CN214151371U - Glue spreader - Google Patents
Glue spreader Download PDFInfo
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- CN214151371U CN214151371U CN202120564247.1U CN202120564247U CN214151371U CN 214151371 U CN214151371 U CN 214151371U CN 202120564247 U CN202120564247 U CN 202120564247U CN 214151371 U CN214151371 U CN 214151371U
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Abstract
The utility model relates to the technical field of gluing equipment, in particular to a glue spreader especially suitable for a thin substrate in a semiconductor circuit imaging processing technology, which is characterized in that a supporting roll is supported by a first supporting component, a glue spreader is supported by a second supporting component, the first supporting component comprises a left vertical plate and a right vertical plate which are symmetrically arranged on a workbench, and a supporting beam fixed on the tops of the left vertical plate and the right vertical plate; the second supporting assembly comprises a second left vertical plate and a second right vertical plate, wherein the upper ends of the second left vertical plate and the second right vertical plate are respectively connected with the supporting beam through a height adjusting screw; the backing roll is driven by supporting motor, and the glue spreader is driven by the rubber coating motor, and backing roll and glue spreader rotation opposite direction, the utility model discloses it is thick even at the photoresist of base plate surface coating, and rubber coating in-process rubber spreading roller and backing roll surface contactless avoid the photoresist to pollute, greatly improve rubber coating product quality.
Description
The technical field is as follows:
the utility model relates to a rubber coating equipment technical field, specific spreading machine that thin slice base plate was used in specially adapted semiconductor circuit image ization processing technology that says so.
Background art:
in the semiconductor imaging process, a photoresist is coated on the surface of a substrate, and the substrate is exposed to light through a photolithography process, followed by imaging and etching. Because the thickness of the thin sheet substrate is 0.3-1 mm usually, the distance between the glue spreader and the supporting roll is required to be set to be smaller than the thickness value of the substrate usually during gluing, the glue spreader and the supporting roll of the prior art are generally equal-diameter glue rollers, certain size deviation exists during processing of the glue rollers, and the glue rollers can deform after being used for a period of time, so that in order to ensure gluing quality, the gluing distance needs to be set to be small to provide proper pressure, so that photoresist on the glue spreader is uniformly transferred to the surface of the thin sheet substrate, the adverse effect caused by the uneven thickness of the glue spread on the surface of the substrate is the problem that the glue spreader and the supporting roll are in contact at the position of the part of the supporting glue roller, the photoresist on the glue spreader overflows, dust on the supporting roll is adhered to the supporting roll, the photoresist is polluted, and the product quality is increased badly.
In order to solve the problem of small glue application amount caused by insufficient liquid carrying amount on the surface of the rubber roller, patent document CN205797627U discloses a V-shaped groove rubber roller, wherein the liquid carrying amount of the rubber roller is improved by arranging a plurality of annular V-shaped grooves on the rubber roller, the width of the tops of connecting points of the V-shaped grooves is 0.005-0.5mm, and the included angle between every two adjacent V-shaped grooves is 5-150 degrees. However, for the thin substrate products, the parameter setting range of the rubber roller is too large, and the precision of the rubber coating thickness of the products can not be accurately controlled to be +/-0.5 μm.
The invention content is as follows:
the utility model discloses shortcoming and not enough to exist among the prior art has provided a spreading machine that pressure is adjustable, rubber coating thickness is even, can effectively avoid the photoresist pollution between glue spreader and thin slice base plate.
The utility model discloses a following measure reaches:
a glue spreader is characterized in that the supporting roll is supported by a first supporting component, the glue spreader is supported by a second supporting component, the first supporting component comprises a left vertical plate and a right vertical plate which are symmetrically arranged on the workbench, and a supporting cross beam fixed at the tops of the left vertical plate and the right vertical plate; the second supporting assembly comprises a second left vertical plate and a second right vertical plate, wherein the upper ends of the second left vertical plate and the second right vertical plate are respectively connected with the supporting beam through a height adjusting screw; the supporting roller is driven by a supporting motor, the glue spreader is driven by a glue spreading motor, and the rotating directions of the supporting roller and the glue spreader are opposite.
Even rubber roll, even rubber roll and rubber roll parallel arrangement, and be equipped with the interval adjustment mechanism who is used for adjusting pressure between even rubber roll and rubber roll still are equipped with even rubber roll to the rubber roll upside.
