CN115305448B - High-efficient vacuum coating device convenient to change coating film work piece - Google Patents
High-efficient vacuum coating device convenient to change coating film work piece Download PDFInfo
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- CN115305448B CN115305448B CN202210844138.4A CN202210844138A CN115305448B CN 115305448 B CN115305448 B CN 115305448B CN 202210844138 A CN202210844138 A CN 202210844138A CN 115305448 B CN115305448 B CN 115305448B
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- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 69
- 239000011248 coating agent Substances 0.000 title claims abstract description 18
- 238000000576 coating method Methods 0.000 title claims abstract description 18
- 230000008859 change Effects 0.000 title claims description 10
- 238000007789 sealing Methods 0.000 claims abstract description 33
- 230000007246 mechanism Effects 0.000 claims abstract description 16
- 230000005540 biological transmission Effects 0.000 claims description 16
- 230000002457 bidirectional effect Effects 0.000 claims description 6
- 230000000903 blocking effect Effects 0.000 claims description 4
- 235000017166 Bambusa arundinacea Nutrition 0.000 claims description 3
- 235000017491 Bambusa tulda Nutrition 0.000 claims description 3
- 241001330002 Bambuseae Species 0.000 claims description 3
- 235000015334 Phyllostachys viridis Nutrition 0.000 claims description 3
- 239000011425 bamboo Substances 0.000 claims description 3
- 230000009471 action Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 230000009916 joint effect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
Abstract
The invention belongs to the technical field of vacuum coating, and particularly relates to a high-efficiency vacuum coating device convenient for replacing a coated workpiece, which comprises a vacuum coating box, wherein two rotating screws are symmetrically connected to the inner walls of the upper side and the lower side of the vacuum coating box in a rotating way through bearings, a driving mechanism for driving the two rotating screws to rotate is fixedly arranged at the bottom of the inner wall of the vacuum coating box, a lifting plate is sleeved on the rod wall of the rotating screw in a threaded way, the same fixed cylinder is fixedly connected between the two lifting plates, a plurality of lifting rods are fixedly connected to the upper end of the lifting plate, and the upper ends of the lifting rods are fixedly connected with a sealing top plate which is in sealing press connection with the upper end of the vacuum coating box. The invention can realize rapid loading and unloading operation, is convenient to use, can realize uniform coating of workpieces, and ensures coating quality.
Description
Technical Field
The invention belongs to the technical field of vacuum coating, and particularly relates to a high-efficiency vacuum coating device convenient for replacing a coated workpiece.
Background
Vacuum coating is a process of placing a material to be coated and a substrate to be coated in a vacuum chamber, heating the material to be coated by a certain method to evaporate or sublimate, and performing flying sputtering on the surface of the substrate to be coated to form a film by condensation.
When the existing workpiece is subjected to vacuum coating, the workpiece placement position in the vacuum coating bin is fixed, and the coating position of the coating material is also fixed, so that the uniformity of the vacuum coating on the surface of the workpiece is different, the quality of the whole vacuum coating is affected, the workpiece is inconvenient to take and place, and the workpiece is inconvenient to take and place in some vacuum coating bins with larger depths, so that the actual use operation is affected.
Therefore, we propose a high-efficiency vacuum coating device which is convenient for replacing a coated workpiece to solve the above problems.
Disclosure of Invention
The invention aims to solve the problems and provide a high-efficiency vacuum coating device which is convenient for replacing a coated workpiece.
In order to achieve the above purpose, the present invention provides the following technical solutions: the utility model provides a high-efficient vacuum coating device convenient to change coating film work piece, includes the vacuum coating case, upper and lower relative one side inner wall of vacuum coating case is through bearing symmetry rotation connection two rotation screw rods, the inner wall bottom of vacuum coating case is fixed to be provided with and is used for driving two rotation screw rod pivoted actuating mechanism, the pole wall screw thread of rotation screw rod has cup jointed the lifter plate, two fixedly connected with one fixed section of thick bamboo between the lifter plate, the upper end of lifter plate still fixedly connected with many lifter rods, many the upper end fixedly connected with of lifter rod is the same sealed roof of sealing crimping in vacuum coating case upper end, the inner wall bottom of fixed section of thick bamboo is fixed and is provided with rotating electrical machines, the upper end output shaft fixedly connected with rotor plate of rotating electrical machines, a plurality of through-holes that are annular distribution and set up have evenly been seted up on the surface of rotor plate, and correspond the through-hole in the rotation cup joint pivot, the upper end fixedly connected with cavity positioning seat of pivot, fixedly connected with two side splint through two side splint in the cavity positioning seat, the lower extreme fixedly connected with drive gear of pivot, the fixed gear is provided with a plurality of ring gear and the fixed bottom of the fixed gear rack of the fixed gear.
