CN213928048U - Automatic translation mechanism applied to heavy-duty equipment in automatic production line - Google Patents

Abstract

The utility model belongs to the technical field of the automatic conveying line, especially, relate to be applied to automatic translation mechanism on the heavy load equipment among the automatic production line. The door-mounted trolley comprises a support, a door-mounted trolley which is arranged on the support and can be fixedly connected with a movable door of equipment, a guide structure which is arranged between the support and the door-mounted trolley, and a driving mechanism which is arranged on the support and is used for driving the trolley to reciprocate along the guide structure, wherein a stable supporting piece which extends to the guide structure and assists the trolley to stably move on the guide structure is further arranged on the door-mounted trolley. The door-mounted trolley is matched with the support, the door-mounted trolley is driven to move by the driving mechanism, the translation door opening of large heavy-duty equipment is realized, the manual opening mode is replaced, the manpower resource is saved, and the risk of safety accidents is reduced.

Description

Automatic translation mechanism applied to heavy-duty equipment in automatic production line

[ technical field ] A method for producing a semiconductor device

The utility model belongs to the technical field of the automatic conveying line, especially, relate to be applied to automatic translation mechanism on the heavy load equipment among the automatic production line.

[ background of the invention ]

With the growing demand for coating, continuous coating of large-area products such as large flat glass has become a trend to increase the coating yield. In addition, in recent years, the rapid development of the touch display industry, the solar cell industry and other industries also greatly promotes the rapid increase of the industry on the requirements of various coating equipment, the rapid development of domestic coating equipment manufacturers is promoted, the size of a coating product is increased along with the rapid development of a coating technology, the coating box body on a production line is increased, the whole weight of the box body is increased due to the increased box body, when a production line is maintained or accessories are replaced, a door of a vacuum box body needs to be opened, the traditional method adopts a hinge mode, the door is manually opened, and the traditional hinge mode has the following disadvantages:

1. due to the gravity center problem, the upper hinge and the lower hinge are easy to be eccentric, so that the vacuum box door is not in place after being closed again, the sealing performance is poor, and the processing effect of a subsequent vacuum box is influenced;

2. because the hinge can rotate freely and the box door is heavy, the safety risk is easy to generate;

3. in addition, structures such as a molecular pump, a target, reinforcing ribs and the like can be installed on a common equipment door, so that the occupied space is reduced, the opening angle of the hinge is limited, and the maintenance, the replacement of accessories and other work cannot be met.

[ summary of the invention ]

The mode of adopting the manual work to open for solving among the prior art vacuum box door leads to opening inefficiency, and is difficult to guarantee to close the problem that targets in place, the utility model provides an automatic translation mechanism on being applied to heavy load equipment among the automatic production line.

The utility model discloses a realize through following technical scheme:

be applied to automatic translation mechanism on heavy load equipment in automatic production line, including the support, locate on the support can with equipment dodge gate fixed connection's door carry the dolly, locate guide structure between support and the door carry the dolly and locate and be used for the drive on the support the dolly is along guide structure reciprocating motion's actuating mechanism, still be equipped with on the door carry the dolly and extend to guide structure on in order to assist its steady support piece of steady motion on guide structure.

The automatic translation mechanism applied to the heavy-duty equipment in the automatic production line is characterized in that the door-mounted trolley is also provided with a coupler which can connect or disconnect a pipeline on the equipment with an external pipeline when moving along with the door-mounted trolley.

The automatic translation mechanism applied to the heavy-duty equipment in the automatic production line comprises a bottom plate and a trolley frame arranged on the bottom plate, the driving mechanism is arranged on the bottom plate, and the stable supporting piece is connected to the bottom plate and extends downwards from the side surface of the bottom plate to the guide structure.

The automatic translation mechanism applied to the heavy-duty equipment in the automatic production line is characterized in that the guide structure is a guide rail arranged on the support, an opening opposite to the guide rail is formed in the bottom plate, and a roller in contact with the upper end face of the guide rail is arranged at the opening.

Be applied to automatic translation mechanism on heavy load equipment in automatic production line as above, set up the spacing groove that the opening is outside, sunken inside and extend along guide rail length direction on the lateral surface of guide rail, steady support piece is including the support connecting piece that just extends downwards from the bottom plate lateral surface on the connection bottom plate, locate the inboard spacing bearing that just is located the spacing inslot of support connecting piece, just spacing bearing contacts with the up end of spacing inslot side.

