CN213739662U

CN213739662U - Vacuum coating machine material loading fast-assembling structure

Info

Publication number: CN213739662U
Application number: CN202022566668.6U
Authority: CN
Inventors: 王盛基
Original assignee: Tonglu Huaya Titanium Technology Co ltd
Current assignee: Tonglu Huaya Titanium Technology Co ltd
Priority date: 2020-11-09
Filing date: 2020-11-09
Publication date: 2021-07-20
Anticipated expiration: 2030-11-09

Abstract

The utility model discloses a vacuum coating machine material loading fast-assembling structure relates to vacuum coating machine technical field, including box and ear case, the both sides of box all communicate there is the ear case, the box inboard is provided with the target source of mutually supporting with the ear case. The utility model discloses during the use, place circular workpiece inside the fixing base, and utilize fixing bolt to fix in advance, and be located the central point of fixing base puts the department, later start electromagnet base, make it produce magnetic force, later through the mutually supporting of iron prop with electromagnet base, with the fixing base fixed with the fly leaf on, later start two-way motor, it is rotatory to make its output shaft and the helical gear group that drive both ends respectively, thereby it is rotatory to drive the screw rod that corresponds, again because of fly leaf and screw rod threaded connection, thereby move the fly leaf downwards, all enter into the inside to the box until circular workpiece, fix circular workpiece through fixing bolt like this, thereby can adapt to the circular workpiece of different diameters, enlarge the range of processing of equipment.

Description

Vacuum coating machine material loading fast-assembling structure

Technical Field

The utility model relates to a vacuum coating machine technical field specifically is a vacuum coating machine material loading fast-assembling structure.

Background

The vacuum coating machine mainly refers to a coating machine which needs to be carried out under a higher vacuum degree, and specifically comprises various types including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and the like, and the main idea is divided into two types of evaporation and sputtering.

Notice No. CN206447938U discloses a vacuum coating machine material loading fast-assembling structure, it is through waiting to coat a membrane work piece to install in the middle fixed orifices of supporting sealed dish, the position and the length of work piece have been adjusted, the supporting sealed dish that will adorn the work piece again is through the internal thread of fast locking end cover and the connection of screwing of the external screw thread of end face flange, thereby will wait to coat a membrane work piece to install, but like this extremely inconvenient in the installation dismantlement, great reduction work efficiency, and with circular work piece ann in supporting sealed dish, it can not adapt to the work piece of different diameters, thereby make its processing range little.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a: in order to solve the problems that in the prior art, the installation and the disassembly are extremely inconvenient, the working efficiency is greatly reduced, and the circular workpieces cannot adapt to the workpieces with different diameters because the circular workpieces are inserted into the supporting sealing disc, so that the processing range of the circular workpieces is small, the feeding quick-assembly structure of the vacuum coating machine is provided.

In order to achieve the above object, the utility model provides a following technical scheme: a vacuum coating machine material loading fast-assembling structure comprises a box body and lug boxes, wherein the two sides of the box body are communicated with the lug boxes, a target source matched with the lug boxes is arranged on the inner side of the box body, a bidirectional motor is installed in the middle of the bottom of the box body, the bidirectional output ends of the bidirectional motor are provided with output shafts, the tail ends of the output shafts are provided with corresponding bevel gear sets, the output shafts are connected with screw rods extending to the inner parts of the lug boxes through the bevel gear sets, the outer sides of the two sets of screw rods are in threaded connection with movable plates, the four corners of the top of each movable plate are in rotary connection with an electromagnet base, the top of each electromagnet base is provided with iron columns matched with the electromagnet base, the top of each iron column is provided with a fixed seat, circular workpieces matched with the fixed seats are arranged in the fixed seats, and the outer sides of the fixed seats are uniformly connected with three sets of fixing bolts matched with the circular workpieces through threads, the top of the box body is provided with a box cover matched with the box body.

Preferably, the motor is installed in the middle of the bottom of the movable plate, the output end of the motor is provided with a gear, and the bottom of each group of the electromagnet base is fixedly connected with a toothed shaft which movably penetrates through the movable plate to be matched with the gear at the bottom of the movable plate.

Preferably, sliding grooves matched with the movable plates are formed between the box body and the ear box.

Preferably, a control panel is installed on the outer side of the box body, and the control panel is electrically connected with the bidirectional motor, the target source, the motor and the electromagnet base.

Preferably, the bottom four corners department of box all is provided with the supporting leg, and the bottom of supporting leg all is provided with the slipmat.

