CN214271037U - Vacuum coating equipment - Google Patents
Vacuum coating equipment Download PDFInfo
- Publication number
- CN214271037U CN214271037U CN202120127571.7U CN202120127571U CN214271037U CN 214271037 U CN214271037 U CN 214271037U CN 202120127571 U CN202120127571 U CN 202120127571U CN 214271037 U CN214271037 U CN 214271037U
- Authority
- CN
- China
- Prior art keywords
- cooling
- vacuum
- cavity
- roller
- vacuum coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model discloses a vacuum coating device, which comprises a vacuum cavity, an unreeling mechanism, a heating device, a cooling roller, a cathode, a reeling mechanism and a low-temperature pump, wherein the unreeling mechanism, the heating device, the cooling roller, the cathode and the reeling mechanism are arranged in the vacuum cavity, a substrate arranged in the unreeling mechanism is withdrawn by the reeling mechanism after sequentially passing through the heating device and the cooling roller, and the cathode is arranged at the periphery of the cooling roller; the low-temperature pump is communicated with the vacuum cavity through a pipeline. The utility model discloses can improve the adhesion force between substrate and the cladding material, improve deposition efficiency, can save the transition layer, reduce cost.
Description
Technical Field
The utility model belongs to the technical field of coating equipment, especially, relate to a vacuum coating equipment.
Background
Most vacuum coating equipment in the market at present consists of a vacuum cavity, a transmission mechanism, a sputtering system (evaporation system), a cooling system and a vacuum system.
When the existing equipment is used for preparing the ultrathin flexible base material, the moisture carried by the base material can not be removed, so that the adhesive force between a film layer and a base is poor, and the deposition efficiency is low; generally, in order to increase the adhesion between the substrate and the coating, a transition layer is added between the substrate and the coating to increase the adhesion, but the relative cost is increased.
SUMMERY OF THE UTILITY MODEL
In order to overcome the defects of the prior art, the utility model aims to provide a vacuum coating device, which can improve the adhesive force between the substrate and the coating, improve the deposition efficiency, save the transition layer and reduce the cost.
In order to achieve the above purpose, the utility model adopts the technical scheme that: a vacuum coating device comprises a vacuum cavity, an unreeling mechanism, a heating device, a cooling roller, a cathode, a reeling mechanism and a low-temperature pump, wherein the unreeling mechanism, the heating device, the cooling roller, the cathode and the reeling mechanism are arranged in the vacuum cavity, a base material arranged in the unreeling mechanism is withdrawn by the reeling mechanism after sequentially passing through the heating device and the cooling roller, and the cathode is arranged on the periphery of the cooling roller; the low-temperature pump is communicated with the vacuum cavity through a pipeline.
Further, heating device includes heater, import deflector roll and export deflector roll the substrate entering end of heater sets up the import deflector roll the substrate output end of heater sets up the export deflector roll, guarantees through the import deflector roll and the export deflector roll that set up that the substrate is stable through the heater according to the motion path.
Further, the heater adopts an infrared heater or a ceramic heater.
Further, a first nip roll is disposed between the heating device and the cooling roll. The base material is stretched before entering the cooling roller, so that the base material is prevented from forming wrinkles on the surface of the cooling roller, the base material is highly attached to the cooling roller, the cooling effect is improved, and the film is not damaged by heat.
Further, including first chill roll and second chill roll, first chill roll and second chill roll are the series relation, the first chill roll is passed through to the substrate openly, the substrate reverse side passes through the second chill roll, all is provided with many negative poles in every chill roll periphery. Realizing double-sided coating. And the inlet and outlet ends of the first cooling roller and the second cooling roller are respectively provided with a press roller, so that the base material can stably pass through the heater cooling roller according to a movement path.
Further, a second flattening roll is disposed between the first cooling roll and the second cooling roll. The base material is stretched before entering the second cooling roller, so that the base material is prevented from forming wrinkles on the surface of the cooling roller, the base material is highly attached to the cooling roller, the cooling effect is improved, and the film is not damaged by heat.
Further, a third flattening roller is arranged between the cooling roller and the winding mechanism. The phenomenon of folding cannot occur during rolling.
