CN214516419U

CN214516419U - Mask cleaning system

Info

Publication number: CN214516419U
Application number: CN202023140839.5U
Authority: CN
Inventors: 闵丙琦
Original assignee: LG Display Optoelectronics Technology China Co Ltd
Current assignee: LG Display Optoelectronics Technology China Co Ltd
Priority date: 2020-12-23
Filing date: 2020-12-23
Publication date: 2021-10-29
Anticipated expiration: 2030-12-23

Abstract

The utility model relates to a mask cleaning system, including first cleaning equipment and second cleaning equipment, first cleaning equipment is including the reservoir that is used for depositing the cleaning solution, infusion pipeline and washing subassembly, infusion pipeline's both ends are connected with reservoir and washing subassembly respectively, it installs in the cleaning chamber to wash the subassembly, and wash the subassembly and be used for spraying the cleaning solution to the mask, second cleaning equipment is including the air compressor who connects gradually, gas holder and supersonic generator, supersonic generator passes through the connecting pipe with infusion pipeline and is connected, and communicate through first valve selectivity between connecting pipe and the infusion pipeline. Through setting up second cleaning equipment to make second cleaning equipment carry out ultrasonic cleaning to gas transmission pipeline and cleaning assembly, make the foreign matter that adheres to on the pipe wall in gas transmission pipeline and the cleaning assembly drop, have the characteristics that cleaning efficiency is high and cleaning quality is good.

Description

Mask cleaning system

Technical Field

The utility model relates to a technical field is made to the display, especially relates to a mask cleaning system.

Background

In a display manufacturing process, an organic thin film needs to be formed on a glass plate to realize its unique optical characteristics. In the process of coating the glass plate, a mask is adopted to shield the position where a film structure is not required to be formed, and meanwhile, the mask plays a role in mounting and fixing the glass plate. During film coating, a thin film structure is formed on the mask due to deposition of an organic material, and before the mask is reused, the mask needs to be cleaned to remove the thin film structure on the mask. When the mask is cleaned, the mainly adopted cleaning equipment comprises a liquid storage tank for storing organic solution and a cleaning spray head for cleaning the mask, the liquid storage tank is connected with the cleaning spray head through a liquid conveying pipeline, the cleaning spray head is arranged in a cleaning chamber, and the cleaning spray head faces the mask and sprays the organic solution to the surface of the mask to clean the mask. Because the organic solution is recycled, impurities after cleaning or impurities existing in the organic solution are easily mixed in the organic solution, and the impurities are deposited in the infusion pipeline and form foreign matters due to bacterial breeding, so that the cleanliness of the cleaning equipment is greatly influenced. The existing cleaning method for the cleaning equipment mainly utilizes water or cleaning solution to wash, the mode is not easy to clean foreign matters firmly adsorbed on the inner wall of the infusion pipeline, the foreign matters in a valve joint gap on the pipeline are not easy to clean, and the cleaning efficiency and the cleaning quality cannot be guaranteed.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a mask cleaning system, its cleaning efficiency is high and cleaning quality is good.

To achieve the purpose, the utility model adopts the following technical proposal:

the utility model provides a mask cleaning system, includes first cleaning equipment and second cleaning equipment, first cleaning equipment is including reservoir, infusion pipeline and the washing subassembly that is used for depositing the cleaning solution, infusion pipeline's both ends respectively with the reservoir with the washing subassembly is connected, wash the subassembly and install in the cleaning chamber, just the washing subassembly is used for spraying to the mask the cleaning solution, second cleaning equipment is including the air compressor, gas holder and the supersonic generator that connect gradually, supersonic generator with the infusion pipeline passes through the connecting pipe and connects, just the connecting pipe with through first valve selectivity intercommunication between the infusion pipeline.

As a preferable scheme of the mask cleaning system, the number of the connecting pipes is multiple, the connecting pipes are arranged at intervals along the length direction of the liquid conveying pipeline, and the ultrasonic generator is detachably connected with the connecting pipes.

As a preferable mode of the mask cleaning system, the connection pipe is connected to the ultrasonic generator through a flange assembly.

As a preferable scheme of the mask cleaning system, the second cleaning device further includes an air blowing pipe, one end of the air blowing pipe is connected to the air storage tank, and the other end of the air blowing pipe is used for being selectively connected to the connecting pipe.