The backing roll corresponds the external diameter of the regional department of base plate rubber coating, than the regional 1-5mm big of non-rubber coating to avoid backing roll and glue spreader contact, pollute the photoresist, influence the rubber coating quality.
The glue spreader surface is equipped with the EPT rubber layer, and the continuous slot of wave type that EPT rubber layer surface set up along glue spreader length direction sets up, and the surface of revolution that the slot formed is perpendicular with the glue spreader axis, and the slot width is 50-200 microns, and depth range is 30-150 microns, and V type groove angle scope is 45-90 degrees, and the glue spreader hardness scope is 50-80 degrees.
In the second support assembly, the inner sides of a second left vertical plate and a second right vertical plate are respectively and symmetrically provided with a left linear slide rail and a right linear slide rail, matched sliders are arranged in the linear slide rails, slider seats are fixedly connected to the sliders, and a group of interval adjusting mechanisms are respectively arranged at the upper ends of the linear slide rails and comprise nut seats and adjusting screw rods, wherein the nut seats are fixed at the upper ends of the linear slide rails on the corresponding second left vertical plate or second right vertical plate; two ends of the glue homogenizing roller are respectively connected with two glue homogenizing roller fixing plates, the two glue homogenizing roller fixing plates are respectively connected with the left side sliding block seat and the right side sliding block seat, one end of an adjusting screw rod in the interval adjusting mechanism is connected with a sliding block, the other end of the adjusting screw rod is connected with a nut seat of the second left vertical plate/the second right vertical plate, the relative position of the glue homogenizing roller fixing plate and a linear slide rail can be controlled by adjusting the relative position of the adjusting screw rod and the nut seat, further, the interval between the glue homogenizing roller and the glue spreading roller is adjusted, the purpose of adjusting the pressure between the glue homogenizing roller and the glue spreading roller is achieved, in the working state, the glue homogenizing roller passively rotates in the reverse direction with the glue spreading roller, and then glue on the glue homogenizing roller is transferred to the glue spreading roller.
The inboard linear slide rail of riser or the right riser of second is less than 90 with the horizontal direction contained angle.
The utility model discloses the workstation downside sets up glues bucket, gluey pump to through the pipeline that links to each other with gluey pump, send into the glue solution the nozzle, the nozzle setting is in even rubber roll top, thereby makes the glue solution directly spray to even rubber roll, accomplishes the coating of glue solution on the rubber roll body through even rubber roll again.
When the utility model works, the relative height of the second supporting component relative to the first supporting component can be adjusted through the height adjusting screw rod, and further the distance between the supporting roll and the glue spreader is adjusted, so that the glue spreader and the supporting roll keep equal distance; the upper openings of the two vertical plates in the second supporting assembly are provided with a glue homogenizing roller fixing plate, the glue homogenizing roller is arranged on the glue homogenizing roller fixing plate, the glue homogenizing roller fixing plate is connected with the sliding block seats on the second group of side plates, the pressure between the glue homogenizing roller and the glue coating roller is adjusted through the spacing adjusting mechanism, the glue coating roller is driven by a glue coating motor, and the support roller is driven by a support motor to enable the glue coating roller and the support roller to rotate oppositely; the glue homogenizing roller is in pressure contact with the glue spreading roller and passively and oppositely rotates with the glue spreading roller, a glue pump extracts glue solution in a glue barrel, the glue solution is dripped onto the glue homogenizing roller through a nozzle and is transferred onto the glue spreading roller, the substrate passes between the glue spreading roller and a supporting roller, and the glue solution is transferred onto the substrate; in addition, the diameter of the rubber roller at the gluing position of the supporting roller corresponding to the substrate is 1-5mm larger than that of the non-gluing area, so that the rubber roller is prevented from contacting with a gluing roller, and the photoresist is prevented from being polluted by foreign matters on the surface of the supporting roller; a plurality of wavy grooves are machined in the surface of the glue spreader through polished smooth ethylene propylene diene monomer, the distance between every two adjacent grooves is the same, the groove width value is 50-200 mu m, the depth value is 30-150 mu m, the angle is 45-90 degrees, the rubber roller hardness is 50-80 degrees, the revolution surface formed by the grooves is perpendicular to the roller axis, the pressure between the glue spreader roller and the glue spreader roller is adjustable, the thickness of photoresist on the surface of the glue spreader roller is uniform, the thickness of the photoresist transferred to the surface of a sheet-shaped substrate is more uniform and controllable, the thickness control precision can reach +/-0.5 mu m, and the glue spreading quality is greatly improved.
