CN214252096U

CN214252096U - Vacuum four-axis motion platform structure for scanning electron microscope

Info

Publication number: CN214252096U
Application number: CN202022864163.8U
Authority: CN
Inventors: 张凡凡; 戴晓鹏; 赫松龄; 贺羽; 张伟
Original assignee: Wuxi Institute Of Quantum Perception
Current assignee: Wuxi Institute Of Quantum Perception
Priority date: 2020-12-03
Filing date: 2020-12-03
Publication date: 2021-09-21
Anticipated expiration: 2030-12-03

Abstract

The utility model discloses a vacuum four-axis motion platform structure for among scanning electron microscope, this vacuum four-axis motion platform structure for among scanning electron microscope can make the sample on the revolving stage hold in the palm at X axle, Y axle and the epaxial motion of Z, can make the sample hold in the palm again and carry out 360 degrees rotations along with the revolving stage, realizes the multidimension degree quick travel of the sample that awaits measuring, and travel switch's design makes the motion more accurate controllable. In a word, this vacuum four-axis motion platform for among scanning electron microscope structural design scientific and reasonable can reliably fix a position the sample on the sample support fast, and the repeated positioning precision is high, and overall mechanism is compact, and the sample is long at X, Y, Z triaxial straight line stroke distance, and the product holds in the palm can adorn jumbo size sample, and convenient loading and unloading, the reliability is high and can be applicable to and use under high vacuum environment such as field emission electron microscope.

Description

Vacuum four-axis motion platform structure for scanning electron microscope

Technical Field

The utility model relates to scanning electron microscope technical field, in particular to vacuum four-axis motion platform structure for among the scanning electron microscope.

Background

With the development and demand of science and technology, scanning electron microscopes are widely used in various departments, research, enterprises and public institutions. The scanning electron microscope generates high-speed electrons by utilizing high voltage between a cathode and an anode, forms superfine electron beams through several stages of focusing, scans and excites various signals on the surface of a sample point by point, and finally collects and images through different sensors. In order to flexibly adjust different samples, adjust different sample areas, adjust resolution, adjust parameters such as image depth of field and the like, multi-axis motion needs to be performed in a narrow vacuum cavity, so that a sample to be shot reliably moves to a position right under an objective lens, and meanwhile, WD parameters can be adjusted to obtain a desired picture.

The structure of original vacuum platform is complicated, both difficult processing also difficult assembly debugging, and external motor increases the dynamic seal moreover, and the repeated positioning accuracy is not very high, and the motion stroke is short, and the platform rate of bleeding is high.

SUMMERY OF THE UTILITY MODEL

Not enough to prior art, the utility model provides a vacuum four-axis motion platform structure for among scanning electron microscope to the realization holds in the palm the accurate removal of waiting to form images article to the sample, can effectively solve the problem among the background art.

In order to achieve the above purpose, the utility model adopts the following technical scheme: a vacuum four-axis motion platform structure for a scanning electron microscope comprises a base platform, a coupling, a stepping motor and a rotating platform, wherein a Z-axis vacuum motor is fixed at the top end of the base platform and connected with a Z-axis screw rod through the coupling; a Y-axis vacuum motor is fixed on the Z-axis sliding table and connected with a Y-axis screw through a coupling, Y-axis guide rails are fixed on two sides of the Z-axis sliding table, a Y-axis sliding table is arranged on the Y-axis guide rails, the Y-axis screw is arranged in the Y-axis sliding table, and the Y-axis vacuum motor can drive the Y-axis sliding table to slide along the Y-axis guide rails through the coupling and the Y-axis screw; an X-axis vacuum motor is fixed on one side of the Y-axis sliding table, the X-axis vacuum motor is connected with an X-axis screw through a coupling, X-axis guide rails are fixed on two sides of the Y-axis sliding table, an X-axis sliding table is arranged on the X-axis guide rails, the X-axis screw is arranged in the X-axis sliding table, and the X-axis vacuum motor can drive the X-axis sliding table to slide along the X-axis guide rails through the coupling and the X-axis screw; the middle part of X axle slip table is equipped with the turbine, be fixed with the revolving stage on the turbine, it is equipped with the worm to correspond the turbine on the X axle slip table, the worm passes through the worm fixing base setting at X axle slip table, Y axle slip table opposite side is fixed with step motor, step motor is connected with the revolving stage drive shaft through the shaft coupling, the revolving stage drive shaft passes in the worm, step motor can drive the turbine rotation through shaft coupling, revolving stage drive shaft and worm, the turbine can drive the revolving stage rotatory.

