CN214310395U - Loading platform, bearing platform and detection equipment - Google Patents

Abstract

The application discloses load platform, load platform are used for bearing the hand-basket, and the hand-basket is used for installing the glued membrane frame of wafer, and load platform includes this machine and a plurality of first detection piece, and the body is provided with a plurality of positions of examining, and a plurality of first detection piece correspond to be installed at a plurality of positions of examining, and when the hand-basket carried on load platform, first detection piece can cooperate with the hand-basket in order to detect the size of hand-basket. The application also discloses plummer and check out test set cooperatees with the hand-basket through a plurality of first detection pieces that detect on the position, can detect the size of the hand-basket of carrying on the loading platform.

Description

Loading platform, bearing platform and detection equipment

Technical Field

The application relates to the technical field of detection, and more particularly relates to a loading platform, a bearing platform and detection equipment.

Background

With the continuous emergence of novel packaging technology, the thickness of chips required by three-dimensional packaging of some high-performance electronic product chips is thinner and thinner. After the circuit layer is manufactured, the back face of the silicon wafer needs to be thinned and polished, then the film is pasted, the ultrathin wafer is supported by the tension of the adhesive film pasted on the frame, the ultrathin wafer is kept flat, the problems of warping, drooping and the like are solved, and the transmission problem of the ultrathin wafer is solved. In addition, the dicing, scribing and grinding of the wafer all require a film frame to provide the necessary load bearing to complete the processing and inspection tasks. However, the adhesive film frame needs to be mounted by using a basket so as to be convenient for conveying the adhesive film frame, the basket needs to be carried on the loading platform, the adhesive film frame needs to be used due to different sizes of wafers, and a loading platform capable of detecting the size of the basket is needed.

SUMMERY OF THE UTILITY MODEL

The embodiment of the application provides a loading platform, a bearing platform and detection equipment.

The loading platform of the embodiment of the application is used for bearing the hand-basket, the hand-basket is used for installing the glued membrane frame of wafer, the loading platform includes this machine and a plurality of first detection piece, the body is provided with a plurality of detection positions, and is a plurality of first detection piece is corresponding to be installed in a plurality of detect the position the hand-basket carries on when on the loading platform, first detection piece can with the hand-basket cooperation is in order to detect the size of hand-basket.

In some embodiments, the first detecting element includes a guide pillar and a sensor, the guide pillar is movably installed in the detecting position and protrudes out of the surface of the body, and when the basket is carried on the loading platform, the basket can abut against the guide pillar, so that the guide pillar moves into the body; the sensor can cooperate with the conductive post to detect whether the basket is properly carried on the load station.

In some embodiments, the detection positions include a plurality of first sub-detection positions and a plurality of second sub-detection positions, and the first detection member mounted in the first sub-detection positions is used for detecting the basket with a first size; the second sub-detection position is far away from the central axis of the body compared with the first sub-detection position, the first detection piece arranged in the second sub-detection position is used for detecting the lifting basket with a second size, and the second size is larger than the first size.

In some embodiments, the loading station further comprises a positioning member adjustably mounted on the body, the positioning member being for positioning the basket.

In some embodiments, the positioning member comprises a first sub-positioning member and a second sub-positioning member, the first sub-positioning member is adjustably mounted on the body and is capable of positioning the basket in a first direction; the second sub-positioning piece is adjustably mounted on the body and can be used for positioning the lifting basket along a second direction, and the second direction is different from the first direction.

In some embodiments, the loading station further comprises a reading device mounted on the body for reading data of the carrier.

In some embodiments, the information reading device comprises a first reading sensor and a second reading sensor, the first reading sensor is mounted on the body and used for reading data of the basket with a first size; the second reading sensor is mounted on the body, the second reading sensor is far away from the center of the body compared with the first reading sensor, the second information reading sensor is used for reading data of the basket with a second size, and the second size is larger than the first size.

In some embodiments, the loading station further comprises a second detecting member, the second detecting member is mounted on the body, and the second detecting member is used for detecting whether the adhesive film frame moves on the body.

In some embodiments, the loading station further comprises a third detection member mounted on the body for detecting whether the basket is in an open state.

In some embodiments, the body is provided with an indicator light for indicating the working state of the loading platform.

The plummer of this application embodiment includes above-mentioned any embodiment the loading platform and protection casing, the protection casing is installed on the loading platform.

