Verticality measuring device
[ technical field ] A method for producing a semiconductor device
The utility model belongs to the technical field of the product inspection, especially, relate to straightness measuring device hangs down.
[ background of the invention ]
Some products incorporate panels which require the maintenance of perpendicularity in the profile between the sides, and therefore, the production of such panels requires the measurement of the profile perpendicularity of the respective sides. However, in the related art, in order to accurately measure the verticality of the shape of the corresponding side surface of the plate, a three-coordinate measuring machine is used to make point contact on the plate shape to obtain data, and then a verticality value is calculated through software, or a machine with a moving mechanism is used to position the plate to be measured and the machine, fix the plate to be measured and the machine, and then drive the measuring gauge head to move back and forth through the moving mechanism to obtain the verticality of the plate shape. However, the equipment for measuring the verticality of the plate appearance in the related art has the problems of large occupied volume, complex operation and low measurement efficiency.
[ Utility model ] content
An object of the utility model is to provide a straightness measuring device hangs down occupies smallly, and convenient operation is swift, can measure the appearance straightness that hangs down of plate high-efficiently and accurately.
The technical scheme of the utility model as follows: the utility model provides a straightness measuring device hangs down which includes have the first bedplate that bears the plane, connect in bear the second bedplate that leans on the plane and along the perpendicular to bear the plane the direction slidable mounting in measurement gauge outfit on the second bedplate, bear the plane be used for with the work piece one side laminating butt that awaits measuring, the measurement gauge outfit includes along being on a parallel with bear the plane to being close to the measuring part of the direction extension of first bedplate.
Further, the first seat plate and the second seat plate are both strip-shaped, the extending direction of the first seat plate is perpendicular to the extending direction of the second seat plate, and the sliding direction of the measuring gauge outfit is parallel to the extending direction of the second seat plate.
Furthermore, the verticality measuring device further comprises a slide rail and a slide block, wherein the slide rail is arranged on the second seat plate, the extending direction of the slide rail is perpendicular to the bearing plane, the slide block is assembled on the slide rail in a sliding mode, and the measuring gauge head is fixedly assembled on the slide block.
Furthermore, the measuring gauge head further comprises a gauge body fixed on the sliding block, and the measuring part comprises a measuring rod which is fixed on the gauge body and is close to the side of the first seat plate and parallel to the bearing plane, and a measuring finger which is movably connected in the measuring rod and protrudes out of the measuring rod and is far away from the gauge body end.
Further, the first seat plate further comprises a first plane perpendicular to the bearing plane, and the extending direction of the measuring finger is parallel to the intersection line of the first plane and the bearing plane.
Further, the second seat plate includes a second plane parallel to the first plane, and the slide rail is mounted to the second plane
Further, the verticality measuring device further comprises a limiting structure arranged on the second seat plate, and the limiting structure is used for positioning a workpiece to be measured.
Further, the second seat plate comprises a limiting plane perpendicular to the extending direction of the measuring finger and perpendicular to the bearing plane, and the limiting structure comprises a limiting block connected to the limiting plane.
Further, the measuring gauge head adopts a dial indicator.
The beneficial effects of the utility model reside in that: and (3) attaching the side surface of the workpiece to be measured to the bearing plane, enabling the plane to be measured of the workpiece to be measured to face the measuring part of the measuring gauge head and to be in contact with the measuring part, then moving the measuring gauge head to slide to enable the measuring part to move on the plane to be measured, wherein the numerical value change of the measuring gauge head is the appearance verticality of the workpiece to be measured. The verticality measuring device of the scheme is small in occupied size, convenient and fast to operate, and capable of efficiently and accurately measuring the verticality of the plate.
[ description of the drawings ]
FIG. 1 is a schematic diagram of the state of the verticality measuring device of the present invention when detecting the verticality of a workpiece to be measured;
fig. 2 is a schematic view of a three-dimensional structure of a first viewing angle of the verticality measuring device of the present invention;
fig. 3 is a schematic perspective view of a second view angle of the verticality measuring device of the present invention;
fig. 4 is the utility model discloses straightness measuring device's three-dimensional decomposition structure schematic diagram hangs down.
[ detailed description ] embodiments
The present invention will be further described with reference to the accompanying drawings and embodiments.
With reference to fig. 1 to 4, a verticality measuring device is provided, which includes a first seat plate 11 having a bearing plane 111, a second seat plate 12 connected to the bearing plane 111, and a measuring gauge head 2 slidably mounted on the second seat plate 12 along a direction perpendicular to the bearing plane 111, wherein the bearing plane 111 is adapted to be abutted against one side of a workpiece 100 to be measured, and the measuring gauge head 2 includes a measuring portion 22 extending in a direction parallel to the bearing plane 111 and approaching the first seat plate 11.
