CN213998253U - Femtosecond laser taper hole processing system - Google Patents
Femtosecond laser taper hole processing system Download PDFInfo
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- CN213998253U CN213998253U CN202022630051.6U CN202022630051U CN213998253U CN 213998253 U CN213998253 U CN 213998253U CN 202022630051 U CN202022630051 U CN 202022630051U CN 213998253 U CN213998253 U CN 213998253U
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- plate glass
- femtosecond laser
- incident light
- ring seat
- axis
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- 239000005357 flat glass Substances 0.000 claims abstract description 62
- 238000000034 method Methods 0.000 claims abstract description 7
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 230000008569 process Effects 0.000 abstract description 4
- 230000007547 defect Effects 0.000 abstract description 2
- 238000003754 machining Methods 0.000 description 4
- 238000006552 photochemical reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000010147 laser engraving Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000008021 deposition Effects 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- 238000010329 laser etching Methods 0.000 description 1
- 238000010330 laser marking Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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Abstract
The utility model relates to a femto second laser taper hole system of processing, including femto second laser instrument, collimating lens, speculum, sheet glass, focusing mirror and sample platform, sheet glass installs on rotatory gradient adjustment seat, and rotatory gradient adjustment seat perpendicular to incident light sets up for sheet glass can be rotatory round the axis of incident light, and the size of sheet glass and incident light's contained angle can be adjusted to rotatory gradient adjustment seat simultaneously, makes one section distance of parallel translation with the incident light when light incides behind the sheet glass. The translation and rotation of the flat glass are added to make the incident light spread in a circle on the surface of the focusing mirror; each point on the circle corresponds to a beam of incident light, all the incident light is converged on the lower surface of the sample, and a conical body is formed on the sample, so that the processing of the conical hole of the sample is realized; by doing so, the energy of light reaching the surface of the sample is greatly increased, and the defect that the galvanometer cannot process a high-precision cone is overcome.
Description
Technical Field
The utility model relates to a laser beam machining field especially relates to a femto second laser taper hole system of processing.
Background
Laser machining can be broadly classified into laser thermal machining and photochemical reaction machining according to the mechanism of interaction between a laser beam and a material. Laser thermal processing refers to finishing a processing process by utilizing a thermal effect generated by projecting a laser beam on the surface of a material, and comprises laser welding, laser engraving and cutting, surface modification, laser marking, laser drilling, micro processing and the like; the photochemical reaction processing refers to a processing process that a laser beam irradiates an object and initiates or controls a photochemical reaction by means of high-energy photons of high-density laser. Including photochemical deposition, stereolithography, laser engraving and etching, and the like. The femtosecond laser is widely applied to the field of micro-nano processing due to the cold processing effect.
The current taper hole processing mainly has two modes, namely a conical solid angle is directly formed on the surface of a sample by a focusing lens, and a light beam is directly focused in the conical solid angle for direct processing; the other type of the vibrating mirror is used for directly processing conical holes at different depths of a sample, but the stepping of the vibrating mirror is limited, and meanwhile, the damage threshold of the vibrating mirror is limited, so that high-energy and high-precision processing is difficult to perform.