Description of the drawings:
fig. 1 is a schematic structural diagram of the present invention.
FIG. 2 is a schematic side view of the middle coating roller and the leveling roller of the present invention.
FIG. 3 is a schematic structural diagram of the middle coating roller of the present invention.
Fig. 4 is a schematic structural diagram of the middle distance adjusting mechanism of the present invention.
Reference numerals: the glue spreader comprises a workbench 1, a first supporting component 2, a supporting roller 3, a glue spreader 4, a second supporting component 5, a sliding block 6 between a first group of side plates and a second group of side plates, a height adjusting mechanism 7, a glue spreader fixing plate 8, a glue spreader 9, a sliding block seat 10, an interval adjusting mechanism 11, a glue spreading motor 12, a supporting motor 13, a glue pump 14, a glue barrel 15, a nozzle 16, a linear slide rail 17, a nut seat 18, an adjusting screw rod 19, a sliding block 20, a groove width a, a groove depth b and a groove angle c.
The specific implementation mode is as follows:
the present invention will be further described with reference to the accompanying drawings and examples.
As shown in the attached drawings, the utility model provides a glue spreader, be equipped with backing roll 3 on the workstation 1, the upside of backing roll 3 is equipped with height-adjustable's glue spreader 4, glue spreader 4 and backing roll 3 parallel arrangement, backing roll 3 is supported by first supporting component 2, glue spreader 4 is supported by second supporting component 5, including the left side riser, the right side riser that symmetry set up on workstation 1 in first supporting component 2, and be fixed in the supporting beam at left side riser and right side riser top; the second supporting assembly 5 comprises a second left vertical plate and a second right vertical plate, wherein the upper ends of the second left vertical plate and the second right vertical plate are respectively connected with the supporting beam through a height adjusting screw; the supporting roller 3 is driven by a supporting motor 13, the glue spreader 4 is driven by a glue spreading motor 12, and the supporting roller 3 and the glue spreader 4 rotate in opposite directions.
4 upsides of glue spreader still are equipped with even rubber roll 9, even rubber roll 9 and 4 parallel arrangement of glue spreader, and are equipped with the interval adjustment mechanism 11 that is used for adjusting pressure between even rubber roll 9 and glue spreader 4.
The external diameter that backing roll 3 corresponds the regional department of base plate rubber coating is 1-5mm bigger than non-rubber coating region to avoid backing roll 3 and rubber coating roller 4 contact, pollute the photoresist, influence the rubber coating quality.
The glue spreader 4 surface is equipped with the EPT rubber layer, and the continuous slot of wave type that the EPT rubber layer surface set up along glue spreader length direction sets up, and the surface of revolution that the slot formed is perpendicular with the glue spreader axis, and the slot width is 50-200 microns, and depth range is 30-150 microns, and V type groove angle scope is 45-90 degrees, and the glue spreader hardness scope is 50-80 degrees.
In the second support assembly 5, the inner sides of a second left vertical plate and a second right vertical plate are respectively and symmetrically provided with a left linear slide rail and a right linear slide rail, the linear slide rails are internally provided with matched sliders, the sliders are fixedly connected with slider seats, the upper ends of the linear slide rails 17 are respectively provided with a group of interval adjusting mechanisms 11, each interval adjusting mechanism 11 comprises a nut seat 18 and an adjusting screw rod 19, wherein the nut seats 18 are fixed at the upper ends of the linear slide rails on the corresponding second left vertical plate or second right vertical plate; two ends of the glue homogenizing roller 9 are respectively connected with two glue homogenizing roller fixing plates 8, the two glue homogenizing roller fixing plates 8 are respectively connected with a left side sliding block seat and a right side sliding block seat, one end of an adjusting screw rod 19 in an interval adjusting mechanism 11 is connected with a sliding block 20, the other end of the adjusting screw rod 19 is connected with a nut seat 18 of a second left vertical plate/a second right vertical plate, the relative positions of the glue homogenizing roller fixing plates 8 and a linear sliding rail 17 can be controlled by adjusting the relative positions of the adjusting screw rod 19 and the nut seat 18, further, the interval between the glue homogenizing roller and the glue coating roller is adjusted, the purpose of adjusting the pressure between the glue homogenizing roller and the glue coating roller is achieved, the glue homogenizing roller passively rotates in the reverse direction with the glue coating roller in a working state, and then glue solution on the glue homogenizing roller is transferred to the glue coating roller.