Preferably the base platform is vertically disposed.

Preferably, two Z-axis travel switches are fixed on one side of the Z-axis sliding table, a Z-axis limiting block is fixed on the base platform corresponding to the Z-axis travel switches, and the Z-axis limiting block is located between the two Z-axis travel switches.

Preferably, two Y-axis travel switches are fixed on one side of the Z-axis sliding table, Y-axis limiting blocks are fixed on the Y-axis sliding table corresponding to the Y-axis travel switches, and the Y-axis limiting blocks are located between the two Y-axis travel switches.

Preferably, X-axis travel switches are respectively fixed on two sides of the Y-axis sliding table corresponding to the X-axis sliding table.

Preferably, a rotary table travel switch is fixed on the X-axis sliding table corresponding to the rotary table.

Preferably, a plurality of sample holders are provided on the rotary stage.

Preferably, the stroke of the Z-axis screw is 60 mm, the stroke of the Y-axis screw and the X-axis screw is 100 mm, and the rotating table can rotate by 360 degrees.

Preferably, the rotating table, the Z-axis sliding table, the Y-axis sliding table and the X-axis sliding table are made of stainless steel materials.

Preferably, the surfaces of the rotating table driving shaft, the worm, the Z-axis screw, the Y-axis screw and the X-axis screw are plated with molybdenum disulfide coatings.

The utility model relates to a vacuum four-axis motion platform structure used in a scanning electron microscope, which can drive a Z-axis sliding table to slide along a Z-axis guide rail through a coupling and a Z-axis screw rod, drive a Y-axis sliding table to slide along a Y-axis guide rail through a coupling and a Y-axis screw rod, drive a turbine to rotate through a coupling, a rotating table driving shaft and a worm rod, and drive the rotating table to rotate, so that a sample on the rotating table can move on the X-axis, the Y-axis and the Z-axis, and can rotate 360 degrees along with the rotating table, thereby realizing the multi-dimensional rapid movement of a sample to be detected, the travel switch is designed to enable the movement to be more accurate and controllable; the rotating table, the Z-axis sliding table, the Y-axis sliding table and the X-axis sliding table are made of stainless steel materials, and the stainless steel is low in air bleeding rate, can be used for high-vacuum equipment and is more beneficial to stable work of a scanning electron microscope; the surfaces of the rotating table driving shaft, the worm, the shaft screw, the Y-axis screw and the X-axis screw are plated with a molybdenum disulfide coating, and the molybdenum sulfide coating can play a role of a solid lubricant in a high-vacuum environment. In a word, this vacuum four-axis motion platform for among scanning electron microscope structural design scientific and reasonable can reliably fix a position the sample on the sample support fast, and the repeated positioning precision is high, and overall mechanism is compact, and the sample is long at X, Y, Z triaxial straight line stroke distance, and the product holds in the palm can adorn jumbo size sample, and convenient loading and unloading, the reliability is high and can be applicable to and use under high vacuum environment such as field emission electron microscope.