The side surface of the workpiece 100 to be measured is attached to the bearing plane 111, the plane to be measured of the workpiece 100 to be measured faces the measuring part 22 of the measuring gauge head 2 and is in contact with the measuring part 22, then the measuring gauge head 2 is moved to slide, the measuring part 22 moves on the plane to be measured, and the numerical value change of the measuring gauge head 2 is the appearance verticality of the workpiece 100 to be measured. The verticality measuring device of the scheme is small in occupied size, convenient and fast to operate, and capable of efficiently and accurately measuring the verticality of the plate.
First bedplate 11 and second bedplate 12 are the strip, and the extending direction of first bedplate 11 perpendicular to second bedplate 12's extending direction measures the extending direction that the slip direction of gauge outfit 2 is on a parallel with second bedplate 12, and first bedplate 11 and second bedplate 12 are the rectangle strip, and consequently, first bedplate 11 and second bedplate 12 are whole to be the L type, and simple structure occupies smallly, uses convenient and fast more.
The verticality measuring device further comprises a sliding rail 3 which is arranged on the second seat plate 12 and the extending direction of which is perpendicular to the bearing plane 111, and a sliding block 4 which is assembled on the sliding rail 3 in a sliding manner, wherein the measuring gauge outfit 2 is fixedly assembled on the sliding block 4. The measuring gauge outfit 2 further comprises a gauge body 21 fixed on the sliding block 4, and the measuring part 22 comprises a measuring rod 222 fixed on the side of the gauge body 21 close to the first seat plate 11 and parallel to the bearing plane 111, and a measuring finger 221 movably connected in the measuring rod 222 and protruding out of the end of the measuring rod 222 far from the gauge body 21. Specifically, the measuring gauge head 2 can adopt a dial indicator, so that the accurate appearance verticality of the plate can be measured, and the measuring precision can reach 0.01 mm.
The first seat plate 11 further comprises a first plane 1a perpendicular to the bearing plane 111, and the extension direction of the measuring finger 221 is parallel to the intersection line of the first plane 1a and the bearing plane 111. Specifically, the first plane 1a is the common bottom surface of the first seat plate 11 and the second seat plate 12, and when the verticality measuring device is used, the first plane can be placed on the plane bearing plate, for example, a desktop, and the workpiece 100 to be measured can be placed on the plate surface of the plane bearing plate to adjust the position, which is more convenient. In the present embodiment, the first plane 1a is adjacent to the bearing plane 111, so that the adjacent line of the first plane 1a and the bearing plane 111 is the intersecting line of the two, and in actual operation, the boundary line of the workpiece 100 to be measured can be aligned with the intersecting line, so as to ensure the measurement accuracy.
The verticality measuring device further comprises a limiting structure 5 arranged on the second seat plate 12, and the limiting structure 5 is used for positioning the workpiece 100 to be measured. The second seat plate 12 includes a limiting plane 121 perpendicular to the extending direction of the measuring finger 221 and perpendicular to the bearing plane 111, and the limiting structure 5 includes a limiting block 51 connected to the limiting plane 121. Specifically, in this embodiment, the limiting plane 121 is adjacent to the bearing plane 111, the limiting plane 121 and the bearing plane 111 enclose a measurement area, the position of the workpiece 100 to be measured can be adjusted in the measurement area, and one, two, three, or four limiting blocks 51 can be disposed on the limiting plane 121 to limit the workpiece 100 to be measured.
The second seat plate 12 includes a second plane 1b parallel to the first plane 1a, and the slide rail 3 is mounted to the second plane 1 b. Specifically, the second plane 1b is a common top surface of the first seat plate 11 and the second seat plate 12, and the second plane 1b is parallel to the first plane 1a, so that the measurement of the sliding of the gauge outfit 2 is more convenient and faster. The sliding block 4 is assembled on the sliding rail 3 in a sliding mode, the sliding block 4 can be fixedly connected with the fixing block 41, and the measuring gauge outfit 2 can be fixedly connected to the sliding block 4 through the fixing block 41. It should be understood that the slide rail 3 can be fixedly connected with the second seat plate 12 by screws, the slide rail 3 can be leveled by using a standard plate before the verticality measuring device is used, the slide rail 3 is fixed with the second seat plate 12 by screws after the leveling, and the slide rail 3 can be leveled once every predetermined time period (for example, 3 months) in the actual use process, so as to ensure the accuracy of the measurement.
The above embodiments of the present invention are only described, and it should be noted that, for those skilled in the art, modifications can be made without departing from the inventive concept, but these all fall into the protection scope of the present invention.