CN219533277U - A conductive thin film online square resistance detection device - Google Patents

Abstract

The utility model discloses an online square resistance detection device of a conductive film in the technical field of square resistance detection instruments, which comprises a fixed shaft center and a shaft sleeve set outside the fixed shaft center, and a plurality of square resistance detection components are embedded in the shaft sleeve , each square resistance detection component includes four probes, and the tops of the four probes are flush with the outer surface of the shaft sleeve, and the square resistance detection component abuts against the surface of the fixed shaft through the connecting piece. It solves the problem that the existing square resistance detector can only detect the online square resistance of the conductive film with a small width. For the conductive film with a large width, it needs to be tested in a static state of the conductive film. The operation method is complicated and the detection efficiency is low. The problem is that for the square resistance detection of large and wide conductive films, it does not need to be detected in the static state of the conductive film, and the square resistance of different positions of the film can be detected online during the rewinding process of the conductive film. The operation method is simple and saves the detection Time, improve the detection efficiency of square resistance.

Description

A conductive thin film online square resistance detection device

technical field

The utility model relates to the technical field of square resistance detection instruments, in particular to an online square resistance detection device of a conductive film.

Background technique

The resistance value per unit square area is called the square resistance, and the square resistance is an important quality index of the conductive film. After the conductive film is produced, it needs to be tested for sheet resistance. Square resistance, referred to as square resistance, also known as film resistance, the resistance measurement value of any size square is the same, the size of the square resistance is only related to the thickness of the conductive film, therefore, the measurement of the square resistance is widely used in the detection of conductive films. Thickness, to monitor film thickness uniformity during the production of conductive films. The four-probe measurement method is widely used in the measurement of sheet resistance in various fields, and four-probe measurement is an essential means for the detection of various conductive thin film related preparation processes.

The existing square resistance detection method is to use a four-probe square resistance detector to detect at different positions of the film, which contacts and conducts with the conductive film to be detected through four probes, so that the gap between the probes, the conductive film and the power supply A measurement loop is formed so that the sheet resistance of the conductive film can be measured. There are some square resistance testers for online square resistance detection of conductive films. However, this square resistance tester can only perform online square resistance test for small-width conductive films. For large-width conductive films, it is necessary to The detection is carried out in a static state, the operation method is complicated, and the detection efficiency is low.

Utility model content

In order to solve the problem that the existing square resistance detector can only detect the online square resistance of the conductive film with a small width. For the conductive film with a large width, it needs to be tested in a static state of the conductive film. The operation method is complicated and the detection efficiency is low. Problem, the utility model provides an online square resistance detection device for a conductive film.

The technical scheme of the utility model is as follows:

An online square resistance detection device for a conductive film, comprising a fixed shaft center and a shaft sleeve sleeved outside the fixed shaft center, and a plurality of square resistance detection components are embedded in the shaft sleeve, each of the square resistance detection components Each includes four probes, and the tops of the four probes are flush with the outer surface of the shaft sleeve, and the square resistance detection assembly abuts against the surface of the fixed shaft through a connecting piece.

According to the utility model of the above solution, the square resistance detection assembly further includes a metal sheet for connecting the probe, and the end of the probe away from the metal sheet is flush with the outer surface of the shaft sleeve, so The metal sheet abuts against the connecting piece.

According to the present utility model of the above solution, a plurality of square resistance detection assemblies are provided along the length direction of the shaft sleeve.

According to the utility model of the above solution, a plurality of square resistance detection assemblies are arranged along the circumferential direction of the shaft sleeve.

According to the utility model of the above solution, a plurality of data transmission cables are arranged in the fixed axis.

According to the utility model of the above solution, the part of the fixed axis in contact with the connector is a conductive ring.

According to the utility model of the above solution, the surface of the shaft sleeve is provided with a rubber layer.

According to the utility model of the above solution, the bushing is made of non-conductive material.

According to the utility model of the above solution, the connecting piece is a spring-type contact thimble.

According to the utility model of the above solution, the square resistance detection component and the connecting piece are all conductive materials.

According to the utility model of above-mentioned scheme, its beneficial effect is:

In the process of rewinding the conductive film, the above-mentioned conductive film online square resistance detection device is set above the film running path of the conductive film, the shaft sleeve rotates with the movement of the film surface, and the square resistance detection is performed during the rotation of the shaft sleeve. The component is in contact with different positions of the conductive film, and the square resistance detection can be carried out at different positions on the width of the conductive film at the same time. For the square resistance detection of a large and wide conductive film, it is not necessary to detect the conductive film in a static state. During the film rewinding process, the square resistance of different positions of the film is detected online, the operation method is simple, the detection time is saved, and the square resistance detection efficiency is improved.

