KR102407090B1 - Fine bubble vacuum pump cleaning device and Cleaning method of vacuum pump using fine bubbles - Google Patents

Abstract

An embodiment of the present invention provides a micro-bubble vacuum pump cleaning apparatus for cleaning without disassembling a vacuum pump used for vacuum formation of industrial equipment. The micro-bubble vacuum pump cleaning device includes a cleaning liquid tank; a bubble generating unit generating a fine bubble cleaning solution using the supplied gas for generating bubbles and the cleaning liquid supplied from the cleaning liquid tank; A first connection part connected to the inlet of the vacuum pump and a second connection part connected to the outlet of the vacuum pump for injecting the microbubble cleaning liquid into the vacuum pump or discharging the cleaning liquid after cleaning from the vacuum pump and a connecting part to which at least one vacuum pump is detachably coupled; and a pipe part connected to the bubble generating part and the connecting part to provide a passage for the microbubble cleaning liquid.

Description

Fine bubble vacuum pump cleaning device and cleaning method of a vacuum pump using fine bubbles

The present invention relates to a microbubble vacuum pump cleaning device and a vacuum pump cleaning method using microbubbles, and more particularly, to a microbubble vacuum pump cleaning device for cleaning the material to be removed inside the vacuum pump without disassembling the vacuum pump. And it relates to a cleaning method of a vacuum pump using fine bubbles.

The production process of industries such as semiconductor, LCD, solar modules, and LED almost inevitably uses a vacuum pump. In particular, in CVD (thin film deposition) and diffusion (diffusion) processes, a large amount of silicon-based raw materials are supplied into the process chamber. A vacuum pump is connected to the process chamber to vacuum the process chamber or to pump the exhaust gas of the process. In this process, impurities accumulate inside the vacuum pump. As a result, there is a problem in that the operating current of the vacuum pump is increased and the performance is deteriorated.

In order to solve this problem, in general, the inside of the vacuum pump is periodically cleaned. For example, raw materials used in the process include silicon-based and non-silicon-based raw materials. The cleaning operation of the vacuum pump may be performed at a cycle of about 2 to 6 months depending on the type and usage of these raw materials. In this case, a method of completely disassembling, cleaning, and reassembling the vacuum pump (overhaul) is used.

However, this method of disassembling, cleaning, and assembling requires disassembling a vacuum pump having a complicated structure and reassembling each of them after cleaning.

Since a large number of vacuum pumps are installed in industrial facilities such as semiconductor processes, when these vacuum pumps are cleaned in the above manner, the smooth operation of the vacuum pump is limited, labor and time are required, and disassembly and assembly are defective. There is always the possibility that this will happen. Therefore, there is a need for a cleaning apparatus or method for a vacuum pump that is different from the existing ones to solve this problem.

The technical problem to be achieved by the present invention is to clean the vacuum pump using a microbubble vacuum pump cleaning device and microbubbles capable of cleaning the material to be removed inside by injecting and discharging the microbubble cleaning solution to the vacuum pump without disassembling the vacuum pump. to provide a way

In order to achieve the above technical object, an embodiment of the present invention provides a micro-bubble vacuum pump cleaning device for cleaning without disassembling the vacuum pump used for vacuum formation of industrial equipment. The micro-bubble vacuum pump cleaning device includes a cleaning liquid tank; a bubble generating unit generating a fine bubble cleaning solution using the supplied gas for generating bubbles and the cleaning liquid supplied from the cleaning liquid tank; A first connection part connected to the inlet of the vacuum pump and a second connection part connected to the outlet of the vacuum pump for injecting the microbubble cleaning liquid into the vacuum pump or discharging the cleaning liquid after cleaning from the vacuum pump and a connecting part to which at least one vacuum pump is detachably coupled; and a pipe part connected to the bubble generating part and the connecting part to provide a passage for the microbubble cleaning liquid.

In an embodiment of the present invention, the pipe unit includes: a forward circulation path in the order of the bubble generating unit, the first connecting unit, the vacuum pump, the second connecting unit, and the washing liquid tank; and a reverse circulation path in the order of the bubble generating unit, the second connecting unit, the vacuum pump, the first connecting unit, and the washing liquid tank.