In the high-efficiency vacuum coating device convenient for replacing a coated workpiece, the driving mechanism comprises a double-shaft motor fixedly arranged at the bottom of the inner wall of the vacuum coating box, two end output shafts of the double-shaft motor are fixedly connected with transmission shafts, one end of each transmission shaft is fixedly connected with a drive bevel gear, and a driven bevel gear meshed with the drive bevel gear is fixedly sleeved on the lower end rod wall of each rotating screw.
In the high-efficiency vacuum coating device convenient for replacing the coated workpiece, the bottom of the inner wall of the vacuum coating box is symmetrically and fixedly connected with two supporting seats, and the side wall of each supporting seat is provided with a through hole for the transmission shaft to penetrate and extend out.
In the high-efficiency vacuum coating device convenient for replacing the coated workpiece, the upper end of the vacuum coating box is fixedly connected with the annular sealing plug block, and the lower side of the sealing top plate is provided with the annular sealing plug groove matched and plugged with the annular sealing plug block.
In the high-efficiency vacuum coating device convenient for replacing the coated workpiece, the outer side of the rotating plate is fixedly sleeved with the limiting ring plate, and the inner wall of the fixed cylinder is provided with the limiting ring groove matched with the limiting ring plate in sliding connection.
In the high-efficient vacuum coating device convenient to change coating film work piece, two-way fixture is including the fixed bi-directional motor who sets up at cavity positioning seat inner wall, the equal fixedly connected with adjusting screw of both ends output shaft of bi-directional motor, adjusting screw's pole wall screw has cup jointed the adjusting seat, the even fixedly connected with of upper end of adjusting seat a plurality of supporting shoes, the upper end of supporting shoe runs through the upper end of cavity positioning seat through the bar opening that the cavity positioning seat upper end was seted up, a plurality of the lateral wall fixed joint of supporting shoe is in the lateral wall of side splint, the lower extreme downside fixedly connected with joint piece of side splint, the joint notch with joint piece matching joint has been seted up to the upper end of supporting shoe, a plurality of joint piece's rear end fixedly connected with same anticreep board, the interface has been seted up to the upper end lateral wall of supporting shoe, and the movable plug board has the fender board to correspond in the interface, the upper end of supporting shoe passes through the fixed joint of chucking mechanism and fender board.
In the high-efficient vacuum coating device convenient to change coating film work piece, chucking mechanism includes the activity and inserts the chucking pole of establishing in the supporting shoe upper end, the chucking groove of the matching joint with the chucking pole is seted up to the upper end of fender fishplate bar, the upper end fixedly connected with chucking arm-tie of chucking pole, the lower extreme of chucking arm-tie and the upper end fixedly connected with cover of supporting shoe establish the chucking spring outside the chucking pole.
In the high-efficiency vacuum coating device convenient for replacing the coated workpiece, the inner wall of the hollow positioning seat corresponding to the strip-shaped opening is fixedly connected with the guide sliding rod, and the side wall of the supporting block is provided with the sliding hole which is in sliding sleeve joint with the guide sliding rod.
Compared with the prior art, the invention provides the high-efficiency vacuum coating device convenient for replacing the coated workpiece, which has the following beneficial effects:
1. this high-efficient vacuum coating device convenient to change coating film work piece places the work piece on the cavity positioning seat through vacuum coating box and the sealed roof that are equipped with, starts biax motor, biax motor passes through the transmission shaft and drives drive bevel gear and rotate, and through drive bevel gear and driven bevel gear's meshing effect drive, and then drive the rotation screw rod and rotate, make the lifter plate drive the work piece and move down through the screw thread socket joint effect of rotation screw rod and lifter plate to drive sealed roof through the lifter and move down, realize sealing connection between sealed roof and the vacuum coating box through the matching grafting of annular sealed grafting piece and annular sealed grafting groove, can realize quick unloading operation, convenient to use.