Further, a gate valve is arranged on a connecting pipeline between the vacuum cavity and the cryogenic pump; the gate valve mainly realizes the connection effect of the cryogenic pump and the cavity, when the process is finished, the gate valve can be directly closed without closing the cryogenic pump, and the vacuum in the vacuum cavity is decompressed to the atmospheric pressure, so that the winding mechanism is separated from the vacuum cavity, and the loading and unloading are realized, and the time is mainly saved.
Further, the vacuum cavity comprises a first cavity and a second cavity, the unwinding mechanism, the heating device, the cooling roller, the cathode, the winding mechanism and the low-temperature pump are mounted on the first cavity, and the second cavity is sleeved at the opening of the first cavity. The material is received to the blowing of being convenient for, improves production efficiency.
Further, slide rails are arranged at the bottoms of the first cavity and the second cavity, and the bottoms of the first cavity and/or the second cavity are movably connected with the slide rails through rollers, so that the material can be conveniently discharged and collected, the operation is convenient, and the production efficiency is improved.
The beneficial effects of the technical scheme are as follows:
the heating device is arranged between the unreeling mechanism and the cooling roller, so that the ultrathin base material can be baked, the water content of the base material is reduced, and the bonding force between the base material and the coating is improved; and then the low-temperature pump is matched to be connected to the vacuum cavity, and water vapor generated by baking is pumped away (only the low-temperature pump can effectively pump away water vapor, and other, such as the molecular pump and the diffusion pump do not have the function of pumping out water vapor), so that the deposition efficiency is improved, a transition layer can be omitted, and the cost is reduced.
Drawings
FIG. 1 is a schematic structural view of a vacuum deposition apparatus of the present invention;
fig. 2 is a schematic structural view of a vacuum chamber in an embodiment of the present invention;
wherein, 1 is the vacuum cavity, 2 is unwinding mechanism, 3 is the heater, 4 is the import deflector roll, 5 is the export deflector roll, 6 is first chill roll, 7 is the second chill roll, 8 is the negative pole, 9 is winding mechanism, 10 is the cryopump, 11 is first nip roll, 12 is the second nip roll, 13 is the third nip roll, 14 is the push-pull valve, 15 is the first cavity, 16 is the second cavity, 17 is the compression roller.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the present invention is further explained below with reference to the accompanying drawings.
In this embodiment, referring to fig. 1, a vacuum coating apparatus includes a vacuum chamber 1, an unwinding mechanism 2, a heating device, a cooling roller, a cathode 8, a winding mechanism 9, and a cryopump 10, where the unwinding mechanism 2, the heating device, the cooling roller, the cathode 8, and the winding mechanism 9 are placed in the vacuum chamber 1, a substrate placed in the unwinding mechanism 2 is sequentially passed through the heating device and the cooling roller and then taken back by the winding mechanism 9, and the cathode 8 is disposed on the periphery of the cooling roller; the cryopump 10 is connected to the vacuum chamber 1 through a pipe.
As an optimization scheme 1 of the above embodiment, the heating device includes a heater 3, an inlet guide roller 4 and an outlet guide roller 5, the inlet guide roller 4 is disposed at the substrate entrance end of the heater 3, the outlet guide roller 5 is disposed at the substrate output end of the heater 3, and the substrate is ensured to stably pass through the heater 3 according to the movement path by the inlet guide roller 4 and the outlet guide roller 5.
Preferably, the heater 3 is an infrared heater or a ceramic heater.
As a preferable mode 2 of the above embodiment, a first flattening roll 11 is provided between the heating device and the cooling roll. The base material is stretched before entering the cooling roller, so that the base material is prevented from forming wrinkles on the surface of the cooling roller, the base material is highly attached to the cooling roller, the cooling effect is improved, and the film is not damaged by heat.
As an optimized scheme 3 of the above embodiment, the device comprises a first cooling roller 6 and a second cooling roller 7, wherein the first cooling roller 6 and the second cooling roller 7 are in series connection, the front surface of the substrate passes through the first cooling roller 6, the back surface of the substrate passes through the second cooling roller 7, and a plurality of cathodes 8 are arranged on the periphery of each cooling roller. Realizing double-sided coating. And the inlet and outlet ends of the first cooling roller 6 and the second cooling roller 7 are respectively provided with a press roller 17, so that the base material can stably pass through the cooling rollers of the heater 3 according to a movement path.