In an embodiment of the present invention, the pipe unit includes: a first pipe for connecting the bubble generating unit and the first connection unit; a second pipe for connecting the second connection part and the cleaning liquid tank; a third pipe for connecting the bubble generating unit and the second connecting unit; and a fourth pipe for connecting the first connection part and the cleaning liquid tank.

In an embodiment of the present invention, a first valve that opens in a forward direction and closes in a reverse direction is installed in the first pipe, a second valve that opens in a forward direction and closes in a reverse direction is installed in the second pipe A third valve that opens in the reverse direction and closes in the forward direction may be installed in the third pipe, and a fourth valve that opens in the reverse direction and closes in the forward direction may be installed in the fourth pipe.

In an embodiment of the present invention, one end of the third pipe is connected to the first pipe between the bubble generating part and the first valve, and the other end of the third pipe is connected to the second connecting part and the second valve. may be connected to the second pipe between have.

In an embodiment of the present invention, a circulation pump installed in the pipe portion to control the supply pressure and flow rate of the microbubble cleaning solution according to the properties of the material to be cleaned formed inside the vacuum pump; and a control unit controlling operations of the first to fourth valves, the circulation pump, the cleaning liquid tank, and the bubble generating unit.

In an embodiment of the present invention, a plurality of the connecting parts are connected in parallel by the pipe part, and a cleaning operation can be performed together with respect to the vacuum pump coupled to each connecting part.

In order to achieve the above technical object, another embodiment of the present invention provides a cleaning method of a vacuum pump using fine bubbles for cleaning without disassembling the vacuum pump used for vacuum formation of industrial equipment. In the cleaning method of a vacuum pump using microbubbles, first, a cleaning solution selected according to the properties of a material to be cleaned formed inside the vacuum pump is prepared in a cleaning solution tank. Thereafter, the inlet of the vacuum pump is detachably coupled to the first connection part provided in the piping part and the outlet of the vacuum pump to the second connection part provided in the piping part, respectively. Using the supplied gas for generating bubbles and the washing liquid supplied from the washing liquid tank, the bubble generating unit generates a fine bubble washing solution.

The cleaning target material inside the vacuum pump is removed by supplying the microbubble cleaning solution in a direction from an inlet to an outlet of the vacuum pump or in a reverse direction thereof through the pipe part.

In an embodiment of the present invention, the step of preparing the cleaning liquid in the cleaning liquid tank includes preparing the cleaning liquid by injecting a chemical into the circulating water supplied to the cleaning liquid tank, wherein the chemical reacts with the cleaning target material in the vacuum A chemical having a selected PH may be injected to relieve binding between the inside of the pump and the material to be cleaned.

In an embodiment of the present invention, in the step of generating the microbubble cleaning solution, the cleaning target material whose binding is relieved by the reaction can be separated from the cleaning target material by the physical collision of the microbubbles. The gas for generation may be selected according to the properties of the material to be cleaned.

In an embodiment of the present invention, the chemical is selected from one of acidic, neutral and basic, and the gas for generating bubbles is at least one of air, nitrogen (N2), oxygen (O2) and carbon dioxide (CO2). may include

In an embodiment of the present invention, in the step of detachably coupling the vacuum pump to the pipe part, the vacuum pump is coupled to the first connection part and the second connection part of the pipe part, and in a forward mode, the first open the valve and the second valve, close the third and fourth valves, open the third and fourth valves in reverse mode, and close the first and second valves.

In an embodiment of the present invention, the supply pressure and flow rate of the microbubble cleaning solution may be adjusted according to the properties of the material to be cleaned formed inside the vacuum pump through the circulation pump installed in the pipe portion.

According to an embodiment of the present invention, without disassembling the vacuum pump, the microbubble vacuum pump cleaning device capable of cleaning the material to be removed inside by injecting and discharging the microbubble cleaning solution into the vacuum pump and cleaning the vacuum pump using microbubbles method can be provided.

According to such a microbubble vacuum pump cleaning apparatus, the inside can be easily cleaned by a method of mounting a vacuum pump and supplying a microbubble cleaning liquid. Therefore, compared to the existing cleaning method of disassembling the complex and heavy vacuum pump, cleaning and reassembling it, the working time is significantly reduced, and the labor of the operator is significantly saved.