2. This high-efficient vacuum coating device convenient to change coating film work piece, through the cavity positioning seat that is equipped with, place the work piece in the upper end of cavity positioning seat, two adjusting screw synchronous rotation is driven to bi-directional motor, screw thread socket joint effect through adjusting screw and adjusting seat makes adjusting seat drive a plurality of supporting shoe remove, the supporting shoe promotes two side splint and removes, make two side splint carry out stable centre gripping to the work piece, realize the quick clamping to the work piece, be convenient for change, and start rotating electrical machines when the coating film, the rotating electrical machines drives the rotor plate and rotates, realize at the uniform velocity rotation to the work piece, and the rotor plate drives the drive gear and remove, the meshing effect through drive gear and annular rack drives the pivot rotation, and then realize the rotation of work piece, can realize the even coating film to the work piece, coating film quality has been guaranteed.
3. This high-efficient vacuum coating device convenient to change coating film work piece, through supporting shoe and side splint that are equipped with, the side splint realize the steady clamping with the supporting shoe through the matching joint in joint piece and joint notch, and the anticreep board supports the rear side at the supporting shoe, insert the baffle plate in the interface of supporting shoe lateral wall, and the chucking pole aligns the chucking groove this moment, chucking spring drop-down chucking arm-lock, the chucking arm-lock is fixed with the firm joint that the chucking pole impels in the chucking inslot and can realize between supporting shoe and the baffle plate, guaranteed the structural stability, and can realize quick assembly disassembly, convenient to use.
To sum up: the invention can realize rapid loading and unloading operation, is convenient to use, can realize uniform coating of workpieces, and ensures coating quality.
Drawings
FIG. 1 is a schematic diagram of a high-efficiency vacuum coating device for conveniently replacing a coated workpiece according to the present invention;
FIG. 2 is an enlarged view of a portion of a hollow positioning seat of a high-efficiency vacuum coating apparatus for facilitating replacement of a coated workpiece according to the present invention;
FIG. 3 is a schematic side view of a support portion of a high-efficiency vacuum coating apparatus for facilitating replacement of a coated workpiece according to the present invention;
fig. 4 is a schematic perspective view of a support seat of a high-efficiency vacuum coating device for conveniently replacing a coated workpiece according to the present invention.
In the figure: 1. a vacuum coating box; 2. rotating the screw; 3. a lifting plate; 4. a fixed cylinder; 5. a lifting rod; 6. sealing the top plate; 7. a rotating electric machine; 8. a rotating plate; 9. a rotating shaft; 10. a hollow positioning seat; 11. a side clamping plate; 12. a transmission gear; 13. an annular rack; 14. a biaxial motor; 15. a transmission shaft; 16. a drive bevel gear; 17. a driven bevel gear; 18. a support base; 19. an annular sealing plug block; 20. an annular sealing insertion groove; 21. a limiting ring plate; 22. a limit ring groove; 23. a bi-directional motor; 24. adjusting a screw; 25. an adjusting seat; 26. a support block; 27. a strip-shaped opening; 28. a clamping block; 29. the clamping groove is connected with the groove; 30. an anti-drop plate; 31. an interface; 32. a baffle plate; 33. a clamping rod; 34. a clamping groove; 35. clamping the pull plate; 36. a clamping spring; 37. and a guide slide bar.
Detailed Description
The following examples are for illustrative purposes only and are not intended to limit the scope of the invention.
Referring to fig. 1-4, a high-efficiency vacuum coating device convenient for replacing coated workpieces comprises a vacuum coating box 1, wherein two rotating screws 2 are symmetrically connected to the inner walls of the upper side and the lower side of the vacuum coating box 1 in a rotating way through bearings, a driving mechanism for driving the two rotating screws 2 to rotate is fixedly arranged at the bottom of the inner wall of the vacuum coating box 1, a lifting plate 3 is sleeved on the rod wall screw thread of the rotating screws 2, the same fixed cylinder 4 is fixedly connected between the two lifting plates 3, a plurality of lifting rods 5 are fixedly connected to the upper ends of the lifting plate 3, the same sealing top plate 6 is fixedly connected to the upper ends of the lifting rods 5 in a sealing way and is in press connection with the upper end of the vacuum coating box 1, a rotating motor 7 is fixedly arranged at the bottom of the inner wall of the fixed cylinder 4, a rotating plate 8 is fixedly connected to the upper end output shaft of the rotating motor 7, a plurality of through holes which are distributed in a ring shape are uniformly arranged on the surface of the rotating plate 8, a rotating shaft 9 is sleeved in the corresponding through bearings in the through holes, a hollow positioning seat 10 is fixedly connected to the upper end of the rotating shaft 9 through bearings, a two-way clamping mechanism is fixedly connected to the two side clamping plates 11, a plurality of gears 12 are fixedly connected to the lower ends of the two side clamping plates 9, and a plurality of gears 12 are fixedly meshed with the inner walls of the rotating shafts 13, and the inner walls of the rotating shafts are fixedly meshed with the rack 13.