Compared with the prior art, the beneficial effects of the utility model are that: the utility model discloses during the use, place circular workpiece inside the fixing base, and utilize fixing bolt to fix in advance, and be located the central point of fixing base and put, later start the electro-magnet base, make it produce magnetic force, later through the iron prop with the mutual cooperation of electro-magnet base, fix the fixing base with on the fly leaf, later start the two-way motor, make it drive the output shaft and the helical gear group rotation at both ends respectively, thereby drive the corresponding screw rod rotation, again because of fly leaf and screw rod threaded connection, thereby move the fly leaf downwards, until circular workpiece all gets into the inside of box, fix circular workpiece through fixing bolt like this, thereby can adapt to the circular workpiece of different diameters, enlarge the range of processing of equipment; when the installation is dismantled, only need remove away the fly leaf through two-way motor, break off the electro-magnet base again, make it lose magnetism, be convenient for take off the fixing base, simple swift.

Drawings

Fig. 1 is a schematic structural view of the present invention;

fig. 2 is a schematic external structural view of the present invention;

FIG. 3 is an enlarged view of the utility model at A;

FIG. 4 is an enlarged view of the utility model at B;

fig. 5 is a schematic view of a part of the structure of the present invention.

In the figure: 1. a box body; 2. a box cover; 3. an ear box; 4. a target source; 5. a bi-directional motor; 6. an output shaft; 7. a bevel gear set; 8. a screw; 9. a movable plate; 10. a motor; 11. a gear; 12. a toothed shaft; 13. An electromagnet base; 14. a fixed seat; 15. an iron column; 16. fixing the bolt; 17. a circular workpiece; 18. A chute; 19. a control panel; 20. and (5) supporting legs.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted", "connected" and "disposed" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art. The following describes an embodiment of the present invention according to its overall structure.

Referring to fig. 1-5, a fast loading structure of a vacuum coating machine comprises a box body 1 and an ear box 3, wherein the two sides of the box body 1 are communicated with the ear box 3, a target source 4 matched with the ear box 3 is arranged on the inner side of the box body 1, a bidirectional motor 5 is arranged in the middle of the bottom of the box body 1, two-way output ends of the bidirectional motor 5 are provided with output shafts 6, the tail ends of the output shafts 6 are provided with corresponding bevel gear sets 7, the output shafts 6 are connected with screw rods 8 extending into the ear box 3 through the bevel gear sets 7, the outer sides of the two sets of screw rods 8 are in threaded connection with movable plates 9, four corners of the top of each movable plate 9 are rotatably connected with an electromagnet base 13, iron columns 15 matched with the electromagnet bases 13 are arranged on the top of the electromagnet bases 13, fixed seats 14 are arranged on the tops of the iron columns 15, circular workpieces 17 matched with the fixed seats 14 are arranged in the fixed seats 14, and the outer side of the fixed seat 14 is evenly connected with three groups of fixing bolts 16 matched with a round workpiece 17 through threads, and the top of the box body 1 is provided with a box cover 2 matched with the box body.

The utility model discloses during the use, place circular workpiece 17 inside fixing base 14, and utilize fixing bolt 16 to fix in advance, and be located the central point of fixing base 14 and put the department, later start electromagnet base 13, make it produce magnetic force, later through mutually supporting of iron prop 15 and electromagnet base 13, be fixed in on fly leaf 9 fixing base 14, later start bidirectional electric motor 5, it is rotatory to make it drive output shaft 6 and the helical gear group 7 at both ends respectively, thereby it is rotatory to drive the screw rod 8 that corresponds, again because of

fly leaf

9 and 8 threaded connection of screw rod, thereby move fly leaf 9 downwards, all enter into to the inside of box 1 until circular workpiece 17, fix circular workpiece 17 through fixing bolt 16 like this, thereby can adapt to the circular workpiece 17 of different diameters, enlarge the range of processing of equipment.

Please refer to fig. 1, fig. 3 and fig. 5, a motor 10 is installed in the middle of the bottom of the movable plate 9, a gear 11 is installed at the output end of the motor 10, the bottom of each group of electromagnet bases 13 is fixedly connected with and movably runs through the movable plate 9 to the toothed shaft 12 matched with the gear 11 at the bottom thereof, the present invention provides the above structure, in order to utilize the motor 10 to realize the rotation of each group of electromagnet bases 13, so that the circular workpiece 17 is more uniformly coated.

Please refer to fig. 1 and fig. 2, the sliding grooves 18 matching with the movable plate 9 are disposed between the case body 1 and the ear case 3, so that the movable plate 9 can move back and forth along the sliding grooves 18 and achieve the limiting effect.

Please refer to fig. 1, fig. 2 and fig. 3, a control panel 19 is installed outside the box body 1, and the control panel 19 is electrically connected to the two-way motor 5, the target source 4, the motor 10 and the electromagnet base 13, so that the present invention provides the above structure for better controlling the two-way motor 5, the target source 4, the motor 10 and the electromagnet base 13, thereby facilitating the use of the operator.