In addition, by injecting the microbubble cleaning liquid into the vacuum pump in the forward mode and the reverse mode, the blind spot inside the vacuum pump is remarkably reduced, and the cleaning quality is greatly improved.

Such forward mode and reverse mode switching can be achieved by simply operating a valve or a switch, and can be automated by a control unit. Therefore, since the time and cost of the periodic cleaning process of the vacuum pump and the disassembly and assembly are omitted, the possibility of occurrence of defects in the disassembly and assembly process is fundamentally eliminated.

1 is a view showing a microbubble vacuum pump cleaning apparatus according to an embodiment of the present invention.
2 is a diagram illustrating an example of a bubble generator according to an embodiment of the present invention.
3 is a view showing an example of a vacuum pump.
4 is a view showing an example of mounting a vacuum pump to the connection part.
5 is a view showing a micro-bubble vacuum pump cleaning device in a reverse mode.
6 is a flowchart illustrating a cleaning method of a vacuum pump using fine bubbles according to an embodiment of the present invention.

Since the present invention can have various changes and can have various forms, specific embodiments are illustrated in the drawings and described in detail in the text. However, this is not intended to limit the present invention to the specific disclosed form, it should be understood to include all modifications, equivalents and substitutes included in the spirit and scope of the present invention. In describing each figure, like reference numerals have been used for like elements.

Unless defined otherwise, all terms used herein, including technical and scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with the meaning in the context of the related art, and should not be interpreted in an ideal or excessively formal meaning unless explicitly defined in the present application. does not

Hereinafter, preferred embodiments of the present invention will be described in more detail with reference to the accompanying drawings.

1 is a view showing a microbubble vacuum pump cleaning apparatus according to an embodiment of the present invention. 2 is a diagram illustrating an example of the bubble generating unit 20 according to an embodiment of the present invention.

1 and 2, the micro-bubble vacuum pump cleaning device is a device for cleaning without disassembling the vacuum pump 300 used for vacuum formation of industrial equipment.

The micro bubble vacuum pump cleaning apparatus includes a cleaning liquid tank 10 , a bubble generating unit 20 , a connecting unit 50 , and a piping unit 30 .

Circulating water is supplied to the washing liquid tank 10 , and a washing solution may be prepared by injecting a chemical into the circulating water. The chemical whose PH is selected may be selected to relieve the binding between the inside of the vacuum pump 300 and the material to be cleaned by reaction with the material to be cleaned. For example, the chemical may be selected from one of acidic, neutral and basic.

The bubble generating unit 20 may generate a fine bubble washing solution using the supplied gas for generating bubbles and the washing solution supplied from the washing solution tank 10 .

The gas for generating bubbles may include at least one of air, nitrogen (N2), oxygen (O2), and carbon dioxide (CO2). The gas for generating bubbles may also be selected in consideration of the properties of the chemical for forming the cleaning solution and the material to be removed accumulated in the vacuum pump 300 .

The bubble generator 20 illustrated in FIG. 2 is an example for explaining the bubble generator 20 , and various types of bubble generators may be employed as the bubble generator 20 . The bubble generating unit 20 includes a body 21, a cleaning liquid inlet 22 formed in the body and injecting a cleaning liquid from the cleaning liquid tank 10, and a gas inlet 23 through which gas is injected from a gas supply unit such as a gas tank. and a bubble generating unit 25 for generating a microbubble cleaning solution in which microbubbles are formed by using the cleaning solution and gas. Here, the microbubbles are very fine bubbles, and the microbubble generator 20 may generate micro-sized or nano-sized microbubbles. A device for generating microbubbles may be adopted by borrowing an existing device.

3 is a diagram illustrating an example of the vacuum pump 300 .

The production process of semiconductors, LCDs, solar modules, LEDs, etc. includes various chambers, and the vacuum pump 300 may be connected to these chambers to form a vacuum. The vacuum pump 300 may have an inlet through which gas from the process equipment is sucked and an exhaust port through which the gas is discharged. The vacuum pump 300 shown in FIG. 3 is only an example for description, and various types of vacuum pumps 300 may be cleaned.

For example, CVD (thin film deposition) and diffusion (diffusion) processes use a large amount of silicon-based raw material, which accumulates inside the vacuum pump 300 and causes an increase in operating current, so periodic cleaning is required.

4 is a view showing an example of mounting the vacuum pump 300 to the connection part.