SUMMERY OF THE UTILITY MODEL
Aiming at the content and solving the problems, the femtosecond laser taper hole processing system comprises a femtosecond laser, a collimating lens, a reflecting mirror, flat glass, a focusing mirror and a sample stage;
the method comprises the following steps that horizontal laser emitted by a femtosecond laser is expanded through a collimating lens, the expanded laser is incident into a reflector, is reflected and then vertically incident into plate glass, is refracted by the plate glass and then is incident into a focusing lens, and the focusing lens converges the laser on a sample on a horizontally arranged sample table for processing;
the flat glass is arranged on the rotating inclination adjusting seat, and the rotating inclination adjusting seat is perpendicular to incident light; so that the flat glass can rotate around the axis of the incident light; meanwhile, the inclination adjusting seat is rotated to adjust the included angle between the plate glass and incident light, so that the light is emitted after being incident on the plate glass and then is translated for a certain distance in parallel with the incident light;
the rotating inclination adjusting seat comprises a rotating ring seat, a fixed clamp and a movable clamp; the rotary ring seat is barrel-shaped, can rotate around the axis vertical to the barrel, the rotational speed is adjustable; the fixed holder and the movable holder are arranged on the inner surface of the rotary ring seat, the fixed holder is provided with a spherical hinge, one end of the spherical hinge is fixed on the inner surface of the rotary ring seat, and the other end of the spherical hinge is provided with a first clamp for clamping the plate glass;
the movable clamp holder is arranged on the opposite side of the fixed clamp holder and comprises a track and a sliding block, the track is arranged parallel to the axis of the rotary ring seat, the sliding block is arranged on the track, the track enables the sliding block to move along the direction parallel to the axis of the rotary ring seat, the movement is controlled by the stepping motor, and the displacement is adjustable;
the sliding block is provided with a limiting hole, a limiting ball, a connecting rod and a second clamp which are connected to the plate glass are arranged in the limiting hole, and the limiting ball is used for limiting so that the second clamp swings along with the movement of the sliding block; when the sliding block translates on the rail, the limiting hole is driven to move along the direction parallel to the axis of the rotating ring seat, so that the second clamp drives one end of the plate glass to move along the direction parallel to the axis of the rotating ring seat; while the plate glass is tilted because the fixed holder at the other end is stationary.
The focus of the focusing mirror is positioned on the lower surface of the sample, and the focusing mirror can move up and down.
The first clip and the second clip are in surface contact with the plate glass.
The femtosecond laser is an infrared femtosecond laser.
The plate glass is circular plate glass.
When the axis of the flat glass is vertical to the axis of the rotary ring seat, the rotating shaft of the rotary ring seat is superposed with the axis of the circular flat glass, and the femtosecond laser is incident to the circle center of the circular flat glass.
Has the advantages that:
the inclination of the plate glass enables the distance between light incident on the focusing mirror and the central axis of the focusing mirror to be changed, and meanwhile, due to the rotation of the plate glass, the light incident on the focusing mirror rotates around the central axis of the focusing mirror; the translation and rotation are added so that the incident light spreads over a circle on the surface of the focusing mirror; each point on the circle corresponds to a beam of incident light, all the incident light is converged on the lower surface of the sample, and a conical body is formed on the sample, so that the processing of the conical hole of the sample is realized; by doing so, the energy of light reaching the surface of the sample is greatly increased, and the defect that the galvanometer cannot process a high-precision cone is overcome.
Drawings
The accompanying drawings, which are included to provide a further understanding of the disclosed subject matter, are incorporated in and constitute a part of this specification. The drawings illustrate the implementations of the disclosed subject matter and, together with the detailed description, serve to explain the principles of implementations of the disclosed subject matter. No attempt is made to show structural details of the disclosed subject matter in more detail than is necessary for a fundamental understanding of the disclosed subject matter and various modes of practicing the same.
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view of a rotating inclination adjusting base;
fig. 3 is a schematic view of the processing principle of the present invention.
Detailed Description
The advantages, features and methods of accomplishing the same will be apparent from the drawings and the detailed description that follows.