In some embodiments, the protective hood includes a hood body mounted on the load station, the hood body having an opening; the cover door is movably connected with the cover body and can selectively close or open the opening.

In some embodiments, the carrier further comprises a fourth detection element, which is mounted on the cover or the cover door and is capable of detecting whether the opening is open.

The detection equipment of this application embodiment includes frame and above-mentioned any embodiment the plummer, the plummer is installed in the frame.

In the loading platform, the bearing platform and the detection equipment of the embodiment of the application, a plurality of detection positions are arranged on the body, the first detection piece is arranged at the plurality of detection positions and corresponds to the detection positions respectively, when the lifting basket is carried on the loading platform, the first detection piece can be matched with the lifting basket to detect the size of the lifting basket, so that the size of a wafer to be detected can be determined, and the wafer can be detected more accurately during subsequent detection.

Additional aspects and advantages of embodiments of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of embodiments of the present application.

Drawings

The above and/or additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

FIG. 1 is a schematic structural diagram of a detection apparatus according to an embodiment of the present application;

fig. 2 is a schematic perspective view of a plummer of the detection apparatus according to the embodiment of the present disclosure;

FIG. 3 is a schematic plan view of a carrier stage of an inspection apparatus according to an embodiment of the present disclosure;

FIG. 4 is a schematic plan view of another perspective of a carrier stage of an inspection apparatus according to an embodiment of the present disclosure;

FIG. 5 is a schematic plan view of a further perspective of a carrier stage of an inspection apparatus according to an embodiment of the present disclosure;

fig. 6 is a schematic perspective view of a loading platform of the inspection apparatus according to the embodiment of the present disclosure;

FIG. 7 is a schematic plan view of a loading platform of a carrier platform of the inspection apparatus according to the embodiment of the present disclosure;

fig. 8 is a schematic plan view of a first detection member of a loading table of a carrier table of a detection apparatus according to an embodiment of the present application.

Detailed Description

Embodiments of the present application will be further described below with reference to the accompanying drawings. The same or similar reference numbers in the drawings identify the same or similar elements or elements having the same or similar functionality throughout.

In addition, the embodiments of the present application described below in conjunction with the accompanying drawings are exemplary and are only for the purpose of explaining the embodiments of the present application, and are not to be construed as limiting the present application.

In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through intervening media. Also, a first feature "on," "above," and "over" a second feature may mean that the first feature is directly above or obliquely above the second feature, or that only the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

Referring to fig. 1 to 5, an inspection apparatus 1000 according to an embodiment of the present disclosure includes a frame 200 and a susceptor 100, wherein the susceptor 100 is mounted on the frame 200. The bearing table 100 comprises a loading table 10 and a protective cover 20, the protective cover 20 is installed on the loading table 10, the loading table 10 is used for bearing a basket 40, the basket 40 is used for installing a film frame 41 of a wafer, the wafer is installed in the film frame 41, the basket 40 can be transported in the detection equipment 1000 with the film frame 41, and in addition, the basket 40 can also protect the film frame 41 and the wafer from being damaged easily in the transportation process.

Referring to fig. 5, the loading platform 10 of the embodiment of the present disclosure includes a body 11 and a plurality of first detecting members 12, the body 11 is provided with a plurality of detecting positions 111, the plurality of first detecting members 12 are correspondingly installed at the plurality of detecting positions 111, and when the basket 40 is loaded on the loading platform 10, the first detecting members 12 can cooperate with the basket 40 to detect the size of the basket 40.

In the loading platform 10, the bearing platform 100 and the detection equipment 1000 according to the embodiment of the application, the body 11 is provided with the plurality of detection positions 111, the plurality of detection positions 111 are respectively provided with the first detection piece 12 correspondingly, and when the basket 40 is carried on the loading platform 10, the first detection piece 12 can be matched with the basket 40 to detect the size of the basket 40, so that the size of a wafer to be detected can be determined, and the wafer can be detected more accurately in subsequent detection.

Specifically, the inspection apparatus 1000 may be used to inspect a wafer for defects, such as wafer surface redundancy, crystal defects, mechanical damage (scratch patterns), and the like. The frame 200 may provide support for the carrier 100, so that the carrier 100 is not easily moved. Other devices, such as a robot, a microscope, an imaging device, etc., may also be disposed on the gantry 200, not to mention here.