The utility model discloses the workstation downside sets up glues bucket 15, glues pump 14 to through the pipeline that links to each other with gluey pump 14, send into nozzle 16 with the glue solution, nozzle 16 sets up in even rubber roll top.
Example 1:
the embodiment provides a glue spreader, which comprises a workbench 1, wherein a first supporting component 2 is arranged on the workbench 1, a supporting roller 3 is arranged between two vertical plates in the first supporting component 2, a glue spreader 4 is arranged between second supporting components 5, the two vertical plates of the first supporting component 2 are correspondingly connected with the two vertical plates 5 of the second supporting components through two sliding blocks 6, the relative position of the second supporting component 5 relative to the first supporting component 2 is adjusted through a height adjusting mechanism 7, the distance between the supporting roller 3 and the glue spreader 4 is adjusted, and the glue spreader and the supporting roller are kept at equal distance through adjustment;
the second group of side plates 5 are provided with openings and are provided with glue homogenizing roller fixing plates 8, glue homogenizing rollers 9 are arranged on the glue homogenizing roller fixing plates 8 on the second group of side plates, the glue homogenizing roller fixing plates 8 are connected on a sliding block seat 10, the pressure between the glue homogenizing rollers 9 and the glue coating rollers 4 is adjusted through an interval adjusting mechanism 11,
in the second support assembly 5, a left linear slide rail and a right linear slide rail are symmetrically arranged on the inner sides of a second left vertical plate and a second right vertical plate respectively, a slider matched with the slider is arranged in the linear slide rail, a slider seat is fixedly connected to the slider, a group of distance adjusting mechanisms are arranged at the upper end of the linear slide rail respectively, each distance adjusting mechanism 11 comprises a nut seat and an adjusting screw rod, wherein the nut seats are fixed at the upper ends of the linear slide rails on the corresponding second left vertical plate or second right vertical plate; the two ends of the glue homogenizing roller 9 are respectively connected with the two glue homogenizing roller fixing plates 8, the two glue homogenizing roller fixing plates 8 are respectively connected with the left side sliding block seat and the right side sliding block seat, one end of an adjusting screw rod in the interval adjusting mechanism is connected with a sliding block, the other end of the adjusting screw rod is connected with a nut seat of a second left vertical plate/a second right vertical plate, the relative position of the glue homogenizing roller fixing plates in a linear slide rail can be controlled by adjusting the relative position of the adjusting screw rod and the nut seat, further, the interval between the glue homogenizing roller and the glue coating roller is adjusted, the purpose of adjusting the pressure between the glue homogenizing roller and the glue coating roller is achieved, the glue homogenizing roller passively rotates reversely with the glue coating roller under the working state, and then the glue solution on the glue homogenizing roller is transferred onto the glue coating roller
The glue spreader is characterized in that a motor 12 is arranged on one side of the glue spreader 4, a motor 13 is arranged on one side of the supporting roller 3, the glue spreader 4 and the supporting roller 3 are driven to rotate in opposite directions, the glue spreader roller 9 is in pressure contact with the glue spreader roller 4 and passively rotates in opposite directions relative to the glue spreader roller 4, a glue pump 14 extracts glue solution in a glue barrel 15, the glue solution is dripped to the glue spreader roller 9 through a nozzle 16 and is transferred to the glue spreader roller 4, and a substrate passes between the glue spreader roller 4 and the supporting roller 3 and is transferred to the substrate.
In the embodiment, the diameter of the rubber roller at the gluing position of the support roller 3 corresponding to the substrate is 1-5mm larger than that of the non-gluing area, so that the rubber roller is prevented from contacting with the glue spreader 4, and the photoresist is prevented from being polluted by foreign matters on the surface of the support roller; a plurality of wavy grooves are machined in the surface of the glue spreader 4 through the polished smooth ethylene propylene diene monomer, the distance between every two adjacent grooves is the same, the groove width value is 50-200 mu m, the depth value is 30-150 mu m, the angle is 45-90 degrees, the rubber roll hardness is 50-80 degrees, the revolution surface formed by the grooves is perpendicular to the axis of the roll, the pressure between the glue spreader and the glue spreader is adjustable, the thickness of photoresist on the surface of the glue spreader is uniform, the thickness of the photoresist transferred to the surface of the sheet-shaped substrate is more uniform and controllable, the thickness control precision can reach +/-0.5 mu m, and the glue spreading quality is greatly improved.