As a preferable scheme of the mask cleaning system, the outlet of the liquid storage tank is provided with a second valve, and one end of the liquid conveying pipeline close to the liquid storage tank is connected with the second valve.

As a preferable scheme of the mask cleaning system, the blowing pipe is a hose, the flange assembly includes a first flange, a second flange, and a fastening bolt for fixing the first flange and the second flange, the first flange is disposed at one end of the connecting pipe, and the second flange is disposed at one end of the blowing pipe close to the connecting pipe.

As a preferable scheme of the mask cleaning system, the first cleaning device further includes a recovery pipeline, one end of the recovery pipeline is installed in the cleaning chamber and used for collecting the cleaning solution, the other end of the recovery pipeline is connected to the reservoir, the recovery pipeline is provided with a filter, and the filter filters the cleaning solution in the recovery pipeline.

As a preferable mode of the mask cleaning system, the recovery pipe is provided with the connection pipe, and the connection pipe is used for being connected with the second cleaning device.

As a preferable scheme of the mask cleaning system, the number of the first cleaning apparatuses is plural, and the plural first cleaning apparatuses are provided in one-to-one correspondence with the plural cleaning chambers.

As a preferable scheme of the mask cleaning system, the second cleaning device comprises a plurality of ultrasonic generators, each of the ultrasonic generators is connected with a liquid conveying pipeline on the corresponding first cleaning device, and all the ultrasonic generators are connected with the gas storage tank through a gas conveying pipeline.

The utility model discloses compare in prior art's beneficial effect:

the utility model discloses a mask cleaning system, through setting up second cleaning equipment, second cleaning equipment has the air compressor, gas holder and the supersonic generator that connect gradually, and supersonic generator and infusion pipe are connected to make second cleaning equipment carry out ultrasonic cleaning to gas transmission pipeline and the washing subassembly of being connected with gas transmission pipeline, make the foreign matter that adheres to on the pipe wall in gas transmission pipeline and the washing subassembly drop, improve the cleaning efficiency. The structure can realize the cleaning operation of the first cleaning equipment, is favorable for avoiding the influence of foreign matters of the first cleaning equipment on the mask cleaning operation, and further ensures the cleaning quality of the mask cleaning system on the mask.

Drawings

Fig. 1 is a schematic view of a mask cleaning system of an embodiment.

In the figure:

1. a first cleaning device; 11. a liquid storage tank; 12. a fluid delivery conduit; 13. cleaning the assembly; 14. a connecting pipe; 15. a second valve; 16. a recovery pipeline; 17. a filter; 2. a second cleaning device; 21. an air compressor; 22. a gas storage tank; 23. an ultrasonic generator; 24. a gas pipeline; 3. a cleaning chamber; 4. a flange assembly.

Detailed Description

The advantages and features of the present invention and the methods of accomplishing the same will become apparent with reference to the following detailed description of the embodiments taken in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various different forms, and the embodiments are provided only to accomplish the disclosure of the present invention and to enable those skilled in the art to sufficiently understand the scope of the present invention, and the present invention is limited only by the scope of the claims. Like reference numerals denote like constituent elements throughout the specification.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