The susceptor 100 includes a loading platform 10 and a protective cover 20, the protective cover 20 is provided with a containing cavity for containing the basket 40 carried on the loading platform 10, so that when the basket 40 is carried on the loading platform 10, the protective cover 20 can protect the basket 40 and further protect the adhesive film frame 41 and the wafer, and can prevent the wafer and the adhesive film frame 41 from being damaged by dust, impurities and the like.

Referring to fig. 2 to 5, the protective cover 20 may be detachably mounted on the loading platform 10 by screws, bolts, fasteners, etc., or the protective cover 20 may be non-detachably mounted on the loading platform 10 by welding, gluing, etc. The protection cover 20 comprises a cover body 21 and a cover door 22, the cover body 21 is installed on the loading platform 10, and the cover body 21 is provided with an opening 211; the cover door 22 is movably connected to the cover 21 and can selectively close or open the opening 211. Specifically, the cover 21 may be detachably or non-detachably mounted on the loading table 10, and the cover 21 is provided with an opening 211, through which the basket 40 can be loaded on the loading table 10, and through which the basket 40 can be unloaded from the loading table 10.

The cover door 22 may be movably connected to the cover 21 by a hinge, etc., and the cover door 22 may be rotated to open the opening 211 or close the opening 211 of the cover door 22. Referring to fig. 2, the protective cover 20 further includes a pneumatic rod 23, one end of the pneumatic rod 23 is connected to the cover door 22, and the other end of the pneumatic rod 23 is connected to the cover 21, so that the cover door 22 can move relative to the cover 21 by changing the telescopic length of the pneumatic rod 23, and the cover door 22 can open or close the opening 211 of the cover 21. Of course, other types of pull rod structures (e.g., connecting rods) may be provided on the cover door 22, and the pull rod structures may pull the cover door 22 to move the cover door 22 relative to the cover body 21, so that the cover door 22 may close or open the opening.

Further, the cover door 22 and the cover body 21 can be connected in a magnetic attraction manner, so that the connection relationship between the cover door 22 and the cover body 21 is relatively tight, and the cover door 22 and the cover body 21 are not easy to slide relatively. For example, the cover door 22 and the cover 21 may be made of magnetic materials; or, the cover door 22 is provided with a magnetic element 24, and the cover body 21 is made of metal material such as iron, alloy, etc. which can be absorbed by the magnetic element 24; or, the cover body 21 is provided with a magnetic element, and the cover door 22 is made of metal material such as iron, alloy, etc. which can be absorbed by the magnetic element; or, the cover body 21 is provided with a magnetic element, and the surface of the cover door 22 contacting with the cover body 21 is provided with a magnetic strip; the magnetic attraction between the cover door 22 and the cover 21 may be other ways, which are not listed here. In the embodiment shown in fig. 2, the cover 21 is provided with a magnetic member 24, and the magnetic member 24 can attract the cover door 22 so that the cover door 22 is not easily separated from the cover 21.

Referring to fig. 2 to 5, when the protection cover 20 is in the open state (i.e., when the opening 211 of the cover 21 is in the open state), the robot can extend into the basket 40 to grab the film frame 41, and therefore, it is required to detect whether the opening 211 of the cover 21 is in the open state, so as to avoid the robot or the cover door 22 from being damaged due to collision between the robot and the cover door 22 when the opening 211 is in the closed state.

Further, the carrier 100 further includes a fourth detecting member 30, the fourth detecting member 30 is mounted on the cover 21 or the cover door 22, and the fourth detecting member 30 can detect whether the opening 211 is opened. Specifically, the fourth detecting member 30 may include a photoelectric sensor, and the photoelectric sensor may be disposed on a side wall of the opening 211 of the cover body 21, and if the cover door 22 closes the opening 211, the emitted light of the photoelectric sensor will be blocked by the cover door 22, so that the photoelectric sensor may receive the light reflected by the cover door 22, and then the photoelectric sensor detects that the opening is in a closed state; if the cover door 22 opens the opening 211, the light emitted by the photoelectric sensor is not blocked by the cover door 22, and the photoelectric sensor cannot receive the light emitted by the photoelectric sensor or receives weak light emitted by the photoelectric sensor, and it can be detected that the opening 211 is in an open state. Of course, the fourth detecting member 30 may also include other types of sensors (e.g., pressure sensors), which will not be described in detail herein.

