CN213990624U - Radio frequency switch sliding in surface - Google Patents

Abstract

The utility model provides a gliding radio frequency switch in face, including basement, sliding part and at least one elastic component, sliding part locates in the basement, and sliding part moves in the basement, and the one end of elastic component is fixed in the basement, and the other end of elastic component is fixed in one side of sliding part, and the flexible direction of elastic component is unanimous with sliding part's moving direction. The utility model provides a gliding radio frequency switch in face sets up the elastic component at sliding part's tip, can slide at sliding part and play the effect of buffering when switching radio frequency switch, prescribes a limit to sliding part's sliding position, avoids it to surpass the drive region when sliding, and can avoid sliding part impact and collision when the motion, improves whole radio frequency switch's reliability.

Description

Radio frequency switch sliding in surface

Technical Field

The utility model belongs to the technical field of the structure is super smooth, more specifically say, relate to a gliding radio frequency switch in face.

Background

The radio frequency switch is a basic core electronic component for controlling the conversion of radio frequency signal channels, and is widely applied to advanced electronic equipment such as mobile communication terminals, automatic test systems (ATE), high-performance phased array radars, satellite communication systems and the like. As the mobile communication technology moves to the age of 5G, the number of operating frequency bands will increase to over 40, and the frequency range is increased to 3GHz-70 GHz. In the transmission of signals in medium and high frequency multi-band (20GHz-70GHz), in order to reduce mutual interference among signals in different frequency bands and improve the signal receiving sensitivity, a radio frequency communication system puts more rigorous requirements on the performances of linearity, isolation, insertion loss and the like of a switch.

Compared with the traditional semiconductor switch, the RF MEMS radio frequency switch has excellent radio frequency characteristics such as high linearity, low loss, high isolation and the like because the on-off of a radio frequency signal is controlled by mechanical switching. Despite the advantages of RF MEMS switches, a breakthrough in reliability is needed for large-scale applications.

In chinese patent application No. CN111884644A, a parallel RF-MEMS switch is disclosed, which comprises a substrate, a driving component, an insulating layer and a sliding component, wherein the driving component is disposed inside the substrate, and the driving component is flush with the surface of the substrate and keeps nano-scale flatness; the sliding component is provided with a charging dielectric layer and an atomic-level smooth super-sliding surface, is in contact with the insulating layer through the super-sliding surface and is arranged on the insulating layer; the sliding member can be driven to slide in a horizontal direction in a plane, which mainly realizes sliding of the sliding member by realizing a voltage difference on both sides of the sliding member, but due to a large driving force of the voltage, a problem of impact and collision may occur during switching of the radio frequency switch.

Disclosure of Invention

An object of the utility model is to provide a gliding radio frequency switch in face to among the solution prior art radio frequency switch switching process, probably produce the technical problem who strikes and collide.

In order to achieve the above object, the utility model adopts the following technical scheme: the radio frequency switch comprises a substrate, a sliding part and at least one elastic piece, wherein the sliding part is arranged on the substrate, the sliding part moves on the substrate, one end of the elastic piece is fixed on the substrate, the other end of the elastic piece is fixed on the sliding part, and the stretching direction of the elastic piece is consistent with the moving direction of the sliding part.

Further, the lower surface of the elastic member is higher than the substrate, and the elastic member is not in contact with the substrate.

Furthermore, the substrate is convexly provided with an anchor point, and the elastic piece is fixed on the anchor point.

Furthermore, the number of the elastic pieces is at least two, and the two elastic pieces are respectively arranged on two opposite sides of the sliding component.

Further, the elastic member is a micro spring.

Furthermore, the sliding component comprises a super-slip sheet and a dielectric layer arranged on the super-slip sheet, the super-slip sheet is arranged on the substrate, at least the upper surface of the substrate is an atomic-level smooth surface, and the super-slip sheet and the substrate form a super-slip pair.

Further, the device also comprises a driving component for driving the sliding component.

Further, the driving part includes at least two electrodes and a connection line connecting all the electrodes.

Furthermore, a single-tooth electrostatic comb driving structure is formed between the sliding component and the connecting line.

Further, the connecting line is a coplanar parallel waveguide line.