Example one

Referring to fig. 1, a mask cleaning system is provided, which includes a first cleaning device 1 and a second cleaning device 2, wherein the first cleaning device 1 is used for cleaning a mask in a cleaning chamber 3, and the second cleaning device 2 is used for cleaning the first cleaning device 1, so as to avoid foreign matters remaining in the first cleaning device 1, improve the self-cleanliness of the first cleaning device 1, and further ensure the cleaning quality of the mask. For this purpose, the first cleaning device 1 comprises a reservoir 11, a feed line 12 and a cleaning module 13, the reservoir 11 being intended to hold a cleaning solution, preferably an organic solution, which has a good cleaning effect on the thin film on the mask. Of course, the specific components of the organic solution may be selected accordingly depending on the membrane components to be cleaned. The liquid conveying pipeline 12 is used for communicating the liquid storage tank 11 and the cleaning assembly 13, and a water pump is further arranged on the liquid conveying pipeline 12 and used for pumping the cleaning solution in the liquid storage tank 11 to the cleaning assembly 13. Cleaning assembly 13 is installed in purge chamber 3, and cleaning assembly 13 includes the shower nozzle that a plurality of intervals set up, and the cleaning solution in cleaning assembly 13 passes through the shower nozzle and sprays to the surface of mask, realizes the washing to the mask. The second cleaning device 2 comprises an air compressor 21, an air storage tank 22 and an ultrasonic generator 23 which are sequentially connected, a connecting pipe 14 is arranged on the liquid conveying pipeline 12, the ultrasonic generator 23 is connected with the liquid conveying pipeline 12 through the connecting pipe 14, a first valve is arranged between the connecting pipe 14 and the liquid conveying pipeline 12 and used for controlling the connection and disconnection between the connecting pipe 14 and the liquid conveying pipeline 12, and therefore the connecting pipe 14 and the liquid conveying pipeline 12 are selectively communicated through the first valve. The air compressor 21 is used for injecting compressed air into an air storage tank 22, and the air storage tank 22 is communicated with the ultrasonic generator 23 through an air transmission pipeline 24. The gas in the gas storage tank 22 forms a gas flow, the gas flow is input into the infusion pipeline 12 in a gas pulse mode after passing through the ultrasonic generator 23, the cleaning solution in the infusion pipeline 12 generates micro bubbles under the mechanical vibration action of ultrasonic waves, and then the huge pressure generated by ultrasonic cavitation has a good cleaning effect on the inner wall of the infusion pipeline 12, so that the cleaning treatment of the infusion pipeline 12 and the cleaning component 13 connected with the infusion pipeline 12 is realized. When the mask is cleaned, the first valve is closed, so that the cleaning solution is conveyed to the cleaning assembly 13 through the liquid conveying pipeline 12, and the cleaning solution is sprayed to the mask by the cleaning assembly 13; when the first cleaning device 1 is cleaned, the first valve is opened, the connecting pipe 14 is communicated with the liquid conveying pipeline 12, compressed air enters the liquid conveying pipeline 12 through the ultrasonic generator 23, and the compressed air flows to the cleaning component 13 along the liquid conveying pipeline 12, so that the first cleaning device 1 is cleaned.

Specifically, the number of the connection pipes 14 is plural, the plural connection pipes 14 are arranged at intervals along the length direction of the infusion tube 12, and the ultrasonic generator 23 is detachably connected to the connection pipes 14. It will be appreciated that the first cleaning device 1 of the present embodiment is intended for use in an automated plant for manufacturing display screens, the distance between the reservoir 11 and the cleaning chamber 3 being relatively large, so that the length of the infusion line 12 is relatively long. In order to avoid that the cleaning effect is reduced due to the fact that the energy of ultrasonic waves is attenuated continuously along with the increase of the cleaning distance, a plurality of connecting pipes 14 are arranged along the length direction of the liquid conveying pipeline 12, and the second cleaning device 2 can perform ultrasonic cleaning on the liquid conveying pipeline 12 through the connecting pipes 14 so as to guarantee the cleaning quality. Of course, the distance between two adjacent connecting pipes 14 can be adaptively selected according to the output power of the ultrasonic generator 23 and the actual cleaning effect. Preferably, since the gas input by the second cleaning device 2 can only move towards the cleaning assembly 13 under the action of the liquid flow of the cleaning solution, in order to achieve the cleaning treatment of the whole infusion tube 12 as much as possible, the side of the infusion tube 12 close to the liquid storage tank 11 is provided with a connecting tube 14 to further ensure the cleaning quality of the infusion tube 12.

Specifically, the connecting pipe 14 is connected with the ultrasonic generator 23 through the flange assembly 4. It can be understood that the connecting pipe 14 is connected with the ultrasonic generator 23 through the flange assembly 4, so that the ultrasonic generator 23 can be conveniently disassembled and assembled, and the ultrasonic generator 23 is connected with a plurality of connecting pipes 14 for use in sequence, thereby reducing the equipment number of the ultrasonic generator 23 and saving the cost. In this embodiment, the flange assembly 4 includes first flange, second flange and the fastening bolt who is used for fixed first flange and second flange, all correspond on first flange and the second flange and be provided with a plurality of connecting holes that are used for wearing to establish fastening bolt, first flange sets up in the one end that the connecting pipe 14 deviates from the infusion pipeline 12, the second flange sets up in the one end that supersonic generator 23 is close to the infusion pipeline 12, first flange and second flange butt each other and pass through fastening bolt and connect fixedly. Meanwhile, a sealing gasket is arranged between the first flange and the second flange, so that the connection sealing performance between the first flange and the second flange is improved.