1 and 4 , the pipe part 30 provides a passage for the microbubble cleaning solution 251 . The cleaning liquid tank 10 and the bubble generating unit 20 are connected, and the piping unit 30 can connect the vacuum pump 300 and the bubble generating unit 20, and the vacuum pump 300 and the washing liquid tank 10. have.

The connecting part 50 may be installed in the pipe part 30 , and the vacuum pump 300 may be detachably coupled to the connecting part 50 . The connecting part 50 may include a first connection part 51 connected to an inlet of the vacuum pump 300 and a second connection part 52 connected to an outlet of the vacuum pump 300 .

Connection parts 51 and 52 may be provided at each end of the branch pipes of the pipe part 30 , respectively. By preparing these connection parts in various shapes and selecting and installing them according to the specifications or shapes of the vacuum pump, the microbubble vacuum pump cleaning apparatus can be applied to various types of vacuum pumps. In addition, the branch pipe may be in the form of a pipe having rigidity. Alternatively, by forming the branch pipe in the form of a flexible hose or tube, it is possible to flexibly move the branch pipe to the inlet and outlet sides of the vacuum pump according to the size or shape of the vacuum pump.

A plurality of connecting parts 50 may be connected in parallel to the pipe part 30 . Accordingly, at least one vacuum pump 300 may be detachably coupled to the plurality of connecting parts 50 . That is, a cleaning operation may be performed simultaneously with respect to a plurality of vacuum pumps 300 . A selection valve is individually installed in the branch pipe of the piping unit 30 connected to each connecting unit 50 to start or block the supply of the microbubble cleaning solution to the vacuum pump 300 .

The microbubble cleaning liquid may be supplied from the bubble generating unit 20 to the vacuum pump 300 through the piping unit 30 and the connecting unit 50 . Since the microbubble cleaning liquid is injected into the vacuum pump 300 and the cleaning liquid after cleaning is discharged from the vacuum pump 300 , the inside can be cleaned without disassembling the vacuum pump 300 .

A cleaning liquid is prepared by injecting a chemical into the circulating water supplied to the cleaning liquid tank 10, but the chemical is the inner wall of the body 310 of the vacuum pump 300 or the internal part 340 of the vacuum pump 300 (eg, a fan). , blades, etc.) may be selected according to the properties of the material to be cleaned adsorbed, attached, or accumulated. The chemical may be a material whose PH is selected to relieve the binding between the inside of the vacuum pump 300 and the material to be cleaned by reaction with the material to be cleaned.

As shown on the right side of FIG. 4 , the cleaning target material whose binding is relieved by the reaction may be separated from the cleaning target material by the physical collision of microbubbles. The gas for generating bubbles may be selected according to the properties of the material to be cleaned.

The chemical is selected from one of acid, neutral and basic, and the gas for generating bubbles may include at least one of air, nitrogen (N2), oxygen (O2), and carbon dioxide (CO2).

5 is a view showing a micro-bubble vacuum pump cleaning device in a reverse mode.

1 and 5 , the pipe unit 30 includes a bubble generating unit 20 , a first connecting unit 51 , a vacuum pump 300 , a second connecting unit 52 , and a cleaning liquid tank 10 in this order. The forward circulation path, the bubble generating unit 20 , the second connection unit 52 , the vacuum pump 300 , the first connection unit 51 , and the cleaning liquid tank 10 may form a reverse circulation path in the order. The shape of the piping for achieving the forward circulation path and the reverse circulation path may be variously changed.

For example, the pipe unit 30 may include a first pipe 31 for connecting the bubble generating unit 20 and the first connection unit 51 , and a second connection unit 52 for connecting the cleaning liquid tank 10 . a second pipe 32 for connecting the bubble generating unit 20 and the second connecting unit 52, and a third pipe 41 connecting the first connecting unit 51 and the cleaning liquid tank 10 to each other. 4 may include a pipe (42).

A first valve 71 that opens in the forward direction and closes in the reverse direction is installed in the first pipe 31, and a second valve 72 that opens in the forward direction and closes in the reverse direction is installed in the second pipe 32, A third valve 73 that opens in the reverse direction and closes in the forward direction is installed in the third pipe 41, and a fourth valve 74 that opens in the reverse direction and closes in the forward direction is installed in the fourth pipe 42. have.