Referring to fig. 2, the cover door 22 is further provided with a handle 25, so that a user or a manipulator or the like can lift the cover door 22 by lifting the handle, so that the cover door 22 can move relative to the cover body 21. The cover door 22 is provided with an observation window 221, and the state of the film frame 41 and the wafer mounted in the protection cover 20 can be observed through the observation window 221. The viewing window 221 may be made of a light-transmitting material, such as glass.

The loading table 10 will be described in detail with reference to the drawings.

Referring to fig. 1, 6 and 7, the loading platform 10 includes a body 11 and a first detecting member 12. The body 11 may be mounted on the frame 200 of the inspection apparatus 1000, the body 11 may be used to provide support for the basket 40, the shield 20 may be mounted on the body 11, and the body 11 may provide support for the shield 20. The body 11 is provided with a plurality of detection sites 111, and the detection sites 111 can be used for mounting the first detection member 12. The detection site 111 may include a hole, a protrusion, etc. provided on the body 11, which are not listed here.

The number of the first detecting members 12 is plural, the plural first detecting members 12 are correspondingly installed on the plural detecting positions 111 of the body 11, and when the basket 40 is loaded on the loading platform 10, the first detecting members 12 can be matched with the basket 40 to identify the size of the basket 40. For example, the basket 40 can be brought into contact with the first detecting member 12 after being placed on the loading platform 10, and the size of the basket 40 can be detected based on the number of the first detecting members 12 brought into contact with the basket 40; alternatively, the size of the basket 40 may be determined based on the distribution of the first sensing members 12 in contact with the basket 40.

Referring to fig. 2 and 7, the detection site 111 includes a first sub-detection site 1111 and a second sub-detection site 1112, the second sub-detection site 1112 is further away from the central axis of the main body 11 than the first sub-detection site 1111, and the plurality of first detection elements 12 are respectively installed in the first sub-detection site 1111 and the second sub-detection site 1112. The first sensing member 12 installed at the first sub-sensing unit 1111 may sense the first-sized baskets 40, and the first sensing member 12 installed at the second sub-sensing unit 1112 may sense the second-sized baskets 40.

Specifically, when the basket 40 of the first size is carried on the loading platform 10, the first detecting member 12 installed at the first sub-detecting location 1111 may sense the basket 40 (e.g., interference with the basket 40, or light shielding by the basket 40, etc.) to determine that the size of the basket 40 carried on the loading platform 10 is the first size. When the second size of the basket 40 is loaded on the loading platform 10, the first detecting member 12 installed at the second sub-detecting position 1112 may sense the basket 40 (for example, the basket 40 collides with the first detecting member, or the basket 40 blocks light, etc.), so as to determine that the size of the basket 40 loaded on the loading platform 10 at this time is the first size, and the first detecting member 12 installed at the first sub-detecting position 1111 may sense the basket 40 or may not sense the basket 40 at this time. It can be understood that if the first detecting member 12 installed at the second sub-detecting position 1112 detects the basket 40, the basket 40 has a second size; if the first detecting member 12 installed at the first sub-detecting position 1111 detects the basket 40 and the first detecting member 12 of the second sub-detecting position 1112 does not detect the basket 40, the basket 40 has the second size.

Referring to fig. 2, 6 and 7, the number of the first sub-detection sites 1111 is four, the number of the second sub-detection sites 1112 is four, the number of the first detection elements 12 is eight, four first detection elements 12 are installed in the first sub-detection sites 1111, and four first detection elements 12 are installed in the second sub-detection sites 1112. When the first size basket 40 is mounted on the loading platform 10, the first sub-detection position 1111 is covered by the basket 40, so that the first detection member 12 mounted at the first sub-detection position 1111 can detect the basket 40, and the first sub-detection member mounted at the second sub-detection position 1112 cannot detect the basket 40, thereby determining that the basket 40 has the first size. When the basket 40 of the second size is mounted on the loading platform 10, the basket 40 covers the first sub-detection position 1111 and the second sub-detection position 1112, and the first detector 12 mounted on the second sub-detection position 1112 can detect the basket 40, and thus the basket 40 can be determined to be the second size.