The driving mechanism comprises a double-shaft motor 14 fixedly arranged at the bottom of the inner wall of the vacuum coating box 1, two end output shafts of the double-shaft motor 14 are fixedly connected with a transmission shaft 15, one end of the transmission shaft 15 is fixedly connected with a drive bevel gear 16, and a driven bevel gear 17 meshed with the drive bevel gear 16 is fixedly sleeved on the lower end rod wall of the rotary screw 2.
Two supporting seats 18 are symmetrically and fixedly connected to the bottom of the inner wall of the vacuum coating box 1, and through holes for the transmission shafts 15 to penetrate and extend out are formed in the side walls of the supporting seats 18.
The upper end of the vacuum coating box 1 is fixedly connected with an annular sealing plug-in block 19, and an annular sealing plug-in groove 20 which is matched and plugged with the annular sealing plug-in block 19 is formed in the lower side of the sealing top plate 6.
The outside of the rotating plate 8 is fixedly sleeved with a limiting ring plate 21, and the inner wall of the fixed cylinder 4 is provided with a limiting ring groove 22 matched and slidingly connected with the limiting ring plate 21.
The bidirectional clamping mechanism comprises a bidirectional motor 23 fixedly arranged on the inner wall of the hollow positioning seat 10, two end output shafts of the bidirectional motor 23 are fixedly connected with an adjusting screw 24, the rod wall of the adjusting screw 24 is in threaded sleeve connection with an adjusting seat 25, the upper end of the adjusting seat 25 is uniformly and fixedly connected with a plurality of supporting blocks 26, the upper ends of the supporting blocks 26 penetrate through the upper ends of the hollow positioning seat 10 through strip-shaped openings 27 formed in the upper ends of the hollow positioning seat 10, the side walls of the supporting blocks 26 are fixedly clamped on the side walls of the side clamping plates 11, clamping blocks 28 are fixedly connected with the lower sides of the lower ends of the side clamping plates 11, the upper ends of the supporting blocks 26 are provided with clamping notch grooves 29 matched and clamped with the clamping blocks 28, the rear ends of the clamping blocks 28 are fixedly connected with the same anti-falling plate 30, the side walls of the upper ends of the supporting blocks 26 are provided with plug-in interfaces 31, the upper ends of the corresponding plug-in interfaces 31 are movably sleeved with blocking plates 32, and the upper ends of the supporting blocks 26 are fixedly clamped with the blocking plates 32 through clamping mechanisms.
The clamping mechanism comprises a clamping rod 33 movably inserted at the upper end of the supporting block 26, a clamping groove 34 matched and clamped with the clamping rod 33 is formed in the upper end of the blocking plate 32, a clamping pull plate 35 is fixedly connected to the upper end of the clamping rod 33, and a clamping spring 36 sleeved outside the clamping rod 33 is fixedly connected to the lower end of the clamping pull plate 35 and the upper end of the supporting block 26.
The inner wall of the hollow positioning seat 10 corresponding to the strip-shaped opening 27 is fixedly connected with a guide slide bar 37, and the side wall of the support block 26 is provided with a slide hole which is in sliding sleeve joint with the guide slide bar 37.