A method of installing a pipe to form a forward circulation path and a reverse circulation path may be variously modified. In this embodiment, one end of the third pipe 41 is connected to the first pipe 31 between the bubble generating unit 20 and the first valve 71 , and the other end of the third pipe 41 is the second connecting part. It is connected to the second pipe 32 between the 52 and the second valve 72 , and one end of the fourth pipe 42 is a first pipe between the first valve 71 and the first connection part 51 . 31 , and the other end of the fourth pipe 42 may be connected to the cleaning liquid tank 10 .

In the forward mode (see Fig. 1), the first and second valves 72 are opened, and the third and fourth valves 73 and 74 are closed. The microbubble cleaning liquid flows in the order of the first pipe 31 , the first connection part 51 , the inside of the vacuum pump 300 , the second connection part 52 , and the second pipe 32 , and is to be recovered to the cleaning solution tank 10 . can A filter for removing impurities or materials to be cleaned from the recovered cleaning solution may be installed in the second pipe 32 .

In the reverse mode (see Fig. 5), the third valve 73 and the fourth valve 74 are opened, and the first valve 71 and the second valve 72 are closed. The microbubble cleaning liquid flows in the order of the first pipe 31 , the third pipe 41 , the second connection part 52 , the inside of the vacuum pump 300 , the first connection part 51 , and the fourth pipe 42 , and the cleaning liquid It can be recovered to the tank 10 .

The microbubble vacuum pump cleaning apparatus may further include a circulation pump 80 and a control unit (not shown).

The circulation pump 80 is installed in the pipe part 30 to control the supply pressure and flow rate of the microbubble cleaning solution according to the properties of the cleaning target material formed inside the vacuum pump 300 . In the example shown in FIG. 1 , the mild pump is installed in the first pipe 31 between the bubble generating unit 20 and the first connecting unit 51 , but the position at which the circulation pump 80 is installed may be changed. .

The cleaning liquid tank 10 , the bubble generating unit 20 , the valves, the circulation pump 80 , and the like can all be automatically operated using an electrical signal and an actuator. The control unit may control them by a loaded program.

According to such a microbubble vacuum pump cleaning device, the inside can be easily cleaned by a method of attaching and detaching the vacuum pump 300 . Therefore, compared to the conventional cleaning method of disassembling the complex and heavy vacuum pump 300, cleaning and reassembling it, the working time is significantly reduced, and the labor force of the operator is significantly saved.

In addition, by injecting the microbubble cleaning liquid into the vacuum pump 300 in the forward mode and the reverse mode, the cleaning blind spots inside the vacuum pump 300 are significantly reduced, and the cleaning quality is greatly improved.

Such forward mode and reverse mode switching can be achieved by simply operating a valve or a switch, and can be automated by a control unit. Accordingly, time and cost reduction of the periodic cleaning process of the vacuum pump 300 is achieved.

In addition, since the disassembly and assembly of the vacuum pump for cleaning is omitted, the possibility of occurrence of defects in the disassembly and assembly process is fundamentally eliminated.

6 is a flowchart illustrating a cleaning method of a vacuum pump using fine bubbles according to an embodiment of the present invention.

The cleaning method of a vacuum pump using fine bubbles provides a method for cleaning without disassembling a vacuum pump used for vacuum formation of industrial equipment.

First, a cleaning liquid selected according to the properties of the material to be cleaned formed inside the vacuum pump 300 is prepared in the cleaning liquid tank 10 ( S10 ). Circulating water is supplied to the cleaning liquid tank 10 and a chemical may be supplied thereto to prepare a cleaning liquid. The chemical may be injected with a selected PH to relieve the binding between the inside of the vacuum pump 300 and the material to be cleaned by reaction with the material to be cleaned.

The method of supplying the chemical to the cleaning liquid tank 10 may be performed manually by an operator, or may be performed automatically by connecting the inlet of the chemical feeder to the port of the cleaning liquid tank. On the other hand, several types of chemical supplies may be connected to a plurality of ports of the cleaning liquid tank 10, respectively, and only the valves of the necessary chemical supplies may be opened and supplied.