In one embodiment, the first dimension is 8 inches and the second dimension is 12 inches. Of course, the first size and the second size in the present embodiment may be other sizes. The loading platform 10 according to the embodiment of the present invention can also be used for detecting a basket having a size such as a third size, a fourth size, a fifth size, and the like by providing a plurality of detection positions, which are not illustrated here.

Wherein, first detection piece 12 can be pressure sensor, and when the hand-basket 40 contradicts with first detection piece 12, first detection piece 12 can sense the pressure of hand-basket 40, and then can confirm that the hand-basket 40 has been placed to current detection position 111. The first detecting member 12 may also be a photoelectric sensor, the photoelectric sensor includes an emitting end and a receiving end, and when the basket 40 is not placed on the detecting position 111, the light emitted by the emitting end is received by the receiving end to be stronger; when the basket 40 is placed at the detection position 111, the receiving end cannot receive the light emitted by the emitting end or the received light is weak.

After the basket 40 is placed on the loading platform 10, there may be situations such as unstable placement of the basket 40, askew placement of the basket 40, etc., the robot may not be able to take out the adhesive film frame 41 from the basket 40, or the robot may easily damage the adhesive film frame 41 or the wafer when gripping the adhesive film frame 41. Therefore, it is necessary to detect whether the basket 40 is correctly placed on the loading platform 10, so as to avoid that the basket 40 is mistakenly loaded on the loading platform 10 to influence the normal operation of the subsequent detection process.

Further, referring to fig. 2, 6 to 8, the first detecting element 12 includes a conductive pillar 121 and a sensor 122, the conductive pillar 121 is movably mounted on the body 11 and protrudes out of the surface of the body 11, when the basket 40 is mounted on the platform 100, the basket 40 can abut against the conductive pillar 121 and the conductive pillar 121 moves toward the body 11; the sensor 122 can cooperate with the conductive post 121 to identify whether the carrier 40 is properly seated on the dock 10. Specifically, when the basket 40 is correctly mounted on the loading platform 10, the plurality of guide pillars 121 abutting against the basket 40 move down by the same distance. The sensor 122 can detect the distance of the downward movement of the guide pillar 121 to determine whether the basket 40 is correctly placed on the carrier 100.

Specifically, the sensor 122 includes a photo sensor, which includes an emitting end 1221 and a receiving end 1222, the emitting end 1221 can continuously emit light toward the receiving end 1222, and the receiving end 1222 can receive the light emitted by the emitting end 1221. The conducting post 121 is mounted between the transmitting end 1221 and the receiving end 1222. If the basket 40 does not interfere with the conductive post 121, the conductive post 121 does not block the light emitted from the emitting end 1221 to the receiving end 1222, and the receiving end can receive the light emitted from the emitting end 1221; if the basket 40 abuts against the conductive post 121, so that the conductive post 121 moves downwards, the conductive post 121 blocks the light emitted from the emitting end 1221 to the receiving end 1222, and the receiving end 1222 cannot receive the light emitted from the emitting end 1221, the sensor 122 recognizes that the basket 40 is mounted on the detection position 111 where the sensor is located. Therefore, the matching between the photoelectric sensor and the conductive column 121 can detect which detection positions 111 the basket 40 is mounted on, and further obtain the size information of the basket 40.

For example, if a first size of the basket 40 is loaded on the loading platform 10, the basket 40 should theoretically be matched with the first detecting member 12 located at the first sub-detecting position 1111, and if it is found that there is a part of the first detecting member 12 in the first sub-detecting position 1111 that is not supported by the basket 40, it can be considered that the basket 40 is not properly placed on the loading platform 10. Or it is found that a part of the conductive columns 121 of the first sensing member 12 does not completely shield the light emitted from the emitting end 1221 to the receiving end, it can be considered that the basket 40 is not stably placed on the loading table 10.

Referring to fig. 2, 6 and 8, the first detecting member 12 further includes an elastic member 123, and the elastic member 123 is connected to the conductive column 121, so that after the basket 40 is removed from the loading platform 10, the restoring force of the elastic member 123 may cause the conductive column 121 to re-extend out of the surface of the body 11, so that the conductive column 121 may continue to cooperate with the basket 40, so that the first detecting member 12 may continue to detect the size of the following basket 40.