The utility model discloses it is thick even at the photoresist of base plate surface coating, and rubber coating in-process rubber coating roller and backing roll surface contactless avoid the photoresist to pollute, greatly improve rubber coating product quality.
Claims (7)
1. A glue spreader is characterized in that the supporting roll is supported by a first supporting component, the glue spreader is supported by a second supporting component, the first supporting component comprises a left vertical plate and a right vertical plate which are symmetrically arranged on the workbench, and a supporting cross beam fixed at the tops of the left vertical plate and the right vertical plate; the second supporting assembly comprises a second left vertical plate and a second right vertical plate, wherein the upper ends of the second left vertical plate and the second right vertical plate are respectively connected with the supporting beam through a height adjusting screw; the supporting roller is driven by a supporting motor, the glue spreader is driven by a glue spreading motor, and the rotating directions of the supporting roller and the glue spreader are opposite.
2. The glue spreader of claim 1, wherein a glue spreader is further disposed above the glue spreader, the glue spreader is disposed parallel to the glue spreader, and a spacing adjustment mechanism is disposed for adjusting a pressure between the glue spreader and the glue spreader.
3. Glue spreader according to claim 1, characterized in that the outer diameter of the support roller at the area corresponding to the glue application area of the substrate is 1-5mm larger than the non-glue application area.
4. The glue spreader according to claim 1, wherein the surface of the glue spreader is provided with an ethylene propylene diene monomer layer, the surface of the ethylene propylene diene monomer layer is provided with wave-shaped continuous grooves arranged along the length direction of the glue spreader, a revolution surface formed by the grooves is vertical to the central axis of the glue spreader, the width of the grooves is 50-200 microns, the depth of the grooves is 30-150 microns, the angle of the V-shaped groove is 45-90 degrees, and the hardness of the glue spreader is 50-80 degrees.
5. The glue spreader according to claim 2, wherein a left linear slide rail and a right linear slide rail are symmetrically arranged on the inner sides of a second left vertical plate and a second right vertical plate in the second supporting assembly respectively, a slider matched with the second left vertical plate is arranged in the linear slide rail, a slider seat is fixedly connected to the slider, a group of interval adjusting mechanisms are arranged at the upper ends of the linear slide rails respectively, each interval adjusting mechanism comprises a nut seat and an adjusting screw rod, and the nut seats are fixed at the upper ends of the linear slide rails on the corresponding second left vertical plate or second right vertical plate; even rubber roll both ends link to each other with two even rubber roll fixed plates respectively, two even rubber roll fixed plates respectively with left side slider seat, right side slider seat links to each other, the slider is connected to adjusting screw's among the interval adjustment mechanism one end, adjusting screw's the other end links to each other with the nut seat of the left riser of second/the right riser of second, through the relative position of adjustment adjusting screw and nut seat, the relative position of steerable even rubber roll fixed plate and linear slide rail, and then adjust the interval between even rubber roll and the rubber coating roller, reach the purpose of adjusting pressure between even rubber roll and the rubber coating roller.
6. The glue spreader of claim 5, wherein an included angle between the linear slide rail on the inner side of the second left vertical plate or the second right vertical plate and the horizontal direction is less than 90 °.
7. The glue spreader of claim 2, wherein the glue barrel and the glue pump are disposed at the lower side of the work table, and the glue solution is fed into the nozzle through a pipeline connected to the glue pump, and the nozzle is disposed above the glue spreading roller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120564247.1U CN214151371U (en) | 2021-03-18 | 2021-03-18 | Glue spreader |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120564247.1U CN214151371U (en) | 2021-03-18 | 2021-03-18 | Glue spreader |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214151371U true CN214151371U (en) | 2021-09-07 |
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ID=77554090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120564247.1U Active CN214151371U (en) | 2021-03-18 | 2021-03-18 | Glue spreader |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214151371U (en) |
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2021
- 2021-03-18 CN CN202120564247.1U patent/CN214151371U/en active Active
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