Thereafter, the inlet of the vacuum pump 300 is connected to the first connection unit 51 provided in the piping unit 30 , and the outlet of the vacuum pump 300 is connected to the second connection unit 52 provided in the piping unit 30 , Each is detachably coupled to each other (S20). By connecting the vacuum pump 300 to each of the plurality of connecting units 50 , the cleaning operation may be performed together with respect to the plurality of vacuum pumps 300 .

The process of coupling the vacuum pump 300 to the connecting part 50 and the process of preparing the cleaning solution may be performed first.

Thereafter, the supply pressure and flow rate of the microbubble cleaning solution may be adjusted according to the properties of the material to be cleaned formed in the vacuum pump 300 through the circulation pump 80 installed in the pipe unit 30 (S30).

Thereafter, it is possible to select from the forward mode and the reverse mode through the control unit (S40). Open the first valve 71 and the second valve 72 in forward mode, close the third valve 73 and fourth valve 74, and close the third valve 73 in reverse mode and the fourth valve 74 is opened, and the first valve 71 and the second valve 72 are closed. Alternatively, you can select the complex mode. In the composite mode, the cleaning can be performed by automatically switching to the reverse mode after cleaning in the forward mode for a certain period of time.

On the other hand, the process of adjusting the supply pressure and flow rate and the process of mode selection may be performed first.

Subsequently, a gas for generating bubbles is supplied to the bubble generating unit 20 from an external device such as a gas tank to generate bubbles in the washing solution supplied from the washing solution tank 10, thereby generating a fine bubble washing solution (S50). The generated microbubble cleaning liquid 251 is supplied through the pipe unit 30 , and the supply pressure and flow rate are adjusted by the preset circulation pump 80 , and then supplied to the vacuum pump through the connecting unit 50 .

Accordingly, the cleaning target material inside the vacuum pump 300 is removed by supplying the microbubble cleaning solution from the inlet to the outlet of the vacuum pump 300 or in the reverse direction through the pipe part 30 (S60).

The chemical of the microbubble cleaning solution may cause a chemical reaction with the material to be removed formed on the inner wall of the vacuum pump 300 or components such as the blade. Accordingly, the binding between the material to be removed and the vacuum pump 300 may be relaxed. In addition, as the microbubbles physically collide with the inner wall or component surface of the vacuum pump 300 , the material to be removed may be separated. The removed material to be removed may be discharged through the pipe part 30 according to the circulation of the cleaning liquid.

On the other hand, a purification unit (not shown) is added to the recovery pipe where the second pipe 32 and the fourth pipe 42 are joined for recovery to the washing solution tank 10 to purify the microbubble washing solution after washing. There is (S70). As a method of purification, various methods such as filtering or chemical treatment may be used.

The purified fine bubble cleaning solution may be recovered back to the cleaning solution tank 10 . Of course, after purifying the cleaning liquid, it may be discharged without recovery.

According to the cleaning method of the vacuum pump using such fine bubbles, it is possible to clean with good efficiency without disassembling the vacuum pump 300 . In addition, since several vacuum pumps 300 can be cleaned together, it is significantly reduced in terms of time and cost, and the possibility of occurrence of defects is fundamentally blocked by the removal of disassembly and assembly.

10: cleaning liquid tank
20: bubble generator
30: piping
31: first pipe
32: second pipe
41: third pipe
42: fourth pipe
50: connecting part
51: first connection part
52: second connection part
71: first valve
72: second valve
73: third valve
74: fourth valve
80: circulation pump
300: vacuum pump

Claims (13)