Drawings

Fig. 1 is a schematic view of an overall structure of a vacuum four-axis motion platform structure for a scanning electron microscope according to the present invention;

fig. 2 is a schematic diagram of an overall structure of a vacuum four-axis motion platform structure for a scanning electron microscope according to the present invention;

in the figure: 1. a base platform; 2. a coupling; 3. a stepping motor; 4. a rotating table; 5. a sample holder; 6. a rotary table drive shaft; 7. a worm; 8. a turbine; 9. a worm fixing seat; 10. a rotary table travel switch; 11. a Z-axis vacuum motor; 12. a Z-axis screw; 13. a Z-axis sliding table; 14. a Z-axis guide rail; 15. a Z-axis travel switch; 16. a Z-axis limiting block; 21. a Y-axis vacuum motor; 22. a Y-axis screw; 23. a Y-axis sliding table; 24. a Y-axis guide rail; 25. a Y-axis travel switch; 26. a Y-axis limiting block; 31. an X-axis vacuum motor; 32. an X-axis screw; 33. an X-axis sliding table; 34. an X-axis guide rail; 35. x-axis travel switch.

Detailed Description

In order to make the technical means, creation features, achievement purposes and functions of the present invention easy to understand, the present invention is further described below with reference to the following embodiments.

As shown in fig. 1-2, a vacuum four-axis motion platform structure for use in a scanning electron microscope includes a base platform 1, a coupling 2, a stepping motor 3, and a rotary table 4, wherein a Z-axis vacuum motor 11 is fixed on a top end of the base platform 1, the Z-axis vacuum motor 11 is connected to a Z-axis screw 12 through the coupling 2, Z-axis guide rails 14 are fixed on two sides of the base platform 1, a Z-axis sliding table 13 is arranged on the Z-axis guide rails 14, the Z-axis screw 12 is arranged in the Z-axis sliding table 13, and the Z-axis vacuum motor 11 can drive the Z-axis sliding table 13 to slide along the Z-axis guide rails 14 through the coupling 2 and the Z-axis screw 12; a Y-axis vacuum motor 21 is fixed on the Z-axis sliding table 13, the Y-axis vacuum motor 21 is connected with a Y-axis screw rod 22 through a coupling 2, Y-axis guide rails 24 are fixed on two sides of the Z-axis sliding table 13, a Y-axis sliding table 23 is arranged on the Y-axis guide rails 24, the Y-axis screw rod 22 is arranged in the Y-axis sliding table 23, and the Y-axis vacuum motor 21 can drive the Y-axis sliding table 23 to slide along the Y-axis guide rails 24 through the coupling 2 and the Y-axis screw rod 22; an X-axis vacuum motor 31 is fixed on one side of the Y-axis sliding table 23, the X-axis vacuum motor 31 is connected with an X-axis screw rod 32 through a coupling 2, X-axis guide rails 34 are fixed on two sides of the Y-axis sliding table 23, an X-axis sliding table 33 is arranged on the X-axis guide rails 34, the X-axis screw rod 32 is arranged in the X-axis sliding table 33, and the X-axis vacuum motor 31 can drive the X-axis sliding table 33 to slide along the X-axis guide rails 34 through the coupling 2 and the X-axis screw rod 32; the middle part of X axle slip table 33 is equipped with the turbine 8, be fixed with revolving stage 4 on the turbine 8, it is equipped with worm 7 to correspond turbine 8 on the X axle slip table 33, worm 7 sets up at X axle slip table 33 through worm fixing base 9, Y axle slip table 23 opposite side is fixed with step motor 3, step motor 3 is connected with revolving stage drive shaft 6 through shaft coupling 2, revolving stage drive shaft 6 passes in worm 7, step motor 3 can drive turbine 8 rotatory through shaft coupling 2, revolving stage drive shaft 6 and worm 7, turbine 8 can drive revolving stage 4 rotatory, base platform 1 is vertical to be set up, two inherent Z axle travel switches 15 of one side of Z axle slip table 13, it is fixed with Z axle stopper 16 to correspond Z axle travel switch 15 on base platform 1, Z axle stopper 16 is located between two Z axle travel switches 15, two Y-axis travel switches 25 are fixed on one side of the Z-axis sliding table 13, a Y-axis limit block 26 is fixed on the Y-axis sliding table 23 corresponding to the Y-axis travel switches 25, the Y-axis limiting block 26 is positioned between the two Y-axis travel switches 25, the two sides of the Y-axis sliding table 23 corresponding to the X-axis sliding table 33 are respectively fixed with an X-axis travel switch 35, a rotary table travel switch 10 is fixed on the X-axis sliding table 33 corresponding to the rotary table 4, a plurality of sample holders 5 are arranged on the rotary table 4, the stroke of the Z-axis screw 12 is 60 mm, the stroke of the Y-axis screw 22 and the X-axis screw 32 is 100 mm, the rotary table 4 can realize 360-degree rotation, the rotary table 1, the Z-axis sliding table 13, the Y-axis sliding table 23 and the X-axis sliding table 33 are made of stainless steel materials, the surfaces of the rotating table driving shaft 6, the worm 7, the Z-axis screw 12, the Y-axis screw 22 and the X-axis screw 32 are plated with molybdenum disulfide coatings.