The automatic translation mechanism applied to the heavy-duty equipment in the automatic production line is characterized in that the supporting connecting piece is connected to the bottom plate at a position opposite to the opening.

Be applied to automatic translation mechanism on heavy load equipment in automatic production line as above, all be equipped with the guide rail on the up end both sides of support, still be equipped with the stopper on the guide rail.

The automatic translation mechanism applied to the heavy-duty equipment in the automatic production line is characterized in that the support is further provided with a transmission rack, the driving mechanism is in meshed transmission with the transmission rack, and the driving mechanism is further connected with a speed reducing mechanism.

The automatic translation mechanism applied to the heavy-duty equipment in the automatic production line is characterized in that a protective cover is further arranged on the outer side of the rack.

The automatic translation mechanism applied to the heavy-duty equipment in the automatic production line comprises a frame arranged on the door-carrying trolley, a first connecting end arranged on the frame and butted with an equipment pipeline, a second connecting end butted with an external pipeline and a buffer pipeline positioned between the first connecting end and the second connecting end, wherein an alignment plate is arranged at one end of the buffer pipeline opposite to the second connecting end, a driving cylinder for driving the alignment plate to move is also arranged on the frame, and the driving cylinder drives the alignment plate to move so that the end part of the buffer pipeline is butted with or separated from the second connecting end.

Compared with the prior art, the utility model discloses there is following advantage:

1. the utility model provides a be applied to automatic production line automatic translation mechanism on heavy load equipment, its pass-through door carries the dolly and the cooperation of support, utilizes actuating mechanism drive door to carry the dolly and removes, realizes that large-scale heavy load equipment's translation opens the door, has replaced the artifical mode of opening, and the resource of using manpower sparingly has reduced the risk of taking place the incident moreover. In addition, the stable supporting piece is specially added, so that the whole translation process is more stable, the stability of the door-mounted trolley is maintained, the door-mounted trolley is not easy to deform and damage, the service life is prolonged, accurate resetting after opening is guaranteed, and equipment such as a vacuum box can maintain the sealing performance.

2. The utility model discloses be applied to automatic translation mechanism on the heavy load equipment in the automatic production line and still adopted the coupler for the pipeline of being connected with the external world on the door closure passes through the coupler and realizes breaking off when opening the door, automatic intercommunication when closing the door, thereby the angle that makes to open the door closure need not be restricted to outside pipeline structure, makes the angle of opening can be bigger, satisfies the demand of work such as maintenance, accessory change.

[ description of the drawings ]

In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.

FIG. 1 is a schematic structural view of an automatic translation mechanism applied to heavy-duty equipment in an automatic production line;

FIG. 2 is a schematic view of an open state of an automatic translation mechanism applied to heavy-duty equipment in an automatic production line (hiding plumbing components on the door);

FIG. 3 is a schematic structural view of an automatic translation mechanism applied to heavy-duty equipment in an automatic production line;

fig. 4 is a schematic view of the vertical turning state of the automatic translation mechanism of the present invention;

FIG. 5 is a schematic structural view of the door-mounted cart of the present invention;

FIG. 6 is a schematic structural view of a stent;

FIG. 7 is a schematic diagram of a coupler;

fig. 8 is an enlarged view of a portion a of fig. 4.

[ detailed description ] embodiments

In order to make the technical problem, technical solution and advantageous effects solved by the present invention more clearly understood, the following description is given in conjunction with the accompanying drawings and embodiments to further explain the present invention in detail. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

The utility model discloses a realize through following technical scheme:

as shown in fig. 1 to 8, the automatic translation mechanism applied to heavy-duty equipment in an automatic production line includes a support 1, a door-loaded trolley 2 which is arranged on the support 1 and can be fixedly connected with an equipment movable door 91, a guide structure 3 which is arranged between the support 1 and the door-loaded trolley 2, and a driving mechanism 4 which is arranged on the support 1 and is used for driving the trolley to reciprocate along the guide structure 3, wherein a stable support member 6 which extends onto the guide structure 3 to assist the door-loaded trolley 2 to stably move on the guide structure 3 is further arranged on the door-loaded trolley 2. The utility model provides a be applied to automatic translation mechanism on heavy load equipment among the automatic production line, use on the vacuum chamber of continuous coating production line very much, when the vacuum chamber needs inside maintenance or change accessory, its pass-through door carries the cooperation of dolly and support, utilizes actuating mechanism drive door to carry the dolly and removes, realizes that large-scale heavy load equipment's translation opens the door, has replaced the artifical mode of opening, the resource of using manpower sparingly has reduced the risk of taking place the incident moreover. In addition, the stable supporting piece is specially added, so that the whole translation process is more stable, the stability of the door-mounted trolley is maintained, the door-mounted trolley is not easy to deform and damage, the service life is prolonged, accurate resetting after opening is guaranteed, and equipment such as a vacuum box can maintain the sealing performance.