The utility model provides a gliding radio frequency switch in face's beneficial effect lies in:

1. the end part of the sliding component is provided with the elastic piece, so that the buffering effect can be achieved when the sliding component slides and switches on and off of the radio frequency switch, the sliding position of the sliding component is limited, the sliding component is prevented from exceeding a driving area when sliding, impact and collision of the sliding component during movement can be avoided, and the reliability of the whole radio frequency switch is improved.

2. The sliding part can directly contact and slide on the substrate, so that signal switching is realized, compared with a traditional vertical driving structure, due to the fact that a suspension structure does not exist, in the switching process, ultra-smooth contact is achieved between the ultra-smooth sheet and the substrate, and the sliding part slides without abrasion, near-zero friction and impact, so that the radio frequency switch can thoroughly avoid impact damage, meanwhile, the problem of adhesion failure caused by van der Waals force, surface tension and the like is solved, and the service life of the radio frequency switch is remarkably prolonged.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the embodiments or the prior art descriptions will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive labor.

Fig. 1 is a schematic top view of an rf switch with in-plane sliding according to an embodiment of the present invention;

fig. 2 is a schematic perspective view of an in-plane sliding rf switch according to an embodiment of the present invention;

fig. 3 is a schematic diagram of a partial cross-sectional structure of an in-plane sliding rf switch according to an embodiment of the present invention;

fig. 4 is an equivalent schematic diagram of an rf switch with in-plane sliding according to an embodiment of the present invention;

fig. 5 is an equivalent circuit diagram of an in-plane sliding rf switch according to an embodiment of the present invention.

Wherein, in the figures, the respective reference numerals:

1. a substrate; 2. a sliding member; 3. an elastic member; 4. an anchor point; 5. a drive member; 11. an insulating layer; 21. a superclipper sheet; 22. a dielectric layer; 51. an electrode; 52. and connecting the wires.

Detailed Description

In order to make the technical problem, technical solution and advantageous effects to be solved by the present invention more clearly understood, the following description is given in conjunction with the accompanying drawings and embodiments to illustrate the present invention in further detail. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.

It will be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in an orientation or positional relationship indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the device or element so referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the invention.

Because the ultra-slip of a large scale cannot be realized for a long time, the phenomenon that the friction coefficient is in the order of thousandth or lower is often called as ultra-slip in documents for over ten years; the phenomenon that the initial friction and wear caused by the non-degree-of-concentricity contact are almost zero is changed into 'structural lubrication', and the 'ultra-smooth' refers in particular to the phenomenon that the friction and wear caused by the non-degree-of-concentricity contact are almost zero.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.

Referring to fig. 1 to fig. 3, the rf switch with in-plane sliding according to the present invention will now be described. The radio frequency switch with the in-plane sliding function comprises a substrate 1, a sliding part 2 and at least one elastic piece 3, wherein the sliding part 2 is arranged on the substrate 1, the sliding part 2 moves on the substrate 1, and as for the driving mode of the sliding part 2, electrostatic driving, electromagnetic driving or other driving modes can be adopted.

Further, please refer to fig. 1 to 3 together, as a specific embodiment of the rf switch of the in-plane sliding according to the present invention, one end of the elastic component 3 is fixed on the substrate 1, the other end of the elastic component 3 is fixed on one side of the sliding component 2, and the extending direction of the elastic component 3 is consistent with the moving direction of the sliding component 2, the elastic component 3 can play a role of buffering when the sliding component 2 slides and switches the on/off of the rf switch, and limits the sliding position of the sliding component 2, so as to avoid exceeding the driving area when the sliding component 2 slides, and avoid the impact and collision of the sliding component 2 when the sliding component moves, thereby improving the reliability of the whole rf switch.

Preferably, the elastic element 3 is generally suspended, that is, the lower surface of the elastic element 3 is higher than the substrate 1, and the elastic element 3 does not contact with the substrate 1 in the moving process, so that the substrate 1 is prevented from being scratched by the movement of the elastic element 3, and the flatness of the surface of the substrate 1 is further prevented from being affected.