The utility model relates to a vacuum four-axis motion platform structure for scanning electron microscope, in the using process, Z axle vacuum motor 11 can drive Z axle slip table 13 to slide along Z axle guide rail 14 through coupling 2 and Z axle screw 12, Y axle vacuum motor 21 can drive Y axle slip table 23 to slide along Y axle guide rail 24 through coupling 2 and Y axle screw 22, X axle vacuum motor 31 can drive X axle slip table 33 to slide along X axle guide rail 34 through coupling 2 and X axle screw 32, stepping motor 3 can drive turbine 8 to rotate through coupling 2, revolving stage drive shaft 6 and worm 7, turbine 8 can drive revolving stage 4 to rotate, thus can make sample on revolving stage 4 hold in the palm 5 in the motion on X axle, Y axle and Z axle, can make sample hold in the palm 5 to carry out 360 degrees rotations along with revolving stage 4 again, realize the multidimension degree fast moving of the sample to be measured, the travel switch is designed to enable the movement to be more accurate and controllable; the rotating table 4, the Z-axis sliding table 13, the Y-axis sliding table 23 and the X-axis sliding table 33 are made of stainless steel, so that the air bleeding rate is low, the air bleeding device can be used on high-vacuum equipment, and the stable work of a scanning electron microscope is facilitated; the surfaces of the rotating table driving shaft 6, the worm 7, the Z-axis screw 12, the Y-axis screw 22 and the X-axis screw 32 are plated with molybdenum disulfide coatings, and the molybdenum sulfide can play a role of a solid lubricant in a high-vacuum environment. In a word, this vacuum four-axis motion platform for among scanning electron microscope structural design scientific and reasonable can reliably fix a position the sample on the sample support fast, and the repeated positioning precision is high, and overall mechanism is compact, and the sample is long at X, Y, Z triaxial straight line stroke distance, and the product holds in the palm can adorn jumbo size sample, and convenient loading and unloading, the reliability is high and can be applicable to and use under high vacuum environment such as field emission electron microscope.

It is noted that, herein, relational terms such as first and second (a, b, etc.) and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.