In particular, the application can be applied to a continuous coating production line, and the continuous coating production generally comprises three processes of preparation before production, coating of products (PVD or CVD and the like) and treatment after production. Preparation before production and treatment after production, wherein the inspection of whether the box is qualified or not before production and the cleaning and maintenance of the box after production are emphasized. The door is opened by the door-mounted trolley, so that the maintenance and cleaning time of a coating production line can be shortened, and the coating production time is prolonged. According to the scheme, the door-mounted trolley is arranged in front of a film inlet chamber, a film outlet chamber and a standard chamber door of a film coating line, so that the three processing chambers can be automatically opened and closed.

In addition, the door-mounted trolley 2 is also provided with a coupler 5 which can connect or disconnect the pipeline on the equipment with the external pipeline when moving along with the door-mounted trolley 2. Make the pipeline of being connected with the external world on the door closure realize breaking off when opening the door through the coupler, automatic intercommunication when closing the door to the angle that makes to open the door closure need not be limited by outside pipeline structure, makes the angle of opening can be bigger, satisfies the demand of work such as maintenance, accessory change.

The door carries the concrete structure of dolly to do: the door-mounted trolley 2 comprises a bottom plate 21 and a trolley frame 22 arranged on the bottom plate 21, the driving mechanism 4 is arranged on the bottom plate 21, and the stable supporting piece 6 is connected to the bottom plate 21 and extends downwards from the side surface of the bottom plate 21 to the guide structure 3. The first stable supporting piece has a guiding effect when moving, the second stable supporting piece has a limiting effect on the trolley, the trolley is prevented from being separated from the track in the moving process, and auxiliary stress can be achieved, so that the trolley is more stable in the moving process.

Specifically, dolly frame 22 includes two curb plates 22a that are the L type, and many channel-section steels 22b of connecting between curb plate 22a of both sides, curb plate 22a lower extreme and bottom plate are connected, and the upper end is equipped with the connecting portion of being connected with the equipment door closure, and the channel-section steel passes through bolted screw and connects on the curb plate for can conveniently tear open under keeping sufficient intensity and trade, wholly adopt Q235 carbon steel board moreover, make overall structure simple, light and handy.

More specifically, the guide structure 3 is a guide rail disposed on the bracket 1, an opening opposite to the guide rail is disposed on the bottom plate 21, and a roller 23 contacting with an upper end surface of the guide rail is disposed at the opening. The rolling on the guide rail is realized through the roller, so that the relative friction is reduced, and the service life of the guide rail is prolonged.

Still further, as shown in fig. 8, a limiting groove 31 which is opened outward and is recessed inward and extends along the length direction of the guide rail is formed on the outer side surface of the guide rail, the stable supporting member 6 includes a supporting connecting member 61 which is connected to the bottom plate 21 and extends downward from the side surface of the bottom plate 21, and a limiting bearing 62 which is arranged inside the supporting connecting member 61 and is located in the limiting groove 31, and the limiting bearing 62 contacts with the upper end surface inside the limiting groove 31. Its simple structure through the medial surface contact of supporting connection spare and spacing bearing with the guide rail, and the gyro wheel on the door year dolly contacts with the up end of guide rail moreover, forms the steady connection with the support, respectively sets up two through both sides in this scheme moreover steady support piece realizes steady removal. In addition, the support link 61 is connected to the bottom plate 21 at a position opposite to the opening. The positions of the connecting rods are uniform, and the connecting rods are convenient to process and install. In addition, the limiting groove can be arranged on the support, the strength of the guide rail does not need to be changed, and the limiting groove can achieve the effect by adopting channel steel for the support, so that the structure is simpler.

