CN214174506U - Online sheet resistance detector for vacuum coating - Google Patents
Online sheet resistance detector for vacuum coating Download PDFInfo
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- CN214174506U CN214174506U CN202120057354.5U CN202120057354U CN214174506U CN 214174506 U CN214174506 U CN 214174506U CN 202120057354 U CN202120057354 U CN 202120057354U CN 214174506 U CN214174506 U CN 214174506U
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- vacuum coating
- sheet resistance
- coating device
- resistance detector
- film
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Abstract
The utility model discloses an online square resistance detector of vacuum coating in the vacuum coating detecting instrument field, including the square resistance appearance and the test probe who is connected with the square resistance appearance electricity, test probe and vacuum coating device's cavity sealing connection, inside its inside vacuum coating device that stretches into to with the face contact of coating film. The utility model provides a traditional mode can only measure the problem that the side hinders after film preparation accomplishes, through stretching into vacuum coating device's inside with the test probe of side resistance appearance, realized the on-line measuring of film product face, can ensure that the film manufacturing in-process can be at any time according to the side resistance value adjustment technological parameter, guarantee that the product reaches required effect.
Description
Technical Field
The utility model relates to a vacuum coating detecting instrument field, specific theory relates to an online square resistance detector of vacuum coating.
Background
The electrical property of the flexible conductive film (such as an ITO film) can be represented by a sheet resistance value, wherein the sheet resistance value refers to the resistance of a unit square plane conductor, and the thickness of the conductive film can be calculated by measuring the sheet resistance because the sheet resistance value of a unit square conductor is related to the thickness of the unit square conductor.
The method is different from the common resistor, the current film resistor is represented by a square resistor, and a square resistor measuring instrument is a special four-probe ohmmeter. However, the existing sheet resistance detector can only measure after the film is manufactured, and cannot realize real-time online detection. Therefore, the film is reworked when the film is not qualified, so that the production procedures of the film product are increased, and the online adjustment during the production cannot be realized.
There is a need for an apparatus that can perform on-line inspection of sheet resistance during the film production process.
Disclosure of Invention
In order to overcome the defects of the prior art, the utility model provides an online sheet resistance detector for vacuum coating.
The utility model discloses technical scheme as follows:
the on-line sheet resistance detector for vacuum coating comprises a sheet resistance instrument and a detection probe electrically connected with the sheet resistance instrument, and is characterized in that the detection probe is hermetically connected with a cavity of a vacuum coating device, and the interior of the detection probe extends into the vacuum coating device and is in contact with a coated film surface.
According to the above scheme the utility model discloses, its characterized in that, vacuum coating device includes the wallboard, seted up on the wallboard with test probe assorted hole.
According to the above scheme the utility model discloses, its characterized in that, test probe includes the conducting shaft and locates four guide pulleys on the conducting shaft, the guide pulley with the face contact in the vacuum coating device and roll along with it.
Furthermore, a conversion plug is arranged at the end part of the detection probe, the conversion plug is hermetically connected with a cavity of the vacuum coating device, and the conversion plug is connected with a plug of the sheet resistance meter.
Furthermore, each guide wheel is connected with the conversion plug through a corresponding lead respectively, and the lead is positioned in the conductive shaft.
Furthermore, the four guide wheels are located on the same conductive shaft, or the four guide wheels are located on different conductive shafts.
Further, the detection probe is matched with a roller in a vacuum coating device for extrusion, so that a coating film passes through the roller and the guide wheel.
Further, the guide wheel is made of metal.
Furthermore, the guide wheel is made of brass or red copper.
According to the above scheme the utility model discloses, its beneficial effect lies in, the utility model discloses a stretch into vacuum coating device's inside with the test probe of square resistance appearance, realized the on-line measuring of film product face, solved the problem that traditional mode can only measure the square resistance after film preparation accomplishes, through the real-time detection to the film square resistance, can ensure that the film manufacturing process can be at any time according to square resistance value adjustment technological parameter, guarantee that the product reaches required effect.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
In the figure, 1-sheet resistance meter; 21-a conductive shaft; 22-a guide wheel; 23-a conversion plug; and 3-wallboard.
Detailed Description
The invention is further described with reference to the following figures and embodiments:
as shown in fig. 1, an online sheet resistance detector for vacuum coating comprises a sheet resistance meter 1 and a detection probe electrically connected with the sheet resistance meter 1, wherein the detection probe extends into a vacuum coating device (the left side in the figure is the inside of the vacuum coating device, and the right side is the outside of the vacuum coating device) and contacts with a coated film surface, so as to realize real-time detection of sheet resistance of the inner film surface of the vacuum coating device. The utility model overcomes the defect that traditional side hinders the appearance and can only detect after film preparation is accomplished, through the on-line measuring to the face side hinders, can be according to the technological parameter of testing result real-time adjustment film preparation, ensure that the product reaches the effect of wanting.
The utility model discloses in, the vacuum environment of vacuum coating device inside can be ensured to the cavity sealing connection of test probe and vacuum coating device, avoids gas leakage. Specifically, the vacuum coating device includes a wall plate 3, a hole (not shown in the figure, the same below) matched with the detection probe is formed in the wall plate 3, and the detection probe extends into the vacuum coating device through the hole.
The end part of the detection probe is provided with a conversion plug 23, the conversion plug 23 is arranged in the hole and is hermetically connected with the cavity (namely the wall plate 3) of the vacuum coating device, the square resistance instrument 1 is positioned at the outer side of the vacuum coating device, and the plug of the square resistance instrument can be inserted into the conversion plug 3. After the plug of the square resistance instrument 1 is disconnected, the whole vacuum coating device is still in a sealed state, so that the vacuum environment of the vacuum coating device is not influenced by whether the square resistance instrument 1 is connected or not.
