CN214109260U - High-speed laser scanning rotary-cut drilling system - Google Patents
High-speed laser scanning rotary-cut drilling system Download PDFInfo
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- CN214109260U CN214109260U CN202022329019.4U CN202022329019U CN214109260U CN 214109260 U CN214109260 U CN 214109260U CN 202022329019 U CN202022329019 U CN 202022329019U CN 214109260 U CN214109260 U CN 214109260U
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Abstract
A high-speed laser scanning rotary-cut drilling system comprises a laser generator, a beam expander and a rotary-cut module, wherein the beam expander is arranged on a light path of the laser generator, and the beam expander and the laser path are kept concentric; the rotary cutting module is arranged in the light emitting direction of the zoom beam expander, and laser passing through the rotary cutting module is emitted to a product to be processed. The utility model discloses when processing PCB FPC copper foil, PI film, choose for use suitable laser instrument technological parameter, realize expanding the beam through the beam expander lens, be equipped with the different aperture eccentric beam distance of having debugged rotary-cut module and can realize 40-200um diameter micropore's drilling, because rotary-cut module can provide higher rotational speed, realize that rotary-cut hole edge is slick and sly more, level and more to better control micropore fuel factor.
Description
[ technical field ] A method for producing a semiconductor device
The utility model relates to a high-speed laser micropore drilling technical field especially relates to the technique of adopting laser scanning rotary-cut to carry out micropore drilling on PCB, FPC, copper foil or the film.
[ background of the invention ]
At present, two types of micro-hole drilling process modes of materials such as PCB, FPC, copper foil and film are known in the market: the first method is to use a micro drill bit and use a numerical control machine tool to drill at high speed, the scheme has low efficiency, and the micro drill bit has high cost in the using process due to high loss efficiency of the drill bit when a copper foil is drilled; the second is to use nanosecond ultraviolet laser and a galvanometer system for scanning drilling, and the scheme is most widely applied. The nanosecond ultraviolet laser is an ultraviolet laser generator with typical pulse width in the nanosecond level, the laser scanner is also called a laser galvanometer and consists of an X-Y optical scanning head, an electronic driving amplifier and an optical reflecting lens, and a signal provided by a computer controller drives the optical scanning head through a driving amplifier circuit so as to control the deflection of a laser beam on an X-Y plane.
However, each positioning of the galvanometer system involves acceleration and deceleration of the galvanometer and causes the galvanometer to not effectively exert high-speed efficiency due to small aperture; secondly, because of the reason that the galvanometer accelerates, the unfavorable phenomena such as crater, carbonization appear in the cutting process inevitable, there is the slope in aperture wall simultaneously, observe from top to bottom along the drilling axial and can find that its hole expands outward promptly, and have 1 ~ 3 tapering.
[ summary of the invention ]
Aiming at the problems and the defects, the utility model provides a system which does not need galvanometer scanning cutting and simultaneously keeps a high-speed rotary cutting and drilling structure; under the working of the system, the improved drilling mode has obviously improved efficiency compared with the existing scheme; avoid the bad phenomena of crater, carbonization and the like.
The utility model relates to a high-speed laser scanning rotary-cut drilling system, which comprises a laser generator and is characterized in that the drilling system also comprises a beam expander and a rotary-cut module, wherein the light path of the laser generator is provided with a zoom beam expander, and the zoom beam expander and the laser light path are kept concentric; the rotary cutting module is arranged in the light emitting direction of the zoom beam expander, and laser passing through the rotary cutting module is emitted to a product to be processed.
The rotary cutting module is an Amplitude SPIN, and comprises a three-wedge prism structure, an X-Y two-axis galvanometer, a reflector and a telecentric field lens.
The beam diameter of the beam incident by the variable-magnification beam expander is less than 10mm of the beam expander of BEX-355-5 XI. The three-wedge prism structure realizes eccentric emergent, and the beam is eccentrically rotated by the rotating structure of the wedge prism in the optical rotation module.
The three-wedge prism is a structure with adjustable relative distance, and light emitting of different eccentric distances is realized by adjusting the distance.
The X-Y two-axis galvanometer with the eccentric light beam passing through the rotary cutting module comprises a galvanometer motor and a reflecting mirror, and the reflecting mirror is moved by the galvanometer motor to realize the positioning of different drilling hole positions.
The telecentric field lens is F100, and the circular rotating hole digging action of the light beam is realized after the telecentric field lens exits, so that the drilling function is achieved.
The laser generator is at a power of 10W @30 KHz.
The utility model discloses when processing PCB FPC copper foil, PI film, choose for use suitable laser instrument technological parameter, realize expanding the beam through the beam expander lens, be equipped with the different aperture eccentric beam distance of having debugged rotary-cut module and can realize 40-200um diameter micropore's drilling, because rotary-cut module can provide higher rotational speed, realize that rotary-cut hole edge is slick and sly more, level and more to better control micropore fuel factor.
[ description of the drawings ]
Fig. 1 is a schematic structural view of a high-speed laser scanning rotary-cut drilling system according to the present invention;
wherein: 1. a laser generator; 2. a beam expander; 3. a rotary cutting module; 4. a product to be processed;
[ detailed description ] embodiments
The present invention will be described in detail with reference to the accompanying drawings and examples. Examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present invention, and should not be construed as limiting the present invention.
In the description of the present invention, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are merely for convenience of description and for simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.