The specific structure of the bracket is as follows: this support is formed by the combination of multistage billet, just all be equipped with the guide rail on the up end both sides of support 1, moreover still be equipped with stopper 11 on the guide rail, in this scheme the stopper is located the tip of guide rail, and it can restrict the shift position of door year dolly, prevents to remove the dislocation, also can reach the control distance of opening the door in addition through setting up travel switch.

In addition, still be equipped with drive rack 12 on the support 1, actuating mechanism 4 with the drive rack meshing transmission, just still be connected with reduction gears on the actuating mechanism 4. In the scheme, the driving mechanism 4 is a motor, is matched with the rack after being subjected to speed reduction output through the speed reduction mechanism, realizes transmission, and realizes automatic translation through a simple structure. Moreover, a protective cover 13 is arranged outside the rack 12. Is beneficial to prolonging the service life of the device.

Often can set up multiple circuit according to the demand of its processing on the equipment door, the pipeline, for example need heater equipotential, compressed air pipeline, condenser tube can be along with the dolly translation, does not influence the function: the connection mode is flexible pipeline, and the towline runs on the trolley, so that the trolley is attractive and practical.

However, in the use process of the coating equipment, the door can be provided with a molecular pump as equipment for realizing vacuum, the molecular pump is connected with a main pipeline of a preceding stage, the door-mounted trolley and the door are required to be moved away from the main body of the coating equipment together in a translation mode, but for a vacuum pipeline, the pipeline connection of the vacuum pipeline is limited by the movement of the trolley due to the butt joint of the vacuum pipeline and an external pipeline, and the scheme adopts the structure of the coupler to realize the quick switch closing of the vacuum pipeline

The concrete structure of the coupler is as follows: as shown in fig. 7, the coupler 5 includes a frame 51 disposed on the door-mounted trolley 2, a first connection end 511 disposed on the frame 51 and butted with the equipment pipeline 92, a second connection end 52 butted with the external pipeline 93, and a buffer pipeline 53 located between the first connection end 511 and the second connection end 52, an alignment plate 54 is disposed on an end of the buffer pipeline 53 opposite to the second connection end 52, a driving cylinder 55 for driving the alignment plate 54 to move is further disposed on the frame 51, and the driving cylinder 55 drives the alignment plate 54 to move so as to make the end of the buffer pipeline 53 butt with or separate from the second connection end 52. In particular, the buffer pipe is a bellows, which is itself telescopic. When the box is closed, the two ends are connected through the buffer pipeline, the pipeline is kept smooth, when the door-mounted trolley moves, the air cylinder on the door-mounted trolley drives the alignment plate to move, the alignment plate and the second connecting end are relatively far away from the movement, the pipeline is disconnected, the frame of the coupler moves together with the door-mounted trolley, when the door-mounted trolley is opened and switched to a closed state, the door-mounted trolley drives the alignment plate to move towards the second connecting end through the air cylinder after the door is reset, and the buffer pipeline is quickly connected with the second connecting end. And the damage that the direct and second link collision of buffer tube caused when having avoided resetting.

The working principle of the scheme is as follows:

taking a vacuum box in a continuous coating production line as an example, a gate of the vacuum box is in a closed state, and a gate-mounted trolley is fixed with the gate;

when the door is opened, the coupler drives the aligning plate to contract and is disconnected with the second connecting end, under the driving of the motor, the upper gear of the door-mounted trolley is meshed with the rack on the bracket to drive the door-mounted trolley to move on the rail, after the travel switch displays the door-mounted trolley in place, the door stops moving, and leaves the box body to play a role in opening and closing; and in the moving process, the stable supporting piece is combined on the rail to do sliding motion, so that the stability of the underframe of the door-mounted trolley is maintained, and the door-mounted trolley is limited and guided by horizontal motion and balanced by gravity.

When the door is closed, the gear and the rack are driven to do meshing motion under the driving of the motor to drive the door-mounted trolley to move on the track, and after the travel switch displays in place, the door-mounted trolley stops moving, and the door is tightly attached to the box body to play a closing role; and the air cylinder on the coupler drives the alignment plate to move towards the second connecting end, so that the alignment of the buffer pipeline and the second connecting end is realized, and the pipeline on the gate is communicated.

The utility model provides a be applied to automatic production line automatic translation mechanism on heavy load equipment, its pass-through door carries the dolly and the cooperation of support, utilizes actuating mechanism drive door to carry the dolly and removes, realizes that large-scale heavy load equipment's translation opens the door, has replaced the artifical mode of opening, and the resource of using manpower sparingly has reduced the risk of taking place the incident moreover. In addition, the stable supporting piece is specially added, so that the whole translation process is more stable, the stability of the door-mounted trolley is maintained, the door-mounted trolley is not easy to deform and damage, the service life is prolonged, accurate resetting after opening is guaranteed, and equipment such as a vacuum box can maintain the sealing performance.