Specifically, the first cleaning device 1 further includes a recovery pipeline 16, one end of the recovery pipeline 16 is installed in the cleaning chamber 3 and used for collecting the cleaning solution, the other end of the recovery pipeline 16 is connected with the liquid storage tank 11, the recovery pipeline 16 is provided with a filter 17, and the filter 17 filters the cleaning solution in the recovery pipeline 16. It will be appreciated that to avoid waste of the cleaning solution, the cleaning solution is recycled for reuse via the recycle line 16. In this embodiment, be provided with the hydrops dish in the purge chamber 3, the one end intercommunication that hydrops dish and recovery pipeline 16 are close to purge chamber 3, and the hydrops dish is located the below of cleaning assembly 13 to the cleaning solution who sprays cleaning assembly 13 collects. The recovery pipeline 16 inputs the cleaning solution in the liquid collecting disc into the filter 17, the filter 17 filters out solid foreign matters in the cleaning solution, and then the filtered cleaning solution is input into the liquid storage tank 11 through the recovery pipeline 16, so that the cleaning solution is recovered. To achieve cleaning of the recovery pipe 16, a connection pipe 14 is provided on the recovery pipe 16, the connection pipe 14 being adapted for selective connection with the second cleaning device 2. The connecting pipe 14 is provided with a first flange, and when the recovery pipeline 16 needs to be cleaned, the ultrasonic generator 23 is connected with the connecting pipe 14 through the flange assembly 4, so that the second cleaning device 2 can clean the recovery pipeline 16.

Example two

Referring to fig. 1, the second cleaning apparatus 2 further includes an air blowing pipe (not shown) having one end connected to the air storage tank 22 and the other end selectively connected to the connection pipe 14. In this embodiment, the blow duct is used to convey compressed air. The outlet of the liquid storage tank 11 is provided with a second valve 15, one end of the transfusion pipeline 12 close to the liquid storage tank 11 is connected with the second valve 15, and the second valve 15 is used for controlling the on-off of the transfusion pipeline 12. When the first cleaning device 1 is cleaned, the second valve 15 is opened, and the ultrasonic generator 23 is connected to the connecting pipe 14, so that the first cleaning device 1 can perform ultrasonic cleaning on the infusion tube 12 and the cleaning assembly 13. Since the ultrasonic cleaning mainly promotes the separation of the foreign matter from the inside of the transfusion tube 12, the foreign matter flows out of the transfusion tube 12 along with the cleaning solution. To improve the cleaning effect, the ultrasonic generator 23 is removed after ultrasonic cleaning, the blow line is connected to the connecting tube 14, and the second valve 15 is closed. Compressed air is injected into the infusion tube 12 through the air blowing tube to dry the inside of the infusion tube 12 and blow out the detached foreign matter out of the infusion tube 12. The structure can avoid the foreign matters from remaining in the infusion pipeline 12, and further improves the cleaning effect. As the preferred scheme, in order to facilitate the connection of the air blowing pipeline, the air blowing pipeline is a hose so as to facilitate the storage and the unfolding for use, a second flange is arranged on the air blowing pipeline, and the air blowing pipeline is connected with the connecting pipe 14 through a flange assembly 4.

EXAMPLE III

Referring to fig. 1, the number of the first cleaning apparatuses 1 is multiple, the number of the first cleaning apparatuses 1 is equal to the number of the cleaning chambers 3, and the plurality of first cleaning apparatuses 1 and the plurality of cleaning chambers 3 are arranged in a one-to-one correspondence manner. In this embodiment, there are a plurality of cleaning chambers 3, each cleaning chamber 3 is provided with one first cleaning device 1, and each first cleaning device 1 independently performs cleaning operation on the mask in the corresponding cleaning chamber 3. The second cleaning device 2 comprises a plurality of ultrasonic generators 23, the number of the ultrasonic generators 23 is equal to that of the first cleaning devices 1, each ultrasonic generator 23 is connected with the corresponding liquid conveying pipeline 12 on the first cleaning device 1 through a connecting pipe 14, and all the ultrasonic generators 23 are connected with the gas storage tank 22 through gas conveying pipelines 24. Every cleaning equipment 1 all is provided with supersonic generator 23, reducible supersonic generator 23's dismouting, improves the operating efficiency. A plurality of ultrasonic generators 23 are connected to one air storage tank 22 through an air transmission pipeline 24, so that the arrangement number of the air compressors 21 and the air storage tanks 22 is reduced, the structure is simplified, and the cost is saved.