As a preferable mode 4 of the above embodiment, a second nip roll 12 is provided between the first cooling roll 6 and the second cooling roll 7. The base material is stretched before entering the second cooling roller 7, so that the base material is prevented from forming wrinkles on the surface of the cooling roller, the base material is highly attached to the cooling roller, the cooling effect is improved, and the film is not damaged by heat.
As a preferred embodiment 5 of the above embodiment, a third nip roller 13 is provided between the cooling roller and the winding mechanism 9. The phenomenon of folding cannot occur during rolling.
As the optimization scheme 6 of the above embodiment, a gate valve 14 is arranged on a connecting pipeline between the vacuum chamber 1 and the cryopump 10; the gate valve 14 mainly realizes the connection effect of the cryogenic pump 10 and the cavity, and when the process is finished, the gate valve 14 can be directly closed without closing the cryogenic pump 10, so that the vacuum in the vacuum cavity 1 is relieved to the atmospheric pressure, the winding mechanism is separated from the vacuum cavity 1, and the loading and unloading are realized, and the time is mainly saved.
As an optimized scheme 7 of the above embodiment, as shown in fig. 2, the vacuum chamber 1 includes a first chamber 15 and a second chamber 16, the unwinding mechanism 2, the heating device, the cooling roller, the cathode 8, the winding mechanism 9, and the cryopump 10 are installed on the first chamber 15, and the second chamber 16 is sleeved at an opening of the first chamber 15. The material is received to the blowing of being convenient for, improves production efficiency.
Preferably, a slide rail is arranged at the bottom of the first cavity 15 and/or the bottom of the second cavity 16, and the bottoms of the first cavity 15 and the second cavity 16 are movably connected with the slide rail through rollers, so that the material can be conveniently discharged and received, the operation is convenient, and the production efficiency is improved.
For better understanding, the utility model discloses, following is to the theory of operation of the utility model make a complete description:
opening the vacuum cavity 1, placing the substrate in the unwinding mechanism 2, and closing the vacuum cavity 1;
the substrate of the unwinding mechanism 2 is withdrawn by the winding mechanism 9 after passing through the heating device and the cooling roller in sequence, and meanwhile, the low-temperature pump 10 is used for pumping away the water vapor in the vacuum cavity 1 to finish the film coating;
and opening the vacuum cavity 1 to take out the product subjected to film coating from the winding mechanism 9.
The foregoing shows and describes the general principles, essential features, and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (10)
1. A vacuum coating device is characterized by comprising a vacuum cavity (1), an unreeling mechanism (2), a heating device, a cooling roller, a cathode (8), a reeling mechanism (9) and a low-temperature pump (10), wherein the unreeling mechanism (2), the heating device, the cooling roller, the cathode (8) and the reeling mechanism (9) are arranged in the vacuum cavity (1), a base material arranged in the unreeling mechanism (2) is withdrawn by the reeling mechanism (9) after sequentially passing through the heating device and the cooling roller, and the cathode (8) is arranged on the periphery of the cooling roller; the low-temperature pump (10) is communicated with the vacuum cavity (1) through a pipeline.
2. Vacuum coating apparatus according to claim 1, wherein the heating device comprises a heater (3), an inlet guide roller (4) and an outlet guide roller (5), the inlet guide roller (4) being arranged at the substrate entrance end of the heater (3), the outlet guide roller (5) being arranged at the substrate exit end of the heater (3).
3. The vacuum coating apparatus according to claim 2, wherein the heater (3) is an infrared heater or a ceramic heater.
4. A vacuum coating apparatus according to claim 1, characterized in that a first flattening roll (11) is arranged between the heating device and the cooling roll.
5. A vacuum coating apparatus according to claim 1, comprising a first cooling roll (6) and a second cooling roll (7), said first cooling roll (6) and said second cooling roll (7) being in series, said substrate passing through said first cooling roll (6) on the front side and said substrate passing through said second cooling roll (7) on the back side, a plurality of cathodes (8) being provided around the periphery of each cooling roll.
6. A vacuum coating apparatus according to claim 5, characterized in that a second flattening roll (12) is arranged between the first cooling roll (6) and the second cooling roll (7); and press rollers (17) are arranged at the inlet and outlet ends of the first cooling roller (6) and the second cooling roller (7).