The foregoing is illustrative of one or more embodiments provided in connection with the detailed description and is not to be construed as limiting the invention to the precise embodiments disclosed herein. All with the utility model discloses a method, structure etc. are similar, the same, or to the utility model discloses make a plurality of technological deductions under the design prerequisite, or the replacement should all regard as the utility model discloses a protection scope.

Claims (10)

1. Be applied to automatic translation mechanism on heavy load equipment in automatic production line, its characterized in that, including support (1), locate on support (1) can with equipment dodge gate fixed connection's door carry dolly (2), locate guide structure (3) between support (1) and the door carry dolly (2) and locate and be used for the drive on support (1) the dolly is along guide structure (3) reciprocating motion's actuating mechanism (4), still be equipped with on door carry dolly (2) and extend to guide structure (3) and with the steady support piece (6) of assisting its steady motion on guide structure (3).

2. The automatic translation mechanism applied to heavy-duty equipment in an automatic production line according to claim 1, characterized in that the door-mounted trolley (2) is further provided with a coupler (5) which can connect or disconnect the pipeline on the equipment with the external pipeline when moving along with the door-mounted trolley (2).

3. The automatic translation mechanism applied to heavy load equipment in automatic production line according to claim 1, characterized in that said door carriage (2) comprises a bottom plate (21), a carriage frame (22) arranged on the bottom plate (21), said driving mechanism (4) is arranged on said bottom plate (21), and said stable support (6) is connected on said bottom plate (21) and extends from the side of the bottom plate (21) downwards to the guiding structure (3).

4. The automatic translation mechanism applied to heavy-duty equipment in an automatic production line according to claim 3, characterized in that the guide structure (3) is a guide rail disposed on the support (1), the bottom plate (21) is provided with an opening opposite to the guide rail, and the opening is provided with a roller (23) contacting with the upper end surface of the guide rail.

5. The automatic translation mechanism applied to heavy-duty equipment in an automatic production line according to claim 4, wherein a limiting groove (31) which is open outwards and is recessed inwards and extends along the length direction of the guide rail is formed on the outer side surface of the guide rail, the stable support member (6) comprises a support connecting member (61) which is connected to the bottom plate (21) and extends downwards from the side surface of the bottom plate (21), and a limiting bearing (62) which is arranged inside the support connecting member (61) and is located in the limiting groove (31), and the limiting bearing (62) is in contact with the upper end surface inside the limiting groove (31).

6. The automatic translation mechanism for heavy load equipments in automatic production lines according to claim 5, characterized in that said supporting connection (61) is connected at the bottom plate (21) in a position opposite to said opening.

7. The automatic translation mechanism applied to heavy-duty equipment in an automatic production line according to claim 4 is characterized in that guide rails are arranged on both sides of the upper end surface of the bracket (1), and the guide rails are further provided with limit blocks (11).

8. The automatic translation mechanism applied to heavy-duty equipment in an automatic production line according to claim 3 is characterized in that a transmission rack (12) is further arranged on the bracket (1), the driving mechanism (4) is in meshing transmission with the transmission rack, and a speed reduction mechanism is further connected to the driving mechanism (4).

9. The automatic translation mechanism applied to heavy load equipment in automatic production line according to claim 8 is characterized in that the outside of said transmission rack (12) is further provided with a protective cover (13).

10. The automatic translation mechanism applied to heavy-duty equipment in an automatic production line according to claim 2, wherein the coupler (5) comprises a frame (51) arranged on the door-carrying trolley (2), a first connecting end (511) arranged on the frame (51) and butted with an equipment pipeline, a second connecting end (52) butted with an external pipeline, and a buffer pipeline (53) arranged between the first connecting end (511) and the second connecting end (52), an alignment plate (54) is arranged on one end of the buffer pipeline (53) opposite to the second connecting end (52), a driving cylinder (55) for driving the alignment plate (54) to move is further arranged on the frame (51), and the driving cylinder (55) drives the alignment plate (54) to move so as to enable the end of the buffer pipeline (53) to be butted with or separated from the second connecting end (52).

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