility model are all within the protection scope of the utility model. The protection scope of the present invention is subject to the claims.
Claims (8)
1. The utility model provides a quartz boat top tooth piece detection device which characterized in that, includes the frame, be equipped with in the frame:
the top tooth mechanism comprises two top tooth mounting plates and a lifting driving assembly, the top tooth mounting plates are connected with the lifting driving assembly through mounting frames, each top tooth mounting plate is provided with a group of top teeth, and tooth grooves for supporting silicon wafers are formed in the top teeth;
the detection mechanism comprises four groups of correlation sensors, two sensors in each group of correlation sensors are respectively arranged at two ends of the top teeth, the correlation sensors can detect silicon chip fragments extending from the tooth sockets, and the four groups of correlation sensors can respectively detect the silicon chip fragments extending from the tooth sockets on the two groups of top teeth to two sides.
2. The quartz boat top tooth debris detecting device of claim 1, wherein the correlation sensors are connected to the rack through a mounting plate, two sets of correlation sensors are located at a bottom of the mounting plate, and two sets of correlation sensors are located at a top of the mounting plate.
3. The quartz boat top tooth debris detecting device as defined in claim 2, wherein the mounting plate is provided with a waist-shaped groove for adjusting the mounting position of the correlation sensor.
4. The quartz boat top tooth debris detection device of claim 1, wherein the mounting bracket comprises a base plate and support blocks, and the top tooth mounting plate is connected to the base plate through the support blocks.
5. The quartz boat top tooth debris detecting device of claim 4, wherein the mounting bracket further comprises a stiffener, and the bottom plate is connected to the lift drive assembly via the stiffener.
6. The quartz boat top tooth debris detecting device as defined in claim 5, wherein the mounting plate is provided with a kidney slot for adjusting the mounting position of the bottom plate.
7. The quartz boat top tooth debris detecting device as defined in claim 1, wherein the top tooth mounting plate is provided with slots for engaging the top teeth, and the bottom of the top teeth are inserted into the slots.
8. The quartz boat top tooth debris detecting device of claim 1, wherein the lift drive assembly is a linear motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023243014.6U CN214586048U (en) | 2020-12-29 | 2020-12-29 | Quartz boat top tooth fragment detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023243014.6U CN214586048U (en) | 2020-12-29 | 2020-12-29 | Quartz boat top tooth fragment detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214586048U true CN214586048U (en) | 2021-11-02 |
Family
ID=78335207
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202023243014.6U Active CN214586048U (en) | 2020-12-29 | 2020-12-29 | Quartz boat top tooth fragment detection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214586048U (en) |
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2020
- 2020-12-29 CN CN202023243014.6U patent/CN214586048U/en active Active
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