The utility model discloses in, the test probe includes conductive shaft 21 and locates four guide pulleys 22 on the conductive shaft 21, and four guide pulleys are connected with change over plug 23 through the wire that corresponds respectively (not shown in the figure, the same down). Preferably, the wire is embedded in the conductive shaft 21 to prevent the wire from affecting the operation of the coating.
The detection probe is in press fit with a roller (not shown in the figure, the same below) in the vacuum coating device, and the coating film passes through the roller and the guide wheel 22, so that the guide wheel 22 is in contact with the film surface in the vacuum coating device and rolls along with the rotation of the roller, and in the process that the coated product moves forwards, the guide wheel 22 can be in contact with the film surface without influencing the normal operation of the coated product. In one embodiment, the four guide wheels 22 are all disposed on the same conductive shaft 21, the end of the conductive shaft 21 is connected to the conversion plug 23, and the wires of the four guide wheels 22 are respectively connected to the conversion plug 23 to realize data transmission. In another embodiment, four guide wheels 22 are located on different conductive shafts 21, and the wires of the four guide wheels 22 are respectively connected with a conversion plug 23 to realize data transmission.
In one embodiment, four guide wheels 22 are equally spaced on the conductive shaft 21; in another embodiment, the four guide wheels 22 may be distributed on the conductive shaft 21 at unequal intervals.
Preferably, the guide wheel 22 is made of metal. The guide wheel 22 can be made of metal materials with good electrical conductivity such as brass, red copper and the like, and the pressure of the guide wheel 22 on the coating film is reduced by controlling the distance between the guide wheel and the roller, so that the guide wheel does not influence the formation of the coating film.
In the specific implementation process, the guide wheel 22 is in contact with the running film surface, the film coating data is measured, the detection data is transmitted to the conversion plug 23 through a lead, the conversion plug 23 is connected with a pin between the plugs of the sheet resistance meter 1, the detection result is transmitted to the sheet resistance meter plug, and the detection result is displayed in the sheet resistance meter 1. The processing and calculating process of the sheet resistance meter 1 for data can adopt the conventional algorithm in the field, and the detailed description is omitted here.
The utility model discloses stretch into vacuum coating device with test probe inside to detect coating film data as four contacts through four guide pulleys, realize on-line measuring coating film side resistance in the coating film production process, make in the coating film production process according to the side resistance result real-time adjustment electroplate data, its real-time nature is high. And the utility model discloses whole check out test set is safe, reliable, stable in structure, and is not fragile.
It will be understood that modifications and variations can be made by persons skilled in the art in light of the above teachings and all such modifications and variations are considered to be within the scope of the invention as defined by the following claims.
The above exemplary description of the present invention is made in conjunction with the accompanying drawings, and it is obvious that the present invention is not limited by the above manner, and various improvements made by the method concept and technical solution of the present invention or by directly applying the concept and technical solution of the present invention to other occasions without improvement are all within the protection scope of the present invention.
Claims (9)
1. The on-line sheet resistance detector for vacuum coating comprises a sheet resistance instrument and a detection probe electrically connected with the sheet resistance instrument, and is characterized in that the detection probe is hermetically connected with a cavity of a vacuum coating device, and the interior of the detection probe extends into the vacuum coating device and is in contact with a coated film surface.
2. The vacuum coating online sheet resistance detector of claim 1, wherein the vacuum coating device comprises a wall plate, and the wall plate is provided with a hole matched with the detection probe.
3. The vacuum coating on-line sheet resistance detector of claim 1, wherein the detection probe comprises a conductive shaft and four guide wheels arranged on the conductive shaft, and the guide wheels contact with and roll with a film surface in the vacuum coating device.
4. The vacuum coating online sheet resistance detector of claim 3, wherein a conversion plug is arranged at the end of the detection probe, the conversion plug is hermetically connected with the cavity of the vacuum coating device, and the conversion plug is connected with the plug of the sheet resistance detector.
5. The vacuum coating on-line sheet resistance detector as claimed in claim 4, wherein each guide wheel is connected with the conversion plug through a corresponding wire, and the wire is located in the conductive shaft.
6. The vacuum coating on-line sheet resistance detector as claimed in claim 3, wherein the four guide wheels are located on the same conductive shaft, or the four guide wheels are located on different conductive shafts.
7. The vacuum coating on-line sheet resistance detector as claimed in claim 3, wherein the detecting probe cooperates with a roller in a vacuum coating device to press so that the coating passes through between the roller and the guide wheel.
8. The vacuum coating on-line sheet resistance detector as claimed in claim 3, wherein the guide wheel is made of metal.
9. The vacuum coating on-line sheet resistance detector as claimed in claim 8, wherein the guide wheel is made of brass or red copper.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120057354.5U CN214174506U (en) | 2021-01-08 | 2021-01-08 | Online sheet resistance detector for vacuum coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120057354.5U CN214174506U (en) | 2021-01-08 | 2021-01-08 | Online sheet resistance detector for vacuum coating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214174506U true CN214174506U (en) | 2021-09-10 |
Family
ID=77593175
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120057354.5U Active CN214174506U (en) | 2021-01-08 | 2021-01-08 | Online sheet resistance detector for vacuum coating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214174506U (en) |
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2021
- 2021-01-08 CN CN202120057354.5U patent/CN214174506U/en active Active
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