One end of the elastic part 3 is fixed on the sliding part 2, the other end of the elastic part needs to be arranged on an element fixed relative to the substrate 1, namely, the anchor point 4 is convexly arranged on the substrate 1, the anchor point 4 is higher than the upper surface of the substrate 1, and the anchor point 4 is respectively fixedly connected with the substrate 1 and the elastic part 3, so that the elastic part 3 can be prevented from directly contacting with the substrate 1, and the surface smoothness of the substrate 1 can be prevented from being damaged.

Preferably, the number of the elastic members 3 is at least two, and the two elastic members 3 are respectively disposed on two sides of the sliding member 2, the length directions of the two elastic members 3 are both consistent with the moving direction of the sliding member 2, and when the sliding member 2 is located in the middle region, the elastic members 3 on two sides are simultaneously in a stretching state, a normal state or a compressing state, the elastic forces of the elastic members 3 on two sides are consistent, and the directions of the applied forces are opposite, so as to reach an initial equilibrium state. When the slide member 2 is moved by the driving of the driving member 5, the elastic force on one side of the slide member 2 is increased, and the slide member can be quickly returned after the external driving force disappears, so that the driving speed can be ensured.

Preferably, the number of the elastic members 3 located on the same side of the sliding component 2 is two, and the two elastic members 3 respectively act on two sides of the sliding component 2, so that the balance of the acting force on the sliding component 2 can be ensured.

Preferably, the elastic member 3 is a micro spring, and the material thereof may be made of a metal material. The spring is typically a micro-spring, typically on the order of microns or centimeters in length. The spring may be any one of a compression spring, an extension spring, and a folding spring, and is not limited to the specific one.

Further, as a specific embodiment of the in-plane sliding radio frequency switch provided by the present invention, any surface of the substrate 1 has an atomically rough surface on which the sliding member 2 slides. The substrate 1 generally comprises a high-resistance silicon substrate 1 and an insulating layer 11 arranged on the upper surface of the high-resistance silicon substrate 1, the sliding part 2 slides on the insulating layer 11, and the sliding part 2 slides without abrasion, near-zero friction and impact when sliding, so that the radio frequency switch can thoroughly avoid impact damage, simultaneously overcome the adhesion failure problem caused by van der waals force, surface tension and the like, and remarkably prolong the service life of the radio frequency switch.

The sliding component 2 comprises a super-sliding piece 21 and a dielectric layer 22 arranged on the super-sliding piece 21, the super-sliding piece 21 is arranged on the substrate 1, the super-sliding piece 21 and the substrate 1 form a super-sliding pair, the dielectric layer 22 is arranged on the surface of the super-sliding piece 21, the super-sliding piece 21 generally adopts an HOPG super-sliding piece 21, the conductivity of the super-sliding piece 21 is poor, the dielectric layer 22 is arranged on the top surface of the super-sliding piece 21 to form an island cover, and the electrostatic driving of the bottom driving component 5 can be achieved.

Preferably, the dielectric layer 22 generally comprises an aluminum metal layer directly disposed on the surface of the superclip 21 and a top nickel metal layer disposed on the surface of the aluminum metal layer.

Further, as a specific embodiment of the in-plane sliding rf switch provided by the present invention, the rf switch further includes a driving part 5, the driving part 5 is used for driving the sliding part 2 to slide horizontally on the surface of the substrate 1, and the driving mode is electrostatic driving.

Preferably, the driving part 5 includes at least two electrodes 51 and a connection line 52 connecting the electrodes 51, and the connection line 52 can connect all the electrodes 51 and an external power source. When a direct current bias is applied between the ground line and the connecting line 52, the sliding member 2 slides to coincide with the connecting line 52 under the action of a horizontal electrostatic force, so that the change of the coupling capacitance between the ground line and the connecting line 52 is controlled, and the on-off of a radio frequency signal is realized.

Preferably, the connecting line 52 is a coplanar parallel waveguide line, the connecting line 52 is deposited between the high-resistance silicon substrate 1 and the insulating layer 11, the coplanar parallel waveguide line is a metal film strip line on the surface of the substrate 1, the coplanar parallel waveguide line has two grounding electrodes 51, the grounding electrodes 51 are parallel to the central strip line, and the sliding part 2 is arranged at the central strip line, so that the sliding part 2 can be driven, and the influence of external factors can be better avoided.