Referring to fig. 2, 6 and 7, the loading platform 10 further includes a positioning member 13, the positioning member 13 is adjustably mounted on the body 11, and the positioning member 13 can be used to position the basket 40 to calibrate and determine the placement position of the basket 40 on the loading platform 10, so as to provide a reference for the robot to grab the film frame 41, thereby improving the precision of the robot to grab the film frame 41. Further, the positioning member 13 includes a first positioning member 131 and a second positioning member 132, and the first positioning member 131 is adjustably installed on the body 11 and can position the basket 40 along the first direction a. Here, the number of the first positioning members 131 may be plural to position the baskets 40 at both sides of the first direction a, respectively, to calibrate the placement positions of the baskets 40 in the first direction a.

In one embodiment, the first positioning member 131 is adjustably connected to the body 11 by means of a sliding groove and a sliding rail. In another embodiment, the body 11 is provided with a plurality of connecting holes, and the first sub-positioning member 131 can be adjustably connected to the connecting holes by adjusting the matching relationship between the first positioning member 131 and the connecting holes.

The second positioning member 132 is adjustably mounted to the body 11 and is capable of positioning the basket 40 in a second direction, different from the first direction. The number of the second positioning members 132 may be multiple, and the multiple second positioning members 132 may respectively position two sides of the basket 40 in the second direction, so as to calibrate the placement position of the basket 40 in the second direction. Through the cooperation of the second positioning member 132 and the first positioning member 131, the placing position of the basket 40 can be calibrated more accurately, so that the placing position of the basket 40 on the loading platform 10 is more accurate, and a manipulator can grab the adhesive film frame 41 more accurately. In one embodiment, the first direction is perpendicular to the second direction.

In one embodiment, the second positioning member 132 is adjustably connected to the body 11 by means of a sliding groove and a sliding rail. In another embodiment, the body 11 is provided with a plurality of connecting holes, and the first sub-positioning member 131 can be adjustably connected to the connecting holes by adjusting the matching relationship between the second positioning member 132 and the connecting holes.

Referring to fig. 2, 6 and 7, in one embodiment, the first positioning member 131 includes a first sub-positioning member 1311 and a second sub-positioning member 1312, the first sub-positioning member 1311 can position the first size basket 40 along the first direction, and the second sub-positioning member 1312 can position the second size basket 40 along the first direction. The second positioning element 132 includes a third sub-positioning element 1321 and a fourth sub-positioning element 1322, the third sub-positioning element 1321 can position the first size of the basket 40 in the second direction, and the fourth sub-positioning element 1322 can position the second size of the basket 40 in the second direction. It will be appreciated that the first sub-positioning member 1311 cooperates with the third sub-positioning member 1321 to position a first size basket 40 and the second sub-positioning member 1312 cooperates with the fourth sub-positioning member 1322 to position a second size basket 40. Thus, the loading table 10 can position the first size and the second size of the carrier 40, respectively.

Referring to fig. 2, the loading platform 10 further includes a reading device 14, the reading device 14 is disposed on the body 11, and the reading device 14 can read data of the basket 40. Specifically, in the actual detection process, there may be a plurality of baskets 40, each basket 40 has a code, and when the basket 40 is carried on the loading platform 10, the reading device 14 can read the coded information of the basket 40, so as to know the information of the basket 40 currently placed on the loading platform 10.

Further, referring to fig. 6 and 7, the reading device 14 includes a first reading sensor 141 and a second reading sensor 142, the first reading sensor 141 is mounted on the body 11 and can read data of the basket 40 with a first size, the second reading sensor 142 is mounted on the body 11, the second reading sensor 142 is farther from the center of the body 11 than the first reading sensor 141122, the second reading sensor 142 can read data of the basket 40 with a second size, and the second size is larger than the first size. By providing the first reading sensor 141 and the second reading sensor 142, the loading table 10 can read data of the baskets 40 of the first size and the second size, respectively.

Specifically, the body 11 is provided with a first groove 112 and a second groove 113, the first reading sensor 141 is installed in the first groove 112, and the first reading sensor 141 does not protrude from the surface of the body 11; the second reading sensor 142 is installed in the second groove 113, and the second reading sensor 142 does not protrude from the surface of the body 11, so that the basket 40 does not collide or collide with the first reading sensor 141 and the second reading sensor 142 when the basket 40 is placed on the loading platform 10, thereby ensuring the safety of the basket 40 and the first reading sensor 141 and the second reading sensor 142.