Example (b):
with reference to fig. 1-3, a femtosecond laser taper hole processing system comprises a femtosecond laser 1, a collimating lens 2, a reflecting mirror 3, a flat glass 4, a focusing mirror 5 and a sample stage 6;
horizontal laser emitted by a femtosecond laser 1 is expanded by a collimating lens 2, the expanded laser is shot into a reflector 3, is vertically shot into a flat glass 4 after being reflected, and is shot into a focusing lens 5 after being refracted by the flat glass 4, and the focusing lens 5 converges the laser on a sample table 6 which is horizontally arranged for processing;
the flat glass 4 is arranged on the rotating inclination adjusting seat which is arranged perpendicular to the incident light; so that the plate glass 4 can rotate around the axis of the incident light; meanwhile, the inclination adjusting seat is rotated to adjust the included angle between the plate glass 4 and the incident light, so that the light is emitted after being incident on the plate glass 4 and then is translated for a certain distance in parallel with the incident light;
the rotating inclination adjusting seat comprises a rotating ring seat 7, a fixed clamp 8 and a movable clamp 9; the rotary ring seat 7 is barrel-shaped, the rotary ring seat 7 can rotate around the axis vertical to the barrel, and the rotating speed is adjustable; the fixed clamper 8 and the movable clamper 9 are arranged on the inner surface of the rotary ring seat 7, the fixed clamper 8 is provided with a spherical hinge 10, one end of the spherical hinge 10 is fixed on the inner surface of the rotary ring seat 7, and the other end of the spherical hinge 10 is provided with a first clamp 11 for clamping the plate glass 4;
the movable clamper 9 is arranged at the opposite side of the fixed clamper 8, and the movable clamper 9 comprises a track arranged parallel to the axis of the rotary ring seat 7 and a slide block 12 arranged on the track, the track enables the slide block 12 to move along the direction parallel to the axis of the rotary ring seat 7, the movement is controlled by a stepping motor, and the displacement is adjustable;
the sliding block 12 is provided with a limiting hole, a limiting ball connected to the plate glass 4, a connecting rod 13 and a second clamp 14 are arranged in the limiting hole, and the limiting ball is used for limiting so that the second clamp swings along with the movement of the sliding block; the slide block 12 drives the limiting hole to move along the direction parallel to the axis of the rotating ring seat 7 when translating on the track, so that the second clamp 14 drives one end of the plate glass 4 to move along the direction parallel to the axis of the rotating ring seat 7; while the plate glass 4 is tilted because the fixed clamper 8 at the other end is stationary.
Further, the focus of the focusing mirror 5 is located on the lower surface of the sample, and the focusing mirror 5 can move up and down.
Further, the contact of the first clip 11 and the second clip 14 with the sheet glass 4 is surface contact.
Further, the femtosecond laser 1 is an infrared femtosecond laser 1.
Further, the plate glass 4 is a circular plate glass 4.
Further, when the flat glass 4 is perpendicular to the axis of the rotary ring seat 7, the rotating shaft of the rotary ring seat 7 coincides with the axis of the circular flat glass 4, and the femtosecond laser is incident to the center of the circular flat glass 4.
Therefore, the inclination of the plate glass enables the distance between the light incident on the focusing mirror and the central axis of the focusing mirror to be changed, and meanwhile, due to the rotation of the plate glass, the light incident on the focusing mirror rotates around the central axis of the focusing mirror; the translation and rotation are added so that the incident light spreads over a circle on the surface of the focusing mirror; each point on the circle corresponds to a beam of incident light, all the incident light is converged on the lower surface of the sample, and a conical body is formed on the sample, so that the processing of the conical hole of the sample is realized;
the degree of deviation of the light reaching the surface of the focusing mirror can be adjusted by adjusting the angle of the swing, so that the tapered holes machined on the sample can have different tapers.
It should be noted that the amplitude of the oscillation of the actual plate glass is less than 5 °, and the eccentricity of the incident light position due to the oscillation is negligible in the actual processing, thereby not causing a decrease in the processing accuracy.
The above description is only for the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art can easily think of the changes or substitutions within the technical scope of the present invention, and all should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (6)
1. A femtosecond laser taper hole processing system comprises a femtosecond laser (1), a collimating lens (2), a reflector (3), flat glass (4), a focusing mirror (5) and a sample table (6); the method is characterized in that:
horizontal laser emitted by a femtosecond laser (1) is expanded by a collimating lens (2), the expanded laser enters a reflector (3), is reflected and then vertically enters plate glass (4), and enters a focusing lens (5) after being refracted by the plate glass (4), and the focusing lens (5) converges the laser on a sample on a horizontally arranged sample table (6) for processing;
the flat glass (4) is arranged on the rotating inclination adjusting seat, and the rotating inclination adjusting seat is perpendicular to incident light; so that the plate glass (4) can rotate around the axis of the incident light; meanwhile, the inclination adjusting seat is rotated to adjust the included angle between the plate glass (4) and incident light, so that the light is emitted after being incident on the plate glass (4) and then is translated for a certain distance in parallel with the incident light;
the rotating inclination adjusting seat comprises a rotating ring seat (7), a fixed clamp holder (8) and a movable clamp holder (9); the rotary ring seat (7) is barrel-shaped, the rotary ring seat (7) can rotate around the axis vertical to the barrel, and the rotating speed is adjustable; the fixed gripper (8) and the movable gripper (9) are arranged on the inner surface of the rotary ring seat (7), the fixed gripper (8) is provided with a spherical hinge (10), one end of the spherical hinge (10) is fixed on the inner surface of the rotary ring seat (7), and the other end of the spherical hinge (10) is provided with a first clamp (11) for clamping the plate glass (4);
the movable clamper (9) is arranged at the opposite side of the fixed clamper (8), the movable clamper (9) comprises a track arranged parallel to the axis of the rotary ring seat (7) and a slide block (12) arranged on the track, the track enables the slide block (12) to move along the direction parallel to the axis of the rotary ring seat (7), the movement is controlled by a stepping motor, and the displacement is adjustable;
the sliding block (12) is provided with a limiting hole, a limiting ball connected to the plate glass (4), a connecting rod (13) and a second clamp (14) are arranged in the limiting hole, and the limiting ball is used for limiting so that the second clamp swings along with the movement of the sliding block; the sliding block (12) drives the limiting hole to move along the direction parallel to the axis of the rotating ring seat (7) when translating on the rail, so that the second clamp (14) drives one end of the plate glass (4) to move along the direction parallel to the axis of the rotating ring seat (7); and the other end of the fixed clamper (8) is not moved, so that the plate glass (4) is inclined.