In the microbubble vacuum pump cleaning device for cleaning without disassembling the vacuum pump used for vacuum formation of industrial equipment,
cleaning liquid tank;
a bubble generating unit generating a fine bubble cleaning solution using the supplied gas for generating bubbles and the cleaning liquid supplied from the cleaning liquid tank;
In order to inject the microbubble cleaning liquid into the vacuum pump or to discharge the cleaning liquid after cleaning from the vacuum pump, a first connection part connected to the inlet of the vacuum pump and a second connection part connected to the outlet of the vacuum pump are included. and a connecting portion to which at least one vacuum pump is detachably coupled; and
and a pipe part connected to the bubble generating part and the connecting part to provide a passage for the microbubble cleaning liquid,
The pipe part,
a forward circulation path in the order of the bubble generating unit, the first connecting unit, the vacuum pump, the second connecting unit, and the cleaning liquid tank; and
and a reverse circulation path in the order of the bubble generating unit, the second connecting unit, the vacuum pump, the first connecting unit, and the washing liquid tank.
delete The method according to claim 1,
The pipe part,
a first pipe for connecting the bubble generating unit and the first connecting unit;
a second pipe for connecting the second connection part and the cleaning liquid tank;
a third pipe for connecting the bubble generating unit and the second connecting unit; and
and a fourth pipe for connecting the first connection part and the cleaning liquid tank.
4. The method according to claim 3,
A first valve that opens in a forward direction and closes in a reverse direction is installed in the first pipe,
A second valve that opens in the forward direction and closes in the reverse direction is installed in the second pipe,
A third valve that opens in the reverse direction and closes in the forward direction is installed in the third pipe,
A microbubble vacuum pump cleaning apparatus, characterized in that the fourth pipe is provided with a fourth valve that is opened in the reverse direction and closed in the forward direction.
5. The method according to claim 4,
One end of the third pipe is connected to the first pipe between the bubble generating unit and the first valve,
The other end of the third pipe is connected to the second pipe between the second connection part and the second valve,
One end of the fourth pipe is connected to the first pipe between the first valve and the first connection part,
The other end of the fourth pipe is a micro-bubble vacuum pump cleaning device, characterized in that connected to the cleaning liquid tank.
5. The method of claim 4,
a circulation pump installed in the pipe portion to control the supply pressure and flow rate of the microbubble cleaning solution according to the properties of the material to be cleaned formed inside the vacuum pump; and
The microbubble vacuum pump cleaning apparatus, characterized in that it further comprises a control unit for controlling the operation of the first to fourth valves, the circulation pump, the cleaning liquid tank, and the bubble generating unit.
The method according to claim 1,
A plurality of connecting parts are connected in parallel by the pipe part, and a cleaning operation for a vacuum pump coupled to each connecting part can be performed together.
In the cleaning method of a vacuum pump using fine bubbles for cleaning without disassembling the vacuum pump used for vacuum formation of industrial equipment,
preparing a cleaning solution selected according to the properties of a material to be cleaned formed inside the vacuum pump in a cleaning solution tank;
Removably coupling the inlet of the vacuum pump to the first connecting portion provided in the piping portion and the outlet of the vacuum pump to the second connecting portion provided in the piping portion, respectively;
generating a microbubble cleaning liquid by a bubble generating unit using the supplied gas for generating bubbles and the cleaning liquid supplied from the cleaning liquid tank; and
A vacuum pump using microbubbles, characterized in that it comprises the step of removing the cleaning target material inside the vacuum pump by supplying the microbubble cleaning solution from the inlet to the outlet of the vacuum pump through the pipe portion or in a reverse direction thereof. cleaning method.
9. The method of claim 8,
The step of preparing the cleaning liquid in the cleaning liquid tank,
Prepare the cleaning solution by injecting a chemical into the circulating water supplied to the cleaning liquid tank, wherein the chemical reacts with the cleaning target material to relieve the binding between the inside of the vacuum pump and the cleaning target material. A cleaning method of a vacuum pump using fine bubbles, characterized in that the input.
10. The method of claim 9,
In the step of generating the microbubble cleaning solution, the gas for generating bubbles is the cleaning target material so that the cleaning target material, whose binding is relieved by the reaction, can be released by the physical collision of the microbubbles. A cleaning method of a vacuum pump using microbubbles, characterized in that it is selected according to the properties of
11. The method of claim 10,
The drug is selected from one of acidic, neutral and basic,
The gas for generating bubbles includes at least one of air, nitrogen (N2), oxygen (O2) and carbon dioxide (CO2).
9. The method of claim 8,
In the step of detachably coupling the vacuum pump to the pipe portion,
The vacuum pump is coupled to the first connection part and the second connection part of the pipe part of claim 4,
open the first valve and the second valve, close the third valve and the fourth valve in the forward mode;
In a reverse mode, the third valve and the fourth valve are opened, and the first valve and the second valve are closed.
13. The method of claim 12,
Vacuum using microbubbles, characterized in that it further comprises the step of adjusting the supply pressure and flow rate of the microbubble cleaning solution according to the properties of the material to be cleaned formed inside the vacuum pump through the circulation pump installed in the pipe part How to clean the pump.

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