The principle of operation of the present invention will now be described as follows: through the vacuum coating box 1 and the sealing top plate 6, the workpiece is placed on the hollow positioning seat 10, the double-shaft motor 14 is started, the double-shaft motor 14 drives the driving bevel gear 16 to rotate through the transmission shaft 15, the driving bevel gear 16 and the driven bevel gear 17 are meshed to drive the rotating screw rod 2 to rotate, the lifting plate 3 drives the workpiece to move downwards through the threaded sleeving action of the rotating screw rod 2 and the lifting plate 3, the sealing top plate 6 is driven to move downwards through the lifting rod 5, the sealing connection between the sealing top plate 6 and the vacuum coating box 1 is realized through the matching grafting of the annular sealing grafting block 19 and the annular sealing grafting groove 20, the quick loading and unloading operation can be realized, the use is convenient, the workpiece is placed at the upper end of the hollow positioning seat 10 through the hollow positioning seat 10, the two adjusting screws 24 are driven to synchronously rotate by the double-direction motor 23, the adjusting seat 25 drives the supporting blocks 26 to move through the threaded sleeving action of the adjusting screw 24 and the adjusting seat 25, the supporting blocks 26 push the two side clamping plates 11 to move, the two side clamping plates 11 stably clamp the workpiece, the workpiece is clamped quickly and is convenient to replace, the rotating motor 7 is started during film plating, the rotating motor 7 drives the rotating plate 8 to rotate, the workpiece is rotated at a uniform speed, the rotating plate 8 drives the transmission gear 12 to move, the rotating shaft 9 is driven to rotate through the meshing action of the transmission gear 12 and the annular rack 13, the workpiece is further rotated, the uniform film plating of the workpiece can be realized, the film plating quality is ensured, the side clamping plates 11 realize the stable clamping with the supporting blocks 26 through the matched clamping of the clamping blocks 28 and the clamping grooves 29, the anti-falling plate 30 is propped against the rear side of the supporting blocks 26, insert the baffle plate 32 in the grafting mouth 31 of supporting shoe 26 lateral wall, and the chucking pole 33 aligns chucking groove 34 this moment, chucking spring 36 drop-down chucking arm-tie 35, chucking arm-tie 35 impels chucking pole 33 in chucking groove 34 can realize that the firm joint between supporting shoe 26 and the baffle plate 32 is fixed, has guaranteed the structure steadiness, and can realize quick assembly disassembly, facilitate the use.
The foregoing description of the preferred embodiments of the invention is not intended to limit the invention to the precise form disclosed, and any such modifications, equivalents, and alternatives falling within the spirit and scope of the invention are intended to be included within the scope of the invention.
Claims (8)
1. The utility model provides a high-efficient vacuum coating device convenient to change coating film work piece, includes vacuum coating case (1), its characterized in that: the inner walls of the upper side and the lower side of the vacuum coating box (1) are symmetrically and rotatably connected with two rotating screws (2) through bearings, a driving mechanism for driving the two rotating screws (2) to rotate is fixedly arranged at the bottom of the inner wall of the vacuum coating box (1), lifting plates (3) are sleeved on the rod wall threads of the rotating screws (2), two lifting plates (3) are fixedly connected with one fixed cylinder (4), the upper ends of the lifting plates (3) are fixedly connected with a plurality of lifting rods (5), the upper ends of the lifting rods (5) are fixedly connected with a sealing top plate (6) which is fixedly connected with one sealing pressing joint at the upper end of the vacuum coating box (1), a rotating motor (7) is fixedly arranged at the bottom of the inner wall of the fixed cylinder (4), a plurality of through holes which are annularly distributed are uniformly formed in the surface of the rotating plate (8), a plurality of corresponding through holes are rotatably sleeved with rotating shafts (9) through bearings, the upper ends of the rotating shafts (9) are fixedly connected with one sealing top plate (6) through bearings, the two sealing top ends of the rotating shafts (9) are fixedly connected with one sealing top plate (10), the two sealing plates (10) are fixedly connected with two hollow clamping plates (11) through two clamping mechanisms, two hollow clamping seats (12) are fixedly connected with one hollow shaft seat (12), an annular rack (13) meshed with the plurality of transmission gears (12) is fixedly arranged at the bottom of the inner wall of the fixed cylinder (4).
2. The efficient vacuum coating apparatus for facilitating replacement of a coated workpiece as recited in claim 1, wherein: the driving mechanism comprises a double-shaft motor (14) fixedly arranged at the bottom of the inner wall of the vacuum coating box (1), two end output shafts of the double-shaft motor (14) are fixedly connected with a transmission shaft (15), one end of the transmission shaft (15) is fixedly connected with a driving bevel gear (16), and a driven bevel gear (17) meshed with the driving bevel gear (16) is fixedly sleeved on the lower end rod wall of the rotating screw (2).
3. The efficient vacuum coating apparatus for facilitating replacement of a coated workpiece as recited in claim 2, wherein: two supporting seats (18) are symmetrically and fixedly connected to the bottom of the inner wall of the vacuum coating box (1), and through holes for the transmission shafts (15) to penetrate and extend out are formed in the side walls of the supporting seats (18).