2. The femtosecond laser taper hole processing system according to claim 1, characterized in that: the focus of the focusing mirror (5) is positioned on the lower surface of the sample, and the focusing mirror (5) can move up and down.
3. The femtosecond laser taper hole processing system according to claim 1, characterized in that: the first clip (11) and the second clip (14) are in surface contact with the plate glass (4).
4. The femtosecond laser taper hole processing system according to claim 1, characterized in that: the femtosecond laser (1) is an infrared femtosecond laser (1).
5. The femtosecond laser taper hole processing system according to claim 1, characterized in that: the plate glass (4) is circular plate glass (4).
6. The femtosecond laser taper hole processing system according to claim 5, wherein: when the axis of the flat glass (4) is vertical to the axis of the rotary ring seat (7), the rotating shaft of the rotary ring seat (7) is superposed with the axis of the circular flat glass (4), and the femtosecond laser is incident to the circle center of the circular flat glass (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022630051.6U CN213998253U (en) | 2020-11-13 | 2020-11-13 | Femtosecond laser taper hole processing system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022630051.6U CN213998253U (en) | 2020-11-13 | 2020-11-13 | Femtosecond laser taper hole processing system |
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| Publication Number | Publication Date |
|---|---|
| CN213998253U true CN213998253U (en) | 2021-08-20 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022630051.6U Active CN213998253U (en) | 2020-11-13 | 2020-11-13 | Femtosecond laser taper hole processing system |
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| Country | Link |
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| CN (1) | CN213998253U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113036581A (en) * | 2021-03-24 | 2021-06-25 | 镭泽精密制造(苏州)有限公司 | Laser with adjustable light source precision |
| CN115609162A (en) * | 2022-12-19 | 2023-01-17 | 扬州艾镭激光设备有限公司 | Automatic height-adjusting type laser marking machine |
-
2020
- 2020-11-13 CN CN202022630051.6U patent/CN213998253U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113036581A (en) * | 2021-03-24 | 2021-06-25 | 镭泽精密制造(苏州)有限公司 | Laser with adjustable light source precision |
| CN115609162A (en) * | 2022-12-19 | 2023-01-17 | 扬州艾镭激光设备有限公司 | Automatic height-adjusting type laser marking machine |
| CN115609162B (en) * | 2022-12-19 | 2023-03-07 | 扬州艾镭激光设备有限公司 | Automatic increase formula laser marking machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A Femtosecond Laser Taper Hole Machining System Effective date of registration: 20221102 Granted publication date: 20210820 Pledgee: Ningbo Tianjin Enterprise Service Co.,Ltd. Pledgor: Ningbo Qiyun New Material Technology Co.,Ltd. Registration number: Y2022980020428 |
|
| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20231115 Granted publication date: 20210820 Pledgee: Ningbo Tianjin Enterprise Service Co.,Ltd. Pledgor: Ningbo Qiyun New Material Technology Co.,Ltd. Registration number: Y2022980020428 |