In addition, the top of each square resistance detection component is flush with the outer surface of the shaft sleeve, preventing the square resistance detection component from damaging the conductive film, and realizing non-destructive testing of the conductive film.

Description of drawings

In order to more clearly illustrate the technical solutions in the embodiments of the utility model, the following will briefly introduce the accompanying drawings that are required in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only the practical For some novel embodiments, those of ordinary skill in the art can also obtain other drawings based on these drawings without any creative work.

Fig. 1 is the structural representation of the utility model;

Fig. 2 is an enlarged view of part A in Fig. 1;

Fig. 3 is a longitudinal sectional view of the utility model;

Fig. 4 is the transverse sectional view of the utility model;

Fig. 5 is the structural representation of fixed axis;

FIG. 6 is a schematic structural diagram of a square resistance detection component.

In the figure, 1. fixed axis; 11. data transmission cable; 12. conductive ring; 2. shaft sleeve; 3. square resistance detection component; 31. probe; 32. metal sheet; 4. connector.

Implementation

In order to make the technical problems, technical solutions and beneficial effects to be solved by the utility model clearer, the utility model will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model, and are not intended to limit the utility model.

As shown in Figure 1 and Figure 2, the utility model provides an online square resistance detection device for conductive films, including a fixed shaft 1, a shaft sleeve 2 set outside the fixed shaft 1, and the shaft sleeve 2 is embedded with multiple There are two square resistance detection components 3, and the top of each square resistance detection component 3 is flush with the outer surface of the shaft sleeve 2, and the square resistance detection component 3 abuts against the surface of the fixed shaft 1 through the connecting piece 4.

As shown in FIG. 3 , in this embodiment, the fixed axis 1 is connected to an external processor, and a plurality of data transmission cables 11 are arranged in the fixed axis 1 to facilitate the transmission of electrical signals. The square resistance detection component 3 transmits the electrical signal to the data transmission cable 11 through the connector 4, and the data transmission cable 11 transmits the electrical signal to an external processor, and the external processor can process the collected electrical signal and convert it into The square resistance data is output through the display. In addition, the standard value range of the square resistance can be set, and when it is detected that the square resistance value is not within the standard value range, the processor can provide an alarm signal. In addition, one data transmission cable 11 corresponds to one square resistance detection component 3 to realize square resistance detection on different positions of the conductive film.

It should be noted that the structures of the external processor and the display of the present invention are not specifically set, as long as the purpose of the present invention is achieved, those skilled in the art can choose according to well-known technical means.

As shown in Figure 4 and Figure 5, in this embodiment, the part of the fixed axis 1 that is in contact with the connector 4 is a conductive ring 12, and the part of the fixed axis 1 except for the conductive ring 12 is non-conductive, and a conductive ring 12 is connected with a data transmission cable 11, the square resistance detection components 3 at different positions along the width direction of the conductive film can transmit electrical signals separately without affecting each other.

As shown in Figure 1 and Figure 4, in this embodiment, the shaft sleeve 2 is made of non-conductive material, and the shaft sleeve 2 is socketed with the fixed shaft center 1. When in use, one end of the shaft sleeve 2 is connected to a power source, and the power The source drives the shaft sleeve 2 to rotate, while the fixed axis 1 is fixed, and the connecting piece 4 slides on the surface of the fixed axis 1 to realize online detection of the square resistance of the conductive film.

As shown in FIG. 1 , FIG. 2 , and FIG. 6 , in this embodiment, the square resistance detection component 3 is made of a conductive material to ensure non-conduction between multiple square resistance detection components 3 . The square resistance detection assembly 3 includes four probes 31 and a metal sheet 32 for connecting the probes 31. The end of the probe 31 away from the metal sheet 32 is flush with the outer surface of the shaft sleeve 2, and the metal sheet 32 is in contact with the connector 4. In addition, the surface of the shaft sleeve 2 is provided with a rubber layer, and the end of the probe 31 transitions smoothly with the rubber layer to prevent the square resistance detection component 3 from damaging the conductive film, and to achieve non-destructive testing of the conductive film. In addition, a plurality of square resistance detection components 3 can be arranged along the length direction of the shaft sleeve 2, and can detect multiple points in the width direction of the conductive film. Multiple square resistance detection components 3 can be arranged on the same straight line, and also It can be set not on the same straight line. In actual design, the distribution of multiple square resistance detection components 3 in the length direction of the shaft sleeve 2 can be designed according to actual needs; A square resistance detection component 3, as the shaft sleeve 2 rotates, can monitor multiple points in the length direction of the conductive film, that is, perform square resistance tests on multiple positions on the conductive film at the same time to improve detection efficiency. In addition, the density of detection points can be controlled by controlling the number of square resistance detection components 3. In actual design, the distribution of square resistance detection components 3 on the shaft sleeve 2 can be designed according to actual needs, and then the detection points can be designed. Density.