The first reading sensor 141 may include a Radio Frequency Identification (RFID) sensor, an RFID tag may be attached to a position of the basket 40 corresponding to the first reading sensor 141, and when the basket 40 is carried on the loading platform 10, the RFID sensor may identify the RFID tag, and may read data information of the basket 40. Of course, the first reading sensor 141 may further include an infrared sensor, a laser sensor, and the like, which are not listed here. The second read sensor 142 and the first read sensor 141 may be the same, and the second read sensor 142 will not be described in detail.

Referring to fig. 2, 6 and 7, the loading platform 10 further includes a second detecting member 15, the second detecting member 15 is mounted on the body 11, and the second detecting member 15 can detect whether the film frame 41 moves relative to the basket 40. Specifically, during the process of placing the basket 40 on the loading station 10, the basket 40 may be continuously moved, which may cause the adhesive film frame 41 to move relative to the basket 40, and if the adhesive film frame 41 moves relative to the basket 40, the gripping accuracy of the robot arm may be affected. Whether the adhesive film frame 41 moves relative to the lifting basket 40 or not is detected through the second detection piece 15, so that the second detection piece 15 can detect the adhesive film frame when the lifting basket 40 moves in time, the grabbing position of the manipulator can be adjusted, and the precision when the manipulator grabs the adhesive film frame 41 is high.

More specifically, the second detecting member 15 includes a tab detecting sensor that will not detect a tab (i.e., a portion of the adhesive film frame 41 protruding from the basket) if the adhesive film frame 41 is not moved relative to the basket 40, and can detect a tab if the adhesive film frame 41 is moved relative to the basket 40. Therefore, it is possible to determine whether the adhesive film frame 41 moves relative to the basket 40 based on the data of the tab detection sensor. The principle of the tab detection sensor may be that the tab detection sensor emits light, if the film frame 41 moves relative to the basket 40, the film frame 41 will block the light, and if the film frame 41 does not move relative to the basket 40, the light will not be blocked by the film frame 41.

Referring to fig. 1, in order to prevent the adhesive film frame 41 from moving relative to the basket 40 during the movement of the basket 40, a stop lever 42 may be disposed in the basket 40, and the stop lever 42 may be rotatably connected to a sidewall of the basket 40. When the basket is in a closed state, the stop lever 42 can extend out of the side wall of the basket 40 to clamp the adhesive film frame 41 so as to prevent the adhesive film frame 41 from moving, and a manipulator cannot grab the adhesive film frame 41 from the inside of the basket 40; when the basket 40 is in the open state, the blocking rod 42 can be folded on the side wall of the basket 40 without blocking the adhesive film frame 41, and the mechanical arm can grab the adhesive film frame 41 out of the basket 40. Therefore, it is necessary to detect whether the basket 40 is in the open state, so as to avoid that the robot extends into the basket 40 to grab the adhesive film frame 41 and cannot take out the adhesive film frame 41, or even the adhesive film frame 41 is damaged when the basket 40 is in the closed state.

Further, the loading platform 10 further includes a third detecting member 16, the third detecting member 16 is mounted on the body 11, and the third detecting member 16 can detect whether the basket 40 is in the open state. Specifically, the third detecting member 16 may detect whether there are stop levers 42 on two sides of the film frame 41, and when the third detecting member 16 detects the stop levers 42, the basket 40 is considered to be in the closed state, and at this time, the manipulator cannot extend into the basket 40 to grab the film frame 41; if the third detecting member 16 does not detect the blocking lever 42 and the basket 40 is in the open state, the robot can extend into the basket 40 to grab the film frame 41.

More specifically, the stopper rod is a metal object made of metal materials such as iron and alloy, the third detection element 16 includes a diffuse reflection sensor, the diffuse reflection sensor includes a receiver and a transmitter, the transmitter transmits light toward the stopper rod, if the basket 40 is in the open state, the receiver receives less reflected light (i.e., the received energy is weak), if the basket 40 is in the closed state, the receiver receives more reflected light (i.e., the received energy is strong), the diffuse reflection sensor can judge whether the stopper rod 42 blocks the adhesive film frame 41 according to the received energy, and further determine the open/close state of the basket 40, so that the manipulator can accurately grab the adhesive film frame 41.