Preferably, a single-tooth electrostatic comb-tooth driving structure is formed between the sliding part 2 and the connecting line 52, and the sliding part 2 can be driven to slide on the substrate 1 due to the lateral instability of the single-tooth electrostatic comb-tooth driving structure. Of course, the connecting wires 52 may also constitute a composite electrostatic driving structure according to practical situations and specific embodiments, and are not limited to the specific embodiments.

When the electrostatic comb-tooth side drive method is adopted, the capacitance between the dielectric layer 22 of the slider 2 and the drive electrode 51 can be approximated to a parallel plate capacitance, and an equivalent circuit diagram thereof is shown in fig. 4. According to the total electrostatic energy of the system, a theoretical physical model of the horizontal driving force of the ultra-sliding switch can be established by utilizing a card theorem (energy principle):

here, F_eIs a horizontal electrostatic force,. epsilon₀Is a vacuum dielectric constant of ∈_rIn the dielectric layer 22, g is the thickness of the insulating layer 11, V is the driving voltage, and W is the electrode width. The above equation sets forth the relationship of the horizontal driving force with the width of the electrode 51, the thickness of the insulating layer 11, and the driving voltage. Assuming that the elastic element 3 is in a linear variation relationship, the static excitation voltage of the ultra-smooth switch can be obtained according to the mechanical balance condition:

here, V_iFor static excitation voltage, k is the suspension spring rate, x_iIs a lateral suction stroke. In addition, according to a parallel plate capacitance formula and an electromagnetism theory, the up/down state capacitance and capacitance ratio of the side driving electrostatic switch can be deduced:

here, w is the equivalent circuit resonant frequency, please refer to FIG. 5, L is the length of the plate, R_sTo switch internal resistance, Z₀Is the conductive line impedance. The relations between the performance parameters such as the driving voltage, the upper state capacitance, the capacitance ratio, the isolation degree, the insertion loss and the like and the structural size can be preliminarily determined through the formulas (2), (3) and (4), and the stable driving of the sliding part 2 can be realized by adopting the electrostatic comb lateral driving mode according to the analysis.

The above description is only exemplary of the present invention and should not be taken as limiting the scope of the present invention, as any modifications, equivalents, improvements and the like made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.

Claims (10)

1. The radio frequency switch sliding in the surface comprises a substrate and a sliding component, wherein the sliding component is arranged on the substrate and moves on the substrate, and the radio frequency switch is characterized in that: the sliding component is characterized by further comprising at least one elastic piece, one end of the elastic piece is fixed on the substrate, the other end of the elastic piece is fixed on the sliding component, and the stretching direction of the elastic piece is consistent with the moving direction of the sliding component.

2. The in-plane sliding radio frequency switch of claim 1, wherein: the lower surface of the elastic member is higher than the substrate, and the elastic member is not in contact with the substrate.

3. The in-plane sliding radio frequency switch of claim 1, wherein: the base is convexly provided with an anchor point, and the elastic piece is fixed on the anchor point.

4. The in-plane sliding radio frequency switch of claim 1, wherein: the number of the elastic pieces is at least two, and the two elastic pieces are respectively arranged on two opposite sides of the sliding part.

5. The in-plane sliding radio frequency switch of claim 1, wherein: the elastic member is a micro spring.

6. The in-plane sliding radio frequency switch of any of claims 1 to 5, wherein: the sliding component comprises a super-slip sheet and a dielectric layer arranged on the super-slip sheet, the super-slip sheet is arranged on the substrate, at least the upper surface of the substrate is an atomic-level smooth surface, and the super-slip sheet and the substrate form a super-slip pair.

7. The in-plane sliding radio frequency switch of any of claims 1 to 5, wherein: and a driving part for driving the sliding part.

8. The in-plane sliding radio frequency switch of claim 7, wherein: the driving part includes at least two electrodes and a connection line connecting all the electrodes.

9. The in-plane sliding radio frequency switch of claim 8, wherein: and a single-tooth electrostatic comb driving structure is formed between the sliding part and the connecting line.

10. The in-plane sliding radio frequency switch of claim 8, wherein: the connecting line is a coplanar parallel waveguide line.

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