As shown in FIG. 4 , in this embodiment, the connector 4 is made of conductive material, and the connector 4 can be designed as a spring-type contact thimble to ensure that the spring-type contact thimble directly receives the electrical signal of the square resistance detection component 3 . Spring contact thimble is a kind of connector, which acts as a bridge and is mainly used to connect current or transmit signals. It is widely used in consumer electronics, automotive electronics, medical, equipment, military, and industrial products. Of course, in actual design, the structure of the connecting member 4 can be designed according to actual needs. The square resistance detection component 3 is in contact with the fixed axis 1 through a spring-type contact thimble, and the fixed axis 1 receives the electrical signal of the square resistance detection component 3 and transmits the electrical signal to an external processor.

In the process of rewinding the conductive film, the online resistance detection device of the conductive film of the present invention is arranged above the film-moving path of the conductive film, the shaft sleeve 2 rotates with the movement of the film surface, and the shaft sleeve 2 is in the process of rotation Among them, the square resistance detection component 3 is in contact with different positions of the conductive film, the square resistance detection component 3 transmits the electrical signal to the fixed axis 1 through the connector 4, the fixed axis 1 transmits the electrical signal to the external processor, and the external processor The collected electrical signals can be processed and converted into square resistance data and output through the display. The utility model can detect the square resistance of different positions on the width of the conductive film at the same time. For the square resistance detection of the large-width conductive film, it does not need to detect the conductive film in a static state, and realizes online during the rewinding process of the conductive film. The square resistance of different positions of the film is detected, the operation method is simple, the detection time is saved, and the detection efficiency of the square resistance is improved.

It should be noted that when an element is said to be "disposed on" another element, it can be directly on the other element or there can also be an intervening element, and when an element is said to be "connected" to another element, it can be A direct connection to another element or possibly an intervening element at the same time.

The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship that is usually placed when the application product is used, or the orientation or positional relationship commonly understood by those skilled in the art, or the The usual orientation or positional relationship of the application product when used is only for the convenience of describing the application and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, therefore It should not be construed as a limitation of the application.

It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should belong to the protection scope of the appended claims of the present utility model.

The utility model patent has been exemplarily described above in conjunction with the accompanying drawings. Obviously, the implementation of the utility model patent is not limited by the above-mentioned methods, as long as various improvements made by the method concept and technical solutions of the utility model patent are adopted, or Directly applying the ideas and technical solutions of the utility model patent to other occasions without improvement is within the protection scope of the utility model.

Claims (10)

1. A conductive thin film online square resistance detection device, characterized in that, comprises a fixed axis, an axle sleeve sleeved on the outside of the fixed axis, a plurality of square resistance detection assemblies are embedded in the axle sleeve, each The square resistance detection components each include four probes, and the tops of the four probes are flush with the outer surface of the shaft sleeve, and the square resistance detection components are connected to the surface of the fixed shaft through a connecting piece. Abut. 2. A conductive thin film online square resistance detection device according to claim 1, wherein the square resistance detection component also includes a metal sheet for connecting the probe, and the probe is far away from the metal One end of the sheet is flush with the outer surface of the sleeve, and the metal sheet abuts against the connecting piece. 3 . The online square resistance detection device of conductive thin film according to claim 1 , wherein a plurality of square resistance detection components are arranged along the length direction of the shaft sleeve. 4 . 4 . The on-line square resistance detection device of conductive thin film according to claim 1 , wherein a plurality of said square resistance detection components are arranged along the circumferential direction of said shaft sleeve. 5 . 5 . The online square resistance detection device of conductive thin film according to claim 1 , wherein a plurality of data transmission cables are arranged in the fixed axis. 5 . 6 . The online square resistance detection device of conductive thin film according to claim 1 , wherein the part of the fixed axis in contact with the connector is a conductive ring. 7 . 7 . The online square resistance detection device of conductive thin film according to claim 1 , wherein a rubber layer is arranged on the surface of the sleeve. 8 . 8 . The online square resistance detection device of a conductive thin film according to claim 1 , wherein the sleeve is made of non-conductive material. 9 . 9 . The online square resistance detection device of conductive thin film according to claim 1 , wherein the connector is a spring-type contact thimble. 10 . 10 . The online square resistance detection device of conductive thin film according to claim 1 , wherein the square resistance detection component and the connecting piece are both made of conductive materials. 11 .