Referring to fig. 2, 6 and 7, the main body 11 is further provided with an indicator light 17, the indicator light 17 may be electrically connected to the first detecting element 12, the second detecting element 15 and the third detecting element 16, and the indicator light 17 may be used for indicating a working state of the loading platform 10. For example, the indicator light 17 may indicate the size information of the basket 40 currently carried on the loading platform 10, the red light of the indicator light 17 indicates that the basket 40 currently carried by the 8-inch wafer adhesive film frame 41 is illuminated, the green light of the indicator light 17 indicates that the basket 40 currently carried by the 12-inch wafer adhesive film frame 41 is illuminated, the yellow light of the indicator light 17 indicates that the basket 40 is not correctly placed, and the purple light of the indicator light 17 indicates that the basket 40 is in the closed state. For example, the body 11 is provided with a plurality of indicator lights 17, a first indicator light 17 indicates that the basket 40 of the 8-inch wafer adhesive film frame 41 is currently carried when being turned on, a second indicator light 17 indicates that the basket 40 of the 12-inch wafer adhesive film frame 41 is currently carried when being turned on, a third indicator light 17 indicates that the basket 40 is incorrectly placed when being turned on, and a fourth indicator light 17 indicates that the basket 40 is in a closed state when being turned on.

In the description herein, reference to the description of the terms "certain embodiments," "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the feature. In the description of the present application, "a plurality" means at least two, e.g., two, three, unless specifically limited otherwise.

Although embodiments of the present application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present application, and that variations, modifications, substitutions and alterations of the above embodiments may be made by those of ordinary skill in the art within the scope of the present application, which is defined by the claims and their equivalents.

Claims (14)

1. A load station for carrying a basket for mounting a film frame of a wafer, the load station comprising:

the body is provided with a plurality of detection positions; and

the first detection pieces are correspondingly arranged at the detection positions, and when the lifting basket is carried on the loading platform, the first detection pieces can be matched with the lifting basket to detect the size of the lifting basket.

2. The dock of claim 1, wherein the first detection member comprises:

the guide post is movably arranged on the body and protrudes out of the surface of the body, and when the lifting basket is carried on the loading platform, the lifting basket can abut against the guide post, so that the guide post moves towards the body; and

a sensor cooperable with the conductive post to detect whether the basket is properly carried on the load station.

3. The dock of claim 1, wherein the first detection member comprises:

a plurality of first sub-detection sites, the first detection member installed in the first sub-detection sites for detecting the baskets of a first size; and

the second sub-detection positions are far away from the central axis of the body compared with the first sub-detection positions, the first detection piece arranged in the second sub-detection positions is used for detecting the lifting basket with a second size, and the second size is larger than the first size.

4. The dock of claim 1, further comprising:

the positioning piece is adjustably mounted on the body and used for positioning the lifting basket.

5. The dock of claim 4, wherein the positioning member comprises:

the first sub-positioning piece is adjustably mounted on the body and can position the lifting basket along a first direction; and

the second sub-positioning piece is adjustably mounted on the body and can be used for positioning the lifting basket along a second direction, and the second direction is different from the first direction.

6. The dock of claim 1, further comprising:

the reading device is installed on the body and used for reading the data of the lifting basket.

7. The dock of claim 6, wherein the reading device comprises:

a first reading sensor mounted on the body for reading data of the basket of a first size; and

the second reading sensor is mounted on the body and is far away from the center of the body compared with the first reading sensor, the second reading sensor is used for reading data of the basket in a second size, and the second size is larger than the first size.

8. The dock of claim 1, further comprising a second detection member mounted on the body, the second detection member configured to detect whether the film frame is moving relative to the basket.

9. The dock of claim 1, further comprising a third detection member mounted on the body for detecting whether the basket is in an open position.

10. The loading station of claim 1, wherein an indicator light is provided on the body for indicating an operational status of the loading station.

11. A carrier table, comprising:

a load stand according to any one of claims 1 to 10; and

a protective cover mounted on the load table.

12. The carrier table of claim 11, wherein the protective cover comprises:

the cover body is arranged on the loading platform and provided with an opening; and

the cover door is movably connected with the cover body and can selectively close or open the opening.

13. The carrier table of claim 12, further comprising a fourth detection member, wherein the fourth detection member is mounted on the cover or the cover door and can detect whether the opening is open.

14. A detection device, characterized in that the detection device comprises:

a frame; and

the carrier of any of claims 11-13, which is mounted on the frame.

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