Please refer to fig. 1 and fig. 2, the four corners of the bottom of the box 1 are all provided with the supporting legs 20, and the bottom of the supporting legs 20 are all provided with the anti-slip pad, the utility model discloses an it is for better supporting device to be provided with above-mentioned structure, makes its normal operating, avoids skidding.

The working principle is as follows: when in use, a round workpiece 17 is placed in the fixed seat 14, is fixed in advance by the fixing bolt 16, is positioned at the central position of the fixed seat 14, is prepared into a plurality of groups in advance, then the box cover 2 is opened from the box body 1, then the control panel 19 is used for controlling the starting of the bidirectional motor 5, so that the bidirectional motor 5 respectively drives the output shafts 6 and the bevel gear groups 7 at the two ends to rotate, thereby driving the corresponding screw rods 8 to rotate, the movable plate 9 is connected with the screw rods 8 by the threads, thereby the movable plate 9 moves upwards, the bidirectional motor 5 is stopped to pause after the movable plate 9 is lifted to the top, then the control panel 19 is used for controlling the electromagnet base 13 to start, so that the electromagnet base 13 generates magnetic force, then the fixed seat 14 is fixed on the movable plate 9 by the mutual matching of the iron column 15 and the electromagnet base 13, and then the control panel 19 is used for controlling the starting of the bidirectional motor 5, under the coordination of the screw 8 and the movable plate 9, the circular workpieces 17 are completely inserted into the box body 1, so that the circular workpieces 17 are fixed through the fixing bolts 16, the circular workpieces 17 with different diameters can be adapted, the processing range of the equipment is expanded, then the motor 10 is started to drive the gear 11 to rotate, the toothed shaft 12 and the electromagnet base 13 are driven to rotate, finally, the interior of the box body 1 is vacuumized, the air pressure is controlled to be below 1 x 10 < -2 > Pa, argon is filled, the air pressure in the box body 1 is controlled to be 10-20 Pa, a negative voltage of 200-300V is applied to the parts through a direct current or pulse power supply, the surfaces of the parts are subjected to plasma cleaning through plasma glow discharge, the metal material of the target source 4 is plated to the area to be plated of the circular workpieces 17 through a sputtering mode, after the completion, the box cover 2 is opened, and starting the two-way motor 5 to lift the movable plate 9 to the top, stopping the two-way motor 5 from pausing, and then sequentially controlling the corresponding electromagnet bases 13 to be closed by using the control panel 19 to take out the round workpiece 17.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims

1. The utility model provides a vacuum coating machine material loading fast-assembling structure, includes box (1) and ear case (3), its characterized in that: the two sides of the box body (1) are communicated with the lug boxes (3), a target source (4) matched with the lug boxes (3) is arranged on the inner side of the box body (1), the two-way motor (5) is installed in the middle of the bottom of the box body (1), the two-way output ends of the two-way motor (5) are provided with output shafts (6), the tail ends of the output shafts (6) are provided with corresponding bevel gear sets (7), the output shafts (6) are connected with screw rods (8) extending into the lug boxes (3) through the bevel gear sets (7), the outer sides of the two sets of screw rods (8) are in threaded connection with movable plates (9), four corners of the top of each movable plate (9) are rotatably connected with an electromagnet base (13), iron columns (15) matched with the electromagnet bases (13) are installed on the top of the electromagnet bases (13), and fixing seats (14) are arranged on the tops of the iron columns (15), the inside of fixing base (14) is provided with rather than circular work piece (17) of mutually supporting, and the outside of fixing base (14) all evenly through threaded connection with three group fixing bolt (16) of mutually supporting with circular work piece (17), the top of box (1) is provided with rather than case lid (2) of mutually supporting.

2. The quick loading structure of vacuum coating machine material loading of claim 1, characterized in that: the middle of the bottom of the movable plate (9) is provided with a motor (10), the output end of the motor (10) is provided with a gear (11), and each group of the electromagnet base (13) is fixedly connected with the bottom of the electromagnet base (13) and movably penetrates through the movable plate (9) to a toothed shaft (12) matched with the gear (11) at the bottom of the movable plate.

3. The quick loading structure of vacuum coating machine material loading of claim 1, characterized in that: sliding grooves (18) matched with the movable plates (9) are formed between the box body (1) and the ear boxes (3).

4. The quick loading structure of vacuum coating machine material loading of claim 1, characterized in that: control panel (19) are installed in the outside of box (1), and all electric connection between control panel (19) and two-way motor (5), target source (4), motor (10), electro-magnet base (13).

5. The quick loading structure of vacuum coating machine material loading of claim 1, characterized in that: the bottom four corners department of box (1) all is provided with supporting leg (20), and the bottom of supporting leg (20) all is provided with the slipmat.