4. The efficient vacuum coating apparatus for facilitating replacement of a coated workpiece as recited in claim 1, wherein: the upper end of the vacuum coating box (1) is fixedly connected with an annular sealing plug-in block (19), and an annular sealing plug-in groove (20) matched and plugged with the annular sealing plug-in block (19) is formed in the lower side of the sealing top plate (6).
5. The efficient vacuum coating apparatus for facilitating replacement of a coated workpiece as recited in claim 1, wherein: the outside of rotor plate (8) is fixed to be cup jointed spacing ring board (21), spacing annular (22) that match slip is connected with spacing ring board (21) are seted up to the inner wall of fixed section of thick bamboo (4).
6. The efficient vacuum coating apparatus for facilitating replacement of a coated workpiece as recited in claim 1, wherein: the bidirectional clamping mechanism comprises a bidirectional motor (23) fixedly arranged on the inner wall of a hollow positioning seat (10), two end output shafts of the bidirectional motor (23) are fixedly connected with an adjusting screw (24), rod walls of the adjusting screw (24) are in threaded connection with an adjusting seat (25), the upper ends of the adjusting seat (25) are uniformly and fixedly connected with a plurality of supporting blocks (26), the upper ends of the supporting blocks (26) penetrate through the upper ends of the hollow positioning seat (10) through strip-shaped openings (27) formed in the upper ends of the hollow positioning seat (10), the side walls of the supporting blocks (26) are fixedly connected with the side walls of a side clamping plate (11), clamping blocks (28) are fixedly connected to the lower sides of the lower ends of the side clamping plates (11), clamping grooves (29) matched with the clamping blocks (28) are formed in the upper ends of the supporting blocks (26), the rear ends of the clamping blocks (28) are fixedly connected with the same anti-falling plate (30), plug-in connectors (31) are formed in the side walls of the upper ends of the supporting blocks (26), and the plug-in connectors (32) are correspondingly connected with plug-in connectors (32).
7. The efficient vacuum coating apparatus for facilitating replacement of a coated workpiece as recited in claim 6, wherein: the clamping mechanism comprises a clamping rod (33) movably inserted into the upper end of the supporting block (26), a clamping groove (34) matched with the clamping rod (33) is formed in the upper end of the blocking plate (32), the upper end of the clamping rod (33) is fixedly connected with a clamping pull plate (35), and the lower end of the clamping pull plate (35) and the upper end of the supporting block (26) are fixedly connected with a clamping spring (36) sleeved outside the clamping rod (33).
8. The efficient vacuum coating apparatus for facilitating replacement of a coated workpiece as recited in claim 6, wherein: the inner wall of the hollow positioning seat (10) corresponding to the strip-shaped opening (27) is fixedly connected with a guide slide bar (37), and the side wall of the supporting block (26) is provided with a slide hole which is in sliding sleeve joint with the guide slide bar (37).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210844138.4A CN115305448B (en) | 2022-07-18 | 2022-07-18 | High-efficient vacuum coating device convenient to change coating film work piece |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210844138.4A CN115305448B (en) | 2022-07-18 | 2022-07-18 | High-efficient vacuum coating device convenient to change coating film work piece |
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| CN115305448A CN115305448A (en) | 2022-11-08 |
| CN115305448B true CN115305448B (en) | 2024-04-09 |
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| CN210798952U (en) * | 2019-10-17 | 2020-06-19 | 联顺辉（天津）油田技术服务有限公司 | Novel oil gas well tracer is put in device |
| CN212834006U (en) * | 2020-06-20 | 2021-03-30 | 成都超纯应用材料有限责任公司 | Rotary tool for evaporation coating |
| CN213034939U (en) * | 2020-07-25 | 2021-04-23 | 欧典建设有限公司 | Concrete mixing device |
| CN213434126U (en) * | 2020-09-22 | 2021-06-15 | 宁德东恒机械有限公司 | Full-automatic slurry stirring equipment |
| CN213556801U (en) * | 2020-10-22 | 2021-06-29 | 福州双屹砂轮有限公司 | Grinding wheel raw material stirring device |
| CN213739662U (en) * | 2020-11-09 | 2021-07-20 | 桐庐华亚钛金技术有限公司 | Vacuum coating machine material loading fast-assembling structure |
| CN113635021A (en) * | 2021-10-13 | 2021-11-12 | 南通万峰智能设备有限公司 | Clamping table for mold machining |
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