The technical effects of the embodiment are as follows: through setting up second cleaning equipment 2, second cleaning equipment 2 has air compressor 21, gas holder 22 and the supersonic generator 23 that connects gradually, and supersonic generator 23 is connected with infusion pipeline 12 to make second cleaning equipment 2 carry out ultrasonic cleaning to infusion pipeline 12 and the cleaning module 13 of being connected with infusion pipeline 12, impel the foreign matter that adheres to on the pipe wall in infusion pipeline 12 and the cleaning module 13 to drop, improve cleaning efficiency. The structure can realize the cleaning operation of the first cleaning equipment 1, is favorable for avoiding the influence of foreign matters of the first cleaning equipment 1 on the mask cleaning operation, and further ensures the cleaning quality of the mask cleaning system on the mask.

Although the embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above embodiments, but may be manufactured in various forms, and those skilled in the art will understand that the present invention may be embodied in other specific forms without changing the technical spirit or essential features of the invention. It is therefore to be understood that the above described embodiments are illustrative and not restrictive in all respects.

Claims

1. The utility model provides a mask cleaning system, its characterized in that, includes first cleaning equipment and second cleaning equipment, first cleaning equipment is including reservoir, infusion pipeline and the washing subassembly that is used for depositing the cleaning solution, the both ends of infusion pipeline respectively with the reservoir with the washing subassembly is connected, wash the unit mount in the washing chamber, just the washing subassembly is used for spraying to the mask the cleaning solution, second cleaning equipment is including the air compressor, gas holder and the supersonic generator who connects gradually, supersonic generator with the infusion pipeline passes through the connecting pipe and connects, just the connecting pipe with communicate through first valve selectivity between the infusion pipeline.

2. The mask cleaning system according to claim 1, wherein the connection pipe is provided in plurality, the plurality of connection pipes are arranged at intervals along a length direction of the liquid supply pipe, and the ultrasonic generator is detachably connected to the connection pipe.

3. The mask cleaning system of claim 2, wherein the connection tube is connected to the ultrasonic generator by a flange assembly.

4. The mask cleaning system according to claim 3, wherein the second cleaning apparatus further comprises a blow pipe having one end connected to the gas storage tank and the other end for selective connection to the connection pipe.

5. The mask cleaning system according to claim 4, wherein the outlet of the reservoir is provided with a second valve, and one end of the liquid supply line near the reservoir is connected to the second valve.

6. The mask cleaning system according to claim 4, wherein the blowing duct is a hose, the flange assembly includes a first flange provided at one end of the connection pipe, a second flange provided at one end of the blowing duct near the connection pipe, and fastening bolts for fixing the first flange and the second flange.

7. The mask cleaning system according to claim 1, wherein the first cleaning device further comprises a recovery pipe, one end of the recovery pipe is installed in the cleaning chamber and is used for collecting the cleaning solution, the other end of the recovery pipe is connected with the reservoir, the recovery pipe is provided with a filter, and the filter performs a filtering process on the cleaning solution in the recovery pipe.

8. The mask cleaning system according to claim 7, wherein the recovery pipe is provided with the connection pipe for connecting with the second cleaning apparatus.

9. The mask cleaning system according to claim 1, wherein the first cleaning apparatus is provided in plurality, and a plurality of the first cleaning apparatuses are provided in one-to-one correspondence with a plurality of the cleaning chambers.

10. The mask cleaning system according to claim 9, wherein the second cleaning apparatus includes a plurality of ultrasonic generators, each of the ultrasonic generators is connected to a liquid supply line on the corresponding first cleaning apparatus, and all of the ultrasonic generators are connected to the gas storage tank through a gas supply line.