Referring to fig. 1, a high-speed laser scanning rotary-cut drilling system is shown, which includes a laser generator 1, and is characterized in that the drilling system further includes a beam expander 2 and a rotary-cut module 3, wherein a beam expander 2 is disposed on an optical path of light emitted from the laser generator 1, and the beam expander and the optical path of the laser are kept concentric; the light emitting direction of the zoom beam expander 2 is provided with a rotary cutting module 3, and laser passing through the rotary cutting module 3 is emitted to a product 4 to be processed.
When the laser is emitted from the laser generator, the laser concentrically enters a variable-power beam expanding mirror to expand the light beam to 5mm, and then the light beam enters the rotary cutting module. The rotary cutting module 3 is an Amplitude SPIN, and comprises a three-wedge prism structure, an X-Y two-axis galvanometer, a reflector and a telecentric field lens, wherein the light beam in the rotary cutting module is eccentrically emitted through the internal three-wedge prism structure, and the effect of eccentric rotation of the light beam is realized by the rotating structure of the wedge prism in the optical rotation module; in the three-wedge prism structure, the light emitting with different eccentric distances can be realized by rapidly adjusting the space of the three-wedge prism through the arrangement of the optical rotation module; and then, the eccentric light beams realize the positioning of different drilling positions through an XY two-axis galvanometer motor and a reflector in the rotary cutting module.
The beam diameter of the incident beam of the variable-magnification beam expander 2 is less than that of a BEX-355-5XI beam expander with the diameter of 10 mm. The three-wedge prism structure realizes eccentric emergent light, and the light beam is eccentrically rotated by the rotating structure of the wedge prism in the optical rotation module 3.
The three-wedge prism is a structure with adjustable relative distance, and light emitting of different eccentric distances is realized by adjusting the distance.
The X-Y two-axis galvanometer in the rotary cutting module 3 for passing the eccentric light beam comprises a galvanometer motor and a reflector, and the reflector is moved by the galvanometer motor to realize the positioning of different drilling positions.
The telecentric field lens is F100, and the circular rotating hole digging action of the light beam is realized after the telecentric field lens exits, so that the drilling function is achieved.
The laser generator is at a power of 10W @30 KHz.
The rotary cutting module can realize the rotating speed of 30000 r/min, the speed is far higher than the deflection speed of the galvanometer lens, and the laser energy and the utilization rate can be more efficiently utilized.
The utility model discloses when processing PCB FPC copper foil, PI film, choose for use suitable laser instrument technological parameter, realize expanding the beam through the beam expander lens, be equipped with the different aperture eccentric beam distance of having debugged rotary-cut module and can realize 40-200um diameter micropore's drilling, because rotary-cut module can provide higher rotational speed, realize that rotary-cut hole edge is slick and sly more, level and more to better control micropore fuel factor.
The above description is only for the preferred embodiment of the present invention, and the present invention is not limited to the above description, and although the present invention is disclosed in the preferred embodiment, it is not limited to the above description, and any person skilled in the art can make modifications or changes equivalent to the above disclosed technical content without departing from the technical scope of the present invention.
Claims (8)
1. A high-speed laser scanning rotary-cut drilling system comprises a laser generator and is characterized by further comprising a beam expander and a rotary-cut module, wherein a beam expander is arranged on a light path of the laser generator, and the beam expander and the laser path are kept concentric; the rotary cutting module is arranged in the light emitting direction of the zoom beam expander, and laser passing through the rotary cutting module is emitted to a product to be processed.
2. The high-speed laser scanning rotational atherectomy drilling system of claim 1, wherein the rotational atherectomy module comprises a three-wedge prism structure, an X-Y two-axis galvanometer, a mirror, and a telecentric field lens.
3. The high-speed laser scanning rotational atherectomy drilling system of claim 1, wherein the beam diameter of the beam incident from the variable-power beam expander is less than 10 mm.
4. The high-speed laser scanning rotational atherectomy drilling system of claim 1, wherein the triple-wedge prism structure provides eccentric exit, and the beam is eccentrically rotated by a rotating structure of the wedge prism inside the optical rotation module.
5. The high-speed laser scanning rotational atherectomy drilling system of claim 4, wherein the triple-wedge prism is a structure with adjustable relative distance, and light emission with different eccentric distances is realized by adjusting the distance.
6. The high-speed laser scanning rotary-cut drilling system according to claim 5, wherein the eccentric beam passes through an X-Y two-axis galvanometer inside the rotary-cut module, the galvanometer motor and the reflector are included, and the reflector is moved by the galvanometer motor to realize positioning at different drilling positions.
7. The high-speed laser scanning rotary-cut drilling system of claim 2, wherein the telecentric field lens is F100, and the drilling function is achieved by the circular rotary hole-digging action of the light beam after the telecentric field lens exits.
8. The high-speed laser scanning rotational atherectomy drilling system of claim 1, wherein the laser generator is powered at 10W @30 KHz.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN202022329019.4U CN214109260U (en) | 2020-10-19 | 2020-10-19 | High-speed laser scanning rotary-cut drilling system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202022329019.4U CN214109260U (en) | 2020-10-19 | 2020-10-19 | High-speed laser scanning rotary-cut drilling system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113787267A (en) * | 2021-10-28 | 2021-12-14 | 广东中科微精光子制造科技有限公司 | Golden finger laser cutting system and cutting method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113787267A (en) * | 2021-10-28 | 2021-12-14 | 广东中科微精光子制造科技有限公司 | Golden finger laser cutting system and cutting method |
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