The basic principles and the main features of the invention and the advantages of the invention have been shown and described above. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. The utility model provides a vacuum four-axis motion platform structure for among scanning electron microscope, includes base platform (1), shaft coupling (2), step motor (3) and revolving stage (4), its characterized in that: the Z-axis vacuum motor (11) is fixed to the top end of the base platform (1), the Z-axis vacuum motor (11) is connected with a Z-axis screw (12) through a coupling (2), Z-axis guide rails (14) are fixed to two sides of the base platform (1), a Z-axis sliding table (13) is arranged on each Z-axis guide rail (14), the Z-axis screw (12) is arranged in the Z-axis sliding table (13), and the Z-axis vacuum motor (11) can drive the Z-axis sliding table (13) to slide along the Z-axis guide rails (14) through the coupling (2) and the Z-axis screw (12); a Y-axis vacuum motor (21) is fixed on the Z-axis sliding table (13), the Y-axis vacuum motor (21) is connected with a Y-axis screw (22) through a coupling (2), Y-axis guide rails (24) are fixed on two sides of the Z-axis sliding table (13), a Y-axis sliding table (23) is arranged on the Y-axis guide rails (24), the Y-axis screw (22) is arranged in the Y-axis sliding table (23), and the Y-axis vacuum motor (21) can drive the Y-axis sliding table (23) to slide along the Y-axis guide rails (24) through the coupling (2) and the Y-axis screw (22); an X-axis vacuum motor (31) is fixed on one side of the Y-axis sliding table (23), the X-axis vacuum motor (31) is connected with an X-axis screw (32) through a coupling (2), X-axis guide rails (34) are fixed on two sides of the Y-axis sliding table (23), an X-axis sliding table (33) is arranged on the X-axis guide rails (34), the X-axis screw (32) is arranged in the X-axis sliding table (33), and the X-axis vacuum motor (31) can drive the X-axis sliding table (33) to slide along the X-axis guide rails (34) through the coupling (2) and the X-axis screw (32); the middle part of X axle slip table (33) is equipped with turbine (8), be fixed with revolving stage (4) on turbine (8), it is equipped with worm (7) to correspond turbine (8) on X axle slip table (33), worm (7) set up at X axle slip table (33) through worm fixing base (9), Y axle slip table (23) opposite side is fixed with step motor (3), step motor (3) are connected with revolving stage drive shaft (6) through shaft coupling (2), pass in revolving stage drive shaft (6) follow worm (7), step motor (3) can drive turbine (8) rotation through shaft coupling (2), revolving stage drive shaft (6) and worm (7), turbine (8) can drive revolving stage (4) rotation.

2. The vacuum four-axis motion stage structure of claim 1, wherein: the base platform (1) is vertically arranged.

3. The vacuum four-axis motion stage structure of claim 1, wherein: two Z axle travel switches (15) are inherent to one side of Z axle slip table (13), it is fixed with Z axle stopper (16) to correspond Z axle travel switch (15) on base platform (1), Z axle stopper (16) are located between two Z axle travel switches (15).

4. The vacuum four-axis motion stage structure of claim 1, wherein: two inherent Y axle travel switches (25) of one side of Z axle slip table (13), it is fixed with Y axle stopper (26) to correspond Y axle travel switch (25) on Y axle slip table (23), Y axle stopper (26) are located between two Y axle travel switches (25).

5. The vacuum four-axis motion stage structure of claim 1, wherein: x-axis travel switches (35) are respectively fixed on two sides of the Y-axis sliding table (23) corresponding to the X-axis sliding table (33).

6. The vacuum four-axis motion stage structure of claim 1, wherein: and a rotary table travel switch (10) is fixed on the X-axis sliding table (33) corresponding to the rotary table (4).

7. The vacuum four-axis motion stage structure of claim 1, wherein: the rotating platform (4) is provided with a plurality of sample holders (5).

8. The vacuum four-axis motion stage structure of claim 1, wherein: the stroke of Z axle screw rod (12) is 60 millimeters, the stroke of Y axle screw rod (22) and X axle screw rod (32) is 100 millimeters, revolving stage (4) can realize 360 degrees rotations.

9. The vacuum four-axis motion stage structure of claim 1, wherein: the rotary table (4), the Z-axis sliding table (13), the Y-axis sliding table (23) and the X-axis sliding table (33) are made of stainless steel materials.

10. The vacuum four-axis motion stage structure of claim 1, wherein: the surfaces of the rotating table driving shaft (6), the worm (7), the Z-axis screw (12), the Y-axis screw (22) and the X-axis screw (32) are plated with molybdenum disulfide coatings.