7. A vacuum coating apparatus according to claim 1, characterized in that a third flattening roll (13) is arranged between the cooling roll and the take-up mechanism (9).
8. The vacuum coating apparatus according to claim 1, wherein a gate valve (14) is provided on a connection pipe between the vacuum chamber (1) and the cryopump (10).
9. The vacuum coating equipment according to claim 1, wherein the vacuum chamber (1) comprises a first chamber (15) and a second chamber (16), the unwinding mechanism (2), the heating device, the cooling roller, the cathode (8), the winding mechanism (9) and the low-temperature pump (10) are mounted on the first chamber (15), and the second chamber (16) is sleeved at the opening of the first chamber (15).
10. The vacuum coating equipment according to claim 9, wherein a slide rail is arranged at the bottom of the first cavity (15) and/or the second cavity (16), and the bottom of the first cavity (15) and the bottom of the second cavity (16) are movably connected through a roller and the slide rail.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120127571.7U CN214271037U (en) | 2021-01-18 | 2021-01-18 | Vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120127571.7U CN214271037U (en) | 2021-01-18 | 2021-01-18 | Vacuum coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214271037U true CN214271037U (en) | 2021-09-24 |
Family
ID=77763598
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120127571.7U Active CN214271037U (en) | 2021-01-18 | 2021-01-18 | Vacuum coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214271037U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114214601A (en) * | 2021-12-23 | 2022-03-22 | 河北科能新材料有限公司 | Aluminizer production facility |
-
2021
- 2021-01-18 CN CN202120127571.7U patent/CN214271037U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114214601A (en) * | 2021-12-23 | 2022-03-22 | 河北科能新材料有限公司 | Aluminizer production facility |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN214271037U (en) | Vacuum coating equipment | |
| CN206475555U (en) | Aluminium sheet film covering device | |
| CN110004427A (en) | Flexible continuity magnetron sputtering deposition plating work chamber partition method | |
| CN107321585A (en) | The full-automatic coating technique and its process units of a kind of aluminium foil | |
| CN111113746A (en) | A cooling forming device for processing of polymer chemical material | |
| CN101492809A (en) | Vacuum magnetron sputtering coil film coating apparatus | |
| CN112295851A (en) | Positive electrode extrusion type double-sided spraying quick-drying coating machine | |
| CN104878350A (en) | Novel efficient aluminizing equipment | |
| CN201158699Y (en) | Coiling film-plating machine | |
| CN218775384U (en) | Ultra-thin metal lithium strip tectorial membrane rolling system | |
| CN205856606U (en) | Graphene film filming equipment based on PECVD | |
| CN115648643B (en) | Composite equipment for producing steel-plastic composite belt | |
| CN216786245U (en) | Ultrathin film vacuum double-sided sputtering device | |
| CN201358299Y (en) | Vacuum magnetron-sputtering type winding film-coating device | |
| CN207072969U (en) | A kind of filming equipment of flexible parent metal coating thick film | |
| CN209685907U (en) | A kind of winding/unwinding device for plated film assembly line | |
| CN210775147U (en) | Device for detecting moisture permeability of aluminized film | |
| CN210620933U (en) | Steel coil unwinding and winding vacuum working chamber | |
| CN209103984U (en) | A kind of arc-shaped conductance device of thin film capacitor winding apparatus | |
| CN112695289A (en) | Multi-target double-sided coating magnetron sputtering winding coating equipment | |
| CN107611206B (en) | A kind of solar battery back film coated on both sides process equipment | |
| CN207899867U (en) | Calender | |
| CN105668279A (en) | Rolling and calendering production line of high-heat-conductivity artificial graphite film | |
| CN219280010U (en) | Aluminum metal steam flow guiding window | |
| CN206570398U (en) | Wire rod winding film coating machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 361100 201-1, complex building 5, No. 11, Butang Middle Road, torch high tech Zone (Tongxiang) industrial base, Xiamen, Fujian Province Patentee after: Xiamen Haichen Energy Storage Technology Co.,Ltd. Address before: 361000 201-1, complex building 5, No. 11, Butang Middle Road, torch high tech Zone (Tongxiang) industrial base, Xiamen, Fujian Patentee before: Xiamen Haichen New Energy Technology Co.,Ltd. |